Transmission device and vacuum coating apparatus

Abstract

The utility model provides a kind of transmission device and vacuum coating equipment, wherein transmission device includes metal transmission shaft, including the connecting section and the last section being connected with each other;Insulating collar, including the sleeve joint part and the first extension, and the sleeve joint part transmission sleeve is set in the last section periphery, and the first extension extends to the connecting section periphery, and the first extension is formed with the connecting section between first slit;Metal transmission wheel, sleeve is set in the insulating collar periphery, and the insulating collar is formed with metal transmission wheel between second slit, and first slit and second slit are located in the same side of metal transmission wheel. First slit and second slit are located in the side of metal transmission wheel away from carrier plate, and dust conduction path between the side of metal transmission wheel away from carrier plate and metal transmission shaft is lengthened, not easy to be completely covered by dust, and maintenance cycle is lengthened.

Description

Technical Field

[0001] This utility model relates to the field of vacuum photovoltaic production equipment technology, and in particular to a transmission device and a vacuum coating equipment. Background Technology

[0002] Vacuum equipment typically uses metal drive shafts and metal drive wheels to support and drive the carrier plates. However, the side of the metal drive wheel facing away from the carrier plate is not shielded by the carrier plate, making it more susceptible to dust accumulation. This can cause conductive dust to easily fill the gap between the side of the metal drive wheel facing away from the carrier plate and the metal drive shaft, creating a connection between the carrier plate and the metal drive shaft. Once this connection occurs, arcing can easily occur, requiring disassembly and maintenance, thus impacting production efficiency. Utility Model Content

[0003] This utility model proposes a transmission device and a vacuum coating equipment, which sets a first slit and a second slit to improve the anti-conduction capability between the metal transmission wheel and the metal transmission shaft and extend the maintenance cycle.

[0004] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0005] This utility model provides a transmission device, comprising:

[0006] A metal drive shaft, comprising a connecting section and an end section that are interconnected;

[0007] An insulating collar includes a sleeve portion and a first extension portion connected to each other. The sleeve portion is drivenly sleeved on the periphery of the end section, and the first extension portion extends to the periphery of the connecting section, forming a first slit between the first extension portion and the connecting section.

[0008] A metal drive wheel is fitted around the periphery of an insulating collar, and a second slit is formed between the insulating collar and the metal drive wheel. The first slit and the second slit are located on the same side of the metal drive wheel.

[0009] Preferably, the transmission device further includes a first threaded fastener, and the insulating collar further includes a second extension. The second extension is located around the periphery of the first extension and has a first through hole. The metal transmission wheel has a first threaded hole. The first threaded fastener passes through the first through hole and is threaded into the first threaded hole to lock the insulating collar and the metal transmission wheel.

[0010] Preferably, the metal drive wheel is provided with a first sink groove, the second extension is housed in the first sink groove, and a second slit is formed between the inner wall of the first sink groove and the outer wall of the second extension.

[0011] Preferably, the second extension is provided with a second recess, in which the nut of the first threaded fastener is housed.

[0012] Furthermore, the transmission device also includes a second threaded fastener and a shaft end baffle. A shoulder is provided between the end section and the connecting section. A second threaded hole is provided on the end face of the end section. A second through hole is provided on the shaft end baffle. The second threaded fastener passes through the second through hole and is threaded into the second threaded hole to lock the shaft end baffle to the end face of the end section. The shaft end baffle is used to press the insulating collar against the shoulder.

[0013] Furthermore, the shaft end baffle is made of metal, and the transmission device also includes an insulating baffle that covers the side of the shaft end baffle away from the end section.

[0014] Preferably, one end of the metal drive wheel extends to the periphery of the insulating baffle, the inner wall of the metal drive wheel is provided with an annular groove, and the periphery of the insulating baffle is embedded in the annular groove.

[0015] Preferably, the metal drive wheel is provided with a third through hole, which communicates with and passes through the first threaded hole and the metal drive wheel. The third through hole is also connected to the annular groove.

[0016] Preferably, the insulating baffle and the metal drive wheel are in clearance fit, and the edge of the insulating baffle is provided with a notch.

[0017] Preferably, a third slit is formed between the shaft end baffle and the metal drive wheel, and an insulating baffle covers one side of the third slit.

[0018] Furthermore, the metal drive shaft is a magnetohydrodynamic shaft, and the transmission device also includes:

[0019] A magnetofluid shell, with a magnetofluid axis penetrating the magnetofluid shell in a horizontal direction;

[0020] The guide bracket is fixedly installed on the magnetofluid housing;

[0021] The bearing housing is fixedly installed on the guide bracket. An insulating component is rotatably sleeved on the periphery of the bearing housing, and the rotation center line of the insulating component is a vertical line.

[0022] A metal guide wheel is fixedly sleeved on the outer wall of the insulating component, and a fourth slit is formed between the metal guide wheel and the bearing seat;

[0023] A positioning retaining ring is fixedly installed on the top of the bearing housing and abuts against the top of the insulating assembly, forming a fifth slit between the metal guide wheel and the positioning retaining ring.

