A measuring device

Abstract

The application provides a measuring device, relates to the technical field of measuring tools, and comprises a module support seat, a driving part connected with the module support seat, and a sensor connected with the output end of the driving part. The module support seat is provided with a connecting part used for cooperating with a tool mounting hole of a workpiece. The driving part is spaced apart from the workpiece in the axial direction of the workpiece to form a measuring space. The driving part is used for driving the sensor to move in the measuring space. On the basis of not needing to disassemble the target material, the connecting part provided on the module support seat directly cooperates with the tool mounting hole of the target material, the driving part is spaced apart from the target material to form the measuring space, the sensor moves in the measuring space, the corrosion morphology of the target material can be measured, the corrosion morphology of the target material on the source of physical vapor deposition can be measured, and the problem that the detection of the consumption of the target material in the prior art needs to disassemble the target material, which is relatively troublesome and time-consuming and laborious, is effectively improved.

Description

Technical Field

[0001] This application relates to the field of measuring tooling technology, and in particular to a measuring device. Background Technology

[0002] Physical vapor deposition (PVD) technology forms thin films by directly bombarding a substrate with the material to be deposited. Common PVD methods include sputtering and thermal evaporation. In sputtering, an ion beam (primarily using an inert gas) is bombarded with the target material, causing particles from the target material to be sputtered out. These detached particles are then transferred to the surface of a silicon wafer or solar panel substrate to form a thin film. The magnetron and the target material are two crucial components of the PVD equipment, determining the type and performance of the formed film. Therefore, data monitoring of the target material and the magnetron is essential. Monitoring the consumption of the target material can reflect the rationality of the magnetron rotation method, thereby optimizing the magnetron rotation method and the lifespan of the target material. However, current technologies require disassembling the target material for detection, which is cumbersome, time-consuming, and labor-intensive. Utility Model Content

[0003] This application discloses a measuring device that effectively improves the problem that the detection of target material consumption in the prior art is troublesome, time-consuming and labor-intensive.

[0004] In a first aspect, this application provides a measuring device, including a module support base, a drive member connected to the module support base, and a sensor connected to the output end of the drive member. The module support base is provided with a connector for engaging with a tooling mounting hole on a workpiece. The drive member and the workpiece are spaced apart axially along the workpiece to form a measuring space. The drive member is used to drive the sensor to move within the measuring space.

[0005] Specifically, the workpiece can be a target material. Without needing to disassemble the target material, the connector on the module support directly connects to the tooling mounting holes of the target material, allowing the driving component and the target material to be spaced apart axially to form a measurement space. The sensor moves within the measurement space along the extension direction of the driving component (radial direction of the target material), enabling the measurement of the corrosion morphology of the target material. This allows for the measurement of the corrosion morphology of the target material on the source electrode of physical vapor deposition (PVD), making it adaptable to PVD target and source electrode environments. It effectively improves the problem of the cumbersome, time-consuming, and labor-intensive process of detecting target consumption in existing technologies, which requires disassembling the target material.

[0006] In one possible implementation, the measuring device further includes a mounting bracket, through which the sensor is connected to the output end of the drive unit. The mounting bracket includes:

[0007] The first connecting plate is detachably connected to the output end of the drive unit;

[0008] The second connecting plate is at least partially located within the measurement space. The second connecting plate is detachably connected to the first connecting plate and is connected to the sensor.

[0009] At least a portion of the second connecting plate is used to suspend the sensor between the driving component and the workpiece, thereby causing the second connecting plate to move the sensor along the extension direction of the driving component (radial direction of the target material) to measure the corrosion morphology of the surface to be inspected on the target material. The fixture effectively prevents the inertial forces, impacts, and vibrations generated during the movement of the moving block of the driving component from being directly transmitted to the sensor, ensuring that the sensor maintains a stable posture during movement and thus improving the measurement accuracy of the sensor.

[0010] In one possible implementation, an adjusting member is provided between the first connecting plate and the second connecting plate, the adjusting member being used to adjust the distance between the first connecting plate and the second connecting plate.

[0011] The adjustment mechanism allows the measuring device to be adapted to the measurement of targets of various sizes, or different measurement requirements for the same target, while ensuring the detection effect.

[0012] In one possible implementation, the adjusting member includes a plurality of gaskets, at least one of which is mounted between the first connecting plate and the second connecting plate.

