Active vibration reduction device

Abstract

The utility model provides a kind of active vibration reduction device, comprising: Lorentz motor, reluctance motor;The stator of Lorentz motor and the stator assembly and bottom pedestal fixed connection of reluctance motor, the mover of Lorentz motor, the mover assembly of reluctance motor is connected with the vibration isolation equipment, Lorentz motor, reluctance motor can be individually or joint output. The output driving device is connected in parallel by Lorentz-reluctance motor compound, realizes high thrust, high bandwidth, high thermal stability and high integration integration output, transient impact and sustained precision control are considered.

Description

Technical Field

[0001] This utility model relates to the field of motor technology, specifically to an active vibration damping device. Background Technology

[0002] Precision vibration reduction technology serves as a core support for high-end equipment manufacturing, precision instruments, and applications in special environments. It must simultaneously address the dual challenges of ground vibration isolation and internal motion shocks within equipment. Particularly in high-mass, high-acceleration workpiece stages and precision motion stages, the impact forces generated by instantaneous acceleration and deceleration place stringent demands on vibration reduction systems. Such disturbances require feedforward control technology, where a drive unit applies a reverse control force to the object being vibration-damped to counteract the impact. Therefore, the performance of the drive unit directly determines the upper limit of the vibration reduction system.

[0003] However, current mainstream drive units have significant shortcomings in their technical implementation: 1. Pneumatic / hydraulic drive units, while suitable for low-frequency support scenarios, typically have a bandwidth below 10 Hz and suffer from severe hysteresis, making it difficult to meet wideband vibration reduction requirements. For example, traditional air springs, due to their non-adjustable damping, can only rely on Lorentz motors to suppress low-frequency vibrations, resulting in limited pressure fluctuation adjustment capabilities and making it difficult to achieve the goal of ultra-low frequency vibration isolation with near-zero stiffness.

[0004] 2. Piezoelectric drive units, while possessing high bandwidth and high output characteristics, are limited by their small stroke (usually requiring mechanical amplification mechanisms), significant nonlinear effects, and high drive voltage, leading to a sharp increase in the complexity of the control system. Furthermore, their output density and temperature drift issues can easily cause stability risks under long-term high-load conditions, making them unsuitable for the continuous operation requirements of precision equipment.

[0005] 3. Electromagnetic drive units (represented by Lorentz motors) have become the mainstream choice due to their advantages such as high linearity, frictionless hysteresis, and fast dynamic response (bandwidth ≥ 1 kHz). However, they have two major bottlenecks: Insufficient thrust density: Their output per unit volume is small, requiring multiple units to be connected in parallel for high-impact scenarios, resulting in a large system size and reduced integration. For example, heavy-duty vibration dampers require a large number of Lorentz motors connected in parallel to compensate for the limited output, which not only occupies space but also increases the risk of failure due to the complexity of electrical connections; Thermal management challenges: Significant heat generation under continuous high-current conditions, temperature rise causes motor parameter drift and structural deformation, compromising system stability. Especially in high-precision scenarios, thermal deformation directly reduces vibration isolation accuracy. For example, in semiconductor manufacturing, a vibration deviation of 0.1 micrometers can lead to a 30% decrease in the yield of an entire batch of chips.

[0006] In summary, existing drive units suffer from systemic deficiencies in terms of output density, thermal stability, integration, and wideband adaptability. Especially under conditions of high impact and high dynamics, the conflict between thrust and thermal management further constrains the performance limits of precision vibration reduction systems, necessitating breakthroughs through structural innovation. Therefore, developing a novel output drive device to address these issues has significant practical implications and application value. Utility Model Content

[0007] Based on the above description, this utility model provides an active vibration damping device to solve the technical problems of existing drive units having systematic defects in terms of output density, thermal stability, integration and wide bandwidth adaptability.

[0008] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: This utility model provides an active vibration damping device, including: a Lorentz motor and a reluctance motor; The stator of the Lorentz motor and the stator assembly of the reluctance motor are fixedly connected to the bottom base. The mover of the Lorentz motor and the mover assembly of the reluctance motor are connected to the vibration-isolated equipment. The Lorentz motor and the reluctance motor can output power individually or in combination.

[0009] Based on the above technical solution, the present invention can be further improved as follows.

