Inter-chamber seal

Abstract

The application discloses an inter-chamber sealing structure for sealing connection of adjacent first and second chambers, which comprises, in sequence from the first chamber to the second chamber, a flangeless vacuum valve, a first sealing ring, a second sealing ring and a plurality of abutting rods, the second chamber comprises first and second sub-chambers, the outer diameter of the first sub-chamber is smaller than that of the second sub-chamber, the first and second sealing rings are sleeved on the first sub-chamber, a triangular sealing groove is arranged on the connecting position between the surface close to the first sealing ring and the inner surface of the second sealing ring, a first sealing ring is arranged in the triangular sealing groove, the plurality of abutting rods are distributed in the circumferential direction of the first sub-chamber, a positioning hole is arranged on the end surface of the second sub-chamber, the end part of the abutting rod penetrates into the positioning hole, and the abutting rod moves towards the first chamber to push the second sealing ring, the first sealing ring and the first sealing ring, so that the flangeless vacuum valve is clamped between the first chamber and the first sealing ring.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a cavity sealing structure. Background Technology

[0002] Ion implanters are large-scale chip manufacturing equipment, typically composed of many interconnected chambers forming a vacuum environment for the movement of the ion beam. Vacuum valves are generally used to isolate the chambers. Flangeless vacuum valves are specifically designed and used in space-constrained locations, such as... Figure 1 As shown, a flangeless vacuum valve is generally a structure with sealing surfaces on both sides and no mounting threads. How to use a flangeless vacuum valve for connecting chambers is a technical problem that urgently needs to be solved in this field. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model innovatively provides a chamber-to-chamber sealing structure that can seal a flangeless vacuum valve between two chambers, achieve sealing between adjacent chambers, and enable sealing connections between two chambers with different spacings. This sealing structure is highly versatile.

[0004] To achieve the aforementioned technical objectives, this utility model discloses a chamber sealing structure for sealing the connection between adjacent first and second chambers. The chamber sealing structure includes a flangeless vacuum valve, a first sealing ring, a second sealing ring, and multiple clamping rods arranged sequentially from the first chamber to the second chamber. The second chamber includes a first sub-chamber and a second sub-chamber that are connected to each other. The first sub-chamber is closer to the first chamber than the second sub-chamber, and the outer diameter of the first sub-chamber is smaller than the outer diameter of the second sub-chamber. The first sealing ring and the second sealing ring are sleeved on the first sub-chamber. A triangular sealing groove is provided at the connection between the surface of the second sealing ring and the inner surface of the second sealing ring near the first sealing ring. A first sealing ring is provided in the triangular sealing groove. The plurality of clamping rods are distributed circumferentially around the first sub-chamber. The end face of the second sub-chamber near the first sub-chamber is provided with a positioning hole for the clamping rods to pass through. The end of the clamping rod near the second sub-chamber passes into the positioning hole. The clamping rod can move relative to the second sub-chamber towards or away from the first chamber. The movement of the clamping rod towards the first chamber pushes the second sealing ring, the first sealing ring and the first sealing ring to move towards the first chamber, clamping the flangeless vacuum valve between the first chamber and the first sealing ring.

[0005] Furthermore, the positioning hole is a threaded hole, and the clamping rod is threadedly connected to the positioning hole.

[0006] Furthermore, it also includes a locking screw, which is used to lock the movement of the abutment rod. The abutment rod has a threaded hole that matches the locking screw. The threaded hole is arranged radially along the abutment rod and passes through the abutment rod. The locking screw passes through the threaded hole and its end abuts against the outer wall of the first chamber to lock the movement of the abutment rod.

[0007] Furthermore, the clamping rods are evenly distributed around the first compartment.

[0008] Furthermore, a positioning step is provided at one end of the first chamber near the flangeless vacuum valve, and the flangeless vacuum valve is sleeved on the positioning step.

[0009] Furthermore, a second sealing ring is sandwiched between the end face of the flangeless vacuum valve near the first chamber and the end face of the first chamber near the flangeless vacuum valve.

