A sealing flange device for a quartz tube container

Abstract

The utility model discloses a kind of sealing flange devices for quartz tube container fusion sealing, belong to quartz tube container fusion sealing technical field, comprising: cover and sealing assembly, sealing assembly is fixedly installed in the downside of cover, when installing cover, sealing assembly is tightly closed opening side wall and generates corresponding elastic deformation, realize sealing;Cooling assembly, cooling assembly is fixedly installed in the downside of cover, for in fusion sealing process, control flange temperature, the utility model passes through the elastic part and generates controllable elastic deformation, adapt to the trace deformation of quartz tube, simultaneously, the deformation direction of elastic part can be limited by limiting unit and improve the support force of elastic part, guarantee sealing effect.

Description

Technical Field

[0001] This utility model relates to the field of quartz tube container sealing technology, specifically to a sealing flange device for sealing quartz tube containers. Background Technology

[0002] Quartz tube containers are widely used in semiconductor manufacturing, optical device packaging, and laboratory sample processing due to their excellent high temperature resistance, chemical stability, and light transmittance. The sealing process is a key step in ensuring the container's airtightness and performance.

[0003] Existing sealing flanges mostly adopt a "single rigid gasket" or "simple O-ring elastic seal" structure. During the fusion sealing process, a slight deformation will occur due to the fusion sealing heat effect. The rigid gasket cannot adapt to this slight deformation. Traditional simple elastic seals such as O-rings lack deformation control structures. Under pressure, they are prone to "local excessive deformation" or "deformation direction deviation", resulting in uneven sealing surface contact. This not only fails to form a stable sealing interface, but also leads to seal failure due to insufficient support force of the elastic element.

[0004] To address the aforementioned problems, this utility model provides a sealing flange device for sealing quartz tube containers. Utility Model Content

[0005] To address the aforementioned technical deficiencies, the purpose of this utility model is to provide a sealing flange device for sealing quartz tube containers. This device generates controllable elastic deformation through an elastic part to adapt to the minute deformation of the quartz tube. At the same time, the limiting unit can limit the deformation direction of the elastic part and improve the supporting force of the elastic part, thus ensuring the sealing effect.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: The present invention provides a sealing flange device for sealing quartz tube containers, comprising: Cover; A sealing assembly is fixedly installed on the lower side of the cover. When the cover is installed, the sealing assembly presses against the side wall of the opening and generates corresponding elastic deformation to achieve a seal. A cooling assembly is fixedly installed on the lower side of the cover and is used to control the flange temperature during the sealing process.

[0007] Preferably, the sealing assembly includes: A base ring, which is coaxially and fixedly installed on the lower side of the cover; The elastic part is fixedly installed on the outer ring surface of the base ring; A retaining ring, which is fixedly sleeved on the outside of the elastic part; During the installation of the cover, the clamping ring presses against the side wall of the opening, and the elastic part undergoes elastic deformation.

[0008] Preferably, the base ring has an "L" shaped cross-section, with the vertical end sidewall fixedly connected to the cover and the horizontal end sidewall fixedly connected to the lower end of the elastic part, which is used to limit the displacement of the lower end of the elastic part.

[0009] Preferably, the elastic part is a hollow structure with an upwardly convex arch at its upper end. When the retaining ring presses against the side wall of the opening, the upper end of the elastic part presses against the lower side of the cover.

[0010] Preferably, the lower side of the cover is provided with multiple sealing rings above the elastic part.

[0011] Preferably, the lower end of the clamping ring is an inwardly curved surface.

[0012] Preferably, the outer ring surface of the clamping ring is an outwardly flared slope.

[0013] Preferably, the elastic part is provided with a plurality of limiting units inside, which are used to limit the deformation direction of the elastic part during the elastic deformation process.

[0014] Preferably, the limiting unit includes: A fixing tube is fixedly installed on one side of the elastic part; A sliding rod, one end of which is slidably installed inside the fixed tube, and the other end is folded to both sides to form a circular structure and pressed against the opening end of the fixed tube. The folded end of the sliding rod is fixedly connected to the inner side of the elastic part.

[0015] Preferably, the cooling assembly includes: A vortex tube is fixedly installed on the lower side of the cover, and an inlet pipe and an outlet pipe are fixedly installed at both ends of the vortex tube, respectively. The ends of the inlet pipe and the outlet pipe away from the vortex tube pass through the cover and are connected to the external circulating cooling equipment.

[0016] The beneficial effects of this utility model are as follows: This invention, through the arrangement of a base ring, an elastic part, and a clamping ring, enables the elastic part to generate controllable elastic deformation when clamped against the side wall of the opening, adapting to the slight deformation of the quartz tube; at the same time, the limiting unit (fixed tube and slide rod) can limit the deformation direction of the elastic part and also improve the supporting force of the elastic part, further enhancing the sealing effect.

