Deposition apparatus

Abstract

The utility model relates to monatomic or cluster particle deposition technical field, especially a kind of deposition device. The deposition device includes deposition chamber and collection unit, the deposition chamber has a gas inlet end and a gas outlet end, a first assembly structure is arranged at the gas inlet end, and the first assembly structure is used to assemble different sizes of gas inlet pipe. The collection unit is detachably assembled to the side wall of the deposition chamber by a second assembly structure, one end of the collection unit extends into the deposition chamber, and its collection site faces the gas inlet end. Based on this, the deposition device of the utility model can assemble different sizes of gas inlet pipe, so that the sample collection distance can be flexibly adjusted.

Description

Technical Field

[0001] This utility model relates to the field of single-atom or cluster particle deposition technology, and in particular to a deposition apparatus. Background Technology

[0002] The deposition apparatus is in a sealed connection with the beam outlet of the single-atom / cluster generator to receive the single-atom / cluster beam. One axial end of the deposition chamber is the gas inlet, which is sealed to the beam outlet, and the other end is the gas outlet, used to discharge the carrier gas. A collection unit is installed inside the deposition chamber for directional deposition of clusters. Existing deposition apparatuses have a direct sealed connection between the gas inlet and the beam outlet, resulting in low versatility and flexibility. Utility Model Content

[0003] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide a deposition device with higher flexibility and versatility.

[0004] To solve the above-mentioned technical problems, the present invention provides a deposition apparatus, comprising: A deposition chamber having an air inlet and an air outlet, wherein a first assembly structure is provided at the air inlet for assembling air inlet pipes of different sizes; and A collection unit is detachably mounted to the side wall of the deposition chamber via a second assembly structure, with one end of the collection unit extending into the deposition chamber and its collection position facing the air inlet.

[0005] Furthermore, the first assembly structure includes a first flange disposed at the air inlet end and a plurality of matching second flanges, wherein one of the plurality of second flanges can be detachably connected to the first flange; each second flange is connected to the air inlet pipe, and the length of the air inlet pipe connected to each second flange is different; or The first assembly structure includes a first flange disposed at the air inlet end and a second flange detachably connected thereto. The second flange can be sealed and detachably connected to air inlet pipes of different lengths. A first sealing ring is provided between the first flange and the second flange.

[0006] Furthermore, the first flange and the second flange are threaded together.

[0007] Furthermore, the first flange and the second flange are fastened together by a first clamp to achieve axial fixation of the first flange and the second flange.

[0008] Furthermore, the opposite sides of the first flange and the second flange have a first inclined surface and a second inclined surface that are inclined outward in opposite directions; the inner periphery of the first clamp has a first pressing surface and a second pressing surface for pressing the first inclined surface and the second inclined surface in a clamped state.

[0009] Furthermore, the first clamp has a first ring wall and a second ring wall spaced apart along the axial direction. The first ring wall has an inner periphery forming a first pressing surface for pressing the first inclined surface, and the inner periphery of the second ring wall forms a second pressing surface for pressing the second inclined surface.

[0010] Furthermore, the side wall of the deposition chamber is sealed with an assembly tube perpendicular to its axis, and the second assembly structure is located at the end of the assembly tube away from the deposition chamber.

[0011] Furthermore, the second assembly structure includes a third flange disposed at the end of the assembly tube away from the deposition chamber; the inner end of the collection unit extends into the deposition chamber through the assembly tube, the outer end of the collection unit is detachably connected to the third flange, and a second sealing ring is provided between the outer end of the collection unit and the third flange.

[0012] Furthermore, the outer end of the collecting unit is provided with a fourth flange whose outer diameter is adapted to the outer diameter of the third flange, and the fourth flange is threadedly connected to the third flange; or, the outer end of the collecting unit is provided with a fourth flange whose outer diameter is adapted to the outer diameter of the third flange, and the fourth flange and the third flange are fastened together by a second clamp to achieve axial fixation of the fourth flange and the third flange.

[0013] Furthermore, the axis of the exhaust pipe is perpendicular to the axis of the intake end; the collection position is located between the intake end and the exhaust end, and its surface faces the intake end.

