Magnetron sputter cathode electrode introduction insulation device

Abstract

The utility model discloses a kind of magnetron sputtering cathode electrode introduction insulation devices, including target holder main body, target holder main body top surface is fixed with cooling water pipe and is laid with insulating layer, and aluminium cover plate is fixed in the upper portion of insulating layer;Cooling water pipe is connected with quick plug connector by passing through insulating layer and aluminium cover plate;Cooling water pipe cover is equipped with insulating cover, and insulating cover is fixed on the upper surface of aluminium cover plate;The top of insulating cover forms the through-hole for quick plug connector insertion;Insulating seat is sleeved in the lower portion of cooling water pipe.The utility model improves cathode insulation reliability, while reducing current introduction obstruction, prevent inter-element discharge breakdown, better insulating stack, enhanced cathode stability, ensure the stable operation of whole machine equipment;Optimize installation mode, edge realizes quick disassembly and maintenance, improve production efficiency;Strengthen the sealing property of cathode, the sealing property of overall equipment improves in turn to further improve coating product quality.

Description

Technical Field

[0001] This utility model relates to the field of machinery, and more specifically to a magnetron sputtering cathode electrode introduction insulation device. Background Technology

[0002] Magnetron sputtering is a widely used physical vapor deposition (PVD) technology in industry. In the field of magnetron sputtering coating technology, the cathode electrode is a core component, and its insulation performance during the deposition process directly affects the coating quality and equipment safety. Currently, most insulation methods on the market are traditional structures, such as... Figure 1 As shown, it includes an insulating layer 1, an aluminum cover plate 2, an electrode conduit 3, and an aluminum shield 4, and it has the following problems: 1. Insufficient performance of insulation materials: Traditional insulation devices mostly use a single ceramic material. Although ceramic materials have excellent insulation performance, they have poor thermal shock resistance. During magnetron sputtering (the working temperature is usually 150-300℃), they are prone to cracking due to sudden temperature changes, which leads to insulation failure.

[0003] 2. Insulation reliability issues: The cathode typically requires a negative high voltage of hundreds to thousands of volts. Traditional electrode introduction devices have simple insulation designs, but under long-term high-temperature and plasma bombardment environments, the insulation material is prone to aging, creepage, and even breakdown, leading to arc discharge, disrupting the coating process, and damaging the equipment. 3. Risks associated with insulation stacking: During use, the cathode needs to be circulated with cooling water, which inevitably leads to frost formation on the component surface. In traditional middle-layer insulation methods, the cover plate needs to be connected to the magnet fixing plate for fixation. After the dew accumulates, it will seep into the connection gap, causing discharge and generating an electric arc that damages the device and equipment.

[0004] The aforementioned problems have led to frequent malfunctions in existing magnetron sputtering cathode electrode introduction insulation devices during use, which not only affect the quality stability of coated products but also increase the production costs and equipment maintenance pressure of enterprises. Therefore, there is an urgent need for a cathode electrode introduction device that integrates high-voltage introduction, insulation sealing, and efficient cooling into one compact, safe, reliable, and easy-to-maintain device. Utility Model Content

[0005] To address the aforementioned technical problems, this utility model discloses an insulation introduction device for magnetron sputtering cathode electrodes. This utility model improves insulation reliability, reduces current conduction resistance, prevents discharge breakdown between components, achieves better insulation stacking, enhances cathode stability, and ensures stable operation of the entire equipment. It also optimizes the installation method, enabling quick disassembly and maintenance at the edges, thus improving production efficiency. Furthermore, it strengthens cathode sealing, improving the overall equipment sealing and consequently enhancing the quality of the coated products.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: An insulating device for introducing a magnetron sputtering cathode electrode includes a target body. Cooling water pipes are fixedly connected to both sides of the top surface of the target body and are covered with an insulating layer. An aluminum cover plate is fixed above the insulating layer. The cooling water pipes pass through the insulating layer and the aluminum cover plate and are connected to quick-connect connectors. An insulating cover is provided over the cooling water pipes and is fixed to the upper surface of the aluminum cover plate. A through hole for inserting the quick-connect connector is formed at the top of the insulating cover. An insulating seat is fitted in the lower part of the cooling water pipe. The insulating seat forms a sleeve portion between the aluminum cover plate and the cooling water pipe. An insulating seat body is connected above the sleeve portion. An O-ring is fixed between the bottom of the insulating seat body and the aluminum cover plate. A skeleton oil seal is fixed between the insulating seat body and the cooling water pipe. An insertion hole for introducing the cathode electrode is formed on the side wall of the insulating cover.

