Transfer device and vacuum transfer apparatus

Abstract

The utility model provides a transfer device and vacuum transfer equipment, transfer device includes steering plate, first driving part and second driving part, and the transmission wheel group is rotatably installed on the both sides of steering plate along the horizontal direction, and two groups are located in the middle part of steering plate and are connected through first transmission shaft transmission between opposite transmission wheel group, first driving part sets up in the bottom of steering plate, and the output of first driving part is connected with steering plate, and first driving part is used for driving steering plate to rotate around vertical line, second driving part sets up in the bottom of steering plate, and the output of second driving part is connected with first transmission shaft through a pair of first bevel gear meshing transmission, and second driving part is used for driving first transmission shaft to rotate around its own axis, to make transmission wheel group drive the horizontal movement of the carrier plate along the two side edges of contact transmission wheel group. The utility model provides a transfer device when the carrier plate is transferred, can make the both sides of carrier plate contact transmission wheel group not change, reduces the powder drop.

Description

Technical Field

[0001] This utility model relates to the field of mechanical transmission technology, and in particular to a transfer device for carrier plate transmission in solar cell manufacturing technology and a vacuum transfer device having the transfer device. Background Technology

[0002] In the field of vacuum coating, there are various coating processes such as RPD, PVD, CVD, vapor deposition, and ALD. Because these different coating processes operate on different principles, solar cell substrates need to be coated in different vacuum chambers. The industry primarily uses a combination of lifting and fixed transport components to transport the substrate carrier in different directions into the required coating chamber. Currently, when transporting the carrier to vacuum chambers in different directions, all four sides of the carrier easily come into contact with the transport wheels, generating friction. This friction causes the coating layer from the substrate on the carrier to peel off and deposit in the chamber. The contact of all four sides of the carrier also increases the substrate's powder shedding rate. Utility Model Content

[0003] The purpose of this invention is to provide a transfer device that keeps the two sides of the carrier plate in contact with the conveyor wheel assembly unchanged before and after the carrier plate turns, thereby reducing powder shedding.

[0004] Another objective of this invention is to provide a vacuum transfer device that reduces powder shedding and extends the maintenance cycle by using the above transfer device.

[0005] Firstly, providing transit facilities, including:

[0006] A steering plate, on which transmission wheel sets are rotatably mounted on opposite sides in the horizontal direction, wherein two sets of transmission wheel sets located in the middle of the steering plate and opposite to each other are connected by a first transmission shaft.

[0007] A first driving member is disposed at the bottom of the steering plate, and the output end of the first driving member is connected to the steering plate. The first driving member is used to drive the steering plate to rotate around a vertical line.

[0008] The second driving member is disposed at the bottom of the steering plate. The output end of the second driving member is connected to the first transmission shaft through a pair of first bevel gears. The second driving member is used to drive the first transmission shaft to rotate around its own axis so that the transmission wheel set drives the carrier plate to move in the horizontal direction.

[0009] As an optional technical solution, a transmission shaft sleeve is connected between the output end of the first driving component and the steering plate;

[0010] The drive shaft is sleeved and has a drive shaft inserted through it. The bottom end of the drive shaft is connected to the output end of the second drive component. The top end of the drive shaft is fixedly sleeved with a first bevel gear. The first drive shaft is fixedly sleeved with another first bevel gear. The two first bevel gears mesh and are connected for transmission.

[0011] As an optional technical solution, a synchronization plate is connected between the second driving component and the transmission shaft sleeve. The synchronization plate is used to drive the second driving component and the driving shaft to rotate synchronously with the transmission shaft sleeve.

[0012] As an optional technical solution, the first drive shaft and the transmission wheel assembly are connected by a first coupling.

[0013] As an optional technical solution, the first drive shaft and the transmission wheel assembly are connected by a clutch.

[0014] Secondly, a vacuum transfer device is provided, including a vacuum chamber and a transfer device as described above. The side wall of the vacuum chamber is provided with four or more openings, at least one of the openings being a feed inlet and at least one of the openings being a discharge outlet. The steering plate is disposed inside the vacuum chamber, and the first driving member and the second driving member are both located outside the vacuum chamber.