[0013] The number of shims is increased or decreased to adjust the axial distance between the first connecting plate and the second connecting plate on the target material, thereby adjusting the distance between the sensor and the surface to be detected on the target material.

[0014] In one possible implementation, the module support includes a first connecting end, which has a first plane for fitting against the surface of the workpiece and a first through hole opened on the first plane and corresponding to the tooling mounting hole. The connector passes through the first through hole and is screwed into the tooling mounting hole.

[0015] The connector connects the first through hole and the tooling mounting hole, which can fix the module support relative to the target material, effectively preventing the module support from shaking relative to the target material, thereby improving the measurement accuracy of the sensor.

[0016] In one possible implementation, there are two module supports, and each module support is used to correspond one-to-one with the tooling mounting hole. The first connecting ends of the two module supports are provided with a clearance notch on opposite sides.

[0017] The clearance notch is used to avoid interference between the module support and the surrounding installation environment of the workpiece. When the workpiece is a target, the clearance notch is used to avoid interference between the module support and the source cell around the target, thereby reducing errors caused by measurement interference.

[0018] In one possible implementation, the module support base further includes a second connection end opposite to the first connection end. The second connection end includes a second plane and a second through hole formed in the second plane. The fastener passes through the second through hole and connects to the drive member.

[0019] The fastener is screwed into the second through hole and the connection hole of the drive component from the side of the second connecting end away from the second plane, so that the drive component can be detachably connected to the module support base, which facilitates the installation and removal of the drive component and the module support base, and at the same time facilitates the maintenance and replacement of either the drive component or the module support base.

[0020] In one possible implementation, it also includes:

[0021] The mounting plate is connected to the module support base;

[0022] A clamp is movably connected to a fixed plate and can slide along the length of the fixed plate to clamp a workpiece.

[0023] The gripper is movably connected to the fixed plate and can slide along the length of the fixed plate to grip a workpiece, which may be a process kit. After the gripper grips the process kit, it fixes the position of the process kit relative to the fixed plate. Then, by moving the sensor, the mass and dimensions of the process kit can be measured.

[0024] In one possible implementation, a sliding hole is provided on the fixed plate, the length direction of the sliding hole is consistent with the length direction of the fixed plate, and the clamp includes a slider that passes through the sliding hole and slides with the sliding hole in the length direction of the sliding hole, and a limiting plate connected to both ends of the slider. The width of the limiting plate is greater than the width of the sliding hole to restrict the slider from disengaging from the sliding hole.

[0025] A limiting plate connected to the top of the slider restricts the slider from moving downwards, and a limiting plate connected to the bottom of the slider restricts the slider from moving upwards, so as to prevent the slider from dislodging from the sliding hole. At the same time, the sliding cooperation between the slide rail and the slide groove guides the movement of the slider relative to the sliding hole.

[0026] In one possible implementation, there are two clamps, and the two clamps have clamping surfaces on opposite sides. The two clamping surfaces are used to clamp the opposite sides of the workpiece, and the clamping surfaces are concave arc surfaces.

[0027] The concave arc surface can be adapted to the outer circumference of a circular or annular workpiece. When the concave arc surface fits against the outer circumference of the workpiece, it can play a centering role for the workpiece. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of the measuring device and the target material connected in conjunction with each other, as provided in the embodiments of this application.

[0030] Figure 2 for Figure 1 The main view;

[0031] Figure 3 for Figure 1 Top view;

[0032] Figure 4 for Figure 1 Side view;

[0033] Figure 5 This is a schematic diagram of the structure of the first connecting plate provided in an embodiment of this application;

[0034] Figure 6 This is a schematic diagram of the structure of the second connecting plate provided in an embodiment of this application;

[0035] Figure 7 This is a schematic diagram of the module support base provided in the embodiments of this application;

[0036] Figure 8 A schematic diagram of the measuring device provided in the embodiment of this application, with a fixing plate mounted on it;

[0037] Figure 9 for Figure 8 The main view;

[0038] Figure 10 for Figure 8 Top view;

[0039] Figure 11 for Figure 8 Side view;

[0040] Figure 12 This is a diagram showing the results of the sensor provided in this application measuring the radial corrosion morphology of the target surface to be inspected.