[0014] In summary, the deposition device of this utility model has at least the following beneficial effects: (1) By setting a first assembly structure at the air inlet end of the deposition chamber, the first assembly structure can assemble air inlet pipes of different sizes, thereby making the sample collection distance between the collection unit and the beam outlet of the cluster generation device adjustable, which can increase the versatility, applicability and flexibility of the deposition device. (2) The first assembly structure realizes the fastening and loosening of the first flange and the second flange through the first clamp. Compared with the traditional threaded connection method, it is faster to disassemble and assemble and has higher assembly efficiency. (3) The air outlet pipe is configured on the side wall of the deposition chamber, and its axis is perpendicular to the axis of the deposition chamber (perpendicular to the axis of the air inlet end). When the deposition chamber is horizontally connected to the beam outlet, the air outlet faces directly downwards so as to be buried below the liquid surface. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of an embodiment of the deposition apparatus of this utility model.

[0016] Figure 2 yes Figure 1 Exploded view.

[0017] Figure 3 yes Figure 2 A structural diagram from another perspective.

[0018] Figure 4 yes Figure 1 Sectional view of AA.

[0019] Figure 5 yes Figure 4 A magnified schematic diagram of part A in the middle.

[0020] The diagrams in the instruction manual are labeled as follows: Sedimentation chamber 100; air inlet 101; air outlet 102; air outlet pipe 110; air inlet pipe 120; assembly pipe 130; Collection unit 200; collection seat 210; fourth flange 220; fourth inclined surface 221; second annular groove 222; collection position 230; First assembly structure 300; First sealing ring 301; First flange 310; First inclined surface 311; Second flange 320; Second inclined surface 321; First clamp 330; First annular wall 331; First pressing surface 3311; Second annular wall 332; Second pressing surface 3321; Second assembly structure 400; second sealing ring 401; sealing ring 401a; sealing gasket 401b; third flange 410; third inclined surface 411; first annular groove 412; second clamp 430; third annular wall 431; third pressing surface 4311; fourth annular wall 432; fourth pressing surface 4321. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] The following disclosure provides various embodiments or examples of different features for implementing this utility model. Specific examples of components and arrangements will be described below to simplify the utility model. Of course, these are merely examples and are not intended to limit the utility model. For example, in the following description, forming a first component above or on a second component may include embodiments where the first and second components are in direct contact, or embodiments where other components may be formed between the first and second components such that the first and second components are not in direct contact. Additionally, reference numerals and / or characters may be repeated in various instances of the utility model. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations.

[0023] Furthermore, spatial relation terms such as "below," "under," "below," "above," and "above" may be used herein to readily describe the relationship between one element or component and another element (or component) or component (or component) as shown in the figure. In addition to the orientations shown in the figure, spatial relation terms will encompass various different orientations of the device in use or operation. The device may be positioned in other ways (rotated 90 degrees or in other orientations) and will be interpreted accordingly through the spatial relation descriptors used herein.

[0024] Furthermore, the technical parts described in this utility model and the appended claims are mainly the improved technical parts of this utility model, and do not limit the object protected by this utility model to only having these technical parts. Other known necessary components (structures and / or methods) and / or non-essential components of the protected object, other than the technical parts described in this utility model and the appended claims, are not included in this utility model and the appended claims because they do not fall within the scope of improvement of this utility model. However, this does not mean that the object protected by this utility model does not possess these known components.

[0025] Please see Figures 1 to 4 , Figures 1 to 4 The structure of an embodiment of the deposition apparatus of the present invention is illustrated by way of example. In the illustrated embodiment, the deposition apparatus includes a deposition chamber 100 having an air inlet end 101 and an air outlet end 102, and a collection unit 200 detachably mounted on the deposition chamber 100, one end (inner end) of the collection unit 200 extending into the deposition chamber 100 and its collection position facing the air inlet end 101.

[0026] The inlet 101 of the deposition chamber 100 is used to receive the single-atom / cluster beam, and the outlet 102 is used to discharge the carrier gas. The deposition chamber 100 can be configured as a tubular structure with open ends, one axial end being the inlet 101 and the other axial end being the outlet 102. The deposition chamber 100 can also be configured as a barrel-shaped structure with one open end and the other closed, the open end being configured as the inlet 101, and an outlet is provided on the side wall near the closed end, the outlet being sealed and connected to an outlet pipe 110, which serves as the outlet 102 of the deposition chamber 100. The axis of the exhaust pipe 110 is perpendicular to the axis of the deposition chamber 100. When the deposition chamber 100 is horizontally connected to the beam outlet, the exhaust pipe 110 is vertically downward so that it can be directly buried in a liquid, such as water, or buried in a liquid through an external pipe, thereby dissolving the escaped single atom / cluster particles and carrier gas in the liquid and avoiding pollution of the experimental environment.