[0024] This utility model also provides a vacuum coating equipment, including a vacuum chamber and a carrier plate for transferring a target workpiece, and at least two of the above-mentioned transmission devices arranged at intervals along the transmission direction of the carrier plate, as well as a driving device. The metal drive shafts of each transmission device are flush with the mounting surface of the inner wall of the vacuum chamber, and the metal drive wheels are disposed inside the vacuum chamber. The driving device is used to drive the metal drive shafts and metal drive wheels of each transmission device to rotate synchronously so as to transmit the carrier plate along the transmission direction.

[0025] This utility model has the following beneficial effects:

[0026] The transmission device provided by this utility model has an insulating collar between the metal drive shaft and the metal drive wheel. When the carrier plate is transmitted on the metal drive wheel, the carrier plate and the metal drive shaft are insulated and isolated. By setting the first slit and the second slit, the surface path between the side of the metal drive wheel facing away from the carrier plate and the metal drive shaft is extended, reducing the probability of the carrier plate connecting to the cavity of the vacuum coating equipment, reducing the arcing phenomenon between the carrier plate and the metal drive wheel, extending the maintenance cycle, and ensuring production efficiency.

[0027] The vacuum coating equipment provided by this utility model adopts the above-mentioned transmission device, which improves the operational stability of the vacuum coating equipment and the production efficiency of vacuum coating. Attached Figure Description

[0028] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0029] Figure 1 A three-dimensional structural schematic diagram of an embodiment of the transmission device provided by this utility model;

[0030] Figure 2 An exploded structural diagram of an embodiment of the transmission device provided by this utility model;

[0031] Figure 3 An exploded structural diagram of an embodiment of the transmission device provided by this utility model from another perspective;

[0032] Figure 4 A schematic diagram of the main structure of an embodiment of the transmission device provided by this utility model;

[0033] Figure 5 for Figure 4 A cross-sectional view of the transmission device along the AA direction, excluding the guide bracket.

[0034] Figure 6 for Figure 5 A partially enlarged structural diagram of the transmission device in the diagram;

[0035] Figure 7 for Figure 4 A cross-sectional view of the transmission device along the BB direction.

[0036] Figure 8A top view of an embodiment of the transmission device provided by this utility model.

[0037] The main markings in the attached figures are as follows:

[0038] 1. Magnetofluid housing; 11. Metal drive shaft; 111. Connecting section; 112. End section; 1121. Second threaded hole; 113. Shoulder; 2. Metal drive wheel; 21. First threaded hole; 22. First countersunk groove; 23. Annular groove; 24. Third through hole; 25. Washer slot; 251. Insulating washer; 3. Insulating collar; 31. Sleeve part; 311. Double round head flat key; 32. First extension part; 321. First through hole; 322. Second countersunk groove; 33. Second extension part; 34. Annular limiter 4. Step; 5. First threaded fastener; 6. Second threaded fastener; 7. Shaft end baffle; 8. Second through hole; 9. Insulating baffle; 10. Notch; 11. First slit; 22. Second slit; 23. Third slit; 24. Guide bracket; 25. Bracket body; 26. Support cantilever; 27. Positioning pin; 28. Bearing seat; 29. ​​Guide wheel; 20. Insulating assembly; 20. Positioning retaining ring; 20. Insulating retaining ring; 21. Fourth slit; 22. Fifth slit; 23. Synchronous pulley.

[0039] Other annotations in the diagram include:

[0040] X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0041] To make the technical problem to be solved, the technical solution and the beneficial effects of this utility model clearer, the following description is provided in conjunction with the appendix. Figure 1-8 The present invention will be further described in detail with reference to the embodiments.

[0042] In vacuum coating equipment, a transfer device is installed on the inner wall of the vacuum chamber. A carrier plate is used to transport silicon wafers or glass. After the carrier plate enters the vacuum chamber, the transfer device supports the sides of the carrier plate and transfers it. Ion clusters in the vacuum chamber are deposited or sputtered onto the silicon wafers or glass.

[0043] The side of the carrier plate is designed as a C-shaped structure, and the metal drive wheel 2 is located inside the C-shaped structure. The opening of the C-shaped structure is located on the side of the metal drive wheel 2 away from the carrier plate body. Ion clusters floating in the vacuum chamber will pass through the opening of the C-shaped structure and adhere to the surface of the metal drive wheel 2 away from the carrier plate body. At this time, the ion clusters are regarded as dust with conductive function. If the dust completely covers the surface of the metal drive wheel 2 away from the carrier plate body and the surface of the metal drive shaft 11, the carrier plate, the metal drive wheel 2 and the metal drive shaft 11 are connected. The negative ions are attracted by the carrier plate and adhere to the surface of the carrier plate, resulting in a plating phenomenon or an arcing phenomenon.