[0010] Furthermore, a first sealing groove is provided on the end face of the flangeless vacuum valve near the first chamber and / or on the end face of the first chamber near the flangeless vacuum valve, and the second sealing ring is stuck in the first sealing groove.

[0011] Furthermore, a third sealing ring is sandwiched between the end face of the flangeless vacuum valve near the first sealing ring and the end face of the first sealing ring near the flangeless vacuum valve.

[0012] Furthermore, a second sealing groove is provided on the end face of the flangeless vacuum valve near the first sealing ring and / or on the end face of the first sealing ring near the flangeless vacuum valve, and the third sealing ring is stuck in the second sealing groove.

[0013] Furthermore, the first sub-chamber includes a first sub-chamber and a second sub-chamber arranged in the direction from the first sub-chamber to the second sub-chamber. The outer diameter of the first sub-chamber is smaller than the outer diameter of the second sub-chamber. The first sealing ring and the second sealing ring are sleeved on the first sub-chamber of the first sub-chamber.

[0014] The beneficial effects of this utility model are as follows: The chamber sealing structure of this utility model can seal a flangeless vacuum valve between two chambers, and can achieve sealing between two adjacent chambers, as well as sealing connection between two chambers with different spacing. This sealing structure has strong versatility. Attached Figure Description

[0015] Figure 1 This is a structural diagram of a flangeless vacuum valve.

[0016] Figure 2 This is a longitudinal sectional view of a chamber sealing structure according to an embodiment of the present invention.

[0017] Figure 3 This is a three-dimensional schematic diagram of the chamber sealing structure of another embodiment of the present invention.

[0018] Figure 4 This is a schematic diagram of the structure of the first sealing ring and the triangular sealing groove in an embodiment of the present invention.

[0019] In the picture, 1. First chamber; 11. Positioning step; 2. Second chamber; 21. First sub-chamber; 211. First sub-chamber; 212. Second sub-chamber; 22. Second sub-chamber; 221. Positioning hole; 3. Flangeless vacuum valve; 31. Inner hole; 41. First sealing ring; 42. Second sealing ring; 421. Triangular sealing groove; 5. Clamping rod; 6. First sealing ring; 7. Locking screw; 81. Second sealing ring; 82. First sealing groove; 91. Third sealing ring; 92. Second sealing groove. Detailed Implementation

[0020] The chamber sealing structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0021] This embodiment specifically discloses a chamber sealing structure, such as Figure 2 and 3 As shown, a sealing connection is used for adjacent first chamber 1 and second chamber 2.

[0022] The chamber sealing structure of this embodiment includes a flangeless vacuum valve 3, a first sealing ring 41, a second sealing ring 42, and multiple clamping rods 5 arranged sequentially from the first chamber 1 to the second chamber 2. The second chamber 2 includes a first sub-chamber 21 and a second sub-chamber 22 that are connected to each other. The first sub-chamber 21 is closer to the first chamber 1 than the second sub-chamber 22. The outer diameter of the first sub-chamber 21 is smaller than the outer diameter of the second sub-chamber 22. The first sealing ring 41 and the second sealing ring 42 are sleeved on the first sub-chamber 21. Figure 2-4As shown, a triangular sealing groove 421 is provided at the connection between the surface of the second sealing ring 42 near the first sealing ring 41 and the inner surface of the second sealing ring 42. A first sealing ring 6 is provided within the triangular sealing groove 421. The first sealing ring 6 achieves multi-face sealing, simultaneously sealing the first sealing ring 41 and the second sealing ring 42, sealing the first sealing ring 41 and the first sub-chamber 21 of the second chamber 2, and sealing the second sealing ring 42 and the first sub-chamber 21 of the second chamber 2. The end face of the first sealing ring 41 near the second sealing ring 42 and the end face of the second sealing ring 42 near the first sealing ring 41 can be fitted together or not, depending on the axial thickness and elasticity of the first sealing ring 6. Preferably, the end face of the first sealing ring 41 near the second sealing ring 42 and the end face of the second sealing ring 42 near the first sealing ring 41 are fitted together to enhance the sealing effect. The first sealing ring 6 can be a rubber ring.