[0027] In the illustrated embodiment, the inlet end 101 of the deposition chamber 100 is provided with a first assembly structure 300, which is used to assemble inlet pipes 120 of different sizes, such as different lengths. The different lengths of the inlet pipes 120 can change the distance between the inlet end 101 of the deposition chamber 100 and the beam outlet, thereby changing the distance between the collection unit 200 and the beam outlet. This allows for adjustment of the single-atom / cluster sample (hereinafter referred to as the sample) collection distance. Increasing the sample collection distance increases the flight time of single-atom / cluster particles in space. A longer flight time allows for more collisions between cluster particles and gas atoms in the air, resulting in an increase in the average particle size. Based on this, by assembling inlet pipes 120 of different lengths on the first assembly structure 300, the sample collection distance can be changed, thereby collecting samples of various distribution levels, stability, and sizes according to the needs of different embodiments.

[0028] In the illustrated embodiment, the first assembly structure 300 includes a first flange 310 disposed at the air inlet end 101 and a plurality of matching second flanges 320, wherein one of the plurality of second flanges 320 can be detachably connected to the first flange 310. The first flange 310 can be connected to the air inlet end 101 by welding. Each second flange 320 is connected to an air inlet pipe 120, and the lengths of the air inlet pipes 120 connected to each second flange 320 are different. In this embodiment, the air inlet pipe 120 and the outer side (the side opposite to the first flange 310) of the second flange 320 are coaxially welded together, and the second flange 320 and the corresponding air inlet pipe 120 are a non-detachable integral structure. Therefore, this integral structure can also be referred to as an air inlet pipe 120 with a second flange 320. Welding can solve the problem of poor sealing at the connection between the second flange 320 and the air inlet pipe 120, and can eliminate the need for a sealing structure. However, welding increases the number of second flanges 320 and intake pipes 120.

[0029] To address the increased number of second flanges 320 and intake pipes 120 caused by welding, in another embodiment, the first assembly structure 300 can be configured as follows: the first assembly structure 300 includes a first flange 310 fixedly disposed at the intake end 101 and a second flange 320 detachably connected to the first flange 310. The second flange 320 can be detachably and sealingly connected to intake pipes 120 of different lengths. Similarly, the first flange 310 can be welded to the intake end 101. The difference between this embodiment and the previous embodiment is that there is only one first flange 310 and one second flange 320. The second flange 320 can be detachably connected to intake pipes 120 of different lengths, and a sealing structure is provided at the connection point with the intake pipe 120. The sealing structure can be any known sealing structure capable of sealing the connection point.

[0030] Those skilled in the art will understand that, regardless of the embodiment used, corresponding sealing structures are provided at each detachable connection to achieve the airtightness of the deposition chamber 100. For example, a first sealing ring 301 is provided between the mating surfaces of the first flange 310 and the second flange 320 to achieve a seal between the first flange 310 and the second flange 320.

[0031] The first flange 310 and the second flange 320 can be detachably connected using known detachable connection methods. For example, the first flange 310 and the second flange 320 can be threaded together, or they can be axially clamped and fixed using a first clamp 330. In the threaded connection method, the outer periphery of both the first flange 310 and the second flange 320 is coaxially provided with connection holes, and every two coaxial connection holes (the connection holes on the first flange 310 and the coaxial connection holes on the second flange 320) are connected together by bolts.

[0032] In the connection method using the first clamp 330, the opposite sides of the first flange 310 and the second flange 320 need to be set as inclined surfaces. Hereinafter, the inclined surface of the first flange 310 is referred to as the first inclined surface 311, and the inclined surface of the second flange 320 is referred to as the second inclined surface 321. Both the first inclined surface 311 and the second inclined surface 321 are inclined outwards (radially outwards) in opposite directions. The inner periphery of the first clamp 330 has a first pressing surface 3311 and a second pressing surface 3321 for pressing the first inclined surface 311 and the second inclined surface 321 in a clamped state. Specifically, the general structure of the first clamp 330 is similar to a known clamp structure, having a first fixing ring (semi-circular arc) and a second fixing ring. One end of the first fixing ring and the second fixing ring are hinged, and the distance between the first fixing ring and the second fixing ring is adjusted by bolts or other structures, thereby adjusting the inner radial dimension of the first clamp 330. The subtle difference from known clamp structures lies in that the first clamp 330 (first fixing ring and second fixing ring) has a first ring wall 331 and a second ring wall 332 spaced apart along the axial direction. The first ring wall 331 is connected to the outer peripheral surface of the second ring wall 332 by an outer peripheral wall. The inner peripheral edge of the first ring wall 331 forms a first pressing surface 3311 for pressing the first inclined surface 311, and the inner peripheral edge of the second ring wall 332 forms a second pressing surface 3321 for pressing the second inclined surface 321. When the first clamp 330 is closed and tightened, it cooperates with the first inclined surface 311 and the second inclined surface 321 to push the first flange 310 and the second flange 320 to move relative to each other in the axial direction, thereby achieving axial pressing and fixing of the first flange 310 and the second flange 320.