[0044] To resolve the above issues, please refer to the following: Figure 1-8 The transmission device provided by this utility model includes a metal drive shaft 11, an insulating collar 3, and a metal drive wheel 2. The metal drive shaft 11 includes a connecting section 111 and a tail section 112 that are connected to each other. The insulating collar 3 includes a sleeve portion 31 and a first extension portion 32 that are connected to each other. The sleeve portion 31 is sleeved around the circumference of the tail section 112, and the first extension portion 32 extends to the circumference of the connecting section 111. A first slit 8 is formed between the first extension portion 32 and the connecting section 111. The metal drive wheel 2 is sleeved around the circumference of the insulating collar 3, and a second slit 9 is formed between the insulating collar 3 and the metal drive wheel 2. The first slit 8 and the second slit 9 are located on the same side of the metal drive wheel 2.

[0045] An insulating collar 3 is provided between the metal drive shaft 11 and the metal drive wheel 2, providing insulation between the carrier plate and the metal drive shaft 11 when the carrier plate is transported on the metal drive wheel 2. A first slit 8 is provided between the connecting section 111 of the metal drive shaft 11 and the first extension 32 of the insulating collar 3, and a second slit 9 is provided between the first extension 32 of the insulating collar 3 and the metal drive wheel 2. Both the first slit 8 and the second slit 9 are located on the same side of the metal drive wheel 2 away from the carrier plate body, that is, both the first slit 8 and the second slit 9 are located on the same side of the C-shaped structure opening. On one side, the path of dust conduction through the gap between the side of the metal drive wheel 2 facing away from the carrier plate and the metal drive shaft 11 is significantly extended, thereby reducing the probability that the gap between the side of the metal drive wheel 2 facing away from the carrier plate and the metal drive shaft 11 will be filled with dust and conduction. This achieves insulation support for the carrier plate and reduces the arcing phenomenon between the carrier plate and the metal drive wheel 2, ensuring the thin film deposition quality of the silicon wafer, improving the operational stability of the vacuum coating equipment and the production efficiency of vacuum coating, and is especially suitable for application in magnetron sputtering coating equipment.

[0046] Please see Figure 3 In one embodiment of the transmission device provided by this utility model, a keyway is provided between the outer wall of the end section 112 and the outer wall of the sleeve part 31, and a double round-headed flat key 311 is embedded in the keyway. The power transmission between the metal drive shaft 11 and the insulating collar 3 is realized through the double round-headed flat key 311.

[0047] In other embodiments of the transmission device provided by this utility model, the sleeve portion 31 of the insulating collar 3 may also be sleeved and connected to the periphery of the end segment 112 using a square-headed flat key, a single round-headed flat key, or other transmission connection key structures.

[0048] In one embodiment of the transmission device provided by this utility model, the insulating collar 3 is made of polyetheretherketone (PEEK) or ceramic material, or other insulating and high-temperature resistant materials.

[0049] Please refer to the following: Figure 1-6 In one embodiment of the transmission device provided by this utility model, the transmission device further includes a first threaded fastener 4, and the insulating collar 3 further includes a second extension 33. The second extension 33 is located around the first extension 32 and has a first through hole 321. The metal transmission wheel 2 has a first threaded hole 21 that matches the first through hole 321. The first threaded fastener 4 passes through the first through hole 321 and is threaded into the first threaded hole 21 to lock the insulating collar 3 and the metal transmission wheel 2, preventing them from rotating relative to each other. The metal transmission wheel 2 is used to support the carrier plate and is subject to wear. When the metal transmission wheel 2 needs to be replaced, the first threaded fastener 4 can be unscrewed to replace it, which is convenient. In this embodiment, the first threaded fastener 4 is a screw; in other embodiments, the first threaded fastener 4 is a bolt or a stud.

[0050] In this embodiment, the central axis of the first threaded fastener 4 is arranged parallel to the central axis of the metal transmission wheel 2, that is, the first threaded fastener 4 passes through the second extension 33 in a horizontal direction on the side of the metal transmission wheel 2 away from the carrier plate and is locked to the metal transmission wheel 2.

[0051] In some other embodiments, the central axis of the first threaded fastener 4 is arranged perpendicular to the central axis of the metal drive wheel 2, and the first threaded fastener 4 locks the metal drive wheel 2 and the insulating collar 3 along the radial direction of the metal drive wheel 2.

[0052] Please see Figure 3 The second extension 33 has a ring-shaped structure. In this embodiment, the second extension 33 is provided with four first through holes 321. The four first through holes 321 are equidistantly spaced around the central axis of the second extension 33. Each first through hole 321 is fitted with a first threaded fastener 4. In other embodiments, the number of first through holes 321 can be set according to actual needs, such as 2, 3, or even more.

[0053] Please refer to the following: Figure 1-6 In one embodiment of the transmission device provided by this utility model, a first recess 22 matching the shape of the second extension 33 is provided at one end of the metal transmission wheel 2 facing the connecting section 111 of the metal transmission shaft 11. The second extension 33 is housed in the first recess 22, and the aforementioned second slit 9 is formed between the inner wall of the first recess 22 and the outer wall of the second extension 33. The transmission device houses the second extension 33 through the first recess 22, preventing it from blocking the carrier plate or accumulating excessive dust.