[0023] The structure of the flangeless vacuum valve 3 is as follows Figure 1 As shown, both ends of the flangeless vacuum valve 3 are sealing surfaces, and there are no threaded holes or other connecting structures on the body for connection with other structures. Due to its unique structure, the flangeless vacuum valve 3 can be used for isolation between two chambers within a confined space.

[0024] like Figure 2 and 3As shown, multiple clamping rods 5 are distributed circumferentially around the first chamber 21, with at least two clamping rods 5. The end face of the second chamber 22 near the first chamber 21 has positioning holes 221 for the clamping rods 5 to pass through. The number of positioning holes 221 is the same as or greater than the number of clamping rods 5. Preferably, the number of positioning holes 221 is the same as the number of clamping rods 5, and there is a one-to-one correspondence between the clamping rods 5 and the positioning holes 221. When the number of positioning holes 221 exceeds the number of clamping rods 5, the position of the clamping rod 5 can be adjusted by selecting the positioning hole 211 to which it is inserted. The axial direction of the positioning hole 221 is parallel to the axial direction of the second chamber 2. The end of the clamping rod 5 near the second sub-chamber 22 is inserted into the positioning hole 221. The clamping rod 5 can move relative to the second sub-chamber 22 towards or away from the first chamber 1. The positioning hole 221 positions the direction of movement of the clamping rod 5, so that the clamping rod 5 moves in a direction parallel to the axial direction of the second chamber 2. The clamping rod 5 moves towards the first chamber 1 to push the second sealing ring 42, the first sealing ring 6 and the first sealing ring 41 towards the first chamber 1, thus clamping the flangeless vacuum valve 3 between the first chamber 1 and the first sealing ring 41. At this time, the end face of the first chamber 1 near the flangeless vacuum valve 3 is sealed with the end face of the flangeless vacuum valve 3 near the first chamber 1 (e.g., sealed fit and / or sealed by a sealing ring), and the end face of the flangeless vacuum valve 3 near the first sealing ring 41 is sealed with the end face of the first sealing ring 41 near the flangeless vacuum valve 3 (e.g., sealed fit and / or sealed by a sealing ring). The first sealing ring 41, the second sealing ring 42, and the second chamber 2 are sealed by the first sealing ring 6, thereby sealing the flangeless vacuum valve 3 between the first chamber 1 and the second chamber 2 and achieving a sealed connection between the first chamber 1 and the second chamber 2. The flangeless vacuum valve 3 controls the opening and closing of the first chamber 1 and the second chamber 2 and can maintain the vacuum environment inside the first chamber 1 and the second chamber 2.

[0025] Furthermore, by setting the clamping rod 5, this application improves the flexibility and selectivity of the axial dimensions of the flangeless vacuum valve 3, the first sealing ring 41, and the second sealing ring 42 by allowing it to move towards or away from the first chamber 1. It also pushes the first sealing ring 6 to move, enabling the sealing position of the first sealing ring 6 along the axial direction of the second chamber 2 to be adjustable. The reverse pressing force of the clamping rod 5 achieves the sealing and fixing of the flangeless vacuum valve 3, the first sealing ring 41, and the second sealing ring 42. Even without changing the axial dimensions of the flangeless vacuum valve 3, the first sealing ring 41, and the second sealing ring 42, the same sealing structure can achieve a sealed connection between two chambers with different spacing.

[0026] In practical working scenarios, the precise distance between two chambers cannot always be determined. The sealing structure of this application can be applied in such scenarios, as there are no strict requirements on the distance between the chambers. On the other hand, the axial dimensions of the flangeless vacuum valve 3, the first sealing ring 41, and the second sealing ring 42 can also be flexibly selected.