[0007] In a further improvement, the skeleton oil seal is topped with an M flat washer, an M flat washer and an M nut, which are fitted onto the cooling water pipe. The M nut is threadedly connected to the cooling water pipe.

[0008] In a further improvement, the insulating layer is a Teflon pad.

[0009] As a further improvement, the thickness of the Teflon gasket is 4mm.

[0010] A further improvement is that the skeleton oil seal is a TC skeleton oil seal.

[0011] A further improvement is that the quick-connect connector is quick-connect connector PL12-03.

[0012] In a further improvement, the insulating cover comprises two vertically symmetrical, interlocking half-covers.

[0013] The beneficial effects that this utility model can achieve are: 1. Higher insulation reliability: The insulating base and pad completely isolate the aluminum cover plate from the target body. The pad is made of polytetrafluoroethylene (PTFE) plate, which prevents the aluminum cover plate from conducting with the target body and avoids discharge caused by the connection between the two.

[0014] 2. Excellent sealing performance: The insulating base adopts a double-layer skeleton oil seal combined with O-ring sealing, which can both insulate and enhance its sealing performance, greatly ensuring the vacuum degree of the equipment.

[0015] 3. Improve safety: An insulating cover made of high-molecular insulating material (polytetrafluoroethylene) is used on the outside of the target holder to wrap the conductive parts and prevent workers from accidentally touching the cathode during operation.

[0016] 4. Better economic efficiency: Replacing PEEK and ceramic materials with PTFE offers advantages in processing technology, material costs, and time costs.

[0017] 5. Convenient maintenance and repair: The electrode guide structure, consisting of M24 flat washers, M22 flat washers, and M22 nuts, is stacked on top and electrically connected to the cooling water pipe. Simply open the insulating cover and inspect the top to determine the approximate problem location, which also increases the speed of replacing parts, reduces downtime, and improves production efficiency. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the existing technology.

[0019] Figure 2 This is a schematic diagram of the structure of this utility model.

[0020] Among them, the insulating layer 1, aluminum cover plate 2, electrode conduit 3, aluminum cover 4, target base body 5, cooling water pipe 6, quick connector 7, insulating cover 8, through hole 801, half cover 802, insulating base 9, sleeve part 901, insulating base body 902, skeleton oil seal 10, M24 flat washer 11, M22 flat washer 12, and M22 nut 13 are all included. Detailed Implementation

[0021] like Figure 2 The magnetron sputtering cathode electrode introduction insulation device shown includes a target body 5, a cooling water pipe 6 is fixedly connected to the top surface of the target body 5 and an insulation layer 1 is laid on it, the insulation layer 1 is a 4mm thick Teflon pad.

[0022] An aluminum cover plate 2 is fixed above the insulation layer 1; a cooling water pipe 6 passes through the insulation layer 1 and the aluminum cover plate 2 and is connected to a quick-connect fitting 7; the cooling water pipe 6 is covered with a polytetrafluoroethylene (PTFE) insulating cover 8, which is fixed to the upper surface of the aluminum cover plate 2; a through hole 801 is formed on the top of the insulating cover 8 for the quick-connect fitting 7 to be inserted; the quick-connect fitting 7 is a quick-connect fitting PL12-03. Through the PL12-03 quick-connect fitting, a water pipe with an outer diameter of 12mm is used to connect to a chiller, and cooling water is introduced to cool the device. The device has two ends, one for water inlet and the other for water outlet.

