A kind of cutter PVD coating target material splash-proof shielding device

Abstract

The utility model discloses a tool PVD coating target material splashproof shielding device, including target material frame, the inboard symmetry of target material frame is provided with fixed baffle, and one side of two fixed baffle all is provided with movable baffle, still include: the below of target material frame is provided with servo motor, and the output of servo motor is fixedly installed with rotating stand, and the top one side of rotating stand is fixedly installed with push piece, and the top of rotating stand is provided with movable plate, wherein, the top symmetry of movable plate is penetrated and is opened sliding slot, and the top of movable plate is penetrated and is opened movable slot in the top of rotating stand, and push piece is slidably connected with movable slot, and the both sides below two movable baffle are provided with positioning assembly, make convenient and fast to the movable baffle and fixed baffle of disassembly, it is convenient to clean deposit regularly, it is convenient for staff to operate, and it is convenient to install subsequently, has improved convenience and practicality.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, specifically to a sputter protection device for PVD coating target material of cutting tools. Background Technology

[0002] The target is the material that is bombarded in this process to release the coating material, while the target baffle is used to control the sputtering direction of the coating material and shield the target to prevent it from sputtering directly into unwanted areas, thereby protecting other components in the coating chamber and also protecting the target from being coated by other targets.

[0003] Publication No. CN223074243U discloses a target baffle device for a PVD vacuum coating machine. This patent, by setting a horizontal sliding rod, allows two movable baffles to move synchronously via a single swing cylinder, saving space inside and outside the chamber and reducing manufacturing costs. By setting a sliding groove base, a baffle limiting groove is provided between the baffle groove of the horizontal sliding rod and the baffle slider of the movable baffle, allowing the movable baffle to move along the baffle limiting groove and fixing its movement trajectory. Simultaneously, the sliding rod limiting groove of the sliding groove base also ensures that the horizontal sliding rod moves horizontally back and forth within the sliding rod limiting groove without deviation, thus guaranteeing the stability of the two movable baffles controlled by a single swing cylinder. This makes the target baffle opening and closing convenient and easy to control. However, this patent still has the following problems in actual use:

[0004] By setting a horizontal sliding rod, two movable baffles can be moved synchronously by a swing cylinder, saving space inside and outside the chamber and reducing manufacturing costs. However, in actual use, the target material is shielded by the fixed baffle and the movable baffle. Deposits accumulate on the baffles during sputtering, requiring them to be lifted and cleaned to prevent excessive deposits. Contaminants may fall back onto the target or substrate, affecting the purity and quality of the coating. When cleaning the movable baffle and the fixed baffle, it is not convenient to disassemble and clean them because the inner side of the baffle is used for shielding, making cleaning quite difficult.

[0005] A sputter protection device for PVD coated targets for cutting tools is proposed to address the problems mentioned above. Utility Model Content

[0006] The purpose of this invention is to provide a sputter protection device for PVD coating targets of cutting tools, in order to solve the problems mentioned in the background art. Currently, by setting a horizontal sliding rod, two movable baffles can be moved synchronously by a swing cylinder, saving space inside and outside the chamber and reducing manufacturing costs. However, in actual use, when the target is shielded by the fixed baffle and the movable baffle, deposits accumulate on the baffles during the sputtering process. These deposits need to be lifted and cleaned to prevent excessive deposits. Contaminants may fall back onto the target or substrate, affecting the purity and quality of the coating. When cleaning the movable baffle and the fixed baffle, it is not convenient to disassemble and clean them because the inner side of the baffle is used for shielding, making cleaning difficult.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a PVD coating target anti-splash shielding device for cutting tools, comprising a target holder;

[0008] The inner side of the target frame is symmetrically provided with fixed baffles, and each of the two fixed baffles is provided with a movable baffle on one side.