[0015] As an optional technical solution, the bottom plate of the vacuum chamber is sealed with a magnetofluid assembly. The magnetofluid assembly includes a transmission shaft sleeve and a drive shaft. The transmission shaft sleeve is connected between the output end of the first drive member and the steering plate. The drive shaft passes through the inside of the transmission shaft sleeve. The bottom end of the drive shaft is connected to the output end of the second drive member. A first bevel gear is fixedly sleeved on the top end of the drive shaft. Another first bevel gear is fixedly sleeved on the first transmission shaft. The two first bevel gears are meshed and connected for transmission.

[0016] As an optional technical solution, a transition wheel assembly is rotatably installed on both sides of each opening, the transition wheel assembly being located between the opening and the steering plate, and the transition wheel assembly being used to support the carrier plate.

[0017] As an optional technical solution, the vacuum chamber is provided with a transmission shaft assembly inside, the transmission shaft assembly is connected to the transition wheel group for transmission, the bottom plate of the vacuum chamber is sealed with a magnetic fluid, the magnetic fluid includes a central shaft, the central shaft is connected to the transmission shaft assembly through a pair of second bevel gears meshing for transmission, and a third driving member is provided outside the vacuum chamber, the output end of the third driving member is connected to the central shaft.

[0018] As an optional technical solution, the transition wheel assembly includes a mounting base, a first rotating shaft, and a second rotating shaft. Both the first and second rotating shafts are rotatably mounted on the mounting base. The second rotating shaft is arranged parallel above the first rotating shaft. The first rotating shaft is fixedly fitted with a first rotating wheel and a third bevel gear. The second rotating shaft is fixedly fitted with a second rotating wheel and a transition wheel. A transmission belt is wound between the first rotating wheel and the second rotating wheel. Two sets of the transition wheel assemblies are provided between two adjacent openings. The two sets of transition wheel assemblies located between two adjacent openings are connected by a pair of third bevel gears meshing and transmitting power. The transition wheel is used to support the carrier plate.

[0019] The drive shaft assembly includes at least three second drive shafts, and the vacuum chamber has at least four openings. The number of second drive shafts is one less than the number of openings, and at least three openings are arranged in a one-to-one correspondence with at least three second drive shafts.

[0020] In the two sets of transition wheel groups corresponding to the same opening and a second drive shaft, one end of the second drive shaft is connected to the first rotating shaft of one set of transition wheel groups via a second coupling, and the other end of the second drive shaft is connected to the first rotating shaft of the other set of transition wheel groups via another second coupling.

[0021] This utility model has the following beneficial effects:

[0022] When the transfer device provided by this utility model receives a carrier plate, the conveyor wheel set on the steering plate supports the left and right sides of the carrier plate in the forward direction of the carrier plate. The front and rear sides of the carrier plate do not contact the conveyor wheel set, which can reduce dust shedding and extend the maintenance cycle. The specific working principle is as follows: When the carrier plate does not need to turn, the second drive unit is activated. The second drive unit drives two sets of conveyor wheel sets located in the middle of the steering plate and opposite each other through the first drive shaft. The conveyor wheel sets arranged on both sides of the steering plate convey the carrier plate downstream. When the carrier plate needs to turn, the first drive unit drives the steering plate to rotate around a vertical line. The conveyor wheel set and the carrier plate follow the steering plate to turn. After the carrier plate completes the turn, the first drive unit stops driving and the second drive unit is activated, thereby conveying the carrier plate downstream in another direction.

[0023] The vacuum transfer equipment provided by this utility model includes a vacuum chamber and the transfer device as described above. By using the transfer device to transfer the carrier plate, powder shedding can be reduced and the maintenance cycle of the vacuum chamber can be extended. Attached Figure Description

[0024] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings. To illustrate the details and facilitate understanding of its principles, the drawings are not necessarily to scale, and similar reference numerals may describe similar components in different views. The accompanying drawings generally illustrate the embodiments discussed herein by way of example and not limitation. Wherein:

[0025] Figure 1 This is a partial structural diagram of the vacuum transfer device in the embodiment. Figure 1 ;

[0026] Figure 2 yes Figure 1 A magnified view of a portion of position A in the middle;

[0027] Figure 3 This is a top view of the vacuum transfer device in the embodiment;

[0028] Figure 4 yes Figure 3 Sectional view of section BB;

[0029] Figure 5 yes Figure 3 A sectional view of section C-C;

[0030] Figure 6 This is a partial structural diagram of the vacuum transfer device in the embodiment. Figure 2 ;

[0031] Figure 7 yes Figure 6 A magnified view of the area at position D in the middle;

[0032] Figure 8 yes Figure 6 A magnified view of the area at position E in the middle.

