Automatic target shutter for vacuum coating apparatus

Abstract

The embodiment of the utility model relates to an automatic target baffle for vacuum coating equipment, a welded bellows assembly is arranged on the automatic target baffle for vacuum coating equipment, a baffle telescopic structure is fixedly connected on the welded bellows assembly, a target baffle structure is fixedly connected above the baffle telescopic structure, when the target baffle structure is used, the baffle telescopic structure and the welded bellows assembly are driven to move through a cylinder, thereby the target baffle structure is driven to move, and the utility model has the advantages of simple structure, long service life, small occupied space, reliable performance and convenient maintenance, solves the technical problem that in the prior art, the operation of the target baffle in the vacuum coating equipment mainly depends on manual operation, but the manual operation can not guarantee the timing accuracy of the opening and closing of the baffle, and can easily affect the uniformity and quality stability of the coating.

Description

Technical Field

[0001] The embodiments of this utility model relate to a baffle, and more particularly to an automatic target baffle for a vacuum coating equipment. Background Technology

[0002] In existing technologies, the operation of target baffles in vacuum coating equipment mainly relies on manual labor. Operators need to install the baffles before the vacuum environment is established and manually open or close them at appropriate times to control the use of the target material. However, manual operation makes it difficult to guarantee the accuracy of the timing of opening and closing the baffles, which can easily affect the uniformity and quality stability of the coating. Moreover, frequent manual intervention in a vacuum environment not only increases the labor intensity of operators but may also lead to the destruction of the vacuum environment, prolonging the production cycle and increasing production costs. Utility Model Content

[0003] The purpose of this utility model is to provide an automatic target baffle for vacuum coating equipment that is simple in structure, has a long service life, occupies little space, is reliable in performance and easy to maintain.

[0004] To achieve the above objectives, the present invention provides an automatic target baffle for a vacuum coating equipment, characterized in that it comprises: A welded bellows assembly is provided on an automatic target baffle for a vacuum coating equipment; A baffle telescopic structure is fixedly connected to the welded bellows assembly; A target baffle structure is fixedly connected above the baffle telescopic structure; when the target baffle structure is used, the baffle telescopic structure and the welded bellows assembly are driven to move by a cylinder, thereby pushing the target baffle structure to move.

[0005] Furthermore, in the automatic target baffle for vacuum coating equipment of this utility model, the automatic target baffle for vacuum coating equipment is provided on the cavity wall.

[0006] Furthermore, in the automatic target baffle for vacuum coating equipment of this utility model, the welding bellows assembly includes: The first mounting flange is fixedly connected to the outer side of the cavity wall; A guide rod, wherein several guide rods are fixedly connected to one side of the first mounting flange; A linear bearing, movably connected to the guide rod; A flange, which is fixedly connected between the linear bearings; A welded bellows is fixed below the first mounting flange.

[0007] Furthermore, in the automatic target baffle for vacuum coating equipment of this utility model, the baffle telescopic structure includes: A transition flange is fixedly connected below the flange of the welded bellows assembly; A shaft coupling is fixedly connected below the adapter flange; A shaft weldment is fixedly connected to one end within the shaft coupling; the shaft weldment passes through the cavity wall, the welded bellows, the flange, and the transition flange; the transition flange holds the lower part of the shaft weldment in place. Support rods, with one end of several support rods fixedly connected to the first mounting flange of the welded bellows assembly; A second mounting flange is fixedly connected to the other end of a plurality of support rods; the plurality of support rods are located between the first mounting flange and the second mounting flange; A connecting rod is fixedly connected to one end of the connecting rod below the coupling.

[0008] Furthermore, in the automatic target baffle for vacuum coating equipment of this utility model, the target baffle structure includes: A baffle mounting shaft is fixedly connected above the shaft weld of the baffle telescopic structure; A baffle is fixedly connected above the baffle mounting shaft.