[0027] The first chamber 1 and the second chamber 2 each have their own supporting feet resting on the mounting base. The center alignment of the first chamber 1 and the second chamber 2 can be adjusted by leveling. After center alignment, the distance between the first chamber and the second chamber 2 can fluctuate within the design dimensions. The sealing structure of this application can achieve sealing.

[0028] This application also provides a new method for installing the flangeless vacuum valve 3.

[0029] The method of using the sealing structure in this application embodiment is as follows: Insert the clamping rod 5 into the positioning hole 221 of the second chamber 2, and then sequentially fit the second sealing ring 42, the first sealing ring 6, and the first sealing ring 41 onto the first sub-chamber 21 of the second chamber 2. Place the flangeless vacuum valve 3 between the first chamber 1 and the second chamber 2, so that the end face of the flangeless vacuum valve 3 near the first chamber 1 can fit against the end face of the first chamber 1. Control the clamping rod 5 to move towards the first chamber 1, pushing the first sealing ring 41, the first sealing ring 6, and the second sealing ring 42 towards the first chamber 1. The first sealing ring 41 first contacts the flangeless vacuum valve 3, and then pushes the flangeless vacuum valve 3 towards the first chamber 1. Vacuum valve 3 is opened until the clamping rod 5 can no longer move, clamping the flangeless vacuum valve 3 between the first chamber 1 and the first sealing ring 41. At this time, the end of the first sealing ring 41 near the first chamber 1 protrudes outward from the first sub-chamber 21 of the second chamber 2, sealing the first chamber 1 with the flangeless vacuum valve 3, sealing the flangeless vacuum valve 3 with the first sealing ring 41, and sealing the first sealing ring 41, the second sealing ring 42 and the second chamber 2 with the first sealing ring 6, thereby realizing the sealed connection between the first chamber 1 and the second chamber 2. The connection between the first chamber 1 and the second chamber 2 can be controlled by the flangeless vacuum valve 3.

[0030] It is simple to operate and has a small overall size, making it easy to handle. It can be used for sealing connections between small internal cavities.

[0031] In some alternative embodiments, such as Figure 2As shown, the positioning hole 221 is a threaded hole, and the clamping rod 5 is threadedly connected to the positioning hole 221. By rotating the clamping rod 5 on the side of the first chamber 1 and the second chamber 2, the clamping rod 5 can be manipulated to move closer to or away from the first chamber 1. The operation is simple and convenient; a wrench or pliers can be used to clamp and rotate the clamping rod 5. The clamping rod 5 is threadedly connected to the second chamber 2, facilitating operation and ensuring a secure connection. When the clamping rod 5 can no longer be rotated, it indicates that the flangeless vacuum valve 3 has been clamped between the first chamber 1 and the first sealing ring 41. External force can then be removed, and the clamping rod 5 can no longer be rotated, thus fixing it in that position securely and maintaining the stability of the sealing effect. The clamping rod 5 can be directly selected as a screw or bolt, making the material readily available. A bolt is preferred for its ease of use with pliers or a wrench. The bolt nut is closer to the second sealing ring 42, and the bolt nut rests against the end face of the second sealing ring 42.

[0032] In some alternative embodiments, such as Figure 3 As shown, the chamber sealing structure of this application also includes a locking screw 7, which is used to lock the movement of the clamping rod 5. The locking screw 7 corresponds one-to-one with the clamping rod 5. The clamping rod 5 has a threaded hole that matches the thread of the locking screw 7. The threaded hole is arranged radially along the clamping rod 5 and passes through the clamping rod 5. The locking screw 7 is perpendicular to the clamping rod 5. The locking screw 7 passes through the threaded hole and its end abuts against the outer wall of the first sub-chamber 21 to lock the movement of the clamping rod 5. In this embodiment, the clamping rod 5 can slide relative to the positioning hole 221 of the second chamber 2. The clamping rod 5 can move towards or away from the first chamber 1 by sliding. When the clamping rod 5 moves, the locking screw 7 passes through the threaded hole of the clamping rod 5 or separates from the clamping rod 5. After the first sealing ring 41 and the first chamber 1 clamp the flangeless vacuum valve 3, the clamping rod 5 can no longer slide towards the first chamber 1. At this time, the locking screw 7 is rotated into the threaded hole until the end of the locking screw 7 abuts against the outer wall of the first sub-chamber 21 of the second chamber 2, thus fixing the position of the clamping rod 5.