[0033] The attached figures are labeled as follows:

[0034] 100. Vacuum chamber; 101. Opening;

[0035] 1. Steering plate; 2. Transmission wheel assembly; 21. Transmission wheel; 22. Synchronous belt; 23. Synchronous pulley; 3. First drive shaft; 4. First drive component; 5. Second drive component; 6. First bevel gear; 7. Magnetofluid assembly; 71. Drive shaft sleeve; 72. Drive shaft; 73. Housing; 8. Reducer; 9. Synchronous plate; 10. First coupling; 11. Drive shaft assembly; 111. Second drive shaft; 12. Magnetofluid; 121. Central shaft; 13. Second bevel gear; 14. Third drive component; 15. Transition wheel assembly; 151. Mounting base; 152. First rotating shaft; 153. Second rotating shaft; 154. First rotating wheel; 155. Third bevel gear; 156. Second rotating wheel; 157. Transition wheel; 158. Drive belt; 159. Second coupling. Detailed Implementation

[0036] The following are specific embodiments of this utility model, and the technical solution of this utility model will be further described in conjunction with the accompanying drawings. However, this utility model is not limited to these embodiments, and the following embodiments do not limit the utility model involved in the claims. In addition, all combinations of features described in the embodiments are not necessarily necessary for the solution of the utility model.

[0037] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0038] like Figures 1 to 8 As shown, the transfer device provided in this embodiment includes a steering plate 1, a first driving member 4, and a second driving member 5. A set of transmission wheels 2 is rotatably mounted on opposite sides of the steering plate 1 along the horizontal direction. Two sets of transmission wheels 2 located in the middle of the steering plate 1 and facing each other are connected by a first transmission shaft 3. The first driving member 4 is located at the bottom of the steering plate 1, and its output end is connected to the steering plate 1. The first driving member 4 is used to drive the steering plate 1 to rotate around a vertical line. The second driving member 5 is located at the bottom of the steering plate 1, and its output end is connected to the first transmission shaft 3 through a pair of first bevel gears 6. The second driving member 5 is used to drive the first transmission shaft 3 to rotate around its own axis, so that the transmission wheels 2 drive the carrier plate to move horizontally.

[0039] like Figure 4 and Figure 5 As shown, specifically, when the carrier plate does not need to turn, the first drive unit 4 pauses driving and the second drive unit 5 starts. The second drive unit 5 drives two sets of transmission wheel sets 2 located in the middle of the steering plate 1 and opposite each other through the first transmission shaft 3. The transmission wheel sets 2 arranged on both sides of the steering plate 1 transport the carrier plate downstream. When the carrier plate needs to turn, the first drive unit 4 drives the steering plate 1 to rotate around a vertical line. The transmission wheel sets 2 and the carrier plate follow the steering plate 1 to turn. After the carrier plate completes the turning, the first drive unit 4 pauses driving and the second drive unit 5 starts, thereby transporting the carrier plate downstream in another direction.

[0040] In the forward direction of the carrier plate, the conveyor wheel set 2 on the steering plate 1 supports the left and right sides of the carrier plate. The front and rear sides of the carrier plate do not contact the conveyor wheel set 2, which can reduce powder shedding and extend the maintenance cycle.

[0041] In this embodiment, both the first driving component 4 and the second driving component 5 are motors.

[0042] In this embodiment, five sets of transmission wheel sets 2 are arranged on each of the opposite sides of the steering plate 1. Among the five sets of transmission wheel sets 2 located on the same side of the steering plate 1, the transmission wheel set 2 located in the middle position is connected to one end of the first transmission shaft 3. Adjacent sets of transmission wheel sets 2 are connected by a synchronous belt 22.

[0043] In other embodiments, the number of transmission wheel sets 2 can be set according to actual needs. For example, two, three, four or even more transmission wheel sets 2 can be set on opposite sides of the steering plate 1.