[0009] Also includes:

[0010] A servo motor is provided below the target frame, and a rotating frame is fixedly installed at the output end of the servo motor. A push block is fixedly installed on one side of the top of the rotating frame, and a movable plate is provided above the rotating frame. T-shaped blocks are symmetrically installed on the top of the movable plate, and T-shaped grooves are symmetrically opened on the top of the target frame. The T-shaped blocks and T-shaped grooves are slidably connected.

[0011] The top of the movable plate is symmetrically provided with sliding grooves, and the top of the movable plate is provided with a sliding groove above the rotating frame. The push block is slidably connected to the sliding groove, and positioning components are provided on both sides below the two movable baffles.

[0012] The positioning component includes two sets of arc-shaped grooves symmetrically opened through the top and bottom of the target frame, and arc-shaped blocks are slidably connected inside the arc-shaped grooves. Support blocks are fixedly installed at the top and bottom of the two sets of arc-shaped blocks, and the support blocks are slidably connected to the target frame.

[0013] Preferably, the bottom of the two lowest support blocks are fixedly installed with column blocks, and the column blocks are slidably connected to the sliding groove.

[0014] Preferably, a positioning seat is fixedly installed on the side of the support block closest to the movable baffle away from the arc-shaped block, and a connecting column is inserted into the positioning seat, and the connecting column is fixedly connected to the movable baffle.

[0015] Preferably, a positioning rod is slidably connected to one side of the positioning seat, and a positioning hole is provided below one side of the connecting column, and the positioning rod is inserted into the positioning hole.

[0016] Preferably, a telescopic spring is sleeved on the outer side of the positioning rod, and one end of the telescopic spring is fixedly connected to the positioning seat, and a fixing block is fixedly installed on the other end of the telescopic spring, and the fixing block is fixedly connected to the positioning rod.

[0017] Preferably, a sliding block is fixedly installed on the side of the fixed block near the target frame, and a guide frame is fixedly installed on the inner side of the target frame on one side of both sets of sliding blocks, and a flared opening is provided on one side of the guide frame.

[0018] Preferably, two sets of limiting blocks are symmetrically installed inside the target frame on the inner side of the two fixed baffles, and the two sets of limiting blocks are arranged symmetrically in the upper and lower parts, with four limiting blocks in total. Each of the two fixed baffles has a limiting hole on one side of the four limiting blocks, and the limiting blocks are inserted into the limiting holes.

[0019] Compared with the prior art, the beneficial effects of this utility model are: this anti-splash shielding device for PVD coating targets for cutting tools allows for convenient and quick disassembly of the movable and fixed baffles, facilitating regular cleaning of deposits, simplifying operation for workers, and enabling subsequent installation, thus improving convenience and practicality. The specific details are as follows:

[0020] 1. When shading is required, the servo motor is fixed inside the vacuum coating equipment. Slow counter-clockwise rotation of the servo motor's output drives the rotating frame to rotate. The rotation of the rotating frame, through the sliding connection between the push block and the movable groove, moves the movable plate. After the movable plate moves, the two lower pillars slide in the sliding groove, pushing the arc-shaped block to slide in the arc-shaped groove, causing the two movable baffles to close. Shading is achieved through the movable baffles and the fixed baffles. When disassembling and cleaning the movable baffles, they are reset. The servo motor then drives the rotating frame to rotate clockwise, causing the arc-shaped block to move backward in the arc-shaped groove. At this point, the sliding block rotates into the guide frame. The rotating frame continues to rotate slowly, and the arc-shaped block slides in the arc-shaped groove and then in the guide frame. At this time, the guide frame... With the orientation opposite to the tangent of the arc block, the movement of the sliding block can pull the fixed block to move, which in turn can cause the positioning rod to move away from the positioning hole, causing the connecting column to lose its positioning. Then, the movable baffle can be removed directly for cleaning. When installing the movable baffle, the connecting column is pushed into the positioning seat through the opening on the positioning seat, causing the rotating frame to reset and rotate. This allows the positioning rod to be inserted into the positioning hole to position the movable baffle. At this time, the telescopic spring is always in a stretched state. With the help of the reaction force of the telescopic spring when stretched, the positioning rod is not easy to disengage from the positioning hole, making it easy and quick to disassemble the movable baffle and the fixed baffle. This facilitates regular cleaning of sediment, makes it easy for staff to operate, and makes subsequent installation easier, improving convenience and practicality.