[0033] The locking screw 7 can use existing screws and bolts, which are readily available and inexpensive.

[0034] Preferably, the clamping rods 5 are evenly distributed around the first chamber 21 to provide uniform clamping force and ensure sealing effect.

[0035] In some optional embodiments, a positioning step 11 is provided at the end of the first chamber 1 near the flangeless vacuum valve 3, and the flangeless vacuum valve 3 is fitted onto the positioning step 11. The positioning step 11 facilitates the assembly of the flangeless vacuum valve 3, ensuring that the central axis of the inner hole 31 of the flangeless vacuum valve 3 coincides with the central axis of the first chamber 1. The positioning step 11 positions the flangeless vacuum valve 3, preventing misalignment. The axial thickness of the positioning step 11 is less than the axial thickness of the flangeless vacuum valve 3, and the positioning step 11 does not affect the opening and closing of the flangeless vacuum valve 3. The outer diameter of the positioning step 11 is slightly smaller than the diameter of the inner hole 31 of the flangeless vacuum valve 3. The flangeless vacuum valve 3 is fitted onto the positioning step 11 through its inner hole 31, reducing assembly errors and ensuring that the central axis of the inner hole 31 of the flangeless vacuum valve 3 coincides with the central axis of the positioning step 11.

[0036] In some optional embodiments, a second sealing ring 81 is sandwiched between the end face of the flangeless vacuum valve 3 near the first chamber 1 and the end face of the first chamber 1 near the flangeless vacuum valve 3. The second sealing ring 81 can be a rubber ring. When the flangeless vacuum valve 3 is clamped between the first chamber 1 and the first sealing ring 41, the second sealing ring 81 sandwiched between the flangeless vacuum valve 3 and the first chamber 1 achieves a seal. At this time, the end face of the flangeless vacuum valve 3 near the first chamber 1 and the end face of the first chamber 1 near the flangeless vacuum valve 3 can be in contact or not, depending on the thickness and elasticity of the second sealing ring 81. Preferably, the end face of the flangeless vacuum valve 3 near the first chamber 1 is in contact with the end face of the first chamber 1 near the flangeless vacuum valve 3 to improve the sealing effect.

[0037] The end face of the flangeless vacuum valve 3 near the first chamber 1 and the end face of the first chamber 1 near the flangeless vacuum valve 3 can be flat planes. The second sealing ring 81 is directly sandwiched between the two end faces. At this time, there may be gaps between the two end faces, but a seal can be achieved through the second sealing ring 81.

[0038] In some optional embodiments, a first sealing groove 82 is provided on the end face of the flangeless vacuum valve 3 near the first chamber 1 and / or on the end face of the first chamber 1 near the flangeless vacuum valve 3, and a second sealing ring 81 is engaged in the first sealing groove 82. That is, in one embodiment, a first sealing groove 82 may be provided on the end face of the flangeless vacuum valve 3 near the first chamber 1, and the end face of the first chamber 1 near the flangeless vacuum valve 3 is flat. During installation, the second sealing ring 81 is first engaged in the first sealing groove 82 to position the second sealing ring 81, and then the second sealing ring 81 is clamped through the end face of the first chamber 1. In another embodiment, the end face of the flangeless vacuum valve 3 near the first chamber 1 is flat, and a first sealing groove 82 may be provided on the end face of the first chamber 1 near the flangeless vacuum valve 3. During installation, the second sealing ring 81 is first engaged in the first sealing groove 82 to position the second sealing ring 81, and then the second sealing ring 81 is clamped through the end face of the flangeless vacuum valve 3. In another embodiment, a first sealing groove 82 can be provided on the end face of the flangeless vacuum valve 3 near the first chamber 1. During installation, the second sealing ring 81 is first inserted into one of the first sealing grooves 82 to position it. Then, the second sealing ring 81 is pressed into the other first sealing groove 82, thus positioning it. The second sealing ring 81 is then pressed into the other first sealing groove 82, whereby it positions itself. The two first sealing grooves 82 work together to clamp the second sealing ring 81. In the above embodiments, the end face of the flangeless vacuum valve 3 near the first chamber 1 and the end face of the first chamber 1 near the flangeless vacuum valve 3 can be in close contact or have a small gap, depending on the elasticity and axial thickness of the second sealing ring 81 and the depth of the first sealing groove 82. The first sealing groove 82 facilitates the positioning and installation of the second sealing ring 81, improves assembly accuracy, and reduces assembly difficulty.

