An in-line plasma processing apparatus

Abstract

The application discloses an online conveying type plasma processing equipment, which comprises a cabinet body, a plasma jet mechanism and a chain conveying device. The chain conveying device comprises a first opening and a second opening arranged on opposite sides of the cabinet body, and a surrounding support frame arranged outside the cabinet body. The support frame is connected to the two openings at two ends and forms a feeding and discharging station at a middle section. A plurality of chain wheels are arranged on the support frame and jointly sheathed with a closed circulating chain. The chain sequentially passes through the first opening and the second opening, so that part of the chain is arranged inside the cabinet body. A jig rod is arranged on a chain link of the chain, and a top end of the jig rod is fixed with a jig used for carrying a workpiece. A rotating driving assembly drives the chain wheels to rotate, drives the chain to transmit, and sequentially circulates the workpiece into the cabinet body to receive plasma processing and move out. The application realizes automatic conveying and continuous processing of the workpiece, does not need to stop the machine for feeding and discharging, and significantly improves equipment utilization and production efficiency.

Description

Technical Field

[0001] This application relates to the technical field of plasma equipment, and more specifically, to an online delivery plasma processing device. Background Technology

[0002] Plasma treatment technology, as a highly efficient surface treatment process, is widely used in various industrial fields such as material cleaning, activation, etching, and coating. Existing plasma treatment equipment typically includes a sealed cabinet containing a plasma jetting mechanism and a fixture for holding the workpiece. The cabinet is equipped with a door for loading and unloading workpieces.

[0003] However, such equipment suffers from significant production efficiency bottlenecks. After each processing cycle, the machine must be stopped, the cabinet door opened, and the processed workpiece manually removed and replaced with the workpiece awaiting processing. This process not only results in substantial non-productive waiting time, reducing equipment utilization, but also increases energy consumption and mechanical wear due to frequent start-ups and shutdowns. Furthermore, the manual loading and unloading method is difficult to integrate seamlessly with automated production lines, limiting the continuous and intelligent development of production processes. Therefore, there is an urgent need in this field for a novel plasma processing device capable of continuous production without downtime for loading and unloading, to overcome the inherent shortcomings of existing technologies and significantly improve production efficiency and automation levels. Utility Model Content

[0004] To address the problem of low utilization rate of existing plasma processing equipment, this application provides an online conveying plasma processing device.

[0005] An online conveying plasma treatment device includes a cabinet and a plasma jetting mechanism disposed inside the cabinet, and further includes a chain conveyor. The chain conveyor includes a first opening and a second opening on opposite side walls of the cabinet, and a surrounding support frame disposed outside the cabinet. Both the first and second openings communicate with the interior of the cabinet. One end of the surrounding support frame is connected to the first opening, and the other end is connected to the second opening. The surrounding support frame forms an unloading / loading station in its middle section. Multiple sprockets are arranged along the extending direction of the surrounding support frame. A closed-loop chain is mounted on each of the sprockets. The chain passes through the first opening and the second opening in sequence, so that a part of the chain passes through the inside of the cabinet. The chain also passes through the loading and unloading stations. A jig rod is provided on the chain link. A jig for carrying the workpiece is fixed at the top of the jig rod. A rotation drive assembly is also provided on the surrounding support frame. The rotation drive assembly is connected to one of the sprockets and drives it to rotate, thereby driving the chain transmission. This allows the jig with the workpiece fixed to it to enter the cabinet in sequence to receive plasma treatment and then be removed from the cabinet.

[0006] Preferably, the cabinet is provided with a support platform, and the support platform is provided with a chain guide rail for guiding and limiting the chain segments passing through the cabinet. The chain guide rail extends from the first opening to the second opening.

[0007] Preferably, the chain guide track is composed of two parallel and symmetrically arranged straight rods, and the chain passes between the two straight rods.

[0008] Preferably, the plasma jetting mechanism is disposed on the support platform.

[0009] Preferably, the upper surface of the surrounding support frame is provided with a first protective cover and a second protective cover. There are two first protective covers, which are respectively placed above the chain segments outside the first and second openings and extend from the openings to both ends of the loading and unloading station. The second protective cover is located at the loading and unloading station, and its height is lower than that of the first protective cover. Its top surface has a slot that matches the diameter of the jig rod, and the jig rod can pass through the slot. The two ends of the second protective cover are respectively connected to the ends of the two first protective covers, and a communication port is provided at the connection positions of the two first protective covers and the second protective cover. The jig rod and the jig can move between the first and second protective covers through the communication port.

[0010] Preferably, the rotation drive assembly includes a motor and a worm gear reducer, wherein the output end of the motor is connected to the input end of the worm gear reducer, and the output end of the worm gear reducer is connected to the sprocket.

[0011] Preferably, the fixture is a plate-shaped structure, on which positioning holes for positioning the workpiece are provided or clamps for holding the workpiece are installed.

[0012] Preferably, the outline shape of the wraparound support frame is rectangular, elliptical, or rounded rectangle.