[0054] Please refer to the following: Figure 1-6In a preferred embodiment of the transmission device provided by this utility model, the first recess 22 is formed at the junction of the end of the metal drive wheel 2 facing the connecting section 111 of the metal drive shaft 11 and the inner side of the metal drive wheel 2. The first threaded hole 21 is provided on the bottom surface of the first recess 22 away from the connecting section 111 and is a blind hole. The first extension 32 is provided at the end of the sleeve 31 facing the connecting section 111 and covers the shoulder 113 of the metal drive shaft 11. The second extension 33 is for... The first sink 22 is shaped to match the convex ring that extends radially along the insulating collar 3 and surrounds the periphery of the first extension 32. A portion of the second extension 33 in the axial direction of the insulating collar 3 is directly opposite the sleeve portion 31, and another portion of the second extension 33 in the axial direction of the insulating collar 3 is directly opposite the first extension 32. That is, the second extension 33 extends axially along the insulating collar 3 to increase the length of the second slit 9, further extending the path for dust to pass through the gap between the insulating collar 3 and the metal drive wheel 2.

[0055] Please refer to the following: Figure 1-8 In a preferred embodiment of the transmission device provided by this utility model, the end segment 112 and the connecting segment 111 are coaxially arranged, and the radial dimension of the end segment 112 is smaller than the radial dimension of the connecting segment 111, that is, the metal transmission shaft 11 is a stepped shaft.

[0056] Please refer to the following: Figure 1-6 In one embodiment of the transmission device provided by this utility model, the second extension 33 is provided with a second recess 322 at one end of the end section 112 of the metal drive shaft 11, which matches the shape of the nut of the first threaded fastener 4. The nut of the first threaded fastener 4 is housed in the second recess 322 to prevent it from blocking the carrier plate or accumulating too much dust.

[0057] Please refer to the following: Figure 1-6 In one embodiment of the transmission device provided by this utility model, the transmission device further includes a second threaded fastener 5 and a shaft end baffle 6. A shoulder 113 is provided between the end section 112 and the connecting section 111. A second threaded hole 1121 is provided on the end face of the end section 112. A second through hole 61 matching the second threaded hole 1121 is provided on the shaft end baffle 6. An annular limiting step 34 matching the shape of the shoulder 113 is formed between the first extension 32 and the sleeve 31.

[0058] After the second threaded fastener 5 passes through the second through hole 61, it is threaded into the second threaded hole 1121 to lock the shaft end baffle 6 to the end face of the end section 112. The shaft end baffle 6 is used to press the annular limiting step 34 of the insulating collar 3 and fit it with the shaft shoulder 113 under the locking action of the second threaded fastener 5, thereby realizing the limiting of the insulating collar 3 in the axial direction of the transmission device. At this time, the metal transmission wheel 2 is located on the outside of the insulating collar 3 and the shaft end baffle 6.

[0059] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, the shaft end baffle 6 is made of metal, and the transmission device also includes an insulating baffle 7, which covers the side of the shaft end baffle 6 away from the end segment 112. Since metal is cheaper and less prone to deformation than insulating material but is more conductive, a thicker metal shaft end baffle 6 is provided on the end face of the end segment 112 to achieve the pressing and thinning of the shaft end insulating collar 3 and the limiting structure, thereby reducing costs. A thinner insulating baffle 7 is provided on the side of the metal shaft end baffle 6 away from the end segment 112 to prevent the metal shaft end baffle 6 from conducting.

[0060] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, one end of the metal transmission wheel 2 extends to the periphery of the insulating baffle 7, and the inner wall of the metal transmission wheel 2 is provided with an annular groove 23, into which the periphery of the insulating baffle 7 is embedded. Because there is a gap between the periphery of the insulating baffle 7 and the annular groove 23, a tool can be inserted to assemble and disassemble the insulating baffle 7.

[0061] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, the insulating baffle 7 and the metal transmission wheel 2 are in clearance fit. The edge of the insulating baffle 7 is provided with several notches 71 so that the insulating baffle 7 can be inserted into the inside of the metal transmission wheel 2 by means of a tool for installation or prying open and removing the insulating baffle 7 from the inside of the metal transmission wheel 2. The clearance fit between the insulating baffle 7 and the metal transmission wheel 2 and the notches 71 on the edge of the insulating baffle 7 also facilitate the removal of air to achieve a vacuum.

[0062] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, a pair of notches 71 are respectively provided on the opposite edges of the insulating baffle 7, and the end face of the notch 71 is parallel to the axial direction of the insulating baffle 7, so as to facilitate the tool to clamp the insulating baffle 7.

[0063] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, the metal transmission wheel 2 is provided with a third through hole 24, which communicates with and passes through the first threaded hole 21 and the metal transmission wheel 2. The third through hole 24 is also connected to the annular groove 23.