[0039] In some optional embodiments, a third sealing ring 91 is sandwiched between the end face of the flangeless vacuum valve 3 near the first sealing ring 41 and the end face of the first sealing ring 41 near the flangeless vacuum valve 3. The third sealing ring 91 can be a rubber ring. When the flangeless vacuum valve 3 is clamped between the first chamber 1 and the first sealing ring 41, the third sealing ring 91 sandwiched between the flangeless vacuum valve 3 and the first sealing ring 41 achieves a seal. At this time, the end face of the flangeless vacuum valve 3 near the first sealing ring 41 and the end face of the first sealing ring 41 near the flangeless vacuum valve 3 can be in contact or not, depending on the thickness and elasticity of the third sealing ring 91. Preferably, the end face of the flangeless vacuum valve 3 near the first sealing ring 41 is in contact with the end face of the first sealing ring 41 near the flangeless vacuum valve 3 to improve the sealing effect.

[0040] The end face of the flangeless vacuum valve 3 near the first sealing ring 41 and the end face of the first sealing ring 41 near the flangeless vacuum valve 3 can be flat planes. The third sealing ring 91 is directly sandwiched between the two end faces. At this time, there may be gaps between the two end faces, but sealing can be achieved through the third sealing ring 91.

[0041] In some optional embodiments, a second sealing groove 92 is provided on the end face of the flangeless vacuum valve 3 near the first sealing ring 41 and / or on the end face of the first sealing ring 41 near the flangeless vacuum valve 3, and the third sealing ring 91 is engaged in the second sealing groove 92. That is, in one embodiment, a second sealing groove 92 may be provided on the end face of the flangeless vacuum valve 3 near the first sealing ring 41, and the end face of the first sealing ring 41 near the flangeless vacuum valve 3 is flat. During installation, the third sealing ring 91 is first engaged in the second sealing groove 92 to position the third sealing ring 91, and then the third sealing ring 91 is clamped by the end face of the first sealing ring 41. In another embodiment, the end face of the flangeless vacuum valve 3 near the first sealing ring 41 is flat, and a second sealing groove 92 may be provided on the end face of the first sealing ring 41 near the flangeless vacuum valve 3. During installation, the third sealing ring 91 is first engaged in the second sealing groove 92 to position the third sealing ring 91, and then the third sealing ring 91 is clamped by the end face of the flangeless vacuum valve 3. In another embodiment, a second sealing groove 92 can be provided on the end face of the flangeless vacuum valve 3 near the first sealing ring 41. During installation, the third sealing ring 91 is first inserted into one of the second sealing grooves 92 to position it. Then, the third sealing ring 91 is pressed into the other second sealing groove 92, where it serves to position itself. The two second sealing grooves 92 then clamp the third sealing ring 91. In the above embodiment, the end face of the flangeless vacuum valve 3 near the first sealing ring 41 and the end face of the first sealing ring 41 near the flangeless vacuum valve 3 can be in close contact or have a small gap, depending on the elasticity and axial thickness of the third sealing ring 91 and the depth of the second sealing groove 92. The second sealing groove 92 facilitates the positioning and installation of the third sealing ring 91, improves assembly accuracy, and reduces assembly difficulty.