[0009] Furthermore, in the automatic target baffle of the vacuum coating equipment of this utility model, a cylinder is fixedly connected to the other end of the connecting rod.

[0010] Furthermore, in the automatic target baffle of the vacuum coating equipment of this utility model, when the baffle of the baffle telescopic structure is used, the connecting rod of the baffle telescopic structure is driven to move by the telescopic movement of the cylinder. The connecting rod drives the shaft coupling and the transition flange of the baffle telescopic structure, the flange and the linear bearing of the welded bellows assembly, and the shaft weld of the baffle telescopic structure to move along the guide rod and the direction of the welded bellows assembly. This causes the shaft weld of the baffle telescopic structure to push the target baffle structure to move, so that the baffle stops at a specific position.

[0011] Furthermore, in the automatic target baffle for vacuum coating equipment of this utility model, a plurality of first sealing rings are provided between the shaft weld and the shaft coupling; and a plurality of second sealing rings are provided between the adapter flange and the flange.

[0012] Furthermore, in the automatic target baffle for vacuum coating equipment of this utility model, the number of support rods is four.

[0013] Compared with the prior art, the embodiment of this utility model adopts a method of setting a welded bellows assembly on an automatic target baffle for vacuum coating equipment; a baffle telescopic structure is fixedly connected to the welded bellows assembly; a target baffle structure is fixedly connected above the baffle telescopic structure; when using the target baffle structure, the movement of the baffle telescopic structure and the welded bellows assembly is driven by a cylinder, thereby driving the target baffle structure to move. It has the advantages of simple structure, long service life, small space occupation, reliable performance and easy maintenance. It solves the problem that in the prior art, the operation of the target baffle in vacuum coating equipment mainly relies on manual labor. Operators need to install the baffle before the vacuum environment is established and manually open or close the baffle at the appropriate time to control the use of the target material. However, manual operation makes it difficult to guarantee the accuracy of the timing of opening and closing the baffle, which can easily affect the uniformity and quality stability of the coating. Moreover, frequent manual intervention in the vacuum environment not only increases the labor intensity of the operators, but may also lead to the destruction of the vacuum environment, prolong the production cycle and increase the production cost. Attached Figure Description

[0014] Figure 1 This is the front view of the present invention; Figure 2 This is a schematic diagram of the adapter flange and shaft weld of this utility model; Figure 3 This is a schematic diagram of the welded bellows assembly of this utility model; Figure 4 This is a perspective view of the present invention. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of this utility model clearer, the various embodiments of this utility model will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the various embodiments of this utility model to facilitate a better understanding of this application. However, the technical solutions claimed in the claims of this application can be implemented even without these technical details and with various variations and modifications based on the following embodiments.

[0016] The embodiments of this utility model relate to an automatic target baffle for vacuum coating equipment, such as... Figure 1 , Figure 2 and Figure 4 As shown, it includes: In this embodiment, a welded bellows assembly 5 is provided on the automatic target baffle of the vacuum coating equipment. During the movement of the equipment, the welded bellows assembly 5 can maintain the sealing and isolation between the inside and outside of the cavity to prevent vacuum leakage. The welded bellows assembly 5 can also adapt to complex working condition changes, maintain good sealing performance and motion compensation capability, and ensure normal operation of the equipment. The welded bellows assembly 5 is located on the outside of the cavity, which is convenient for maintenance.

[0017] A baffle telescopic structure 1 is fixedly connected to the welded bellows assembly 5. The baffle telescopic structure 1 is driven to move by the cylinder 3, thereby controlling the position of the target baffle structure 2 and precisely controlling the exposure degree of the target material.

[0018] A target baffle structure 2 is fixedly connected above the baffle telescopic structure 1. When using the target baffle structure 2, the baffle telescopic structure 1 and the welded bellows assembly 5 are driven by the cylinder 3, thereby pushing the target baffle structure 2 to move. Driven by the baffle telescopic structure 1 and the welded bellows assembly 5, the target baffle structure 2 can shield the target material and precisely control the coating area. In local coating applications, the target baffle structure 2 can limit the deposition range of the coating material, achieving precise patterned coating.

