Adjustable CVD tooling for multiple shape size products

Abstract

The utility model discloses a kind of adjustable CVD tool for multi-shape size product, it is related to chemical vapor deposition equipment technical field;Including graphite gas dispersion disc, at least one group of stand, support cross bar;The graphite gas dispersion disc is uniformly provided with multiple parallel grating;The bottom of stand is detachably connected between two grating;Hollow groove is set on stand along its length direction;At least one support cross bar is detachably connected on hollow groove;The end of support cross bar away from hollow groove is provided with round head structure, and third nut is threadedly connected on support cross bar;The utility model can be aimed at a small amount of different shape size product when coating in chemical vapor deposition, improve the production efficiency of coating product, reduce the waste of tooling, save cost, and strong flexibility.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition equipment, in particular to an adjustable CVD tooling for products of multiple shapes and sizes. Background Art

[0002] CVD technology is a material preparation method in which volatile compounds containing constituent elements of a film or coating react with other gas-phase substances under specific conditions to deposit solid substances on the surface of a substrate, thereby endowing materials with specific properties such as wear resistance, heat resistance and corrosion resistance without changing the composition and strength of the matrix. It has been widely used in many industrial fields. With the rapid development of the semiconductor industry, more and more products with different shapes and sizes have emerged in the industry, and these products generally require coating treatment through CVD technology in the production process to meet performance requirements. To achieve efficient and high-quality CVD coating, it is necessary to be equipped with matching tooling components, whose design directly affects the contact area between the product and the atmosphere and the deposition efficiency.

[0003] However, in the current field of CVD technology, tooling design has obvious limitations. When it is necessary to sample a small number of products, due to the differences in shape and size of different products, separate tooling needs to be designed for each product during deposition operation. This method can achieve the optimal deposition effect for specific products, but its shortcomings are also prominent. When replacing different deposited products, tooling needs to be designed every time, which not only greatly prolongs the pre-preparation time, increases the design cost, leads to low production efficiency, but also causes excessive waste of materials. Utility Model Content

[0004] The utility model overcomes the deficiencies of the prior art, and proposes an adjustable CVD tooling for products of multiple shapes and sizes, which can perform coating sampling for a small number of products of different shapes and sizes during chemical vapor deposition, improves the production efficiency of coated products, reduces the waste of tooling, and saves costs.

[0005] In order to achieve the above object, the utility model is implemented through the following technical solution: An adjustable CVD tooling for products of multiple shapes and sizes comprises a graphite gas diffusion plate, at least one set of upright columns and a supporting cross bar; a plurality of parallel grids are uniformly arranged on the graphite gas diffusion plate; the bottom of the upright column is detachably connected between two grids; a hollow groove is arranged on the upright column along the length direction thereof; at least one supporting cross bar is detachably connected to the hollow groove; one end of the supporting cross bar away from the hollow groove is provided with a round head structure, and a third nut is threadedly connected to the supporting cross bar.

[0006] Further, the grid is of a "convex"-shaped structure.

[0007] Furthermore, the column is positioned between the two grilles, and the bottom of the column is provided with threaded holes, which are then fastened to the graphite diffuser plate by screws and nuts.

[0008] Furthermore, one end of the support crossbar extends into the hollow groove and is fixed by a second nut.

[0009] Furthermore, the supporting crossbar includes a first threaded rod, a straight rod, and a second threaded rod connected in sequence; the diameter of the first threaded rod is smaller than the width of the hollow groove on the column, and the first threaded rod is engaged with the hollow groove on the column and fixed by a second nut.

[0010] Furthermore, the diameter of the straight rod is greater than the width of the hollow groove on the column.

[0011] Furthermore, the end of the second threaded rod away from the straight rod has the aforementioned round head structure, and the diameter of the second threaded rod is smaller than the diameter of the first threaded rod; the third nut is connected to the second threaded rod.

[0012] Furthermore, the graphite diffuser plate, column, and support crossbar are all made of graphite material.

[0013] The beneficial effects of this utility model compared to the prior art are as follows: (1) The tooling of this utility model can freely select the number of columns and supporting crossbars according to the shape and size of the coated product. At the same time, the distance between the columns can be adjusted according to actual needs, and the vertical height of the supporting crossbars can be adjusted according to actual needs.

[0014] (2) The support crossbar of the tooling of this utility model is cylindrical and has a line contact with the contact surface of the annular coating product. The right end of the support crossbar is designed with a round head structure and has a point contact with the contact surface of the plate-shaped coating product. The contact area is small, which increases the contact area between the product and the process gas and improves the thickness uniformity of the CVD coating on the product surface.