[0044] Optionally, the conveyor wheel set 2 includes a conveyor wheel 21, a support shaft, and a synchronous wheel 23. The support shaft is rotatably mounted on the steering plate 1. The conveyor wheel 21 is fixedly sleeved on the end of the support shaft away from the rotation center of the steering plate 1. The synchronous wheel 23 is fixedly sleeved on the end of the support shaft close to the rotation center of the steering plate 1. The diameter of the conveyor wheel 21 is larger than the diameter of the synchronous wheel 23. The synchronous wheels 23 between two adjacent sets of conveyor wheel sets 2 are connected by a synchronous belt 22. The conveyor wheel 21 supports the side of the carrier plate and conveys the carrier plate. There is a gap between the synchronous wheel 23 and the carrier plate to prevent the synchronous wheel 23 or the synchronous belt 22 from contacting the bottom surface of the carrier plate and reduce powder shedding.

[0045] Optionally, a transmission shaft sleeve 71 is connected between the output end of the first drive member 4 and the steering plate 1; the transmission shaft sleeve 71 is fitted with a drive shaft 72, the bottom end of the drive shaft 72 is connected to the output end of the second drive member 5, a first bevel gear 6 is fixedly fitted at the top end of the drive shaft 72, and another first bevel gear 6 is fixedly fitted on the first transmission shaft 3, and the two first bevel gears 6 mesh and are connected for transmission.

[0046] By setting the first drive member 4 and the second drive member 5 coaxially, the layout can be optimized. The first drive member 4 can drive the steering plate 1 to turn through the transmission shaft sleeve 71, and the second drive member 5 can drive the first transmission shaft 3 to rotate through the drive shaft 72 and the two first bevel gears 6.

[0047] When the angular velocity of the output shaft of the first drive member 4 is equal to that of the output shaft of the second drive member 5, the angle of rotation of the transmission shaft sleeve 71 around the vertical line, the angle of rotation of the steering plate 1 around the vertical line, the angle of rotation of the first transmission shaft 3 around the vertical line, and the angle of rotation of the drive shaft 72 around the vertical line are always equal. Therefore, the meshing position of the first bevel gear 6 fixedly installed on the first transmission shaft 3 and the first bevel gear 6 fixedly installed on the drive shaft 72 remains unchanged, and the two first bevel gears 6 do not rotate relative to each other, thereby preventing the first transmission shaft 3 from rotating around itself and preventing the phenomenon of the first transmission shaft 3 driving the transmission wheel group 2 and the carrier plate during the steering process.

[0048] Maintaining the angular velocity of the output shaft of the first drive component 4 and the output shaft of the second drive component 5 at all times is quite difficult and relatively expensive.

[0049] To prevent the first drive shaft 3 from driving the transmission wheel assembly 2 and the carrier plate during steering, and to reduce control difficulty, in this embodiment, a synchronization plate 9 is connected between the second drive component 5 and the drive shaft sleeve 71. The synchronization plate 9 is used to drive the second drive component 5 and the drive shaft 72 to rotate synchronously with the drive shaft sleeve 71. In this embodiment, the synchronization plate 9 has a barrel-shaped structure, and its side wall has a hollow opening.

[0050] When steering is not required, the first drive component 4 stops outputting power while the second drive component 5 continues to output power. The drive shaft 72, the two first bevel gears 6, the first transmission shaft 3, and the transmission wheel set 2 rotate synchronously to achieve the transfer of the carrier plate. When steering is required, the first drive component 4 continues to output power while the second drive component 5 stops outputting power. The transmission shaft sleeve 71, the steering plate 1, the first transmission shaft 3, the synchronization plate 9, the second drive component 5, and the drive shaft 72 rotate synchronously around a vertical line. Therefore, the meshing position of the first bevel gear 6 fixedly installed on the first transmission shaft 3 and the first bevel gear 6 fixedly installed on the drive shaft 72 remains relatively unchanged, and the two first bevel gears 6 do not rotate relative to each other. This avoids the first transmission shaft 3 rotating around itself and prevents the phenomenon of the first transmission shaft 3 driving the transmission wheel set 2 and the carrier plate during the steering process.

[0051] In this embodiment, the first drive shaft 3 and the transmission wheel assembly 2 are connected by a first coupling 10, which facilitates the assembly and disassembly of the first drive shaft 3 and the transmission wheel assembly 2. The coupling does not require lubricant and can be used in a vacuum environment.

