Product fixing support for evaporation coater

Abstract

The utility model discloses a kind of product fixing support for evaporation coating machine, it is related to coating machine technical field.The utility model includes machine door, further include: fixed part, the fixed part is provided with several, several The fixed part is arranged in circumferential array on machine door;Rotary part, the rotary part is installed on machine door;The fixed part includes support assembly, and the support assembly is set on machine door;Fixed assembly, the fixed assembly is provided with several, and several The fixed assembly is all arranged on machine door;The support assembly includes the cylindrical support rod being set on machine door.The utility model sets up fixed part, solved the existing coating machine when using, it is inconvenient to fix product, product can be displaced, inclined even fall off due to equipment slight vibration, to cause the physical damage of product collision support, further affect the stability of coating process to carry out The problem.

Description

Technical Field

[0001] This utility model belongs to the field of coating machine technology, and in particular relates to a product fixing bracket for an evaporation coating machine. Background Technology

[0002] Evaporation coating is a core process in the manufacturing of semiconductors, optical devices and functional coatings. The uniformity of the film formation directly determines the electrical and optical performance of the product. The substrate fixing bracket in the coating machine is a key component that supports the wafer / substrate. Its structural design affects the incident angle of vapor molecules, film thickness distribution and defect rate.

[0003] However, existing coating machines are not convenient for fixing products during use. Products may shift, tilt, or even fall off due to slight vibrations of the equipment, resulting in physical damage caused by the product colliding with the support, which in turn affects the stability of the coating process. Utility Model Content

[0004] The purpose of this utility model is to provide a product fixing bracket for an evaporation coating machine. By setting a fixing part, the problem of existing coating machines being inconvenient to fix products during use, causing products to shift, tilt, or even fall off due to slight vibrations of the equipment, resulting in physical damage caused by the product colliding with the bracket, and thus affecting the stability of the coating process.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution: This utility model relates to a product fixing bracket for an evaporation coating machine, comprising a machine door and: a fixing part, wherein a plurality of fixing parts are arranged in a circumferential array on the machine door; a rotating part, wherein the rotating part is mounted on the machine door; the fixing part includes a support assembly, wherein the support assembly is mounted on the machine door; the fixing assembly includes a plurality of fixing components, wherein each fixing component is mounted on the machine door; the support assembly includes a cylindrical support rod mounted on the machine door, wherein a plurality of equilateral triangular blocks are fixedly connected to the outer wall of the cylindrical support rod, wherein a plurality of cylindrical rods are fixedly connected to the outer wall of the plurality of equilateral triangular blocks, and wherein each of the plurality of cylindrical rods is fixedly connected to the outer wall of the plurality of cylindrical rods; there are six fixing parts, each fixing part comprising six equilateral triangular blocks, three cylindrical rods, and three equilateral hexagonal blocks; the support assembly, with the cylindrical support rod as the center, together with the equilateral triangular blocks, cylindrical rods, and equilateral hexagonal blocks, forms a multi-dimensional support frame, providing a stable mounting foundation for the fixing components, while ensuring support strength and structural balance through a specific configuration of the number of components.

[0006] Furthermore, the fixing assembly includes several spring telescopic rods fixedly connected to the outer wall of the equilateral hexagonal block. A product is disposed on the equilateral hexagonal block, and six abutment members are disposed on the several spring telescopic rods. Each of the six side walls of the equilateral hexagonal block is provided with three spring telescopic rods, and each spring telescopic rod on each side is provided with an abutment member. The abutment member includes an arc-shaped block fixedly connected to the side of the corresponding three spring telescopic rods away from the equilateral hexagonal block. The outer wall of the arc-shaped block on the side away from the equilateral hexagonal block abuts against the inner wall of the product. The fixing assembly utilizes the spring telescopic rods on the side walls of the equilateral hexagonal block and the arc-shaped block, and takes advantage of the elastic telescopic characteristics of the spring telescopic rods to achieve flexible adaptation and tight abutment fixing of products of different specifications to be coated, and avoids damage to the product during the fixing process.