[0023] An insulating seat 9 is fitted in the lower part of the cooling water pipe 6. The insulating seat 9 forms a sleeve portion 901 between the aluminum cover plate 2 and the cooling water pipe 6. An insulating seat body 902 is connected above the sleeve portion 901. An O-ring 903 is fixed between the bottom of the insulating seat body 902 and the aluminum cover plate 2. A skeleton oil seal 10 is fixed between the insulating seat body 902 and the cooling water pipe 6. The skeleton oil seal 10 is a TC skeleton oil seal.

[0024] Above the skeleton oil seal 10 are, in order, an M24 flat washer 11, an M22 flat washer 12, and an M22 nut 13, all fitted onto the cooling water pipe 6. The M24 flat washer is placed inside the insulating base, pressing the skeleton oil seal to provide a better seal between the oil seal, the insulating cover, and the cooling pipe. The M22 flat washer prevents the nut from slipping due to vibration and from damaging other parts due to tightening, while also increasing the electrode contact area and reducing electrical resistance. The M22 nut is locked to the external thread of the cooling water pipe, connecting the device in series and locking it in place. The cooling water pipe acts like a bolt, ensuring the stability of the entire device.

[0025] This utility model adopts a ring-shaped layered structure, in which the cooling water pipe is welded to the target body and serves as an important fixing component of the series assembly. Other parts are assembled and spliced ​​around it. A 4mm Teflon plate is used as a spacer between the aluminum cover plate and the target body. The aluminum cover plate is installed on the vacuum chamber cover plate in the equipment, which can separate the upper and lower insulation. The target body is under negative voltage, while the aluminum cover plate is under no voltage.

[0026] The main function of the insulating base is to seal the inside of the cathode from the atmospheric environment and to insulate it with an insulating aluminum cover plate and an external insulating cover in a ring-like manner, thus completely isolating the electrode.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A magnetic sputter cathode electrode introduction insulation device, characterized by The system includes a target base body (5), on which cooling water pipes (6) are fixedly connected to both sides of the top surface and covered with an insulating layer (1). An aluminum cover plate (2) is fixed above the insulating layer (1). The cooling water pipes (6) pass through the insulating layer (1) and the aluminum cover plate (2) and are connected to a quick-connect fitting (7). An insulating cover (8) is provided over the cooling water pipes (6) and is fixed to the upper surface of the aluminum cover plate (2). A through hole (801) is formed at the top of the insulating cover (8) for the quick-connect fitting (7) to be inserted. An insulating seat (9) is fitted in the lower part of the water pipe (6). The insulating seat (9) forms a sleeve part (901) between the aluminum cover plate (2) and the cooling water pipe (6). An insulating seat body (902) is connected above the sleeve part (901). An O-ring (903) is fixed between the bottom of the insulating seat body (902) and the aluminum cover plate (2). A skeleton oil seal (10) is fixed between the insulating seat body (902) and the cooling water pipe (6). An insertion hole for the cathode electrode is formed on the side wall of the insulating cover (8).

2. The magnetron sputtering cathode electrode introduction insulation device as claimed in claim 1, characterized in that, Above the skeleton oil seal (10) are, in order, an M24 flat washer (11), an M22 flat washer (12) and an M22 nut (13) fitted on the cooling water pipe (6), with the M22 nut (13) threadedly connected to the cooling water pipe (6).

3. The magnetron sputtering cathode electrode introduction insulation device as claimed in claim 1, characterized in that, The insulating layer (1) is a Teflon pad.

4. The magnetron sputtering cathode electrode introduction insulation device as described in claim 3, characterized in that, The thickness of the Teflon gasket is 4mm.

5. The magnetron sputtering cathode electrode introduction insulation device as claimed in claim 1, characterized in that, The skeleton oil seal (10) is a TC skeleton oil seal.

6. The magnetron sputtering cathode electrode introduction insulation device as claimed in claim 1, characterized in that, The quick-connect connector (7) is a quick-connect connector PL12-03.

7. The magnetron sputtering cathode electrode introduction insulation device as claimed in claim 1, characterized in that, The insulating cover (8) comprises two vertically symmetrical, interlocking half-covers (802).

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