[0052] In some other embodiments, the first drive shaft 3 and the transmission wheel set 2 are connected by a clutch. Without a synchronizing plate 9 or by controlling the angular velocities of the first drive member 4 and the second drive member 5 to be equal, by setting a clutch between the first drive shaft 3 and the transmission wheel set 2, when steering is required, the first drive member 4 continuously outputs power while the second drive member 5 pauses power output. At this time, the clutch disconnects the power transmission between the first drive shaft 3 and the transmission wheel set 2. The first drive shaft 3 rotates vertically following the steering plate 1. The first bevel gear 6, fixedly mounted on the first drive shaft 3, rotates around the central axis of the drive shaft 72 and engages with the first bevel gear 6 fixedly mounted on the drive shaft 72. Therefore, the first drive shaft 3 still rotates around its own axis at this time. However, since the clutch has disconnected the power transmission between the first drive shaft 3 and the transmission wheel set 2, the first drive shaft 3 cannot drive the transmission wheel set 2, thereby preventing the carrier plate from moving relative to the transmission wheel set 2.

[0053] Optionally, a reducer 8 is installed at the output end of the second drive unit 5, and the drive shaft 72 is connected to the reducer 8 in a transmission connection.

[0054] This embodiment also provides a vacuum transfer device, including a vacuum chamber 100 and the transfer device as described above. The side wall of the vacuum chamber 100 is provided with four or more openings 101, at least one opening 101 is a feed inlet, at least one opening 101 is a discharge outlet, the steering plate 1 is disposed inside the vacuum chamber 100, and the first driving member 4 and the second driving member 5 are both located outside the vacuum chamber 100.

[0055] In this embodiment, the sidewall of the vacuum chamber 100 has four openings 101, and the included angle between two adjacent openings 101 is 90 degrees. In other embodiments, the sidewall of the vacuum chamber 100 has five, six, or even more openings 101, which can be set according to actual needs.

[0056] The vacuum chamber 100 needs to maintain a vacuum level. Therefore, in this embodiment, the first driving member 4 and the second driving member 5 are both located outside the vacuum chamber 100 to avoid affecting the vacuum level inside the vacuum chamber 100, and also to facilitate the disassembly and maintenance of the first driving member 4 and the second driving member 5.

[0057] Optionally, a magnetic fluid assembly 7 is sealed and installed on the bottom plate of the vacuum chamber 100. The magnetic fluid assembly 7 includes a transmission shaft sleeve 71 and a drive shaft 72. The transmission shaft sleeve 71 is connected between the output end of the first drive member 4 and the steering plate 1. The drive shaft 72 passes through the inside of the transmission shaft sleeve 71. The bottom end of the drive shaft 72 is connected to the output end of the second drive member 5. A first bevel gear 6 is fixedly sleeved on the top end of the drive shaft 72. Another first bevel gear 6 is fixedly sleeved on the first transmission shaft 3. The two first bevel gears 6 mesh and are connected for transmission.

[0058] The magnetofluid assembly 7 also includes a housing 73, which is sealed and fixedly installed on the base plate of the vacuum chamber 100 to ensure the vacuum level inside the vacuum chamber 100; the specific functions of the transmission shaft sleeve 71 and the drive shaft 72 are as described above and will not be repeated here.

[0059] Optionally, a transition wheel set 15 is rotatably installed on both sides of each opening 101. The transition wheel set 15 is located between the opening 101 and the steering plate 1 and is used to support the carrier plate.

[0060] Since the steering plate 1 needs to rotate inside the vacuum chamber 100, the distance between the side wall of the vacuum chamber 100 and the steering plate 1 needs to be controlled within a preset range to avoid the steering plate 1 hitting the side wall of the vacuum chamber 100 during the turning process. When the distance between the side wall of the vacuum chamber 100 and the steering plate 1 increases, the distance between the opening 101 and the steering plate 1 also increases accordingly. In order to avoid the carrier plate from being suspended in this range, this embodiment uses the transition wheel set 15 to support the carrier plate.

[0061] In this embodiment, the horizontal height of the transmission wheel set 2 is equal to the horizontal height of the transition wheel set 15 to ensure that the carrier plate is in a horizontal state.