[0033] The second assembly structure 400 is disposed on the side wall of the deposition chamber 100, and an assembly pipe 130 is hermetically connected to the side wall. The assembly pipe 130 can be welded to the side wall of the deposition chamber 100, and the axis of the assembly pipe 130 is perpendicular to the axis of the deposition chamber 100 (i.e., the axis of the air outlet 102 is perpendicular to the axis of the air inlet 101). The second assembly structure 400 is disposed on the end (outer end) of the assembly pipe 130 away from the deposition chamber 100.

[0034] The second assembly structure 400 can be configured to include a third flange 410 disposed at the outer end of the assembly tube 130, the third flange 410 being welded to the outer end of the assembly tube 130. The inner end of the collection unit 200 extends into the sedimentation chamber 100 through the assembly tube 130, the outer end of the collection unit 200 is detachably connected to the third flange 410, and a second sealing ring 401 is provided between the outer end of the collection unit 200 and the third flange 410.

[0035] The collection unit 200 includes a columnar collection seat 210 and a fourth flange 220 disposed at the outer end of the collection seat 210. The inner end of the collection seat 210 extends inward through the assembly tube 130 into the deposition chamber 100 and is located between the air inlet end 101 and the air outlet end 102, with its collection position 230 facing the air inlet end 101. The collection position 230 is used to assemble a collection substrate, such as a substrate, copper mesh, or carbon film. The outer diameter of the fourth flange 220 disposed at the outer end of the collection unit 200 is adapted to the outer diameter of the third flange 410. The fourth flange 220 and the third flange 410 are detachably connected, and a second sealing ring 401 is disposed between the fourth flange 220 and the third flange 410.

[0036] The fourth flange 220 can be detachably connected to the third flange 410 using a known detachable connection method. For example, the fourth flange 220 and the third flange 410 can be threaded together. Alternatively, the fourth flange 220 and the third flange 410 can be axially clamped and fixed using a second clamp 430. In the threaded connection method, both the fourth flange 220 and the third flange 410 have coaxially arranged connecting holes on their outer peripheries, and every two coaxial connecting holes are connected together by bolts.

[0037] In the connection via the second clamp 430, the opposite side of the third flange 410 and the fourth flange 220 is set as an inclined surface. Hereinafter, the inclined surface of the third flange 410 is referred to as the third inclined surface 411, and the inclined surface of the fourth flange 220 is referred to as the fourth inclined surface 221. Both the third inclined surface 411 and the fourth inclined surface 221 are inclined outwards (radially outwards) in opposite directions. The inner periphery of the second clamp 430 has a third pressing surface 4311 and a fourth pressing surface 4321 for pressing the third inclined surface 411 and the fourth inclined surface 221 in a clamped state. Specifically, the general structure of the second clamp 430 is similar to a known clamp structure, having a third fixing ring (semi-circular arc) and a fourth fixing ring. One end of the third and fourth fixing rings is hinged, and the distance between the third and fourth fixing rings is adjusted by bolts or other structures, thereby adjusting the inner radial dimension of the second clamp 430. The subtle difference from known clamp structures lies in the fact that the second clamp 430 (the third fixing ring and the fourth fixing ring) has a third ring wall 431 and a fourth ring wall 432 spaced apart along the axial direction. The third ring wall 431 is connected to the fourth ring wall 432 by an outer peripheral wall. The inner peripheral edge of the third ring wall 431 forms a third pressing surface 4311 for pressing the third inclined surface 411, and the inner peripheral edge of the fourth ring wall 432 forms a fourth pressing surface 4321 for pressing the fourth inclined surface 221. When the second clamp 430 closes and tightens, it cooperates with the third inclined surface 411 and the fourth inclined surface 221 to push the third flange 410 and the fourth flange 220 to move relative to each other in the axial direction, thereby achieving axial pressing and fixing of the third flange 410 and the fourth flange 220.

