Carrier assembly and coating apparatus

Abstract

The utility model discloses a kind of carrier plate assembly and coating equipment, including carrier frame, it is characterized in that, the carrier plate assembly further includes multiple bearing trays, the carrier frame includes multiple sub-carrier frames corresponding with multiple bearing trays, multiple sub-carrier frames are connected to form an integral whole, multiple bearing trays are respectively set in corresponding sub-carrier frame;The carrier plate assembly further includes reinforcing rod, the reinforcing rod is set in the side of bearing tray away from the carrier frame;Multiple coating ports are formed on the bearing tray, the coating port penetrates bearing tray along thickness direction, the inner wall of the coating port is formed with installation step, the installation step is located in the coating port, close to the side of carrier frame, and for carrying substrate.The utility model has the advantages of stable structure and high coating efficiency.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, specifically to a carrier plate assembly and coating equipment. Background Technology

[0002] In the coating chamber of a vacuum carrier assembly, the substrate needs to be transported within the equipment by a carrier to complete the coating process, enabling continuous production. Current coating processes involve coating the upper surface of the substrate, which is detachably connected to the top surface of the carrier disk.

[0003] In a coating equipment that performs atomic layer deposition from bottom to top, the carrier disk is used to carry the substrate for atomic layer deposition. For a single carrier disk, the number of substrates that can be processed at one time is fixed, which cannot meet the requirements for higher efficiency. Utility Model Content

[0004] This invention aims to address one of the technical problems in related technologies to a certain extent. To this end, this invention provides a carrier disk assembly and a coating equipment, which has the advantage of being able to perform coating from bottom to top.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A carrier plate assembly includes a frame and a plurality of carrier plates. The frame includes a plurality of sub-frames corresponding to the carrier plates, the sub-frames being connected to form a single unit, and the carrier plates being disposed in their respective sub-frames. The carrier plate assembly also includes a reinforcing rod disposed on the side of the carrier plate opposite to the frame. A plurality of coating openings are formed on the carrier plates, the coating openings penetrating the carrier plates along the thickness direction. An installation step is formed on the inner wall of each coating opening, the installation step being located inside the coating opening near the frame and used to support the substrate.

[0006] Multiple carrier disks are placed within multiple sub-carrier frames. The carrier disks have through-holes for deposition, and are secured by reinforcing rods positioned on one side of the back ion carrier frame. This allows the deposition holes on the carrier disks to penetrate, facilitating bottom-up atomic layer deposition. The reinforcing rods support and secure the carrier disks from the top, overcoming any structural strength deficiencies.

[0007] Optionally, the reinforcing rod extends along a first direction and penetrates the bearing plate along the first direction, the first direction being parallel to the length direction of the bearing plate.

[0008] The reinforcing bar runs through the bearing plate, ensuring that the entire bearing plate is supported and suspended by the reinforcing bar, resulting in good support.

[0009] Optionally, the reinforcing rod includes a plurality of first reinforcing ribs and a plurality of fixing units, wherein the first reinforcing ribs and the fixing units correspond one-to-one, and are detachably connected to the bearing plate through the fixing units.

[0010] The fixing unit is used to fix the first reinforcing rib to one side of the back ion carrier frame of the carrier plate, which can avoid fixing the carrier plate from the bottom, leave space for liquid to enter from the bottom of the carrier plate, allow the coating liquid to enter, and complete the coating on the side of the substrate close to the sub-carrier frame.

[0011] Optionally, the first reinforcing ribs are spaced apart along the second direction, the second direction forming an angle with the first direction, and the distance between adjacent first reinforcing ribs is the same.

[0012] The spacing of the first stiffener, through reasonable spacing design, can ensure that the structure is evenly distributed under stress, thereby enhancing the overall bending, shear and tensile resistance. At the same time, the spacing of the first stiffener can avoid localized excessive stress concentration in certain areas, reducing the risk of deformation or damage.