[0007] Furthermore, the rotating part includes a power assembly disposed on the machine door; and a connecting assembly mounted on the machine door. The power assembly includes a motor fixedly connected to the top of the machine door, the output shaft of the motor being fixedly connected to a rotating shaft via a coupling, and a sleeve being fixedly connected to the outer wall of the rotating shaft. The bottom of the rotating shaft rotatably passes through the machine door. The power assembly uses the motor as a power source, drives the rotating shaft to rotate via the coupling, and transmits the power to the connecting assembly through the sleeve on the outer wall of the rotating shaft, providing a continuous and stable power output for the rotating part to drive the fixed part to rotate.

[0008] Furthermore, the connecting assembly includes connecting rods fixedly connected to the outer wall of the sleeve. Two connecting rings are fixedly connected to the side of several connecting rods away from the sleeve. A support ring is fixedly connected to the top of the upper connecting ring. A connector is provided between the two connecting rings. The support ring rotatably extends into the machine door. A cylindrical support rod is fixedly connected to the lower connecting ring. The connector includes a cylindrical connecting rod fixedly connected between the two connecting rings. Several cylindrical connecting rods are arranged in a circumferential array around the sleeve. The connecting assembly connects the two connecting rings through the connecting rods and enhances the structural stability with the cylindrical connecting rods. At the same time, the support ring is used to improve the rotational support. Ultimately, the power of the power assembly is transmitted to the fixed part, driving the fixed part and the product to perform circumferential motion around the rotating axis.

[0009] This utility model has the following beneficial effects: 1. By setting up a fixing part, during fixing, the support component is centered on the cylindrical support rod, and together with equilateral triangular blocks, cylindrical rods and equilateral hexagonal blocks, a multi-dimensional support frame is formed, which realizes the stable mounting of the fixing component; the fixing component uses the spring telescopic rods and arc blocks on the six side walls of the equilateral hexagonal blocks. Through the elastic extension and contraction characteristics of the spring telescopic rods, the arc blocks can be tightly pressed against the inner wall of the product, which not only realizes the flexible adaptation and fixing of products of different specifications, but also prevents the product from shifting, tilting or even falling off due to slight vibration of the equipment, avoids physical damage caused by the product colliding with the bracket, and ensures the stability of the coating process; 2. By incorporating a rotating section, during coating, the power assembly uses a motor as the power source, driving the rotating shaft to rotate via a coupling. The power is then transmitted to the connecting assembly through a sleeve on the outer wall of the rotating shaft, providing a continuous and stable power output for the rotation. The design of the rotating shaft's bottom rotating through the machine door ensures the coaxiality and stability of the power transmission. The connecting assembly connects two connecting rings via a connecting rod on the outer wall of the sleeve, and uses a cylindrical connecting rod to enhance the structural stability of the two connecting rings. The support ring at the top of the upper connecting ring rotates and extends into the machine door, further improving the structural support during rotation. The fixed connection between the lower connecting ring and the cylindrical support rod drives six fixed parts to rotate around the rotating shaft, ensuring that the product to be coated makes uniform contact with the evaporation source during the coating process. This effectively avoids uneven coating thickness caused by the product being stationary, significantly improving the uniformity of the coating layer and the coating quality of the product.

[0010] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0011] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a cross-sectional structural diagram of the present invention; Figure 2 This is a schematic diagram of the rear structure of this utility model; Figure 3 This is a partial structural diagram of the fixing part of this utility model; Figure 4 This is a partial cross-sectional view of the fixing part of this utility model; Figure 5 This is a partial cross-sectional view of the rotating part of this utility model.