[0010] Furthermore, the bottom base is a bottom plate; the vibration-isolated device is a top plate; The stator of the Lorentz motor and the stator assembly of the reluctance motor are arranged side by side on the upper surface of the base plate, and the rotor assembly of the reluctance motor is fixedly disposed on the lower surface of the top plate. The rotor of the Lorentz motor is connected to the rotor assembly of the reluctance motor to form a drive device in which the reluctance motor and the Lorentz motor are connected in parallel. The reluctance motor includes two sets of EI reluctance motor structures, which are arranged in a mirror-symmetrical manner along the vertical direction to form a "sandwich" clamping topology.

[0011] Furthermore, the mover assembly of the reluctance motor includes a reluctance motor mover and a first connecting member; The top of the first connector is connected to the lower surface of the top plate, and the magnetoresistive motor actuator is located on the protruding section of the first connector; The stator assembly of the reluctance motor includes a first reluctance motor stator, a second reluctance motor stator, and a second connector; The bottom of the second connector is connected to the upper surface of the base plate; The second connector has two accommodating spaces arranged opposite each other in the vertical direction. The two accommodating spaces are respectively used to fix the first reluctance motor stator and the second reluctance motor stator, so that the first reluctance motor stator and the second reluctance motor stator are symmetrical about the reluctance motor mover, forming two sets of EI reluctance motor structures.

[0012] Furthermore, a receiving cavity is formed between the protruding section of the first connector and the top plate, and the receiving cavity is adapted to the first reluctance motor stator or the second reluctance motor stator.

[0013] Furthermore, in any of the EI reluctance motor structures, the stator of the reluctance motor is an E-shaped stator, and the mover of the reluctance motor is an I-shaped mover.

[0014] Furthermore, the E-shaped stator has an E-shaped three-tooth structure, with the openings between the teeth facing the I-shaped mover; The middle tooth of the three-tooth structure is wound with a coil.

[0015] Furthermore, the I-shaped mover has a rectangular frame structure, with its two opposite sides located on the upper and lower sides of the protruding section of the first connector, respectively.

[0016] Furthermore, the mover of the Lorentz motor includes an adapter, a soft magnetic component, and a magnet; The upper surface of the adapter is connected to the outer extension of the first connector; Two of the soft magnetic components are disposed opposite each other at both ends of the adapter, and a plurality of magnets are evenly distributed on the opposite surfaces of the soft magnetic components.

[0017] Furthermore, the stator of the Lorentz motor is located in the receiving area formed by the two soft magnetic components, and the two soft magnetic components with magnets are symmetrically arranged about the stator of the Lorentz motor.

[0018] Furthermore, the stator of the Lorentz motor includes a coil box and a Lorentz coil; The coil box is vertically mounted on the base plate; the Lorentz coil is located inside the coil box.

[0019] Compared with the prior art, the active vibration damping device provided by this utility model has the following beneficial technical effects: 1. Advantages of Composite Thrust: The reluctance motor can output large thrust with a small current and bear steady-state loads; the Lorentz motor, with its inertia-free magneto-electric conversion characteristics, instantly compensates for high-frequency dynamic components. The two are mechanically paralleled and magnetically decoupled, forming a "low-high frequency complementary" force synthesis path, achieving seamless connection of force output across the entire frequency band, significantly improving the peak thrust margin, and enabling rapid suppression of large-impact conditions without increasing the number of motors.

[0020] 2. High-bandwidth performance: Reluctance motors inherently exhibit phase lag due to their large winding inductance. This invention actively compensates for this lag using a feedforward inverse model, significantly expanding the system's usable bandwidth from the low-frequency range of the reluctance motor operating alone to a wide frequency range. The Lorentz motor continuously provides a high-response branch, ensuring high-frequency commands are not distorted. The combined effect of these two components results in an order-of-magnitude increase in overall effective bandwidth, meeting the requirements for millisecond-level impulse suppression.

[0021] 3. Improved Thermal Stability: The stator assembly of the reluctance motor directly relies on the second connector as a heat dissipation substrate, forming a low thermal resistance path; the Lorentz motor uses a liquid-cooled coil box to achieve near-end heat exchange between the winding and the coolant. The two thermal management paths are independent of each other, avoiding heat source coupling and temperature gradient superposition, so that the system maintains a low temperature rise under continuous high current conditions, suppressing parameter drift and structural deformation caused by temperature drift, and ensuring long-term accuracy.