[0013] Optionally, the reinforcing rod further includes a plurality of second reinforcing ribs and corresponding fixing units. The second reinforcing ribs are detachably connected to the bearing plate through the fixing units. The extension direction of the second reinforcing ribs is the same as the second direction and extends through the width direction of the bearing plate.

[0014] By setting a second reinforcing rib with a direction different from that of the first reinforcing rib, the isotropic strength of the plating pad is improved. In other words, it can provide good support in different directions, thus exhibiting more uniform strength and stability.

[0015] Optionally, the second reinforcing ribs are spaced apart along the first direction, forming an angle between the first direction and the second direction, and the distance between adjacent second reinforcing ribs is the same.

[0016] The arrangement of multiple second reinforcing ribs can achieve a better fixing effect than a single second reinforcing rib, reducing the sagging of the bearing plate.

[0017] Optionally, the fixing unit includes a fixing member and a mating member. The fixing member passes through the carrier plate and the sub-carrier frame, and fixes the carrier plate to the sub-carrier frame by cooperating with the mating member.

[0018] The fixing unit can improve the fixing effect by using fasteners and mating parts together. Optionally, the mounting step protrudes inward from the inner surface of the coating port, and a gap is formed between the mounting step and the surface of the carrier plate facing away from the sub-carrier frame.

[0019] The mounting step protrudes from the inner surface of the coating port, forming a protrusion on the side near the sub-carrier and a recess on the side of the back ion carrier. This recess can be used to support the substrate for atomic layer deposition.

[0020] Optionally, the carrier plate is a carbon fiber plate, and the frame is made of metal.

[0021] The carrier plate is made of carbon fiber plate, which has the characteristics of low thermal expansion coefficient and good machinability. It can avoid the deformation of the carrier frame due to heating during the coating process, which would affect the uniformity of the film. At the same time, since the carrier frame needs to reciprocate, the use of metal material can increase the friction force with the transmission module, which has the advantage of better repeatability.

[0022] Furthermore, this utility model also provides a coating apparatus, which includes the carrier disk assembly described in any of the preceding claims. The reasoning process for the beneficial effects of the coating apparatus provided by this utility model and the aforementioned carrier disk assembly is similar, and will not be repeated here.

[0023] These features and advantages of this utility model will be disclosed in detail in the following specific embodiments and accompanying drawings. The preferred embodiments or means of this utility model will be shown in detail in conjunction with the accompanying drawings, but are not intended to limit the technical solutions of this utility model. In addition, each of these features, elements and components appearing in the following text and drawings is multiple and is labeled with different symbols or numbers for convenience, but all represent parts with the same or similar structure or function. Attached Figure Description

[0024] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the structure of a carrier disk assembly and coating equipment according to the present invention.

[0025] Figure 2 This is a top view of a carrier disk assembly and coating equipment according to the present invention.

[0026] Figure 3 This is a structural diagram of a coating equipment, which is a carrier disk assembly and coating equipment according to the present invention.

[0027] 1. Carrier frame, 11. Sub-carrier frame, 2. Carrier plate, 21. Coating port, 3. Reinforcing rod, 31. First reinforcing rib, 32. Fixing unit, 33. Second reinforcing rib, 4. Chamber, 5. Power transmission assembly. Detailed Implementation

[0028] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described are intended to explain this utility model and should not be construed as limiting it.

[0029] The terms "an embodiment," "example," or "trademark" used in this specification refer to a particular feature, structure, or characteristic described in connection with the embodiment itself that may be included in at least one embodiment disclosed in this utility model. The phrase "in an embodiment" appearing in various places throughout the specification does not necessarily refer to the same embodiment.

[0030] In the deposition chamber of an ALD (Atomic Layer Deposition) vacuum coating equipment, the substrate needs to be transported within the equipment by a carrier to complete the deposition process, enabling continuous production. Currently, ALD deposition occurs on the upper surface of the substrate. Due to structural limitations, the carrier plate is a single, non-perforated unit, thus unsuitable for bottom deposition. For other bottom deposition equipment carrier plates, the carrier (substrate) is detachably connected to the top surface of the frame. If this frame carrier plate is used for bottom-to-top deposition, the distance from the substrate deposition surface to the lower surface of the carrier plate is relatively long, which does not meet the film deposition distance requirements for ALD. Specifically, existing ALD carrier plates have a support structure on the back and a central support. The substrate is placed on the upper surface of the carrier plate, and the back of the substrate is a solid structure, which cannot meet the requirements for bottom-to-top deposition.