[0017] This invention increases the contact area with the cover by using a vortex tube. Combined with a circulating cooling system connected to inlet and outlet water pipes, it can efficiently remove the heat generated by the fusion sealing process, effectively controlling the temperature of the flange and sealing components. Simultaneously, the structural design of the elastic part of the sealing component and the clamping ring maintains stable elastic deformation capacity even with temperature changes. This design solves the adverse effects of high temperatures on sealing performance, extends the service life of the device, and is more suitable for the high-temperature conditions of quartz tube fusion sealing. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention (first perspective).

[0020] Figure 2 This is a schematic diagram of the overall structure of the present invention (second perspective).

[0021] Figure 3 This is a cross-sectional view of the present invention.

[0022] Figure 4 This utility model Figure 3 Enlarged view of point A.

[0023] Figure 5 This is an exploded view of the base ring, elastic part, and clamping ring of this utility model.

[0024] Figure 6 This is a cross-sectional view of the elastic part of this utility model.

[0025] Explanation of reference numerals in the attached figures: 1. Cover body, 2. Base ring, 3. Elastic part, 4. Anchor ring, 5. Sealing ring, 6. Fixing tube, 7. Slide rod, 8. Vortex tube, 9. Inlet pipe, 10. Outlet pipe. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] This utility model provides a sealing flange device for fusion sealing of quartz tube containers, such as... Figures 1 to 6 As shown.

[0028] Example 1: A sealing flange device for sealing a quartz tube container includes a cover 1, which is a circular plate structure. A sealing assembly is fixedly installed on its lower side. The sealing assembly includes a base ring 2, an elastic part 3, and a clamping ring 4.

[0029] The base ring 2 has an "L" shaped cross-section. The vertical end sidewall of the base ring 2 is fixedly connected to the lower side of the cover 1 by welding. The horizontal end sidewall extends horizontally outward, and the upper surface of the horizontal end sidewall is fixedly connected to the lower end of the elastic part 3. The core function of this "L" shaped structure is to limit the displacement of the lower end of the elastic part 3, prevent the elastic part 3 from shifting downward when it is subjected to pressure deformation, and provide stable lower support for the elastic part 3.

[0030] The elastic part 3 is made of fluororubber and has a hollow ring structure. Its upper end is designed as an upward-convex arch. The inner ring surface of the elastic part 3 is fitted and fixed to the outer ring surface of the base ring 2, while the outer ring surface is fixedly connected to the inner ring surface of the clamping ring 4. The hollow arch structure design can form a "recoverable deformation space" when under pressure, avoiding tearing of the elastic part 3 due to local stress concentration. At the same time, the upper end of the arch can tightly press against the lower side of the cover 1 when deformed, forming a two-way constraint of "upper clamping the cover and lower connecting the base ring".

[0031] The lower end of the clamping ring 4 is an inwardly curved surface, which can serve as a guide during installation. At the same time, the upper side of the outer ring surface of the clamping ring 4 is an outwardly sloping surface. As the cover 1 is gradually installed, the clamping force on the elastic part 3 gradually increases, which also gradually increases the elastic deformation of the elastic part 3, making it easier for the staff to install.

[0032] During this process, the transverse sidewall of the base ring 2 restricts the downward deformation of the elastic part 3, and the cover 1 restricts the excessive upward deformation of the elastic part 3. The hollow arch of the elastic part 3 absorbs the slight radial deformation of the quartz tube caused by the heat effect of the fusion seal through controllable deformation. The base ring 2, the elastic part 3 and the clamping ring 4 work together to form a stable sealing interface, which solves the problems that traditional rigid sealing gaskets cannot adapt to slight deformation and simple O-rings do not fit evenly.

[0033] Meanwhile, on the lower side of the cover 1, above the elastic part 3 (that is, directly above the arched surface of the upper end of the elastic part 3), there are multiple concentrically distributed sealing rings 5 ​​with a semi-circular cross-section. When the upper end of the elastic part 3 presses against the lower side of the cover 1, it will engage with the sealing rings 5 ​​to further improve the sealing performance.

[0034] Example 2: Based on Embodiment 1, in order to make the deformation of the elastic part 3 more stable, multiple limiting units are provided inside the elastic part 3 in its annular hollow cavity. The multiple limiting units are evenly distributed along the circumference of the cover 1. The limiting unit includes a fixing tube 6 and a sliding rod 7. One end of the fixing tube 6 is fixed to the inner side of one side of the elastic part 3. One end of the sliding rod 7 is inserted into the interior of the fixing tube 6 and forms a sliding fit with the fixing tube 6. The other end is symmetrically folded to both sides, and the folded part forms a circle. One side of the folded part of the sliding rod 7 abuts against the opening end of the fixing tube 6, and the other side is fixedly connected to the inner side of the other side of the elastic part 3.