[0013] In summary, this application includes at least one of the following beneficial technical effects:

[0014] 1. The integrated design of the chain conveyor and cabinet enables automatic conveying and continuous processing of workpieces. The fixture carries the workpiece through the cabinet in a loop, allowing for simultaneous loading / unloading and plasma processing without stopping the machine. This reduces the waiting time caused by frequent start-ups and shutdowns and manual operation in traditional equipment, maximizing equipment utilization and significantly improving production efficiency.

[0015] 2. The equipment drives the sprocket and chain through a motor and worm gear reducer, realizing the full automation of stable workpiece conveying, workpiece positioning and processing, reducing the intensity of manual operation and labor costs, while avoiding human operation errors, and making it easier to integrate into automated production lines.

[0016] 3. The use of chain-guided tracks and a closed-loop conveyor structure ensures the smooth operation of the chain inside and outside the cabinet, reduces vibration and deviation, and improves conveying accuracy and overall equipment reliability.

[0017] 4. By setting a first protective cover outside the first and second openings and configuring a second protective cover at the loading and unloading stations, the plasma treatment area is effectively isolated from the external environment, which not only protects the safety of operators but also prevents external pollutants from entering the cabinet, ensuring the cleanliness and stability of the treatment process. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of an online delivery plasma treatment device according to this embodiment.

[0019] Figure 2 This is a schematic diagram of the connection structure between the chain, jig rod, and jig in this embodiment.

[0020] Figure 3 This is a schematic diagram of the internal structure of the cabinet in this embodiment.

[0021] Figure 4 This is a schematic diagram of an online conveying plasma treatment device with a first protective cover and a second protective cover according to this embodiment.

[0022] Reference numerals: 1. Cabinet; 11. First opening; 12. Second opening; 13. Support platform; 131. Chain guide rail; 1311. Straight rod; 2. Plasma jet mechanism; 3. Chain conveyor device; 31. Circular support frame; 311. First protective cover; 3111. Connecting port; 312. Second protective cover; 3121. Slot; 32. Sprocket; 33. Chain; 34. Fixture rod; 35. Fixture; 36. Rotation drive assembly; 361. Motor; 362. Worm gear reducer. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] Reference Figure 1-3An online conveying plasma treatment device includes a cabinet 1, a plasma jetting mechanism 2, and a chain conveyor 3. The cabinet 1 serves as the core chamber for plasma treatment, and the plasma jetting mechanism 2 is installed inside it for surface treatment of workpieces. To achieve continuous production, the chain conveyor 3 includes a first opening 11 and a second opening 12 respectively opened on opposite side walls of the cabinet 1, and a surrounding support frame 31 disposed outside the cabinet 1. The first opening 11 and the second opening 12 connect the inside and outside of the cabinet 1. One end of the surrounding support frame 31 is precisely aligned with the first opening 11, and the other end is aligned with the second opening 12, thus physically forming a closed channel. The outline shape of the surrounding support frame 31 can be rectangular, elliptical, or rounded rectangular, preferably rectangular.

[0025] Reference Figure 1 and Figure 2 The middle section of the wraparound support frame 31 is defined as the loading and unloading station, where workpieces can be automatically or manually picked up and placed. Multiple sprockets 32 are spaced apart along the circumferential extension direction of the wraparound support frame 31. Preferably, there are four sprockets 32, arranged at the four corners of the wraparound support frame 31. A closed-loop chain 33 is mounted on all four sprockets 32. A specific section of this chain 33 passes sequentially through the first opening 11 and the second opening 12 (not shown in the figure), allowing a portion of the chain 33 to pass through the processing area inside the cabinet 1, while the remaining portion of the chain 33 circulates on the support frame outside the cabinet 1. A jig rod 34 is vertically fixed on multiple consecutive links of the chain 33. A jig 35 for carrying the workpiece is installed at the top of the jig rod 34. The jig 35 is usually a plate structure with positioning holes for accurately positioning the workpiece or a special clamp for holding the workpiece. In this embodiment, positioning holes are preferred to facilitate fixing workpieces with simpler shapes, such as bottles.

[0026] Reference Figure 1 To drive the entire conveying system, a rotation drive assembly 36 is installed on the surrounding support frame 31. The rotation drive assembly 36 includes a motor 361 and a worm gear reducer 362. The output shaft of the motor 361 is connected to the input end of the worm gear reducer 362, while the output end of the worm gear reducer 362 is connected to one of the drive sprockets 32. The worm gear reducer 362 ensures that the chain 33 performs precise intermittent movement, that is, it moves by a fixed pitch each time, so that each fixture 35 can accurately stop and receive plasma treatment within the cabinet 1, and can accurately move to the next position after treatment.

[0027] Refer to 1 and Figure 3To ensure the stability of the chain 33 during high-speed operation, especially its smoothness within the cabinet 1, a support platform 13 is provided in the cabinet 1. A chain 33 guide rail 131 is fixedly installed on the support platform 13. This guide rail 131 consists of two parallel and symmetrically arranged straight rods 1311, extending from the inside of the first opening 11 to the inside of the second opening 12. The chain 33 segment entering the cabinet passes precisely between these two straight rods 1311, effectively limiting the horizontal vibration and offset of the chain 33 and ensuring the positioning accuracy of the fixture 35 and the workpiece. A plasma jetting mechanism 2 is installed on the support platform 13, allowing its jet nozzle to be directly aligned with the workpiece conveyed above the chain 33. The plasma jetting mechanism 2 is prior art and will not be described in detail in this application.