[0041] Explanation of reference numerals in the attached figures:

[0042] 10-Module support base;

[0043] 101 - First connecting end; 102 - Second connecting end; 103 - Clearance notch;

[0044] 1011 - First plane; 1012 - First through hole; 1021 - Second plane; 1022 - Second through hole;

[0045] 20-Drive components;

[0046] 201-Electric motor;

[0047] 30-Sensor;

[0048] 40-Target material;

[0049] 401 - Surface to be inspected;

[0050] 50-Fixed bracket;

[0051] 501 - First connecting plate; 502 - Second connecting plate;

[0052] 5011 - First connecting part; 5012 - Second connecting part; 5021 - Mounting part;

[0053] 60-Fixed plate;

[0054] 601 - Sliding hole; 602 - Slide rail section;

[0055] 70-Clamper;

[0056] 701-Clamping surface; 702-Slider; 703-Limiting plate.

[0057] 80 - Measurement space. Detailed Implementation

[0058] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0059] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0060] In physical vapor deposition (PVD) processes, monitoring the consumption of the target material can reflect the rationality of the magnetron rotation method, thereby optimizing the magnetron rotation method and the lifespan of the target material. However, current technologies require disassembling the target material for detection, which is cumbersome, time-consuming, and labor-intensive.

[0061] Based on this, this application provides a measuring device that effectively improves the problem that the detection of target consumption in the prior art is troublesome, time-consuming and labor-intensive.

[0062] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of this utility model.

[0063] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more” unless the context clearly indicates otherwise.

[0064] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 12 ,in, Figure 1 This is a schematic diagram of the structure of the measuring device and the target material connected in conjunction with each other, as provided in the embodiments of this application. Figure 2 for Figure 1 The main view; Figure 3 for Figure 1 Top view; Figure 4 for Figure 1 Side view; Figure 12 This is a diagram showing the results of the sensor provided in this application measuring the radial corrosion morphology of the target surface to be inspected.

[0065] In a first aspect, this application provides a measuring device, including a module support 10, a drive member 20 connected to the module support 10, and a sensor 30 connected to the output end of the drive member 20. The module support 10 is provided with a connector for engaging with a tooling mounting hole on a workpiece. The drive member 20 and the workpiece are spaced apart axially along the workpiece to form a measuring space 80. The drive member 20 drives the sensor 30 to move within the measuring space 80. The workpiece may be, but is not limited to, a target material 40. When the workpiece is a target material 40, the line connecting the tooling mounting holes passes through the center of the target material 40. The sensor 30 moves within the measuring space 80 along the extension direction of the drive member 20 (radial direction of the target material 40) with the output end of the drive member 20 to measure the corrosion morphology of the surface 401 to be inspected on the target material 40. In this design, the surface 401 to be inspected on the target 40 is the side of the target 40 that is bombarded by the ion beam (mainly using an inert gas). After being bombarded by the ion beam, particles from the surface 401 to be inspected on the target 40 are sputtered out, and the target 40 is consumed. In the magnetron sputtering equipment, the target 40 is connected to the bottom of the chamber cover, and the surface 401 to be inspected is located on the side of the target 40 facing away from the chamber cover. That is, when the chamber cover is closed relative to the process chamber, the surface 401 to be inspected faces downwards; when the chamber cover is rotated 180 degrees relative to the process chamber and is in the open state, the surface 401 to be inspected faces upwards.

[0066] It should be noted that in the related technology, the target material 40 has two tooling mounting holes located circumferentially on the target material 40, and the line connecting the centers of the two tooling mounting holes passes through the center of the surface 401 to be inspected on the target material 40. The tooling mounting holes are used to engage with the workpiece and bolts to remove the target material 40 from the cavity cover of the process chamber. When it is not necessary to remove the target material 40, the two tooling mounting holes are idle, and the projection of the line connecting the axes of the two tooling mounting holes onto the surface 401 to be inspected is the diameter passing through the center of the surface 401. In this embodiment, the module support 10 is provided with a connector that engages with the tooling mounting holes on the target material 40. The sensor 30 moves between the two tooling mounting holes to record the distance from the surface 401 to the sensor 30. This allows for the measurement of the radial corrosion morphology of the surface 401 to be inspected.

[0067] Understandably, in a magnetron sputtering apparatus, the target 40 is connected to the bottom of the cavity cover. By bombarding the side of the target 40 away from the cavity cover with an ion beam, particles from this side are sputtered out and transferred to the substrate surface of a silicon wafer or solar panel to form a thin film. Detecting the consumption of the target 40 is equivalent to detecting its thickness. The sensor 30 can be, but is not limited to, a laser sensor.