[0013] The attached diagram lists the components represented by each number as follows: 111. Machine door; 2. Fixing part; 21. Support assembly; 211. Cylindrical support rod; 212. Equilateral triangular block; 213. Cylindrical rod; 214. Equilateral hexagonal block; 22. Fixing assembly; 221. Spring telescopic rod; 222. Arc block; 223. Product; 3. Rotating part; 31. Power assembly; 311. Motor; 312. Rotating shaft; 32. Connecting assembly; 313. Sleeve; 321. Connecting rod; 322. Connecting ring; 323. Support ring; 324. Cylindrical connecting rod. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figure 1-5 As shown, this utility model is a product fixing bracket for an evaporation coating machine, including a machine door 111, and also including: a fixing part 2, wherein a plurality of fixing parts 2 are arranged in a circumferential array on the machine door 111; and a rotating part 3, which is installed on the machine door 111.

[0016] The fixing part 2 includes a support assembly 21, which is mounted on the machine door 111; and a fixing assembly 22, of which several fixing assemblies 22 are mounted on the machine door 111; the support assembly 21 includes a cylindrical support rod 211 mounted on the machine door 111, with several equilateral triangular blocks 212 fixedly connected to the outer wall of the cylindrical support rod 211, several cylindrical rods 213 fixedly connected to the outer wall of the several equilateral triangular blocks 212, and several equilateral hexagonal blocks 214 fixedly connected to the outer wall of each of the several cylindrical rods 213; there are six fixing parts 2, each fixing part 2 including six equilateral triangular blocks 212, three cylindrical rods 213, and three equilateral hexagonal blocks 214; the fixing assembly 22 includes a cylindrical support rod 211 fixedly connected to the outer wall of each of the several cylindrical rods 213. Several spring telescopic rods 221 are mounted on the outer wall of block 214. A product 223 is mounted on the equilateral hexagonal block 214. Six abutment members are mounted on the spring telescopic rods 221. Three spring telescopic rods 221 are mounted on each of the six side walls of the equilateral hexagonal block 214. Each spring telescopic rod 221 has an abutment member. The abutment member includes an arc-shaped block 222 fixedly connected to the side of the corresponding three spring telescopic rods 221 away from the equilateral hexagonal block 214. The outer wall of the arc-shaped block 222 away from the equilateral hexagonal block 214 abuts against the inner wall of the product 223. By setting the fixing part 2, the product can be prevented from shifting, tilting or even falling off due to slight vibration of the equipment, avoiding physical damage caused by the product colliding with the bracket, and ensuring the stability of the coating process.

[0017] The rotating part 3 includes a power assembly 31, which is mounted on the machine door 111; and a connecting assembly 32, which is also mounted on the machine door 111. The power assembly 31 includes a motor 311 fixedly connected to the top of the machine door 111. The output shaft of the motor 311 is fixedly connected to a rotating shaft 312 via a coupling. A sleeve 313 is fixedly connected to the outer wall of the rotating shaft 312. The bottom of the rotating shaft 312 rotatably passes through the machine door 111. The connecting assembly 32 includes connecting rods 321 fixedly connected to the outer wall of the sleeve 313. Two connecting rings 322 are fixedly connected to the side of several connecting rods 321 away from the sleeve 313. The upper connecting rods 321 are connected to the connecting rods 321. A support ring 323 is fixedly connected to the top of ring 322, and a connector is provided between the two connecting rings 322. The support ring 323 extends rotatably into the machine door 111. The cylindrical support rod 211 is fixedly connected to the connecting ring 322 located on the lower side. The connector includes a cylindrical connecting rod 324 fixedly connected between the two connecting rings 322. Several cylindrical connecting rods 324 are arranged in a circumferential array around the sleeve 313. By setting the rotating part 3, the product 223 to be coated is made to contact the evaporation source evenly during the coating process, which effectively avoids the problem of uneven coating thickness caused by the product being fixed, and significantly improves the uniformity of the coating layer and the coating quality of the product.

[0018] It should be noted that the control of motor 311 in this application can be achieved by using a program set in the control panel and inputting relevant parameters as needed for automated control. This control method can be implemented using existing technologies, such as PLC.