[0022] 4. High Integration and Lightweight Design: The EI reluctance motor adopts a vertically symmetrical "sandwich" topology, generating bidirectional magnetic pull within a limited space, resulting in a short magnetic circuit and low magnetic leakage. The Lorentz motor and the reluctance motor are arranged side by side, sharing the same top-bottom plate reference plane, avoiding the space waste caused by "motor stacking" in traditional parallel schemes. The overall structure achieves volume and weight reduction at the same thrust level, significantly improving the output density per unit volume and facilitating installation in compact equipment.

[0023] 5. Low harmonics and force smoothing: The reluctance motor uses EI cogging optimization to reduce thrust pulsation caused by cogging effect; the Lorentz motor eliminates cogging torque. Combined, the output force exhibits a highly smooth linear characteristic, effectively reducing residual vibration of the isolated object and providing a clean mechanical environment for subsequent precision control.

[0024] 6. Modularity and scalability: Each component is modular in structure, and one-dimensional linear arrays or two-dimensional matrix expansions can be achieved without additional adapters; each module works independently, or they can work together through a shared control bus; in actual use, the number of modules can be flexibly increased or decreased according to the load size and stroke requirements, which significantly shortens the system iteration cycle and reduces maintenance costs. Attached Figure Description

[0025] Figure 1 One of the structural schematic diagrams of the active vibration damping device provided in the embodiments of this utility model; Figure 2 A second schematic diagram of the active vibration damping device provided in this embodiment of the utility model; Figure 3 The third schematic diagram of the active vibration damping device provided in the embodiment of this utility model; Figure 4An exploded structural diagram of the active vibration damping device provided in this embodiment of the utility model; The attached diagram lists the components represented by each number as follows: 1. Lorentz motor; 11. Mover; 111. Adapter; 112. Soft magnetic component; 113. Magnet; 12. Stator; 2. Reluctance motor; 21. Mover assembly; 211. Reluctance motor mover; 212. First connector; 213. Protruding section; 22. Stator assembly; 221. First reluctance motor stator; 222. Second reluctance motor stator; 223. Second connector; 224. Coil; 3. Top slab; 4. Base plate. Detailed Implementation

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "provided with" and "connected," etc., should be interpreted broadly. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0028] Existing drive units cannot achieve a balance between high thrust, high bandwidth, high thermal stability, and high integration. Therefore, developing a composite topology that connects a high-thrust-density reluctance motor and a high-response-bandwidth Lorentz motor in parallel has become a technological direction to overcome these bottlenecks. However, the reluctance motor suffers from a large inductance (mH level) due to its doubly salient pole structure, resulting in a large current time constant τ=L / R and severe high-frequency output attenuation; while the Lorentz motor, although having good high-frequency response, suffers from an inherent contradiction of low thrust density and high heat generation. How to coordinate the operating modes of the two motors to achieve seamless connection of force output in a wide frequency range is the core technical problem that this invention aims to solve.

[0029] Based on this, such as Figures 1 to 4 This utility model provides an active vibration damping device, such as... Figure 1As shown, the output drive device includes: a Lorentz motor 1 and a reluctance motor 2.

[0030] The stator of the Lorentz motor 1 and the stator assembly of the reluctance motor 2 are fixedly connected to the bottom base. The mover of the Lorentz motor 1 and the mover assembly of the reluctance motor 2 are connected to the vibration-isolated equipment. The Lorentz motor 1 and the reluctance motor 2 can output power individually or in combination.

[0031] The bottom base is the base plate 4; the vibration-isolated equipment is the top plate 3; such as Figure 1 As shown, the stator of the Lorentz motor 1 and the stator assembly of the reluctance motor 2 are arranged side by side on the upper surface of the base plate 4, and the mover assembly of the reluctance motor 2 is fixed on the lower surface of the top plate 3. The mover of the Lorentz motor 1 is connected to the mover assembly of the reluctance motor 2 to form a drive device in which the reluctance motor 2 and the Lorentz motor 1 are connected in parallel.