[0031] like Figure 1 As shown, a carrier plate assembly includes a carrier frame 1 and a plurality of carrier plates 2. The carrier frame 1 includes a plurality of sub-carrier frames 11 corresponding one-to-one with the plurality of carrier plates 2. The plurality of sub-carrier frames 11 are connected to form an integral unit, and the plurality of carrier plates 2 are respectively disposed in the corresponding sub-carrier frames 11. The carrier plate assembly also includes a reinforcing rod 3, which is disposed on the side of the carrier plate 2 away from the carrier frame 1. A plurality of coating openings 21 are formed on the carrier plate 2. The coating openings 21 penetrate the carrier plate 2 along the thickness direction. The inner wall of the coating opening 21 is formed with an installation step. The installation step is located inside the coating opening 21 on the side close to the carrier frame 1 and is used to support the substrate.

[0032] By setting multiple carrier disks 2 and multiple sub-carrier frames 11, the number of substrates carried by the carrier disk 2 can be adjusted to obtain higher coating efficiency. In addition, since the reinforcing rod 3 is set on the top of the carrier disk 2 and penetrates through the carrier disk 2, the structural strength of the carrier disk 2 is increased and the stability is good.

[0033] In this embodiment, there are two sub-carrier disks 11, which are arranged side by side and fixed together by a corresponding connecting mechanism. It should be noted that in other embodiments, there may be more sub-carrier disks 11, and the arrangement direction and arrangement method of the sub-carrier frames may also be changed. This application does not limit the number and arrangement method of the sub-carrier disks 11.

[0034] Multiple carrier disks 2 are placed in multiple sub-carrier frames 11. A through-hole coating port 21 is formed on the carrier disk 2, and the carrier disk 2 is fixed by a reinforcing rod 3. The reinforcing rod 3 is located on one side of the back ion carrier frame 11 of the carrier disk 2, so that the coating port 21 on the carrier disk 2 can penetrate the carrier disk 2, which facilitates atomic layer deposition from bottom to top.

[0035] The reinforcing rod 3 extends along a first direction and penetrates the bearing plate 2 along the first direction, the first direction being parallel to the length direction of the bearing plate 2.

[0036] In this embodiment, the reinforcing rod 3 extends along the length of the support plate 2 and penetrates the support plate 2, thus supporting the entire support plate 2. It should be noted that in this embodiment, since there are two sub-frames 11 and two support plates 2, there can be only one reinforcing rod 3. However, in other embodiments, when there are more support plates 2 and more sub-frames 11, more than one reinforcing rod 3 can be provided to support the top of all support plates 2, as long as the reinforcing rod 3 can penetrate all support plates 2. This application does not impose specific limitations on this.

[0037] It should be noted that in this embodiment, the first direction is parallel to the length direction of the carrier disk 2. However, in other embodiments, the first direction does not necessarily have to be parallel to the length direction of the carrier disk 2, and may also form an angle with the length direction of the carrier disk 2. This application does not make specific limitations on this.

[0038] Furthermore, when an angle is formed between the first direction and the length direction of the carrier plate 2, the direction and number of the reinforcing rods 3 also need to be modified accordingly, so that the reinforcing rods 3 can penetrate each carrier plate 2 or sub-carrier frame 11 through the top of the carrier plate 2 to achieve a fixing effect on each carrier plate 2, ensuring that no carrier plate is shifted due to the lack of suspension of the reinforcing rods 3 during the atomic layer deposition process, thus affecting actual production.

[0039] The reinforcing rod 3 runs through the bearing plate 2, so that the entire bearing plate 2 can be supported and suspended by the reinforcing rod 3, resulting in good support effect.