[0035] During installation, the elastic part 3 is subjected to a clamping force. In addition to radial contraction deformation, the elastic part 3 may also become misaligned, which will affect the sealing performance. The sliding fit between the slide rod 7 and the fixing tube 6 can prevent the elastic part 3 from becoming misaligned. Furthermore, when the two sides of the elastic part 3 approach each other, the folded part of the slide rod 7 will also press against the opening end of the fixing tube 6 and generate elastic deformation, thereby increasing the support force on the elastic part 3 and further improving the sealing performance.

[0036] Example 3: Based on Embodiment 2, this embodiment adds a cooling component to control the flange temperature and prevent stress concentration in the quartz tube due to excessive temperature. The cooling component is fixedly installed on the lower side of the cover 1 and includes a vortex tube 8, an inlet pipe 9, and an outlet pipe 10. The vortex structure of the vortex tube 8 can increase the contact area between the vortex tube 8 and the cover 1, thereby significantly improving the heat transfer efficiency.

[0037] The inlet end of the vortex tube 8 is fixed to one end of the inlet pipe 9 by welding, and the outlet end is fixed to one end of the outlet pipe 10 by welding. The other ends of the inlet pipe 9 and the outlet pipe 10 pass through the cover 1 (the cover 1 has a corresponding through hole, and a high-temperature resistant sealing ring is provided in the through hole), extend to the outer side of the upper side of the cover 1, and are connected to the external circulating cooling equipment (such as an industrial chiller) through a quick connector.

[0038] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A sealing flange device for sealing quartz tube containers, characterized in that, include: Cover (1); A sealing assembly is fixedly installed on the lower side of the cover (1). When the cover (1) is installed, the sealing assembly abuts against the side wall of the opening and generates corresponding elastic deformation to achieve sealing. A cooling assembly is fixedly installed on the lower side of the cover (1) to control the flange temperature during the sealing process.

2. The sealing flange device for sealing quartz tube containers as described in claim 1, characterized in that, The sealing assembly includes: Base ring (2), which is coaxially fixedly installed on the lower side of the cover (1); The elastic part (3) is fixedly installed on the outer ring surface of the base ring (2); A retaining ring (4) is fixedly sleeved on the outside of the elastic part (3); When the cover (1) is installed, the clamping ring (4) clamps against the side wall of the opening, and the elastic part (3) undergoes elastic deformation.

3. A sealing flange device for sealing quartz tube containers as described in claim 2, characterized in that, The base ring (2) has an "L" shaped cross section. The vertical end sidewall is fixedly connected to the cover (1), and the horizontal end sidewall is fixedly connected to the lower end of the elastic part (3) to limit the displacement of the lower end of the elastic part (3).

4. A sealing flange device for sealing quartz tube containers as described in claim 3, characterized in that, The elastic part (3) is a hollow structure with an upward-convex arch at its upper end. When the clamping ring (4) clamps against the side wall of the opening, the upper end of the elastic part (3) clamps against the lower side of the cover (1).

5. A sealing flange device for sealing quartz tube containers as described in claim 4, characterized in that, The lower side of the cover (1) is provided with multiple sealing rings (5) above the elastic part (3).

6. A sealing flange device for sealing a quartz tube container as described in claim 2, characterized in that, The lower end of the clamping ring (4) is an inwardly curved surface.

7. A sealing flange device for sealing quartz tube containers as described in claim 6, characterized in that, The outer ring surface of the clamping ring (4) is an outwardly expanding inclined surface on the upper side.

8. A sealing flange device for sealing quartz tube containers as described in claim 2, characterized in that, The elastic part (3) is provided with multiple limiting units inside, which are used to limit the deformation direction of the elastic part (3) during the elastic deformation process.

9. A sealing flange device for sealing a quartz tube container as described in claim 8, characterized in that, The limiting unit includes: The fixing tube (6) is fixedly installed on one side inside the elastic part (3); The slide rod (7) has one end slidably installed inside the fixed tube (6), and the other end is folded to both sides to form a circular structure and abuts against the opening end of the fixed tube (6). The folded end of the slide rod (7) is fixedly connected to the inner side of the elastic part (3).

10. A sealing flange device for sealing a quartz tube container as described in claim 1, characterized in that, The cooling assembly includes: The vortex tube (8) is fixedly installed on the lower side of the cover (1), and the two ends of the vortex tube (8) are respectively fixedly installed with an inlet pipe (9) and an outlet pipe (10). The ends of the inlet pipe (9) and the outlet pipe (10) away from the vortex tube (8) pass through the cover (1) and are connected to the external circulating cooling equipment.

Images