[0038] Please see Figure 5 As an example, for assembling the second sealing ring 401, a first annular groove 412 is provided on the side of the third flange 410 facing the fourth flange 220, and a second annular groove 222 is provided on the side of the fourth flange 220 facing the third flange 410. The first annular groove 412 and the second annular groove 222 are arranged opposite to each other and their inner diameters are adapted to the outer diameter of the collecting seat 210. The second sealing ring 401 has a sealing ring 401a and a sealing gasket 401b disposed on the outer periphery of the sealing ring 401a. The two ends of the sealing ring 401a are embedded in the first annular groove 412 and the second annular groove 222, and the sealing gasket 401b is tightly fitted between the third flange 410 and the fourth flange 220.

[0039] Based on the above embodiments, the deposition device of this utility model has at least the following beneficial effects: (1) By setting a first assembly structure 300 at the air inlet 101 of the deposition chamber 100, the first assembly structure 300 can assemble air inlet pipes 120 of different sizes, thereby making the sample collection distance between the collection unit 200 and the beam outlet of the cluster generation device adjustable, which can increase the versatility, applicability and flexibility of the deposition device. (2) The first assembly structure 300 realizes the fastening and loosening of the first flange 310 and the second flange 320 through the first clamp 330. Compared with the traditional threaded connection method, it is faster to disassemble and assemble and has higher assembly efficiency. (3) The air outlet pipe 110 is arranged on the side wall of the deposition chamber 100 and its axis is perpendicular to the axis of the deposition chamber 100. When the deposition chamber 100 is horizontally connected to the beam outlet, the air outlet faces directly downward so as to be buried below the liquid surface.

[0040] The above embodiments only illustrate preferred implementations of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A deposition apparatus, characterized in that, include: A deposition chamber having an air inlet and an air outlet, wherein a first assembly structure is provided at the air inlet for assembling air inlet pipes of different sizes. as well as A collection unit is detachably mounted to the side wall of the deposition chamber via a second assembly structure, with one end of the collection unit extending into the deposition chamber and its collection position facing the air inlet.

2. The deposition apparatus as described in claim 1, characterized in that: The first assembly structure includes a first flange disposed at the air inlet end and a plurality of matching second flanges, wherein one of the plurality of second flanges can be detachably connected to the first flange; each second flange is connected to an air inlet pipe, and the length of the air inlet pipe connected to each second flange is different; or The first assembly structure includes a first flange disposed at the air inlet end and a second flange detachably connected thereto. The second flange can be sealed and detachably connected to air inlet pipes of different lengths. A first sealing ring is provided between the first flange and the second flange.

3. The deposition apparatus as described in claim 2, characterized in that: The first flange and the second flange are threaded together.

4. The deposition apparatus as described in claim 2, characterized in that: The first flange and the second flange are fastened together by a first clamp to achieve axial fixation of the first flange and the second flange.

5. The deposition apparatus as described in claim 4, characterized in that: The opposite sides of the first flange and the second flange have a first inclined surface and a second inclined surface that are inclined outward in opposite directions; the inner periphery of the first clamp has a first pressing surface and a second pressing surface for pressing the first inclined surface and the second inclined surface in a clamped state.

6. The deposition apparatus as described in claim 5, characterized in that: The first clamp has a first ring wall and a second ring wall spaced apart along the axial direction. The first ring wall has an inner periphery forming a first pressing surface for pressing the first inclined surface, and the inner periphery of the second ring wall forms a second pressing surface for pressing the second inclined surface.

7. The deposition apparatus as claimed in claim 1, characterized in that: The side wall of the deposition chamber is sealed with an assembly tube perpendicular to its axis, and the second assembly structure is located at the end of the assembly tube away from the deposition chamber.

8. The deposition apparatus as claimed in claim 7, characterized in that: The second assembly structure includes a third flange disposed at the end of the assembly tube away from the deposition chamber; the inner end of the collection unit extends into the deposition chamber through the assembly tube, the outer end of the collection unit is detachably connected to the third flange, and a second sealing ring is provided between the outer end of the collection unit and the third flange.

9. The deposition apparatus as claimed in claim 8, characterized in that: The outer end of the collecting unit is provided with a fourth flange that is adapted to the third flange, and the fourth flange is threadedly connected to the third flange. or, The outer end of the collecting unit is provided with a fourth flange whose outer diameter is adapted to the outer diameter of the third flange. The fourth flange and the third flange are fastened together by a second clamp to achieve axial fixation of the fourth flange and the third flange.

10. The deposition apparatus according to any one of claims 1 to 9, characterized in that: The axis of the air outlet is perpendicular to the axis of the air inlet; the collection position is located between the air inlet and the air outlet, and its surface faces the air inlet.

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