[0019] In this embodiment, a target baffle structure 2 is fixedly connected above the baffle telescopic structure 1. When using the target baffle structure 2, the cylinder 3 drives the baffle telescopic structure 1 and the welded bellows assembly 5 to move, thereby pushing the target baffle structure 2 to move. Only the target baffle structure 2 and the shaft weld 13 are inside the cavity, which can reduce the space occupied. Other components are outside the cavity, which is convenient for maintenance. It has the advantages of simple structure, long service life, small space occupation, reliable performance and convenient maintenance. It solves the problem that in the prior art, the operation of the target baffle in the vacuum coating equipment mainly relies on manual labor. The operator needs to install the baffle before the vacuum environment is established and manually open or close the baffle at the appropriate time to control the use of the target material. However, manual operation makes it difficult to guarantee the accuracy of the timing of opening and closing the baffle, which can easily affect the uniformity and quality stability of the coating. Moreover, frequent manual intervention in the vacuum environment not only increases the labor intensity of the operator, but may also lead to the destruction of the vacuum environment, prolong the production cycle and increase the production cost.

[0020] To achieve the above-mentioned technical effects, such as Figure 1 , Figure 2 and Figure 4 As shown, an automatic target baffle for a vacuum coating equipment is provided on the cavity wall 4, and the cavity wall 4 provides a position for the installation of the automatic target baffle for the vacuum coating equipment.

[0021] To achieve the above-mentioned technical effects, such as Figure 1 , Figure 2 and Figure 4 As shown, the welded bellows assembly 5 includes: A first mounting flange 54 is fixedly connected to the outside of the cavity wall 4. The first mounting flange 54 serves to fix and connect the cavity wall 4, the welded bellows 51, the support rod 14 and the guide rod 52, so as to ensure the accurate relative position between the various components.

[0022] Several guide rods 52 are fixedly connected to one side of the first mounting flange 54. The guide rods 52 provide precise guidance for the movement of the automatic target baffle. When the baffle telescopic structure 1 moves, the guide rods 52 ensure that it moves along the straight line of the guide rod 52, avoiding deviation and improving the accuracy and stability of the movement.

[0023] A linear bearing 53 is movably connected to the guide rod 52. The linear bearing 53 cooperates with the guide rod 52 to make the movement of the baffle telescopic structure 1 smoother, reduce energy consumption, reduce wear of parts, extend the service life of the equipment, and also help maintain the straightness and accuracy of the movement of the baffle 22, ensuring that the baffle 22 can reach the designated position.

[0024] A flange 55 is fixedly connected between the linear bearings 53. The flange 55 serves to fix the linear bearings 53 and the welded bellows 51. During the movement of the equipment, the flange 55 can transmit force and motion, enabling the various components to work together and ensuring the smoothness and reliability of the equipment movement.

[0025] A welded bellows 51 is fixed below the first mounting flange 54. The two ends of the welded bellows 51 are fixed to the first mounting flange 54 and flange 55 respectively. The welded bellows 51 has the characteristic of being expandable and can compensate for the displacement that will occur during the opening and closing of the automatic target baffle, reduce the impact of movement on other components, and ensure the flexibility and stability of the movement of the automatic target baffle. The welded bellows 51 can also ensure the vacuum degree and reliable performance.

[0026] To achieve the above-mentioned technical effects, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the baffle telescopic structure 1 includes: A transition flange 11 is fixedly connected below the flange 55 of the welded bellows assembly 5. The transition flange 11 is fixedly connected to the flange 55 and the coupling 12, serving as a connection transition.