[0064] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, the other end of the connecting section 111 of the metal transmission wheel 2 facing away from the metal transmission shaft 11 faces the carrier plate of the vacuum coating device for transferring the target workpiece (not shown in the figure). The other end of the connecting section 111 of the metal transmission wheel 2 facing away from the metal transmission shaft 11 is provided with a third through hole 24. The third through hole 24 is coaxially connected with the first threaded hole 21 and passes through the metal transmission wheel 2. The third through hole 24 is also connected to the annular groove 23 along the radial direction of the metal transmission wheel 2.

[0065] The air inside the first threaded hole 21 can be easily removed through the third through hole 24 to ensure the vacuum environment inside and outside the transmission device. When the port of the third through hole 24 is blocked by the carrier plate, air can also be removed through the third through hole 24 and the annular groove 23.

[0066] Please refer to the following: Figure 1-6 In a preferred embodiment of the transmission device provided by this utility model, a third slit 10 is formed between the shaft end baffle 6 and the metal transmission wheel 2, and an insulating baffle 7 covers the side of the third slit 10 facing away from the connecting section 111 of the metal transmission shaft 11.

[0067] Since the metal drive wheel 2 and the shaft end baffle 6 are spaced apart, dust may enter the inner side of the insulating baffle 7 along the notch 71 on the edge of the insulating baffle 7. The third slit 10 provided between the shaft end baffle 6 and the metal drive wheel 2 can improve the anti-conduction capability.

[0068] Please refer to the following: Figure 1-6 In a more preferred embodiment of the transmission device provided by this utility model, the third slit 10 is formed between the insulating collar 3, the shaft end baffle 6, the insulating baffle 7 and the metal transmission wheel 2, and the third slit 10 is connected to the annular groove 23.

[0069] Please refer to the following: Figure 1-8In one embodiment of the transmission device provided by this utility model, the metal drive shaft 11 is a magnetic fluid shaft. The transmission device also includes a magnetic fluid housing 1 and a metal guide wheel 40. The magnetic fluid shaft passes through the magnetic fluid housing 1 in a horizontal direction. The magnetic fluid shaft is the aforementioned metal drive shaft 11. The magnetic fluid shaft and the magnetic fluid housing 1 constitute a magnetic fluid bearing. The guide bracket 20 is fixedly installed on the magnetic fluid housing 1. The bearing seat 30 is fixedly installed on the guide bracket 20. An insulating component 401 is rotatably sleeved on the periphery of the bearing seat 30. The metal drive shaft 11, the insulating collar 3, and the metal drive wheel 2 are coaxial, and their axial directions are parallel to the first direction X in the horizontal direction. The transmission direction of the transmission device is simultaneously horizontal. The rotation center line of the insulating assembly 401 is a vertical line, which runs along the axial direction (first direction X) and the horizontal direction (second direction Y) of the metal drive shaft 11, insulating collar 3 and metal drive wheel 2. The direction of this vertical line is a third direction Z (i.e., the vertical direction) that is perpendicular to both the first direction X and the second direction Y. The metal guide wheel 40 is fixedly sleeved on the outer wall of the insulating assembly 401, and a fourth slit 50 is formed between the metal guide wheel 40 and the bearing seat 30. The positioning retaining ring 402 is fixedly installed on the top of the bearing seat 30 and abuts against the top of the insulating assembly 401, and is located inside the metal guide wheel 40. A fifth slit 60 is formed between the metal guide wheel 40 and the positioning retaining ring 402.

[0070] Metal guide wheel 40 is used to cooperate with the carrier plate to guide its movement along the transmission direction under the drive of metal drive wheel 2.

[0071] The transmission device provided by this utility model forms a fourth slit 50 between the metal guide wheel 40 and the bearing seat 30, and an insulating component 401 is sleeved around the periphery of the bearing seat 30. A fifth slit 60 is formed between the positioning retaining ring 402 installed on the top of the bearing seat 30 and the insulating component 401 and the metal guide wheel 40. This significantly extends the path for dust to pass through the gap between the metal guide wheel 40 and the bearing seat 30, thereby reducing the probability that the gap between the metal guide wheel 40 and the bearing seat 30 will be filled and connected by dust. This achieves the insulating guidance of the metal guide wheel 40 to the carrier plate and reduces the arcing phenomenon that occurs between the carrier plate and the metal guide wheel 40, ensuring the thin film deposition quality of the silicon wafer, improving the operational stability of the vacuum coating equipment and the production efficiency of vacuum coating, and is especially suitable for application in magnetron sputtering coating equipment.

[0072] Please refer to the following: Figure 1-8In a preferred embodiment of the transmission device provided by this utility model, the guide bracket 20 includes a bracket body 201, which is positioned and installed on the end face of the magnetic fluid housing 1 facing the metal transmission wheel 2 and extends along the transmission direction; a pair of support cantilever arms 202 are respectively connected to the two ends of the side of the bracket body 201 facing the transmission wheel in the transmission direction; a pair of bearing seats 30 are respectively fixedly installed on the pair of support cantilever arms 202 and are respectively used to install a pair of metal guide wheels 40.