[0062] like Figures 6 to 8 As shown, optionally, a drive shaft assembly 11 is provided inside the vacuum chamber 100, and the drive shaft assembly 11 is connected to the transition wheel group 15. A magnetic fluid 12 is sealed and installed on the bottom plate of the vacuum chamber 100. The magnetic fluid 12 includes a central shaft 121. The central shaft 121 and the drive shaft assembly 11 are connected by a pair of second bevel gears 13. A third drive member 14 is provided outside the vacuum chamber 100, and the output end of the third drive member 14 is connected to the central shaft 121.

[0063] In this embodiment, the third driving component 14 is a motor. The third driving component 14 drives the central shaft 121 to rotate. The second bevel gear 13 mounted on the central shaft 121 and the second bevel gear 13 mounted on the transmission shaft assembly 11 mesh and transmit power. Then, the transmission shaft assembly 11 drives the transition gear group 15.

[0064] Optionally, the transition wheel assembly 15 includes a mounting base 151, a first rotating shaft 152, and a second rotating shaft 153. Both the first rotating shaft 152 and the second rotating shaft 153 are rotatably mounted on the mounting base 151. The second rotating shaft 153 is arranged parallel above the first rotating shaft 152. The first rotating shaft 152 is fixedly sleeved with a first rotating wheel 154 and a third bevel gear 155. The second rotating shaft 153 is fixedly sleeved with a second rotating wheel 156 and a transition wheel 157. A transmission belt 158 ​​is wound between the first rotating wheel 154 and the second rotating wheel 156. Two sets of transition wheel assemblies 15 are provided between two adjacent openings 101. The two sets of transition wheel assemblies 15 located between two adjacent openings 101 are connected by a pair of third bevel gears 155 meshing and transmitting power. The transition wheel 157 is used to receive the carrier plate; the drive shaft assembly 11 includes at least three second drive shafts 111, the vacuum chamber 100 is provided with at least four openings 101, the number of second drive shafts 111 is one less than the number of openings 101, and at least three openings 101 are arranged in a one-to-one correspondence with at least three second drive shafts 111: in two sets of transition wheel groups 15 and one second drive shaft 111 corresponding to the same opening 101, one end of the second drive shaft 111 is connected to the first rotating shaft 152 of one set of transition wheel groups 15 through a second coupling 159, and the other end of the second drive shaft 111 is connected to the first rotating shaft 152 of another set of transition wheel groups 15 through another second coupling 159.

[0065] In this embodiment, the vacuum chamber 100 is provided with four openings 101, and three second drive shafts 111 are provided. The three second drive shafts 111 correspond one-to-one with the three openings 101. One of the three second drive shafts 111 is fixedly fitted with a second bevel gear 13 to transmit power from the third drive member 14.

[0066] When the second drive shaft 111 rotates, it can drive the first rotating shaft 152 through the second coupling 159. The first rotating shaft 152 sequentially drives the first rotating wheel 154, the transmission belt 158, the second rotating wheel 156, the second rotating shaft 153, and the transition wheel 157. The transition wheel 157 drives the carrier plate. At the same time, the first rotating shaft 152 can also drive another set of transition wheel sets 15 through two third bevel gears 155.

[0067] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A transfer device, characterized by include: A steering plate (1) is provided, on which two sets of transmission wheels (2) are rotatably mounted on opposite sides along the horizontal direction. The two sets of transmission wheels (2) located in the middle of the steering plate (1) and opposite to each other are connected by a first transmission shaft (3). The first driving member (4) is disposed at the bottom of the steering plate (1). The output end of the first driving member (4) is connected to the steering plate (1). The first driving member (4) is used to drive the steering plate (1) to rotate around a vertical line. The second drive member (5) is located at the bottom of the steering plate (1). The output end of the second drive member (5) is connected to the first transmission shaft (3) by a pair of first bevel gears (6). The second drive member (5) is used to drive the first transmission shaft (3) to rotate around its own axis so that the transmission wheel group (2) drives the carrier plate to move in the horizontal direction.

2. The transfer device according to claim 1, characterized in that, A transmission shaft sleeve (71) is connected between the output end of the first driving member (4) and the steering plate (1); The drive shaft sleeve (71) is fitted with a drive shaft (72), the bottom end of the drive shaft (72) is connected to the output end of the second drive member (5), the top end of the drive shaft (72) is fixedly fitted with a first bevel gear (6), the first drive shaft (3) is fixedly fitted with another first bevel gear (6), and the two first bevel gears (6) are meshed and connected for transmission.