[0068] Specifically, the cavity cover is opened and rotated approximately 180° so that the surface 401 to be tested on the target 40 faces upwards. The target 40 does not need to be disassembled. The module support 10 is equipped with a connector that directly engages with the tooling mounting hole on the target 40. The drive unit 20 and the target 40 are spaced apart axially to form a measurement space 80. The drive unit 20 drives the sensor 30 to move within the measurement space 80, enabling the measurement of the corrosion morphology of the target 40, thereby achieving the measurement of the corrosion morphology of the target 40 on the source electrode of physical vapor deposition. The measurement device provided in this embodiment is adaptable to physical vapor deposition target 40 and source electrode environments, effectively improving the problem of the cumbersome and time-consuming process of detecting target 40 consumption requiring disassembly in existing technologies.

[0069] Please continue reading. Figure 1 , Figure 2 and Figure 3 And see Figure 5 and Figure 6 ,in, Figure 5 This is a schematic diagram of the structure of the first connecting plate provided in an embodiment of this application; Figure 6 This is a schematic diagram of the structure of the second connecting plate provided in an embodiment of this application.

[0070] In one possible implementation, the measuring device further includes a mounting bracket 50, through which the sensor 30 is connected to the output end of the drive member 20. The mounting bracket 50 includes a first connecting plate 501 and a second connecting plate 502. The first connecting plate 501 is detachably connected to the output end of the drive member 20. The drive member 20 may be, but is not limited to, an electric slide with a moving block. Specifically, the first connecting plate 501 is detachably connected to the moving block of the drive member 20. The drive member 20 is also connected to a motor 201, which drives the moving block of the drive member 20 to move along the extension direction of the drive member 20, causing the moving block to synchronously move the first connecting plate 501 along the extension direction of the drive member 20. The second connecting plate 502 is connected to the first connecting plate 501, and the first connecting plate 501 can drive the second connecting plate 502 to move synchronously along the extension direction of the drive member 20. The second connecting plate 502 is provided with a mounting part 5021 located within the measurement space 80 and fixedly connected to the sensor 30. The mounting part 5021 is used to suspend the sensor 30 between the driving member 20 and the target material 40, thereby causing the second connecting plate 502 to drive the sensor 30 to move along the extension direction of the driving member 20 (the radial direction of the target material 40) to measure the corrosion morphology of the surface 401 of the target material 40 to be tested. The setting of the fixing frame 50 effectively avoids the inertial force, impact and vibration generated during the movement of the moving block of the driving member 20 from being directly transmitted to the sensor 30, ensuring that the sensor 30 maintains a stable posture during movement, thereby improving the measurement accuracy of the sensor 30.

[0071] In one possible implementation, the first connecting plate 501 includes a first connecting portion 5011 and a second connecting portion 5012. The first connecting portion 5011 is detachably connected to the output end of the drive member 20. The second connecting portion 5012 is connected to the first connecting portion 5011 and extends toward the measurement space 80. One end of the second connecting portion 5012 opposite to the first connecting portion 5011 is connected to the second connecting plate 502. The first connecting plate 501 may have a U-shaped structure, including a first connecting portion 5011 in the shape of an "I" and two second connecting portions 5012 in the shape of an "I". The first connecting portion 5011 is connected to the top of the moving block of the drive member 20, and includes an extension extending horizontally out of the width direction of the drive member 20. One end of the second connecting portion 5012 is connected to the extension of the first connecting portion 5011, such that the end of the second connecting portion 5012 opposite to the first connecting portion 5011 is located between the extension of the first connecting portion 5011 and the target material 40. The first connecting portion 5011 of the first connecting plate 501 is connected to the output end of the drive component 20, and the second connecting portion 5012 of the first connecting plate 501 is connected to the second connecting plate 502, so that the first connecting portion 5011 and the second connecting portion 5012 of the first connecting plate 501 can be designed independently according to different connection requirements. If the drive component 20 needs to be replaced, it is only necessary to disassemble the first connecting portion 5011 of the first connecting plate 501 from the output end of the drive component 20; if the second connecting plate 502 needs to be replaced, it is only necessary to disassemble the second connecting portion 5012 of the first connecting plate 501, thus reducing maintenance costs.