[0073] Please refer to the following: Figure 1-8 In a preferred embodiment of the transmission device provided by this utility model, the insulating component 401 is a vacuum insulating bearing rotatably sleeved on the periphery of the bearing seat 30, the metal guide wheel 40 is fixedly sleeved on the outer wall of the vacuum insulating bearing (insulating component 401), and the positioning retaining ring 402 is fixedly installed on the top of the bearing seat 30 by screws and abuts against the top of the vacuum insulating bearing.

[0074] The aforementioned fifth slit 60 is formed meanderingly between the positioning retaining ring 402, the vacuum insulated bearing (insulating component 401), and the metal guide wheel 40, in order to further extend the path through which dust passes between the metal guide wheel 40 and the bearing housing 30.

[0075] Because the process chamber of vacuum coating equipment requires a high degree of vacuum, grease and oil can have an adverse effect on the vacuum environment at high temperatures. Therefore, the transmission device uses high-temperature resistant, high-insulation magnetohydrodynamic bearings and vacuum-insulated bearings, which are suitable for use in high-temperature and high-vacuum environments. This allows for sealed transmission and an oil-free environment, reducing the impact on the vacuum environment of the vacuum coating equipment.

[0076] Please refer to the following: Figure 1-8 In a more preferred embodiment of the transmission device provided by this utility model, the transmission device further includes an insulating retaining ring 403, which is disposed in the gap formed by the bearing seat 30, the vacuum insulating bearing (insulating component 401) and the metal guide wheel 40, and is connected between the bearing seat 30, the vacuum insulating bearing (insulating component 401) and the metal guide wheel 40.

[0077] The aforementioned fourth slit 50 is formed meanderingly between the bearing housing 30, the insulating retaining ring 403, and the metal guide wheel 40, in order to further extend the path through which dust passes between the metal guide wheel 40 and the bearing housing 30.

[0078] In other embodiments of the transmission device provided by this utility model (not shown in the figure), the insulating component 401 may also include a non-vacuum insulated bearing (such as a non-vacuum insulated oilless bearing) rotatably sleeved on the periphery of the bearing seat 30, and an insulating sleeve sleeved on the periphery of the non-vacuum insulated bearing. The metal guide wheel 40 is fixedly sleeved on the outer wall of the non-vacuum insulated bearing, and the positioning retaining ring 402 is fixedly installed on the top of the bearing seat 30 and abuts against the top of the non-vacuum insulated bearing.

[0079] Please refer to the following: Figure 1-8 This utility model also provides a vacuum coating equipment, including a vacuum chamber and a carrier plate for transferring target workpieces, and at least two of the above-mentioned transmission devices arranged at intervals along the transmission direction of the carrier plate, as well as a driving device. The corresponding metal transmission shafts 11 of each transmission device are flush with the mounting surface of the inner wall of the vacuum chamber, and the metal transmission wheel 2 is disposed inside the vacuum chamber. The driving device is used to drive the corresponding metal transmission shafts 11 and metal transmission wheels 2 of each transmission device to rotate synchronously, so as to drive the carrier plate to be transmitted along the transmission direction through the synchronous rotation of the metal transmission wheels 2.

[0080] Please refer to the following: Figure 1-8 In one embodiment of the vacuum coating equipment provided by this utility model, the mounting surfaces of the magnetic fluid housings 1 of all transmission devices are flush with the same inner wall mounting surface of the vacuum cavity. Therefore, the end faces of all magnetic fluid housings 1, metal drive shafts 11, and metal drive wheels 2 are kept on the same horizontal plane. The support bodies 201 of each transmission device can be positioned and installed in the mounting holes reserved on the end face of the magnetic fluid housing 1 facing the metal drive wheel 2. The support bodies 201 are locked to the end face of the magnetic fluid housing 1 facing the metal drive wheel 2 by the positioning pins 203. At this time, the metal guide wheels 40 on the bearing seats 30 of all transmission devices are kept on the same horizontal straight line. No installation adjustment is required to ensure that the distance between each metal guide wheel 40 and the carrier plate is the same. Thus, by rotating synchronously, each metal guide wheel 40 can drive the carrier plate to move horizontally and reciprocally in a straight line in the transmission direction, avoiding jamming of the plate due to the offset of the carrier plate during transmission.

[0081] In the confined process chamber of vacuum coating equipment, only one set of metal guide wheels 40 can usually be installed near the magnetohydrodynamic bearing. However, the vacuum coating equipment provided by this utility model uses the magnetohydrodynamic housing 1 of the magnetohydrodynamic bearing as the installation platform. Two sets of metal guide wheels 40 are simultaneously installed on the transmission device through the guide bracket 20 composed of the bracket body 201 and the cantilever beam (support cantilever 202). In a confined space, there is no need for repeated assembly or disassembly, which can reduce the time for installation and maintenance.