3. The transfer device according to claim 2, characterized in that, A synchronization plate (9) is connected between the second driving member (5) and the transmission shaft sleeve (71). The synchronization plate (9) is used to drive the second driving member (5) and the driving shaft (72) to rotate synchronously with the transmission shaft sleeve (71).

4. The transfer device according to claim 3, characterized in that, The first drive shaft (3) is connected to the transmission wheel assembly (2) via a first coupling (10).

5. The transfer device according to claim 2, characterized in that, The first drive shaft (3) is connected to the transmission wheel set (2) via a clutch.

6. A vacuum transfer device, characterized in that, Includes a vacuum chamber (100) and a transfer device as described in any one of claims 1-5, wherein the side wall of the vacuum chamber (100) is provided with four or more openings (101), at least one of the openings (101) is a feed inlet, at least one of the openings (101) is a discharge outlet, the steering plate (1) is disposed inside the vacuum chamber (100), and the first driving member (4) and the second driving member (5) are both located outside the vacuum chamber (100).

7. The vacuum transfer device according to claim 6, characterized in that, The vacuum chamber (100) has a magnetic fluid assembly (7) sealed on its bottom plate. The magnetic fluid assembly (7) includes a transmission shaft sleeve (71) and a drive shaft (72). The transmission shaft sleeve (71) is connected between the output end of the first drive member (4) and the steering plate (1). The drive shaft (72) passes through the inside of the transmission shaft sleeve (71). The bottom end of the drive shaft (72) is connected to the output end of the second drive member (5). A first bevel gear (6) is fixedly sleeved on the top end of the drive shaft (72). Another first bevel gear (6) is fixedly sleeved on the first transmission shaft (3). The two first bevel gears (6) are meshed and connected for transmission.

8. The vacuum transfer device according to claim 6, characterized in that, Each of the openings (101) has a transition wheel assembly (15) rotatably mounted on both sides. The transition wheel assembly (15) is located between the opening (101) and the steering plate (1) and is used to support the load plate.

9. The vacuum transfer device according to claim 8, characterized in that, The vacuum chamber (100) is equipped with a drive shaft assembly (11) inside, which is connected to the transition wheel group (15) for transmission. The bottom plate of the vacuum chamber (100) is sealed with a magnetic fluid (12), which includes a central shaft (121). The central shaft (121) is connected to the drive shaft assembly (11) through a pair of second bevel gears (13) for transmission. The vacuum chamber (100) is equipped with a third drive member (14) outside, and the output end of the third drive member (14) is connected to the central shaft (121).

10. The vacuum transfer device according to claim 9, characterized in that, The transition wheel assembly (15) includes a mounting base (151), a first rotating shaft (152), and a second rotating shaft (153). The first rotating shaft (152) and the second rotating shaft (153) are rotatably mounted on the mounting base (151). The second rotating shaft (153) is arranged parallel above the first rotating shaft (152). The first rotating shaft (152) is fixedly fitted with a first rotating wheel (154) and a third bevel gear (155). The second rotating shaft (153) is fixedly fitted with a second rotating wheel (156) and a transition wheel (157). A transmission belt (158) is wound between the first rotating wheel (154) and the second rotating wheel (156). Two sets of the transition wheel assemblies (15) are provided between two adjacent openings (101). The two sets of transition wheel assemblies (15) located between two adjacent openings (101) are connected by a pair of third bevel gears (155) through meshing transmission. The transition wheel (157) is used to support the carrier plate. The drive shaft assembly (11) includes at least three second drive shafts (111), and the vacuum chamber (100) is provided with at least four openings (101). The number of second drive shafts (111) is one less than the number of openings (101), and at least three openings (101) are arranged in a one-to-one correspondence with at least three second drive shafts (111). In the two sets of transition wheel sets (15) corresponding to the same opening (101) and a second drive shaft (111), one end of the second drive shaft (111) is connected to the first rotating shaft (152) of one set of transition wheel sets (15) via a second coupling (159), and the other end of the second drive shaft (111) is connected to the first rotating shaft (152) of the other set of transition wheel sets (15) via another second coupling (159).

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