[0072] In one possible implementation, an adjusting member is provided between the first connecting plate 501 and the second connecting plate 502 to adjust the distance between them. The connecting member on the module support 10 engages with the tooling mounting hole of the target 40, ensuring a fixed distance between the driving member 20 and the surface 401 to be tested on the target 40, thereby maintaining a fixed distance between the first connecting plate 501 and the surface 401 to be tested on the target 40. Specifically, the adjusting member is positioned between the second connecting portion 5012 of the first connecting plate 501 and the second connecting plate 502 to adjust the distance between them, thereby adjusting the distance between the second connecting portion 5012 of the first connecting plate 501 and the sensor 30, and thus adjusting the distance between the sensor 30 and the surface 401 to be tested on the target 40. The adjusting member allows the measuring device to be adapted to the measurement of targets 40 of various sizes or different measurement requirements for the same target 40, while ensuring effective detection.

[0073] In one possible implementation, the adjusting component includes multiple shims, at least one of which is installed between the first connecting plate 501 and the second connecting plate 502. Specifically, the axial distance between the first connecting plate 501 and the second connecting plate 502 on the target material 40 is adjusted by increasing or decreasing the number or thickness of the shims. When shims of the same specification are used, the axial distance between the first connecting plate 501 and the second connecting plate 502 on the target material 40 is adjusted by increasing or decreasing the number of shims, thereby adjusting the distance between the sensor 30 and the surface 401 to be detected on the target material 40. When the shims have different specifications, the axial distance between the first connecting plate 501 and the second connecting plate 502 on the target material 40 is adjusted by replacing different shims or increasing or decreasing the number of shims, thereby adjusting the distance between the sensor 30 and the surface 401 to be detected on the target material 40. In other embodiments, the adjusting member may also include a flexible component that is elastic and mounted between the first connecting plate 501 and the second connecting plate 502. Specifically, the axial distance between the first connecting plate 501 and the second connecting plate 502 on the target material 40 is adjusted by compressing the thickness of the flexible component between the first connecting plate 501 and the second connecting plate 502.

[0074] Please continue reading. Figure 1 Please see Figure 7 , Figure 7 This is a schematic diagram of the module support base provided in the embodiments of this application. The connector can be integral with or separate from the module support base 10; the connector can be a screw or a pin. In one possible embodiment, when the connector is separate from the module support base 10, the module support base 10 includes a first connecting end 101. The first connecting end 101 has a first plane 1011 for contacting the surface of the workpiece and a first through hole 1012 formed on the first plane 1011 and corresponding to the tooling mounting hole. The first plane 1011 is used to contact the surface of the workpiece so that the first through hole 1012 is aligned with the tooling mounting hole. The connector passes through the first through hole 1012 and is screwed into the tooling mounting hole, thereby fixing the module support base 10 and the workpiece. When the workpiece is a target material 40, after the first plane 1011 is attached to the surface of the target material 40, the first through hole 1012 and the tooling mounting hole are connected by a connector. This allows the module support 10 to be fixed relative to the target material 40, effectively preventing the module support 10 from shaking relative to the target material 40, thereby improving the measurement accuracy of the sensor 30. When the first through hole 1012 is internally threaded, a screw is used as the connector. The connector is screwed into the first through hole 1012 and the tooling mounting hole from the side of the first connecting end 101 away from the first plane 101, allowing the module support 10 to be detachably connected to the target material 40. The tooling mounting hole is connected to the module support 10 by a screw, which reduces horizontality error and improves measurement repeatability.

[0075] Please continue reading. Figure 1 and Figure 2 In one possible implementation, there are two module supports 10, each corresponding to a tooling mounting hole. The first connecting ends 101 of the two module supports 10 are provided with clearance notches 103 on opposite sides. The line connecting the tooling mounting holes passes through the center of the target 40, and the module supports 10 are connected to the tooling mounting holes in a one-to-one correspondence, so that the line connecting the two module supports 10 passes through the center of the target 40. The probe of the sensor 30 moves radially along the target 40 between the two module supports 10 to measure the corrosion morphology. The clearance notches 103 are used to avoid interference between the module supports 10 and the surrounding installation environment of the workpiece. When the workpiece is the target 40, the clearance notches 103 are used to avoid interference between the module supports 10 and the source cells surrounding the target 40, reducing errors caused by measurement interference.