[0082] Please refer to the following: Figure 1-8In one embodiment of the vacuum coating equipment provided by this utility model, the driving device of the transmission device includes a synchronous pulley 70, which is disposed at one end of the metal transmission shaft 11 opposite to the metal transmission wheel 2; a synchronous toothed belt (not shown in the figure), which meshes with the synchronous pulley 70 disposed on the corresponding metal transmission shaft 11 of each transmission device; and a driving unit (not shown in the figure), which is used to drive the synchronous toothed belt to rotate in the transmission direction, so as to drive the synchronous pulley 70, the metal transmission shaft 11 and the metal transmission wheel 2 of each transmission device to rotate synchronously in the forward and reverse directions, thereby driving the carrier plate and the target workpiece to be transmitted in the transmission direction through each metal transmission wheel 2.

[0083] In a preferred embodiment of the vacuum coating equipment provided by this utility model, the vacuum coating equipment is a magnetron sputtering coating equipment, and the target workpiece is a silicon wafer.

[0084] In other embodiments of the vacuum coating equipment provided by this utility model, the vacuum coating equipment can also be other types of coating equipment, and the target workpiece can also be other types of substrates, such as glass.

[0085] In a preferred embodiment of the vacuum coating equipment provided by this utility model, the cross-section of the side of the carrier plate is C-shaped or U-shaped. The side of the carrier plate includes a main body vertically arranged along a third direction and a pair of bent portions respectively provided at the upper and lower ends of the main body. The other end of the connecting section 111 of the metal drive wheel 2 facing away from the metal drive shaft 11 faces the main body of the carrier plate. The pair of bent portions extend horizontally from the upper and lower ends of the main body, bend and partially cover one end of the connecting section 111 of the metal drive wheel 2 facing the metal drive shaft 11, and are spaced apart from the connecting section 111.

[0086] Please refer to the following: Figure 1-8 In one embodiment of the vacuum coating equipment provided by this utility model, a plurality of insulating washers 251 for contacting the carrier plate are wound around the outer surface of the metal transmission wheel 2 along the circumference of the transmission wheel.

[0087] Please refer to the following: Figure 1-8 In a preferred embodiment of the vacuum coating equipment provided by this utility model, a plurality of washer slots 25 extending circumferentially along the outer surface of the metal transmission wheel 2 are provided at intervals, and a plurality of insulating washers 251 are respectively engaged in each washer slot 25. The insulating washers 251 are made of insulating rubber.

[0088] Please refer to the following: Figure 1-8 In a preferred embodiment of the vacuum coating equipment provided by this utility model, the insulating gasket 251 is a fluororubber O-ring, and the cross-section of the gasket groove 25 is U-shaped to match the shape of the fluororubber O-ring (insulating gasket 251).

[0089] After the fluororubber O-ring (insulating washer 251) is installed in the washer groove 25 on the metal drive wheel 2, its outer diameter is slightly larger than that of the metal drive wheel 2. Since the transmission speed of the carrier plate in the process chamber of the vacuum coating equipment is usually slow, the combination of fluororubber O-ring (insulating washer 251) and metal drive wheel 2 during the linear transmission process can play a certain role in buffering and shock absorption. Under the action of gravity, the carrier plate will squeeze and deform the fluororubber O-ring (insulating washer 251) so that it is basically consistent with the outer diameter of the metal drive wheel 2. At this time, the carrier plate and the metal drive wheel 2 are in contact. The fluororubber O-ring (insulating washer 251) can increase the friction and prevent the metal drive wheel 2 from slipping when it moves relative to the metal carrier plate, thereby reducing the loss of the carrier plate due to vibration during the transmission process.

[0090] The transmission device provided by this utility model achieves the transmission of the carrier plate to reduce the adhesion of negative ions to the carrier plate and the arcing phenomenon between the carrier plate and the metal transmission wheel 2, and ensures the thin film deposition quality of the substrate. At the same time, it integrates the guide wheel 40 with the magnetic fluid housing 1, the guide bracket 20, and the metal guide wheel 40. At least two metal guide wheels 40 can be directly installed in a specific position on the magnetic fluid housing 1 without the need for additional openings in the cavity or the selection of additional mounting surface positions. This improves the space utilization of the vacuum equipment and makes the disassembly, assembly, and maintenance of the transmission wheel in the narrow process cavity convenient. In addition, an insulating structure is only set between the metal guide wheel 40 and the carrier plate to achieve insulating support for the carrier plate. There is no need to add a large-volume insulating sleeve between the magnetic fluid bearing and the cavity, which reduces equipment costs and the risk of vacuum leakage.

[0091] In other embodiments of the vacuum coating equipment provided by this utility model, the metal transmission wheel 2 housing adopts a rubber-coated roller design to further improve its buffering and shock absorption effect.