[0015] (3) The graphite diffuser plate of this utility model tool is designed with a grid structure, which can be applied to CVD chamber structures with horizontal and vertical air intake and exhaust.

[0016] (4) The tooling of this utility model is easy to install and disassemble, and can be reused multiple times, which effectively reduces time and design costs.

[0017] (5) This utility model tooling is applicable to products of different sizes, such as ring and plate, and can meet the needs of depositing multiple different products in one furnace. Attached Figure Description

[0018] Figure 1 This is a front view of the adjustable CVD fixture proposed in this utility model; Figure 2 This is a perspective view of the adjustable CVD fixture proposed in this utility model; Figure 3 This is a schematic diagram of the graphite diffuser disc of the adjustable CVD fixture proposed in this utility model. Figure 4 This is a schematic diagram of the column structure of the adjustable CVD fixture proposed in this utility model; Figure 5 This is a schematic diagram of the support crossbar of the adjustable CVD fixture proposed in this utility model; Figure 6 This is a schematic diagram of the structure of the hanging ring-shaped coated product in Example 2; Figure 7 This is a schematic diagram of the structure of the fixed plate-shaped coating product in Example 1; Legend: 1. Graphite diffuser plate; 2. Column; 3. Screw; 4. First nut; 5. Second nut; 6. Support crossbar; 7. Third nut; 8. Annular coating product; 9. Plate coating product. Detailed Implementation

[0019] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto. Example 1

[0020] See Figures 1 to 5 This embodiment proposes an adjustable CVD fixture for products of various shapes and sizes, including two sets of columns 2 and a graphite diffuser 1; Specifically, such as Figure 2 and Figure 3 As shown, the graphite gas diffuser 1 is uniformly provided with multiple parallel "convex" shaped grids; the grids of the graphite gas diffuser 1 are "convex" shaped structures that are narrow at the top and wide at the bottom, which makes it easy to clamp the column 2 between two grids. Furthermore, when the deposition furnace is inlet and outlet of gas in the vertical direction, the porous grid design of the graphite gas diffuser 1 can ensure normal airflow.

[0021] The column 2 is vertically positioned between the two "U"-shaped grid structures of the graphite diffuser plate 1. The column 2 can be installed at any position on the graphite diffuser plate 1 using the screw 3 and the first nut 4. The spacing between the two columns 2 can be adjusted according to the size of the coated product. Specifically, the bottom of the column 2 has threaded holes, which are then fastened to the graphite diffuser plate 1 using the screw 3 and the first nut 4.

[0022] like Figure 1 As shown, each set of columns 2 is equipped with two sets of upper and lower support crossbars 6. The support crossbars 6 are fastened to any height position of the column 2 using the second nut 5. The spacing between the two support crossbars 6 is adjusted according to the size of the coated product. The support crossbars 6 are used to fix, support, or hang the coated product.

[0023] Specifically, such as Figure 4 As shown, the column 2 is provided with two hollow grooves for cooperating with the support crossbar 6; one end of the support crossbar 6 extends into the hollow groove and is fixed by the second nut 5.

[0024] like Figure 5 As shown, the support crossbar 6 is divided into three sections: a first threaded rod 61, a straight rod 62, and a second threaded rod 63 connected in sequence. The diameter of the first threaded rod 61 is slightly smaller than the width of the hollow groove on the column 2. The first threaded rod 61 is used to connect with the hollow groove on the column 2. The second nut 5 shown engages with the first threaded rod 61 to fasten the support crossbar 6 to the column 2. The diameter of the straight rod 62 is slightly larger than the width of the hollow groove on the column 2 and can be used for limiting movement. The end of the second threaded rod 63 away from the straight rod 62 has a rounded head structure, which can be used to contact the coated product and limit its movement. The diameter of the second threaded rod 63 is as thin as possible while ensuring strength. The rounded head structure and the thinner second threaded rod 63 reduce the contact area between the support crossbar 6 and the product, reducing the impact on the gas flow field and ensuring the coating effect. A third nut 7 is also connected to the second threaded rod 63, which can limit the sliding of the coated product during the coating process.

[0025] like Figure 1 As shown, for narrower plate-shaped coated products, when using the tooling, the coated product can be placed between the upper and lower support crossbars 6 of a column 2. Specifically, the bottom of the coated product can be placed on the second threaded rod 63 of the lower support crossbar 6 of the column 2, and then the position of the upper support crossbar 6 of the column 2 can be adjusted so that the second threaded rod 63 of the upper support crossbar 6 cooperates with the second threaded rod 63 of the lower support crossbar 6 to clamp the coated product, and then it can be placed in the deposition furnace for coating operation.