[0027] A shaft coupling 12 is fixedly connected below the adapter flange 11. One end of the shaft weld 13 is fixedly connected inside the shaft coupling 12, and the lower end is fixedly connected to one end of the connecting rod 16, so that power can be transmitted from the cylinder 3 to the shaft weld 13 through the connecting rod 16, thereby realizing the extension and retraction movement of the baffle 22. The shaft coupling 12 can also play a role in buffering and shock absorption, protecting the normal operation of the equipment.

[0028] One end of the shaft weldment 13 is fixedly connected inside the shaft coupling 12; the shaft weldment 13 passes through the cavity wall 4, the welded bellows 51, the flange 55 and the transition flange 11; the shaft weldment 13 transmits the power of the cylinder 3 to the target baffle structure 2, driving the baffle 22 to move, so that the baffle 22 can reach the designated position; the transition flange 11 is locked under the shaft weldment 13, which plays a role in positioning and fixing the shaft weldment 13, ensuring that the shaft weldment 13 remains stable during the movement.

[0029] Several support rods 14 are fixedly connected to one end of the first mounting flange 54 of the welded bellows assembly 5. The support rods 14 play a structural support role, enhance the overall strength of the baffle telescopic structure 1, and prevent the equipment from deforming during movement.

[0030] A second mounting flange 15 is fixedly connected to the other end of several support rods 14; several support rods 14 are located between the first mounting flange 54 and the second mounting flange 15; the second mounting flange 15, the first mounting flange 54, and the support rods 14 constitute the support structure of the automatic target baffle, ensuring that the components can operate in coordination.

[0031] One end of the connecting rod 16 is fixedly connected below the shaft coupling 12. The connecting rod 16 transmits the power generated by the cylinder 3 to the shaft coupling 12, which in turn drives the target baffle structure 2 to move through the shaft weld 13, so that the baffle 22 stays in a specific position.

[0032] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, the target baffle structure 2 includes: A baffle mounting shaft 21 is fixedly connected above the shaft weld 13 of the baffle telescopic structure 1. The baffle mounting shaft 21 provides a stable support foundation for the baffle 22, ensuring that the baffle 22 can be in the correct position during movement.

[0033] A baffle 22 is fixedly connected above the baffle mounting shaft 21. During the vacuum coating process, the baffle 22 can move to the corresponding position under the drive of components such as the shaft weld 13 and the baffle mounting shaft 21 to block the target material. By adjusting the position of the baffle 22, the coverage area of ​​the coating material can be limited to achieve local coating. By adjusting the relative position of the baffle 22 and the target material and the blocking time, the coating thickness can also be adjusted to meet the coating requirements of different products.

[0034] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2As shown, a cylinder 3 is fixedly connected to the other end of the connecting rod 16. The cylinder 3 is a driving device. By inputting compressed gas into the cylinder 3, the piston reciprocates, driving the connecting rod 16 to move. The connecting rod 16 transmits the power of the cylinder 3 to the shaft coupling 12 and the shaft weld 13, driving the baffle 22 to move, so that the baffle 22 can reach the designated position, reducing manual intervention and improving production efficiency and coating quality.

[0035] To achieve the above-mentioned technical effects, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, when the baffle 22 of the baffle telescopic structure 1 is used, the connecting rod 16 of the baffle telescopic structure 1 is driven to move by the telescopic movement of the cylinder 3. The connecting rod 16 drives the shaft coupling 12 and the transition flange 11 of the baffle telescopic structure 1, the flange 55 and the linear bearing 53 of the welded bellows assembly 5, and the shaft weld 13 of the baffle telescopic structure 1 to move along the direction of the guide rod 52 and the welded bellows 51 of the welded bellows assembly 5. This causes the shaft weld 13 of the baffle telescopic structure 1 to push the target baffle structure 2 to move, so that the baffle 22 stays in a specific position.