[0021] 2. The movable baffle and the fixed baffle are fitted together. When disassembling the fixed baffle, the movable baffle is removed first. At this time, the outside of the fixed baffle will not be blocked by the movable baffle. The fixed baffle can be removed from the left and right sides, so that the limiting block is disengaged from the limiting hole. When the movable baffle moves to its limit distance, it will also block the fixed baffle. When installing the fixed baffle, the fixed baffle is placed on the target holder so that the limiting block is inserted into the limiting hole. The subsequent installation of the movable baffle can position the fixed baffle, which makes it easier for the staff to disassemble the fixed baffle and clean it, thus improving its practicality. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the overall structure of this utility model from another perspective;

[0024] Figure 3 This utility model Figure 1 Enlarged structural diagram of region A in the middle;

[0025] Figure 4 This is an exploded view of the positioning component of this utility model;

[0026] Figure 5 This is a schematic diagram of the cross-sectional structure of the target frame of this utility model;

[0027] Figure 6 This utility model Figure 5 A magnified structural diagram of region B in the middle.

[0028] In the diagram: 1. Target frame; 101. Fixed baffle; 102. Movable baffle; 103. Servo motor; 104. Rotating frame; 105. Movable plate; 1051. T-block; 1052. T-slot; 106. Movable slot; 107. Push block; 108. Sliding slot; 109. Limiting block; 110. Limiting hole; 2. Positioning assembly; 201. Arc-shaped slot; 202. Arc-shaped block; 203. Support block; 204. Column block; 205. Positioning seat; 206. Connecting column; 207. Positioning rod; 208. Positioning hole; 209. Telescopic spring; 210. Fixed block; 211. Sliding block; 212. Guide frame. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Please see Figure 1-6 This utility model provides a technical solution: a splash-proof shielding device for PVD coating targets of cutting tools, including a target frame 1, with fixed baffles 101 symmetrically arranged on the inner side of the target frame 1, and movable baffles 102 arranged on one side of each of the two fixed baffles 101. It also includes: a servo motor 103 arranged below the target frame 1, with a rotating frame 104 fixedly mounted on the output end of the servo motor 103, and a push block 107 fixedly mounted on one side of the top of the rotating frame 104. A movable plate 105 is arranged above the rotating frame 104, wherein the top of the movable plate 105 is symmetrically provided with sliding grooves 108, and the top of the movable plate 105 above the rotating frame 104 is provided with a movable... The movable groove 106 is slidably connected to the push block 107. Positioning components 2 are provided on both sides below the two movable baffles 102. The positioning components 2 include two sets of arc-shaped grooves 201 symmetrically opened through the top and bottom of the target frame 1. Arc-shaped blocks 202 are slidably connected inside the arc-shaped grooves 201. Support blocks 203 are fixedly installed on the top and bottom of the two sets of arc-shaped blocks 202. The support blocks 203 are slidably connected to the target frame 1, which makes it easy and quick to disassemble the movable baffles 102 and the fixed baffles 101, which facilitates regular cleaning of sediments, makes it easy for staff to operate, and makes subsequent installation easier, thus improving convenience and practicality.