[0040] like Figure 2As shown, the reinforcing rod 3 includes a plurality of first reinforcing ribs 31 and a plurality of fixing units 32. The first reinforcing ribs 31 and the fixing units 32 correspond one-to-one, and are detachably connected to the bearing plate 2 through the fixing units 32.

[0041] In this embodiment, a plurality of first reinforcing ribs 31 are evenly distributed on the bearing plate 2 so that the first reinforcing ribs 31 can uniformly provide suspension for the bearing plate 2. The plurality of first reinforcing ribs 31 (not shown in the figure) penetrate each bearing plate 2 and sub-carrying frame 11 in a first direction.

[0042] In this embodiment, the fixing unit 32 is evenly arranged on the first reinforcing rib 31 to improve the fixing effect on the first reinforcing rib 31, making the overall structure more robust and improving the structural stability of this application.

[0043] The fixing unit 32 is used to fix the first reinforcing rib 31 to one side of the back ion carrier frame 11 of the carrier plate 2, which can avoid fixing the carrier plate 2 from the bottom, leave space for liquid to enter the bottom of the carrier plate 2, allow the coating liquid to enter, and complete the coating on the side of the substrate close to the sub-carrier frame 11.

[0044] The first reinforcing ribs 31 are spaced apart along the second direction, and the second direction forms an angle with the first direction. The distance between adjacent first reinforcing ribs 31 is the same.

[0045] In this embodiment, the angle between the first direction and the second direction is 90°, meaning the first direction and the second direction are perpendicular. This arrangement allows the first reinforcing rib 31 and the second reinforcing rib 33 to work together to provide a more uniform stress distribution. Especially when subjected to external forces from different directions, this configuration enhances structural rigidity and stability. Furthermore, the perpendicular arrangement also reduces stress concentration, facilitates manufacturing, and enhances bending resistance.

[0046] The first stiffener 31 is spaced out. Through reasonable spacing design, it can ensure that the structure is evenly distributed when under stress, thereby enhancing the overall bending, shear and tensile resistance. At the same time, the spacing of the first stiffener 31 can avoid local excessive stress concentration in certain areas, reducing the risk of deformation or damage.

[0047] The reinforcing rod 3 also includes a plurality of second reinforcing ribs 33 and corresponding fixing units 32. The second reinforcing ribs 33 are detachably connected to the bearing plate 2 through the fixing units 32. The extension direction of the second reinforcing ribs 33 is the same as the second direction and extends through the width direction of the bearing plate 2.

[0048] By setting a second reinforcing rib 33 with a direction different from that of the first reinforcing rib 31, the isotropic strength of the plating pad is improved. In other words, it can provide good support in different directions, thus exhibiting more uniform strength and stability.

[0049] The second reinforcing ribs 33 are spaced apart along the first direction, and the first direction and the second direction form an angle. The distance between adjacent second reinforcing ribs 33 is the same.

[0050] The arrangement of multiple second reinforcing ribs 33 can achieve a better fixing effect than a single second reinforcing rib 33, reducing the sagging of the bearing plate 2.

[0051] The fixing unit 32 includes a fixing member and a mating member. The fixing member passes through the carrier plate 2 and the sub-carrier frame 11, and fixes the carrier plate 2 to the sub-carrier frame 11 by cooperating with the mating member.

[0052] The fixing unit 32 can improve the fixing effect by using fasteners and mating parts together. The mounting step protrudes inward from the inner surface of the coating port 21, and a gap is formed between the mounting step and the surface of the carrier plate 2 that is away from the sub-carrier frame 11.

[0053] The mounting step protrudes from the inner surface of the coating port 21, forming a protrusion on one side near the sub-carrier frame 11 and a recess on one side of the back ion carrier frame 11. The recess can be used to support the substrate for atomic layer deposition process.

[0054] The carrier plate 2 is made of carbon fiber plate, and the frame 1 is made of metal.