[0032] Among them, such as Figure 3 and Figure 4 As shown, the reluctance motor 2 includes two sets of EI reluctance motor structures, which are arranged symmetrically in a mirror image along the vertical direction, forming a "sandwich" clamping topology. The parallel drive system of the reluctance motor and the Lorentz motor innovatively combines the two types of motors organically, giving full play to their respective advantages and achieving the goal of high bandwidth and high force output.

[0033] Specifically, by combining a reluctance motor with a voice coil motor (Lorentz motor) in parallel, the problems of slow current response, high drive voltage requirements, and limited system bandwidth caused by the large inductance characteristics of traditional reluctance motors during high-frequency driving are solved. This system fully leverages the high thrust advantage of the reluctance motor and the high dynamic response characteristics of the Lorentz motor, achieving high-bandwidth and high-precision force control, and is particularly suitable for shock-resistant precision vibration reduction control that requires a combination of rapid response and high thrust.

[0034] In optional examples, such as Figure 2 , Figure 3 and Figure 4 As shown, the mover assembly 21 of the reluctance motor 2 includes a reluctance motor mover 211 and a first connector 212; the top of the first connector 212 is connected to the lower surface of the top plate 3, and the reluctance motor mover 211 is disposed on the protruding section 213 of the first connector 212.

[0035] The stator assembly 22 of the reluctance motor 2 includes a first reluctance motor stator 221, a second reluctance motor stator 222, and a second connector 223; as shown Figure 2 As shown, the bottom of the second connector 223 is connected to the upper surface of the base plate 4.

[0036] like Figure 3 and Figure 4As shown, the second connector 223 has two accommodating spaces arranged opposite each other in the vertical direction. The two accommodating spaces are used to fix the first reluctance motor stator 221 and the second reluctance motor stator 222 respectively, so that the first reluctance motor stator 221 and the second reluctance motor stator 222 are symmetrical about the reluctance motor mover 211, so as to form two sets of EI reluctance motor structures.

[0037] It should be noted that the EI-type reluctance motor structure has the characteristics of low current and high thrust. However, the current response speed of the reluctance motor is limited by its electromagnetic time constant (τ=L / R). The large inductance characteristic leads to a slow current build-up and decay process, which severely limits the dynamic response capability and control bandwidth of the system. In contrast, the Lorentz motor has high dynamic response. In this embodiment of the invention, the above-mentioned defects are overcome, so that the overall active vibration damping device has the advantages of both—low current and high thrust and high dynamic response.

[0038] like Figure 4 As shown, in any EI reluctance motor structure, the stator of the reluctance motor is an E-shaped stator, and the corresponding mover of the reluctance motor is an I-shaped mover.

[0039] Furthermore, such as Figure 3 As shown, the E-shaped stator has an E-shaped three-tooth structure with the opening between the teeth facing the I-shaped mover; the middle tooth of the three-tooth structure is wound with a coil 224.

[0040] like Figure 4 As shown, the I-shaped mover has a rectangular frame structure, with its two opposite sides located on the upper and lower sides of the protruding section of the first connector 212, respectively.

[0041] In an optional embodiment, a receiving cavity is formed between the protruding section 213 of the first connector 212 and the top plate 3, and the receiving cavity is adapted to the first reluctance motor stator 221 or the second reluctance motor stator 222.

[0042] Furthermore, such as Figure 1 and Figure 4 As shown, the mover 11 of the Lorentz motor 1 includes a connector 111, a soft magnetic component 112, and a magnet 113; the upper surface of the connector 111 is connected to the extension of the first connector 212 to realize the mechanical parallel connection of the Lorentz motor and the reluctance motor.

[0043] Two soft magnetic components 112 are disposed opposite each other at both ends of the adapter 111, and a plurality of magnets 113 are evenly distributed on the opposite surfaces of the soft magnetic components 112.

[0044] The stator 12 of the Lorentz motor 1 is located in the receiving area formed by two soft magnetic components 112, and the two soft magnetic components 112 with magnets are symmetrically arranged about the stator 12 of the Lorentz motor 1.

[0045] The stator 12 of the Lorentz motor 1 includes a coil box and a Lorentz coil; the coil box is vertically mounted on the base plate; the Lorentz coil is located inside the coil box.

[0046] It should be noted that the Lorentz motor 1 can be equipped with a Halbach array magnetic circuit structure to further reduce the thickness of the motor yoke plate and increase the thrust density.