[0031] The bottom of the two lowest support blocks 203 are each fixedly equipped with a column block 204, and the column block 204 is slidably connected to the sliding groove 108, so that the movement of the movable plate 105 can drive the movement of the movable baffle 102. The support block 203 near the movable baffle 102 has a positioning seat 205 fixedly installed on the side away from the arc block 202, and a connecting column 206 is inserted into the positioning seat 205, and the connecting column 206 is fixedly connected to the movable baffle 102, which facilitates the installation of the movable baffle 102. A positioning rod 207 is slidably connected to the inside of the positioning seat 205, and a positioning hole 208 is opened on the lower side of the connecting column 206, and the positioning rod 207 is inserted into the positioning hole 208 to position the movable baffle 102. A telescopic spring 209 is sleeved on the outer side of the positioning rod 207, and one end of the telescopic spring 209 is connected to the positioning seat 205. 05. A fixed connection is made, and a fixed block 210 is fixedly installed on the other end of the telescopic spring 209. The fixed block 210 is fixedly connected to the positioning rod 207, which facilitates the positioning rod 207 to be reset after movement. A sliding block 211 is fixedly installed on the side of the fixed block 210 near the target frame 1. A guide frame 212 is fixedly installed on one side of each of the two sets of sliding blocks 211 on the inner side of the target frame 1. A flared opening is provided on one side of the guide frame 212 to facilitate the movement of the positioning rod 207. Two sets of limiting blocks 109 are symmetrically installed on the inner side of the two fixed baffles 101 inside the target frame 1. The two sets of limiting blocks 109 are arranged symmetrically in four positions. Limiting holes 110 are opened on one side of each of the two fixed baffles 101 on the four limiting blocks 109. The limiting blocks 109 are inserted into the limiting holes 110 to facilitate the installation of the fixed baffles 101.

[0032] Working principle: Before using this type of PVD coating target anti-splash shielding device, it is necessary to check the overall condition of the device to ensure it can work normally. Figure 1 - Figure 6As shown, when shading is required, the servo motor 103 is fixed inside the vacuum coating equipment. The slow counter-clockwise rotation of the servo motor 103's output can drive the rotating frame 104 to rotate. The rotation of the rotating frame 104, through the sliding connection between the push block 107 and the movable groove 106, pushes the movable plate 105 to move. After the movable plate 105 moves, the two lower pillars 204 slide in the sliding groove 108, which can push the arc-shaped block 202 to slide in the arc-shaped groove 201, causing the two movable baffles 102 to close. The movable baffle 102 and the fixed baffle 101 can provide obstruction. When the movable baffle 102 is disassembled and cleaned, it is reset, and the servo motor 103 drives the rotating frame 104 to rotate clockwise, causing the arc-shaped block 202 to move backward in the arc-shaped groove 201. At this time, the sliding block 211 can rotate into the guide frame 212. Then, the rotating frame 104 continues to rotate slowly, and the arc-shaped block 202 slides in the arc-shaped groove 201, while the sliding block 211 slides in the guide frame 212. When the guide frame 212 is in the opposite direction to the tangent of the arc block 202, the sliding block 211 moves and pulls the fixed block 210 to move, which in turn causes the positioning rod 207 to move away from the positioning hole 208, causing the connecting column 206 to lose its positioning. Then the movable baffle 102 can be removed directly and cleaned. When installing the movable baffle 102, the connecting column 206 is pushed into the positioning seat 205 through the opening on the positioning seat 205, causing the rotating frame 104 to reset and rotate. This allows the positioning rod 207 to be inserted into the positioning hole 208 to position the movable baffle 102. At this time, the telescopic spring 209 is always in a stretched state. With the help of the reaction force of the telescopic spring 209 when stretched, the positioning rod 207 is not easy to disengage from the positioning hole 208, which makes it easy and quick to disassemble the movable baffle 102 and the fixed baffle 101, which facilitates regular cleaning of sediment, makes it easy for staff to operate, and makes subsequent installation easier, improving convenience and practicality.

[0033] The movable baffle 102 is attached to the fixed baffle 101. When disassembling the fixed baffle 101, the movable baffle 102 is removed first. At this time, the outer side of the fixed baffle 101 will not be blocked by the movable baffle 102. The fixed baffle 101 can be removed from the left and right sides, so that the limiting block 109 is disengaged from the limiting hole 110. When the movable baffle 102 moves to its limit distance, it will also block the fixed baffle 101. When installing the fixed baffle 101, the fixed baffle 101 is placed on the target holder 1, so that the limiting block 109 is inserted into the limiting hole 110. The subsequent installation of the movable baffle 102 can position the fixed baffle 101, which makes it easier for the staff to disassemble the fixed baffle 101, facilitates cleaning, and improves practicality.