[0026] like Figure 2 As shown, for wider plate-shaped coating products, two columns 2 can be used to fix the two columns 2 in the same grid of the graphite diffuser plate 1. Then, the wider plate-shaped coating product is clamped and limited by four support crossbars 6 in the same way as the narrower plate-shaped coating product. After that, it can be placed in the deposition furnace for coating operation.

[0027] like Figure 7As shown, to improve the stability of the plate-shaped coated product during coating operations, or for plate-shaped coated products with greater height, at least three columns 2 are mounted on the graphite gas distribution plate 1. Two columns 2 are fixed within the same grid of the graphite gas distribution plate 1, and the third column 2 is positioned opposite to and between the first two columns 2, forming a triangular distribution structure. The length of the upper support crossbar 6 of the two columns 2 within the same grid is slightly shorter than that of the lower support crossbar 6. The distance between the two columns 2 within the same grid is adjusted according to the length of the coated product to support the plate-shaped coated product 9. Specifically, the bottom of the plate-shaped coated product 9 is placed on the second threaded rod 63 of the lower support crossbar 6 of the two columns 2 within the same grid. The rounded ends of the upper support crossbar 6 of these three columns 2 abut against the sides of the plate-shaped coated product 9. Furthermore, the third nut 7 provided on the lower support crossbar 6 prevents the bottom of the plate-shaped coated product 9 from sliding. Example 2

[0028] This embodiment proposes an adjustable CVD fixture for products of various shapes and sizes, suitable for annular coated products. The difference between this embodiment and Embodiment 1 is that at least one column 2 is installed on the graphite gas distribution plate 1, and at least one support crossbar 6 is installed and fixed on the column 2. The annular coated product is hung on the support crossbar 6. Furthermore, the annular coated product 8 can be limited by the third nut 7 to prevent the product from falling off due to airflow during the coating process.

[0029] Furthermore, because the furnace temperature is high during the chemical vapor deposition process, in the above embodiments, the graphite gas diffuser 1, column 2, and support crossbar 6 are preferably made of high-temperature resistant and non-deformable isostatic graphite material; and in order to avoid assembly angle deviation and ensure assembly strength, the screw 3, first nut 4, second nut 5, and third nut 7 are all made of high-strength carbon-carbon composite material.

[0030] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. An adjustable CVD fixture for products of various shapes and sizes, characterized in that, Comprising a graphite gas diffusion disc (1), at least one set of upright columns (2), and support cross bars (6); a plurality of mutually parallel gratings are uniformly arranged on the graphite gas diffusion disc (1); the bottom of the upright column (2) is detachably connected between two gratings; a hollow groove is arranged on the upright column (2) along the length direction thereof; at least one support cross bar (6) is detachably connected to the hollow groove; an end of the support cross bar (6) away from the hollow groove is provided with a round head structure, and a third nut (7) is threadedly connected to the support cross bar (6).

2. The adjustable CVD fixture for products of multiple shapes and sizes according to claim 1, characterized in that, The grating has a "convex" shape structure.

3. An adjustable CVD fixture for products of multiple shapes and sizes according to claim 2, characterized in that, The upright column (2) is clamped between two gratings, a threaded hole is provided at the bottom of the upright column (2), and the upright column is fastened and connected to the graphite gas diffusion disc (1) through a screw rod (3) and a nut (4).

4. The adjustable CVD fixture for products of multiple shapes and sizes according to claim 1, characterized in that, One end of the support cross bar (6) extends into the hollow groove and is fixed by a second nut (5).

5. An adjustable CVD fixture for products of multiple shapes and sizes according to claim 4, characterized in that, The support cross bar (6) comprises a first threaded rod (61), a straight rod (62) and a second threaded rod (63) which are connected in sequence; the diameter of the first threaded rod (61) is smaller than the width of the hollow groove on the upright column (2), the first threaded rod (61) cooperates with the hollow groove on the upright column (2), and the first threaded rod (61) is fixed through the second nut (5).

6. An adjustable CVD fixture for products of multiple shapes and sizes according to claim 5, characterized in that, The diameter of the straight rod (62) is larger than the width of the hollow groove on the upright column (2).

7. An adjustable CVD fixture for products of multiple shapes and sizes according to claim 6, characterized in that, An end of the second threaded rod (63) away from the straight rod (62) is the aforementioned round head structure, the diameter of the second threaded rod (63) is smaller than the diameter of the first threaded rod (61); the aforementioned third nut (7) is fittingly connected to the second threaded rod (63).

8. An adjustable CVD fixture for products of multiple shapes and sizes according to claim 1, characterized in that, The graphite gas diffusion disc (1), the upright columns (2) and the support cross bars (6) are all made of graphite material.

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