[0028] Reference Figure 4 For safety and protection, the surround support frame 31 is equipped with a first protective cover 311 and a second protective cover 312. A tall first protective cover 311 is installed above the chain 33 segments outside the first opening 11 and the second opening 12, extending from the openings to both ends of the loading / unloading station, enclosing the high-speed chain 33. At the loading / unloading station, a shorter second protective cover 312 is installed, with a narrow slot 3121 on its top surface matching the diameter of the jig rod 34. The jig rod 34 can pass through this slot, facilitating the handling of workpieces by operators or robotic arms. The two ends of the second protective cover 312 are respectively connected to the ends of the two first protective covers 311 through connecting openings 3111, allowing the jig rod 34, with the jig 35 fixed thereon, to move smoothly from the closed area of ​​the first protective cover 311 to the open area of ​​the second protective cover 312, and vice versa. This design ensures the safety of operators, prevents external pollutants from entering the cabinet 1, and avoids the leakage of gases such as ozone that may be generated during the plasma treatment process.

[0029] The implementation principle of an online conveying plasma treatment device is as follows: After the device is started, the motor 361 drives the sprocket 32 ​​to rotate through the worm gear reducer 362, thereby driving the entire enclosed chain 33 to achieve transmission. Operators or automated robots at the open loading / unloading station install the workpiece to be treated onto the fixture 35 stationed there, or remove the already treated workpiece. The fixture 35 carrying the workpiece then moves with the chain 33, entering the cabinet 1 through the first opening 11. Under the constraint of the chain 33 guide rail 131, the fixture 35 smoothly passes through the treatment area formed by the plasma jet mechanism 2, and the workpiece surface is uniformly treated with plasma. After treatment, the chain 33 continues to advance, sending the fixture 35 and the workpiece out of the cabinet 1 through the second opening 12, and finally returning it to the loading / unloading station, completing a full automated cycle. This process achieves continuous production without stopping the machine, greatly improving equipment utilization and production efficiency.

[0030] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An online conveying plasma treatment device, comprising a cabinet and a plasma jetting mechanism disposed inside the cabinet, characterized in that: It also includes a chain conveyor device, which includes a first opening and a second opening on opposite side walls of the cabinet and a surrounding support frame located outside the cabinet. Both the first and second openings are connected to the interior of the cabinet. One end of the surrounding support frame is connected to the first opening, and the other end is connected to the second opening. The surrounding support frame forms a loading and unloading station in its middle section. Multiple sprockets are arranged along the extension direction of the surrounding support frame, and a closed-loop chain is mounted on all the sprockets. The chain passes through the first and second openings in sequence, so that a part of the chain passes through the interior of the cabinet and through the loading and unloading station. A jig rod is provided on the chain link, and a jig for carrying the workpiece is fixed at the top of the jig rod. The surrounding support frame is also provided with a rotation drive assembly, which is connected to one of the sprockets and drives it to rotate, thereby driving the chain transmission so that the jig with the workpiece fixed can sequentially enter the cabinet to receive plasma treatment and be removed from the cabinet.

2. The online conveying plasma treatment equipment according to claim 1, characterized in that: The cabinet is equipped with a support platform, and the support platform is equipped with a chain guide rail for guiding and limiting the chain segments passing through the cabinet. The chain guide rail extends from the first opening to the second opening.

3. The online conveying plasma treatment equipment according to claim 2, characterized in that: The chain guide track consists of two parallel and symmetrically arranged straight rods, with the chain passing between the two straight rods.

4. The online conveying plasma treatment equipment according to claim 3, characterized in that: The plasma jetting mechanism is mounted on the support platform.

5. The online conveying plasma treatment equipment according to claim 1, characterized in that: The upper surface of the wraparound support frame is provided with a first protective cover and a second protective cover. There are two first protective covers, which are respectively placed above the chain segments outside the first and second openings and extend from the openings to both ends of the loading and unloading station. The second protective cover is located at the loading and unloading station, and its height is lower than that of the first protective cover. Its top surface has a slot that matches the diameter of the jig rod, and the jig rod can pass through the slot. The two ends of the second protective cover are respectively connected to the ends of the two first protective covers, and a communication port is opened at the connection position of the two first protective covers and the second protective cover. The jig rod and the jig can move between the first protective cover and the second protective cover through the communication port.

6. The online conveying plasma treatment equipment according to claim 1, characterized in that: The rotation drive assembly includes a motor and a worm gear reducer. The output end of the motor is connected to the input end of the worm gear reducer, and the output end of the worm gear reducer is connected to the sprocket.

7. The online conveying plasma treatment equipment according to claim 1, characterized in that: The fixture is a plate-shaped structure with positioning holes for positioning the workpiece or with clamps for holding the workpiece.

8. The online conveying plasma treatment equipment according to claim 1, characterized in that: The outline shape of the wraparound support frame is rectangular, elliptical, or rounded rectangle.

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