[0076] Please continue reading. Figure 1 and Figure 2 Please see Figure 7 , Figure 7 This is a schematic diagram of the module support base provided in an embodiment of this application. In one possible implementation, the module support base 10 further includes a second connection end 102 facing away from the first connection end 101. The second connection end 102 includes a second plane 1021 and a second through hole 1022 formed on the second plane 1021. The second plane 1021 is used to fit against the driving member 20 so that the second through hole 1022 is aligned with the connection hole on the driving member 20. The fixing member passes through the second through hole 1022 and is screwed into the connection hole, thereby fixing the second connection end 102 and the driving member 20, effectively preventing the driving member 20 from shaking relative to the module support base 10, and improving the measurement accuracy of the sensor 30. The second through hole 1022 and the aforementioned connecting hole may be provided with internal threads. Screws can be used as fasteners. The fasteners are screwed into the connecting hole of the second through hole 1022 and the connecting hole of the drive component 20 from the side of the second connecting end 102 facing away from the second plane 1021. This allows the drive component 20 to be detachably connected to the module support base 10, facilitating the installation and removal of both the drive component 20 and the module support base 10, and also facilitating the maintenance and replacement of either the drive component 20 or the module support base 10. Furthermore, the main body of the module support base 10 located between the first connecting end 101 and the second connecting end 102 can be adjusted in size and shape according to actual needs, without interfering with the surrounding installation environment.

[0077] Please continue reading. Figure 7 Please see Figure 8 , Figure 9 , Figure 10 and Figure 11 ,in, Figure 8A schematic diagram of the measuring device provided in the embodiment of this application, with a fixing plate mounted on it; Figure 9 for Figure 8 The main view; Figure 10 for Figure 8 Top view; Figure 11 for Figure 8 Side view.

[0078] In one possible implementation, the measuring device further includes a fixing plate 60 and a clamp 70, with the fixing plate 60 detachably connected to the module support base 10. Specifically, mounting holes corresponding one-to-one with the first through holes 1012 can be provided on the fixing plate 60. Similarly, a connector can be inserted from the side of the first connecting end 101 away from the first plane 1011 into the first through holes 1012 and mounting holes to achieve a stable connection between the fixing plate 60 and the module support base 10. The fixing plate 60 has a third plane, which is used to abut against the first plane 1011, effectively preventing the fixing plate 60 from wobbling relative to the module support base 10. The clamp 70 is movably connected to the fixing plate 60 and can slide along the length of the fixing plate 60 to clamp the workpiece, which can be a process kit. After the clamp 70 clamps the process kit, the position of the process kit relative to the fixing plate 60 can be fixed. Then, by moving the sensor 30, the mass and dimensions of the process kit can be measured.

[0079] Please continue reading. Figure 8 , Figure 9 , Figure 10 and Figure 11 In one possible implementation, the fixing plate 60 has a sliding hole 601, the length direction of which is consistent with the length direction of the fixing plate 60. The clamp 70 includes a slider 702 that passes through the sliding hole 601 and slides with the sliding hole 601 along its length direction, and limiting plates 703 connected to both ends of the slider 702. The width of the limiting plates 703 in the fixing plate 60 is greater than the width of the sliding hole 601, so as to restrict the slider 702 from disengaging from the sliding hole 601. Specifically, the fixing plate 60 includes two slide rail portions 602, which are located on both sides of the sliding hole 601 in the width direction of the fixing plate 60, that is, the sliding hole 601 is located between the two slide rail portions 602. The limiting plates 703 are located at the top and bottom of the slider 702, and a groove is formed between the limiting plate 703 at the top of the slider 702 and the limiting plate 703 at the bottom of the slider 702 to slide with the slide rail portion 602. The limiting plate 703 located at the top of the slider 702 restricts the slider 702 from moving downwards, and the limiting plate 703 located at the bottom of the slider 702 restricts the slider 702 from moving upwards, so as to prevent the slider 702 from disengaging from the sliding hole 601. At the same time, the sliding engagement between the slide rail part 602 and the slide groove guides the movement of the slider relative to the sliding hole 601.

[0080] In one possible implementation, when there is only one clamp 70, the clamp 70 cooperates with any module support 10 to clamp the workpiece. Specifically, the clamp 70 clamps both ends of the workpiece in the length direction of the fixed plate 60 on the side facing the module support 10.