[0055] The carrier plate 2 is made of carbon carbon plate, which has the characteristics of low thermal expansion coefficient and good machinability. It can avoid the deformation of the carrier frame 1 due to heating during the coating process, which would affect the uniformity of the film. At the same time, since the carrier frame 1 needs to reciprocate, the use of metal material can increase the friction force with the transmission module, which has the advantage of better repeatability.

[0056] like Figure 3 As shown, this utility model also provides a coating device, which includes a chamber 4, a power transmission component 5 and the aforementioned carrier plate assembly. The power transmission component 5 and the carrier frame 1 are disposed in the chamber 4. The power transmission component 5 is abutted and connected to the carrier frame 1 and can drive the carrier plate assembly to move.

[0057] The above are merely specific embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Those skilled in the art should understand that this utility model includes, but is not limited to, the contents described in the accompanying drawings and the specific embodiments above. Any modifications that do not depart from the functional and structural principles of this utility model will be included within the scope of the claims.

Claims

1. A carrier assembly, comprising a carrier frame (1), characterized in that, The carrier assembly further includes multiple carrier disks (2), and the carrier frame (1) includes multiple sub-carrier frames (11) corresponding to the multiple carrier disks (2) one by one. The multiple sub-carrier frames (11) are connected to form an integral unit, and the multiple carrier disks (2) are respectively disposed in the corresponding sub-carrier frames (11). The carrier plate assembly also includes a reinforcing rod (3), which is disposed on the side of the carrier plate (2) away from the carrier frame (1); The carrier plate (2) has a plurality of coating ports (21) formed thereon. The coating ports (21) penetrate the carrier plate (2) along the thickness direction. The inner wall of the coating port (21) has an installation step. The installation step is located inside the coating port (21) on the side close to the frame (1).

2. The carrier disk assembly according to claim 1, characterized in that, The reinforcing rod (3) extends along a first direction and penetrates the bearing plate (2) along the first direction, the first direction being parallel to the length direction of the bearing plate (2).

3. The carrier disk assembly according to claim 2, characterized in that, The reinforcing rod (3) includes multiple first reinforcing ribs (31) and multiple fixing units (32). The first reinforcing ribs (31) and the fixing units (32) correspond one-to-one, and are detachably connected to the bearing plate (2) through the fixing units (32).

4. The carrier disk assembly according to claim 3, characterized in that, The first reinforcing ribs (31) are spaced apart along the second direction, and the second direction forms an angle with the first direction. The distance between adjacent first reinforcing ribs (31) is the same.

5. The carrier disk assembly according to claim 4, characterized in that, The reinforcing rod (3) also includes a plurality of second reinforcing ribs (33) and a corresponding fixing unit (32). The second reinforcing ribs (33) are detachably connected to the bearing plate (2) through the fixing unit (32). The extension direction of the second reinforcing ribs (33) is the same as the second direction and extends through the width direction of the bearing plate (2).

6. The carrier disk assembly according to claim 5, characterized in that, The second reinforcing ribs (33) are spaced apart along the first direction, and the first direction and the second direction form an angle. The distance between adjacent second reinforcing ribs (33) is the same.

7. The carrier disk assembly according to any one of claims 3 to 6, characterized in that, The fixing unit (32) includes a fixing member and a mating member. The fixing member passes through the carrier plate (2) and the sub-carrier frame (11) and fixes the carrier plate (2) on the sub-carrier frame (11) by cooperating with the mating member.

8. The carrier disk assembly according to any one of claims 1 to 6, characterized in that, The mounting step protrudes inward from the inner surface of the coating port (21), and a gap is formed between the mounting step and the surface of the carrier plate (2) facing away from the sub-carrier frame (11).

9. The carrier disk assembly according to claim 8, characterized in that, The carrier plate (2) is a carbon plate, and the sub-carrier frame (11) is made of metal.

10. A coating apparatus, characterized in that, The coating equipment includes a chamber (4), a power transmission component (5), and a carrier plate assembly as described in any one of claims 1 to 9. The power transmission component (5) and the carrier frame (1) are disposed in the chamber (4). The power transmission component (5) is abutted against the carrier frame (1) and is capable of driving the carrier plate assembly to move.

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