[0092] In other embodiments of the vacuum coating equipment provided by this utility model, the guide bracket 20 and the magnetic fluid housing 1 can also be designed separately, and the guide bracket 20 can be installed in other positions of the cavity of the vacuum coating equipment.

[0093] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A transmission device, characterized in that, include: The metal drive shaft (11) includes a connecting section (111) and a tail section (112) that are connected to each other; An insulating collar (3) includes a sleeve portion (31) and a first extension portion (32) connected to each other. The sleeve portion (31) is driven to be sleeved on the periphery of the end segment (112). The first extension portion (32) extends to the periphery of the connecting segment (111). A first slit (8) is formed between the first extension portion (32) and the connecting segment (111). A metal drive wheel (2) is fitted around the periphery of the insulating collar (3), and a second slit (9) is formed between the insulating collar (3) and the metal drive wheel (2). The first slit (8) and the second slit (9) are located on the same side of the metal drive wheel (2).

2. The transmission device according to claim 1, characterized in that, The transmission device further includes a first threaded fastener (4), and the insulating collar (3) further includes a second extension (33). The second extension (33) is located around the first extension (32). The second extension (33) is provided with a first through hole (321). The metal transmission wheel (2) is provided with a first threaded hole (21). The first threaded fastener (4) passes through the first through hole (321) and is threaded to the first threaded hole (21) to lock the insulating collar (3) and the metal transmission wheel (2).

3. The transmission device according to claim 2, characterized in that, The metal drive wheel (2) is provided with a first sink (22), and the second extension (33) is housed in the first sink (22). A second slit (9) is formed between the inner wall of the first sink (22) and the outer wall of the second extension (33).

4. The transmission device according to claim 2, characterized in that, The second extension (33) is provided with a second recess (322), and the nut of the first threaded fastener (4) is housed in the second recess (322).

5. The transmission device according to claim 2, characterized in that, The transmission device further includes a second threaded fastener (5) and a shaft end baffle (6). A shoulder (113) is provided between the end section (112) and the connecting section (111). A second threaded hole (1121) is provided on the end face of the end section (112). A second through hole (61) is provided on the shaft end baffle (6). The second threaded fastener (5) passes through the second through hole (61) and is threaded to the second threaded hole (1121) to lock the shaft end baffle (6) to the end face of the end section (112). The shaft end baffle (6) is used to press the insulating collar (3) against the shoulder (113).

6. The transmission device according to claim 5, characterized in that, The shaft end baffle (6) is made of metal. The transmission device also includes an insulating baffle (7), which covers the side of the shaft end baffle (6) away from the end section (112).

7. The transmission device according to claim 6, characterized in that, One end of the metal drive wheel (2) extends to the periphery of the insulating baffle (7), and the inner wall of the metal drive wheel (2) is provided with an annular groove (23), and the periphery of the insulating baffle (7) is embedded in the annular groove (23).

8. The transmission device according to claim 7, characterized in that, The metal transmission wheel (2) is provided with a third through hole (24), which is connected to the first threaded hole (21) and passes through the metal transmission wheel (2). The third through hole (24) is also connected to the annular groove (23).

9. The transmission device according to claim 6, characterized in that, The insulating baffle (7) and the metal transmission wheel (2) are in clearance fit, and the edge of the insulating baffle (7) is provided with a notch (71).

10. The transmission device according to claim 6, characterized in that, A third slit (10) is formed between the shaft end baffle (6) and the metal transmission wheel (2), and the insulating baffle (7) covers one side of the third slit (10).

11. The transmission device according to any one of claims 1-10, characterized in that, The metal drive shaft (11) is a magnetohydrodynamic shaft, and the transmission device further includes: A magnetic fluid housing (1) has a magnetic fluid axis that extends horizontally through the magnetic fluid housing (1). The guide bracket (20) is fixedly installed on the magnetofluid housing (1); A bearing housing (30) is fixedly installed on the guide bracket (20). An insulating component (401) is rotatably sleeved on the periphery of the bearing housing (30). The rotation center line of the insulating component (401) is a vertical line. A metal guide wheel (40) is fixedly sleeved on the outer wall of the insulating component (401), and a fourth slit (50) is formed between the metal guide wheel (40) and the bearing seat (30); A positioning retaining ring (402) is fixedly installed on the top of the bearing seat (30) and abuts against the top of the insulating assembly (401), forming a fifth slit (60) between the metal guide wheel (40) and the positioning retaining ring (402).

12. A vacuum coating apparatus, comprising a vacuum chamber and a carrier plate for transferring a target workpiece, characterized in that, It also includes at least two transmission devices as described in any one of claims 1-11 arranged sequentially at intervals along the transmission direction of the carrier plate, and a driving device, wherein the metal drive shaft (11) of each of the transmission devices is mounted flush with the inner wall mounting surface of the vacuum cavity, the metal drive wheel (2) is disposed inside the vacuum cavity, and the driving device is used to drive the metal drive shaft (11) and the metal drive wheel (2) of each of the transmission devices to rotate synchronously so as to transmit the carrier plate along the transmission direction.

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