[0036] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, several first sealing rings 6 are provided between the shaft weld 13 and the shaft coupling 12; several second sealing rings 7 are provided between the transition flange 11 and the flange 55; the several first sealing rings 6 seal between the shaft weld 13 and the shaft coupling 12, and the several second sealing rings 7 seal between the transition flange 11 and the flange 55, to prevent gas leakage, block impurities from entering, maintain a stable vacuum environment, improve the quality of the coating, and extend the service life of the components.

[0037] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, there are four support rods 14. The four support rods 14 can evenly transmit and distribute various forces generated during the movement of the equipment, enhance the stability of the structure, improve the load-bearing capacity, and also determine the relative position between the second mounting flange 15 and the first mounting flange 54, reducing installation errors.

[0038] Those skilled in the art will understand that the above embodiments are specific examples of implementing the present invention, and in practical applications, various changes can be made to them in form and detail without departing from the spirit and scope of the present invention.

Claims

1. An automatic target baffle for a vacuum coating equipment, characterized in that, include: A welded bellows assembly is provided on an automatic target baffle for a vacuum coating equipment; A baffle telescopic structure is fixedly connected to the welded bellows assembly; A target baffle structure is fixedly connected above the baffle telescopic structure; when the target baffle structure is used, the baffle telescopic structure and the welded bellows assembly are driven by a cylinder to move, thereby pushing the target baffle structure to move.

2. The automatic target baffle for vacuum coating equipment according to claim 1, characterized in that, An automatic target baffle for the vacuum coating equipment is installed on the cavity wall.

3. The automatic target baffle for vacuum coating equipment according to claim 1, characterized in that, The welded bellows assembly includes: The first mounting flange is fixedly connected to the outer side of the cavity wall; A guide rod, wherein several guide rods are fixedly connected to one side of the first mounting flange; A linear bearing, movably connected to the guide rod; A flange, which is fixedly connected between the linear bearings; A welded bellows is fixed below the first mounting flange.

4. The automatic target baffle for vacuum coating equipment according to claim 1, characterized in that, The baffle telescopic structure includes: A transition flange is fixedly connected below the flange of the welded bellows assembly; A shaft coupling is fixedly connected below the adapter flange; A shaft weldment is fixedly connected to one end within the shaft coupling; the shaft weldment passes through the cavity wall, the welded bellows, the flange, and the transition flange; the transition flange holds the lower part of the shaft weldment in place. Support rods, with one end of several support rods fixedly connected to the first mounting flange of the welded bellows assembly; A second mounting flange is fixedly connected to the other end of a plurality of support rods; the plurality of support rods are located between the first mounting flange and the second mounting flange; A connecting rod is fixedly connected to one end of the connecting rod below the coupling.

5. The automatic target baffle for a vacuum coating equipment according to claim 1, characterized in that, The target baffle structure includes: A baffle mounting shaft is fixedly connected above the shaft weld of the baffle telescopic structure; A baffle is fixedly connected above the baffle mounting shaft.

6. The automatic target baffle for a vacuum coating equipment according to claim 4, characterized in that, A cylinder is fixedly connected to the other end of the connecting rod.

7. The automatic target baffle for a vacuum coating equipment according to claim 1, characterized in that, When the baffle of the aforementioned baffle telescopic structure is used, the telescopic movement of the cylinder drives the connecting rod of the baffle telescopic structure to move. The connecting rod drives the shaft coupling and transition flange of the baffle telescopic structure, the flange and linear bearing of the welded bellows assembly, and the shaft weld of the baffle telescopic structure to move along the guide rod and the direction of the welded bellows assembly. This causes the shaft weld of the baffle telescopic structure to push the target baffle structure to move, so that the baffle stops at a specific position.

8. The automatic target baffle for a vacuum coating equipment according to claim 4, characterized in that, A plurality of first sealing rings are provided between the shaft weld and the shaft coupling; a plurality of second sealing rings are provided between the adapter flange and the flange.

9. The automatic target baffle for a vacuum coating equipment according to claim 4, characterized in that, The number of support rods is four.

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