[0047] In practical applications, a layered control strategy can be adopted to control the active vibration damping device provided in this embodiment of the present invention: the upper layer is the motion planning layer, which generates total force / position commands; the middle layer is the force distribution layer, which decomposes the commands into low-frequency components (magnetic reluctance motor) and high-frequency components (voice coil motor - Lorentz motor) according to frequency characteristics; and the bottom layer is the independent servo control layer for each motor.

[0048] The force distribution layer employs two complementary filters: a low-pass filter Hlpf and a new-pass filter Hhpf. Here, Hlpf + Hbpf = 1, for example, in a simple first-order filter. and Select an appropriate cutoff frequency W based on the performance of the reluctance motor and the Lorentz motor and the total force signal. c Based on online identification of output power spectrum characteristics and output amplitude, the system automatically switches between operating modes (pure high-impedance mode, pure voice coil mode, and hybrid mode) to improve system energy efficiency. This method is simple to implement, requires little computation, and is suitable for most scenarios.

[0049] For applications requiring high performance and precision, it is necessary to parametrically model the effects of leakage flux, edge flux, hysteresis, and eddy currents on the reluctance motor, establishing a dynamic model of the reluctance motor. Using a Luenberger observer, based on the system output (such as the feedback speed sensor in a vibration damper system, or a force sensor added to the system), the output force signals of the reluctance motor and the Lorentz motor are estimated and distributed in real time. This approach requires an accurate system model and has high implementation complexity, but it boasts strong anti-interference capabilities and can achieve performance far exceeding that of complementary filters.

[0050] The active vibration damping device provided in this embodiment of the utility model has the following beneficial effects: 1. Advantages of Composite Thrust: The reluctance motor can output large thrust with a small current and bear steady-state loads; the Lorentz motor, with its inertia-free magneto-electric conversion characteristics, instantly compensates for high-frequency dynamic components. The two are mechanically paralleled and magnetically decoupled, forming a "low-high frequency complementary" force synthesis path, achieving seamless connection of force output across the entire frequency band, significantly improving the peak thrust margin, and enabling rapid suppression of large-impact conditions without increasing the number of motors.

[0051] 2. High-bandwidth performance: Reluctance motors inherently exhibit phase lag due to their large winding inductance. This invention actively compensates for this lag using a feedforward inverse model, significantly expanding the system's usable bandwidth from the low-frequency range of the reluctance motor operating alone to a wide frequency range. The Lorentz motor continuously provides a high-response branch, ensuring high-frequency commands are not distorted. The combined effect of these two components results in an order-of-magnitude increase in overall effective bandwidth, meeting the requirements for millisecond-level impulse suppression.

[0052] 3. Improved Thermal Stability: The stator assembly of the reluctance motor directly relies on the second connector as a heat dissipation substrate, forming a low thermal resistance path; the Lorentz motor uses a liquid-cooled coil box to achieve near-end heat exchange between the winding and the coolant. The two thermal management paths are independent of each other, avoiding heat source coupling and temperature gradient superposition, so that the system maintains a low temperature rise under continuous high current conditions, suppressing parameter drift and structural deformation caused by temperature drift, and ensuring long-term accuracy.

[0053] 4. High Integration and Lightweight Design: The EI reluctance motor adopts a vertically symmetrical "sandwich" topology, generating bidirectional magnetic pull within a limited space, resulting in a short magnetic circuit and low magnetic leakage. The Lorentz motor and the reluctance motor are arranged side by side, sharing the same top-bottom plate reference plane, avoiding the space waste caused by "motor stacking" in traditional parallel schemes. The overall structure achieves volume and weight reduction at the same thrust level, significantly improving the output density per unit volume and facilitating installation in compact equipment.

[0054] 5. Low harmonics and force smoothing: The reluctance motor uses EI cogging optimization to reduce thrust pulsation caused by cogging effect; the Lorentz motor eliminates cogging torque. Combined, the output force exhibits a highly smooth linear characteristic, effectively reducing residual vibration of the isolated object and providing a clean mechanical environment for subsequent precision control.

[0055] 6. Modularity and scalability: Each component is modular in structure, and one-dimensional linear arrays or two-dimensional matrix expansions can be achieved without additional adapters; each module works independently, or they can work together through a shared control bus; in actual use, the number of modules can be flexibly increased or decreased according to the load size and stroke requirements, which significantly shortens the system iteration cycle and reduces maintenance costs.