[0042] In this embodiment, the first sealing ring 41 can be made from an existing flange, and the second sealing ring 42 can be made from an existing flange, which makes it easy to obtain materials and reduces costs.

[0043] In some alternative embodiments, the outer diameter of the first sub-chamber 21 of the second chamber 2 may be exactly the same along the axial direction.

[0044] In some optional embodiments, the first sub-chamber 21 includes a first sub-chamber 211 and a second sub-chamber 212 arranged from the first sub-chamber 21 to the second sub-chamber 22. The outer diameter of the first sub-chamber 211 is smaller than the outer diameter of the second sub-chamber 212, and the outer diameter of the second sub-chamber 212 is smaller than the outer diameter of the second sub-chamber 22. A first sealing ring 41 and a second sealing ring 42 are fitted onto the first sub-chamber 211 of the first sub-chamber 21. That is, the outer surface of the first sub-chamber 21 has a variable diameter structure, and the end face of the second sub-chamber 212 near the first sub-chamber 211 positions the first sealing ring 41 and the second sealing ring 42 for initial installation on the first sub-chamber 211, reducing assembly difficulty. The clamping rods 5 are distributed around the second sub-chamber 212. The clamping rods 5 can move towards the first sub-chamber 211, pushing the first sealing ring 41 outward to the end face of the first sub-chamber 211 away from the second sub-chamber 212, so that the first sealing ring 41 and the first chamber 1 clamp the flangeless vacuum valve 3.

[0045] The method of using the sealing structure in this application embodiment is as follows: Insert the clamping rod 5 into the positioning hole 221 of the second chamber 2, and then sequentially fit the second sealing ring 42, the first sealing ring 6, and the first sealing ring 41 onto the first sub-chamber 21 of the second chamber 2. The third sealing ring 91 is inserted into the second sealing groove 92, and the second sealing ring 81 is inserted into the first sealing groove 82. The flangeless vacuum valve 3 is fitted onto the positioning step 11 of the first chamber 1. Control the clamping rod 5 to move towards the first chamber 1, pushing the first sealing ring 41, the first sealing ring 6, and the second sealing ring 42 towards the first chamber 1, and further pushing the flangeless vacuum valve 3 towards the first chamber 1, until the clamping rod 5 can no longer move. Fix the position of the clamping rod 5. (For example, stop rotating the clamping rod 5, or fix the position of the clamping rod 5 by locking the screw 7), clamp the flangeless vacuum valve 3 between the first chamber 1 and the first sealing ring 41. The first sealing ring 6, the second sealing ring 81 and the third sealing ring 91 are squeezed and clamped. The flangeless vacuum valve 3 is sealed to the first chamber 1 by the second sealing ring 81, and the flangeless vacuum valve 3 is sealed to the first sealing ring 41 by the third sealing ring 91. The first sealing ring 41, the second sealing ring 42 and the second chamber 2 are sealed by the first sealing ring 6, thereby realizing the sealed connection between the first chamber 1 and the second chamber 2. The connection between the first chamber 1 and the second chamber 2 can be controlled by the flangeless vacuum valve 3.

[0046] This application provides a novel installation method for a flangeless vacuum valve 3. The installation method is simple and applicable to sealing between chambers in confined spaces. Sealing is achieved by the reverse compression of the clamping rod 5. The positions of the first sealing ring 6, the second sealing ring 81, and the third sealing ring 91 can be adjusted to achieve adjustable sealing position. Since the clamping rod 5 can move relative to the second chamber 2, the flangeless vacuum valve 3 is sealed through compression. This sealing structure can be applied between two chambers with different spacings, thus increasing its versatility.