[0034] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A sputter protection device for PVD coated cutting tool target, comprising a target holder (1); The inner side of the target frame (1) is symmetrically provided with fixed baffles (101), and each of the two fixed baffles (101) is provided with a movable baffle (102) on one side. Its features are, Also includes: A servo motor (103) is provided below the target frame (1), and a rotating frame (104) is fixedly installed at the output end of the servo motor (103). A push block (107) is fixedly installed on one side of the top of the rotating frame (104), and a movable plate (105) is provided above the rotating frame (104). T-shaped blocks (1051) are symmetrically installed on the top of the movable plate (105), and T-shaped grooves (1052) are symmetrically opened on the top of the target frame (1). The T-shaped blocks (1051) and the T-shaped grooves (1052) are slidably connected. The top of the movable plate (105) is symmetrically provided with sliding grooves (108), and the top of the movable plate (105) is provided with a movable groove (106) above the rotating frame (104). The push block (107) is slidably connected to the movable groove (106), and positioning components (2) are provided on both sides below the two movable baffles (102). The positioning component (2) includes two sets of arc-shaped grooves (201) symmetrically opened through the top and bottom of the target frame (1), and arc-shaped blocks (202) are slidably connected inside the arc-shaped grooves (201). Support blocks (203) are fixedly installed at the top and bottom of the two sets of arc-shaped blocks (202), and the support blocks (203) are slidably connected to the target frame (1).

2. The anti-splashing shielding device for PVD-coated target material of cutting tools according to claim 1, characterized in that: The bottom of the two lowest support blocks (203) are each fixedly installed with a column block (204), and the column block (204) is slidably connected to the sliding groove (108).

3. The anti-splashing shielding device for PVD-coated target material of cutting tools according to claim 1, characterized in that: A positioning seat (205) is fixedly installed on the side of the support block (203) near the movable baffle (102) away from the arc block (202), and a connecting column (206) is inserted into the inside of the positioning seat (205), and the connecting column (206) is fixedly connected to the movable baffle (102).

4. The anti-splashing shielding device for PVD-coated target material of cutting tools according to claim 3, characterized in that: A positioning rod (207) is slidably connected to one side of the positioning seat (205), and a positioning hole (208) is provided below one side of the connecting column (206), and the positioning rod (207) is inserted into the positioning hole (208).

5. The anti-splashing shielding device for PVD-coated target material of cutting tools according to claim 4, characterized in that: A telescopic spring (209) is sleeved on the outer side of the positioning rod (207), and one end of the telescopic spring (209) is fixedly connected to the positioning seat (205), and a fixing block (210) is fixedly installed on the other end of the telescopic spring (209), and the fixing block (210) is fixedly connected to the positioning rod (207).

6. The anti-splashing shielding device for PVD-coated target material of cutting tools according to claim 5, characterized in that: The fixed block (210) is fixedly installed with a sliding block (211) on the side close to the target frame (1), and a guide frame (212) is fixedly installed on the inner side of the target frame (1) on one side of the two sets of sliding blocks (211), and a horn-shaped opening is provided on one side of the guide frame (212).

7. The anti-splashing shielding device for PVD-coated target material of cutting tools according to claim 1, characterized in that: The target frame (1) is symmetrically equipped with two sets of limiting blocks (109) inside the two fixed baffles (101), and the two sets of limiting blocks (109) are arranged symmetrically in the upper and lower parts as four. Each of the two fixed baffles (101) has a limiting hole (110) on one side of the four limiting blocks (109), and the limiting block (109) is inserted into the limiting hole (110).

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