[0056] In summary, this utility model embodiment achieves a high-thrust, high-bandwidth, high-thermal-stability, and highly integrated output by using a parallel combination of Lorentz-reluctance motors, while also taking into account both transient impacts and continuous precision control.

[0057] In the description of this specification, references to terms such as "specific example" or "some examples" refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example that are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. An active vibration damping device, characterized in that, include: Lorentz motor (1), reluctance motor (2); The stator of the Lorentz motor (1) and the stator assembly of the reluctance motor (2) are fixedly connected to the bottom base. The mover of the Lorentz motor (1) and the mover assembly of the reluctance motor (2) are connected to the vibration-isolated equipment. The Lorentz motor (1) and the reluctance motor (2) can output power individually or in combination.

2. The active vibration damping device according to claim 1, characterized in that, The bottom base is a bottom plate (4); the vibration isolation device is a top plate (3). The stator of the Lorentz motor (1) and the stator assembly of the reluctance motor (2) are arranged side by side on the upper surface of the base plate (4), and the mover assembly of the reluctance motor (2) is fixedly disposed on the lower surface of the top plate (3). The mover of the Lorentz motor (1) is connected to the mover assembly of the reluctance motor (2) to form a drive device in which the reluctance motor (2) and the Lorentz motor (1) are connected in parallel. The reluctance motor (2) includes two sets of EI reluctance motor structures, which are arranged in a mirror-symmetrical manner along the vertical direction to form a "sandwich" clamping topology.

3. The active vibration damping device according to claim 2, characterized in that, The mover assembly (21) of the reluctance motor (2) includes a reluctance motor mover (211) and a first connector (212). The first connector (212) is connected to the top plate (3), and the magnetoresistive motor mover (211) is located on the protruding section (213) of the first connector (212). The stator assembly (22) of the reluctance motor (2) includes a first reluctance motor stator (221), a second reluctance motor stator (222), and a second connector (223). The bottom of the second connector (223) is connected to the upper surface of the base plate (4); The second connector (223) has two accommodating spaces arranged opposite each other in the vertical direction. The two accommodating spaces are respectively used to fix the first reluctance motor stator (221) and the second reluctance motor stator (222) so that the first reluctance motor stator (221) and the second reluctance motor stator (222) are symmetrical about the reluctance motor mover (211) to form two sets of EI reluctance motor structures.

4. The active vibration damping device according to claim 3, characterized in that, A receiving cavity is formed between the protruding section (213) of the first connector (212) and the top plate (3), and the receiving cavity is adapted to the first reluctance motor stator (221) or the second reluctance motor stator (222).

5. The active vibration damping device according to claim 3, characterized in that, In any of the EI reluctance motor structures, the stator of the reluctance motor is an E-shaped stator, and the mover of the reluctance motor is an I-shaped mover.

6. The active vibration damping device according to claim 5, characterized in that, The E-shaped stator has an E-shaped three-tooth structure, with the openings between the teeth facing the I-shaped mover; The middle tooth of the three-tooth structure is wound with a coil (224).

7. The active vibration damping device according to claim 5, characterized in that, The I-shaped mover is a rectangular frame structure, with its two opposite sides located on the upper and lower sides of the protruding section of the first connector (212).

8. The active vibration damping device according to claim 3, characterized in that, The mover (11) of the Lorentz motor (1) includes a converter (111), a soft magnetic component (112), and a magnet (113). The upper surface of the adapter (111) is connected to the extension of the first connector (212); Two soft magnetic components (112) are disposed opposite each other at both ends of the adapter (111), and a plurality of magnets (113) are evenly distributed on the opposite surfaces of the soft magnetic components (112).

9. The active vibration damping device according to claim 8, characterized in that, The stator (12) of the Lorentz motor (1) is located in the receiving area formed by the two soft magnetic components (112), and the two soft magnetic components (112) with magnets are symmetrically arranged about the stator (12) of the Lorentz motor (1).

10. The active vibration damping device according to claim 2, characterized in that, The stator (12) of the Lorentz motor (1) includes a coil box and a Lorentz coil; The coil box is vertically mounted on the base plate; the Lorentz coil is located inside the coil box.

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