[0081] In one possible implementation, there are two grippers 70, and each gripper 70 has a clamping surface 701 on its facing side. The clamping surface 701 is used to clamp the opposite sides of the workpiece, and the clamping surface 701 is a concave arc surface. The two grippers 70 are also connected to an elastic element, which drives the two grippers 70 to move towards each other, so that the two clamping surfaces 701 clamp the workpiece. The elastic element can be located on the opposite side of the two grippers 70, or it can be located on the facing side of the two grippers 70 and accommodated in the sliding hole 601. The elastic element can be, but is not limited to, a spring. The elastic element can increase the clamping force on the workpiece. The gripper 70 slides with the sliding hole 601, ensuring that the gripper 70 moves along the length direction of the sliding hole 601, thereby improving the movement effect of the gripper 70 and enabling the clamping of workpieces of different sizes for measurement.

[0082] The clamping surface 701 is a concave arc surface, and the two clamping surfaces 701 are symmetrically arranged. The concave arc surface can adapt to the outer circumference of a circular or annular workpiece. When the concave arc surface is in contact with the outer circumference of the workpiece, the concave arc surface can play a centering role for the workpiece. The sensor 30 moves along the extension direction of the drive member 20 and can measure the dimensions of the side of the workpiece facing the drive member 20. The dimension measurement can be, but is not limited to, height, wall thickness, inner diameter, outer diameter, circumference, etc.

[0083] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0084] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0085] The above-described preferred embodiments have further detailed the purpose, technical solution, and advantages of this utility model. It should be understood that the above are merely preferred embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A measuring device, characterized in that, The device includes a module support base, a drive unit connected to the module support base, and a sensor connected to the output end of the drive unit. The module support base is provided with a connector for engaging with a tooling mounting hole on a workpiece. The drive unit and the workpiece are spaced apart axially on the workpiece to form a measurement space. The drive unit is used to drive the sensor to move within the measurement space.

2. The measuring device according to claim 1, characterized in that, It also includes a mounting bracket, through which the sensor is connected to the output end of the drive component. The mounting bracket includes: The first connecting plate is detachably connected to the output end of the driving component; The second connecting plate is at least partially located within the measurement space. The second connecting plate is detachably connected to the first connecting plate and is connected to the sensor.

3. The measuring device according to claim 2, characterized in that, An adjusting member is provided between the first connecting plate and the second connecting plate, and the adjusting member is used to adjust the distance between the first connecting plate and the second connecting plate.

4. The measuring device according to claim 3, characterized in that, The adjusting component includes a plurality of gaskets, at least one of which is installed between the first connecting plate and the second connecting plate.

5. The measuring device according to any one of claims 1-4, characterized in that, The module support includes a first connecting end, which has a first plane for fitting against the surface of the workpiece and a first through hole opened on the first plane and corresponding to the tooling mounting hole. The connector passes through the first through hole and is screwed into the tooling mounting hole.

6. The measuring device according to claim 5, characterized in that, There are two module support bases, and each module support base is used to correspond one-to-one with the tooling mounting hole. The first connecting ends of the two module support bases are provided with a clearance notch on opposite sides.

7. The measuring device according to claim 5, characterized in that, The module support also includes a second connection end opposite to the first connection end. The second connection end includes a second plane and a second through hole opened in the second plane. The fixing member passes through the second through hole and is connected to the driving member.

8. The measuring device according to any one of claims 1-4, characterized in that, Also includes: The fixing plate is connected to the module support base; A clamp is movably connected to the fixed plate, and the clamp is slidable along the length of the fixed plate to clamp the workpiece.

9. The measuring device according to claim 8, characterized in that, The fixed plate has a sliding hole, the length direction of which is consistent with the length direction of the fixed plate. The clamp includes a slider that passes through the sliding hole and slides with the sliding hole in the length direction of the sliding hole, and a limiting plate connected to both ends of the slider. The width of the limiting plate is greater than the width of the sliding hole to prevent the slider from disengaging from the sliding hole.

10. The measuring device according to claim 8, characterized in that, There are two clamps, and the two clamps have clamping surfaces on opposite sides. The two clamping surfaces are used to clamp the opposite sides of the workpiece, and the clamping surfaces are concave arc surfaces.

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