[0019] One specific application of this embodiment is as follows: When using the product, the product 223 is inserted into several arc-shaped blocks 222 on the corresponding equilateral hexagonal block 214. The product 223 will squeeze the arc-shaped blocks 222 to bring them closer to the equilateral hexagonal block 214 and compress the corresponding support component 21 until the arc-shaped blocks 222 are completely inserted into the product 223. The spring telescopic rods 221 rebound and drive the arc-shaped blocks 222 to reset and squeeze the inner wall of the product 223, thereby completing the fixation of the product 223. Similarly, other products 223 can be fixed. When coating, the motor 311 is turned on, and the motor 311 will drive the rotating shaft 312 to rotate. The rotating shaft 312 drives the two connecting rings 322 to rotate through the sleeve 313 and several connecting rods 321. The lower connecting ring 322 drives the six fixing parts 2 on it to make a circular motion around the rotating shaft 312, thereby assisting the coating process.

[0020] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0021] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A product fixing bracket for an evaporation coating machine, comprising a machine door (111), characterized in that, Also includes: A fixing part (2) is provided, and the fixing parts (2) are arranged in a circular array on the door (111); A rotating part (3) is mounted on the machine door (111); The fixing part (2) includes a support assembly (21) which is disposed on the door (111); and A fixing component (22) is provided, and a plurality of fixing components (22) are provided on the machine door (111); The support assembly (21) includes a cylindrical support rod (211) mounted on the machine door (111). A plurality of equilateral triangular blocks (212) are fixedly connected to the outer wall of the cylindrical support rod (211). A plurality of cylindrical rods (213) are fixedly connected to the outer wall of the plurality of equilateral triangular blocks (212). An equilateral hexagonal block (214) is fixedly connected to the outer wall of each of the plurality of cylindrical rods (213). Among them, there are six fixing parts (2), and each fixing part (2) includes six equilateral triangular blocks (212), three cylindrical rods (213) and three equilateral hexagonal blocks (214).

2. The product fixing bracket for an evaporation coating machine according to claim 1, characterized in that, The rotating part (3) includes a power assembly (31) which is mounted on the door (111); and A connecting component (32) is mounted on the door (111).

3. The product fixing bracket for an evaporation coating machine according to claim 2, characterized in that, The fixing component (22) includes a plurality of spring telescopic rods (221) fixedly connected to the outer wall of the equilateral hexagonal block (214), the product (223) is provided on the equilateral hexagonal block (214), and six abutment members are provided on the plurality of spring telescopic rods (221); Among them, each of the six side walls of the equilateral hexagonal block (214) is provided with three spring telescopic rods (221), and each spring telescopic rod (221) on each face is provided with an abutment.

4. The product fixing bracket for an evaporation coating machine according to claim 3, characterized in that, The power assembly (31) includes a motor (311) fixedly connected to the top of the door (111), the output shaft of the motor (311) is fixedly connected to a rotating shaft (312) via a coupling, and a sleeve (313) is fixedly connected to the outer wall of the rotating shaft (312). Among them, the bottom of the rotating shaft (312) rotates through the machine door (111).

5. The product fixing bracket for an evaporation coating machine according to claim 4, characterized in that, The connecting assembly (32) includes connecting rods (321) fixedly connected to the outer wall of the sleeve (313), and two connecting rings (322) fixedly connected to the side of the connecting rods (321) away from the sleeve (313). A support ring (323) is fixedly connected to the top of the upper connecting ring (322), and a connector is provided between the two connecting rings (322). Among them, the support ring (323) extends rotatably into the machine door (111), and the cylindrical support rod (211) is fixedly connected to the connecting ring (322) located on the lower side.

6. The product fixing support for an evaporation coater according to claim 5, wherein The abutment includes an arc-shaped block (222) fixedly connected to the side of the corresponding three spring telescopic rods (221) away from the equilateral hexagonal block (214). Among them, the outer wall of the arc block (222) on the side away from the equilateral hexagonal block (214) abuts against the inner wall of the product (223).

7. The product fixing bracket for an evaporation coating machine according to claim 6, characterized in that, The connector includes a cylindrical connecting rod (324) fixedly connected between two connecting rings (322); Among them, several cylindrical connecting rods (324) are arranged in a circular array around the sleeve (313).

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