[0047] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0048] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0050] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0051] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A chamber-to-chamber sealing structure, characterized in that, For sealing connection of adjacent first chamber (1) and second chamber (2), The inter-chamber sealing structure includes a flangeless vacuum valve (3), a first sealing ring (41), a second sealing ring (42), and multiple clamping rods (5) arranged sequentially from the first chamber (1) to the second chamber (2). The second chamber (2) includes a first sub-chamber (21) and a second sub-chamber (22) that are connected to each other. The first sub-chamber (21) is closer to the first chamber (1) than the second sub-chamber (22). The outer diameter of the first sub-chamber (21) is smaller than the outer diameter of the second sub-chamber (22). The first sealing ring (41) and the second sealing ring (42) are fitted on the first sub-chamber (21). A triangular sealing groove (421) is provided at the connection between the surface of the second sealing ring (41) and the inner surface of the second sealing ring (42). A first sealing ring (6) is provided in the triangular sealing groove (421). The plurality of clamping rods (5) are distributed circumferentially around the first sub-chamber (21). The second sub-chamber (22) has a positioning hole (221) on its end face near the first sub-chamber (21) for the clamping rods (5) to pass through. The end of the clamping rod (5) near the second sub-chamber (22) passes into the positioning hole (221). The clamping rod (5) can move relative to the second sub-chamber (22) towards or away from the first chamber (1). The clamping rod (5) moves towards the first chamber (1) to push the second sealing ring (42), the first sealing ring (6) and the first sealing ring (41) towards the first chamber (1) to clamp the flangeless vacuum valve (3) between the first chamber (1) and the first sealing ring (41).

2. The chamber sealing structure according to claim 1, characterized in that, The positioning hole (221) is a threaded hole, and the clamping rod (5) is threadedly connected to the positioning hole (221).

3. The chamber sealing structure according to claim 1, characterized in that, It also includes a locking screw (7), which is used to lock the movement of the abutment rod (5). The abutment rod (5) has a threaded hole that matches the locking screw (7). The threaded hole is arranged radially along the abutment rod (5) and passes through the abutment rod (5). The locking screw (7) passes through the threaded hole and its end abuts against the outer wall of the first sub-chamber (21) to lock the movement of the abutment rod (5).

4. The chamber sealing structure according to claim 1, characterized in that, The clamping rods (5) are evenly distributed around the first chamber (21) in a circumferential direction.

5. The chamber sealing structure according to claim 1, characterized in that, The first chamber (1) is provided with a positioning step (11) at one end near the flangeless vacuum valve (3), and the flangeless vacuum valve (3) is sleeved on the positioning step (11).

6. The chamber sealing structure according to claim 1 or 5, characterized in that, A second sealing ring (81) is sandwiched between the end face of the flangeless vacuum valve (3) near the first chamber (1) and the end face of the first chamber (1) near the flangeless vacuum valve (3).

7. The chamber sealing structure according to claim 6, characterized in that, The flangeless vacuum valve (3) has a first sealing groove (82) on the end face of the first chamber (1) and / or the end face of the first chamber (1) near the flangeless vacuum valve (3), and the second sealing ring (81) is stuck in the first sealing groove (82).

8. The chamber sealing structure according to claim 1, characterized in that, A third sealing ring (91) is sandwiched between the end face of the flangeless vacuum valve (3) near the first sealing ring (41) and the end face of the first sealing ring (41) near the flangeless vacuum valve (3).

9. The chamber sealing structure according to claim 8, characterized in that, The flangeless vacuum valve (3) has a second sealing groove (92) on the end face of the first sealing ring (41) and / or the end face of the first sealing ring (41) near the flangeless vacuum valve (3), and the third sealing ring (91) is stuck in the second sealing groove (92).

10. The chamber sealing structure according to claim 1, characterized in that, The first sub-chamber (21) includes a first sub-chamber (211) and a second sub-chamber (212) arranged in the direction from the first sub-chamber (21) to the second sub-chamber (22). The outer diameter of the first sub-chamber (211) is smaller than the outer diameter of the second sub-chamber (212). The first sealing ring (41) and the second sealing ring (42) are sleeved on the first sub-chamber (211).

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