A valve with both cutting and sucking functions

Abstract

The utility model discloses a valve with the functions of cutting off and back suction simultaneously belongs to valve technical field, including the valve body, be equipped with the liquid inlet and liquid outlet on the valve body, the liquid inlet with the liquid outlet is communicated through the communication groove between, cut off department, cut off department is located in the valve body, cut off department includes cut off mounting seat, cut off spring and cut off diaphragm, cut off mounting seat is fixed in the valve body, cut off spring sets up on cut off mounting seat, back suction department, back suction department is located in the valve body, back suction department includes back suction mounting seat, back suction spring and back suction diaphragm, back suction mounting seat is fixed in the valve body, back suction spring sets up on back suction mounting seat, piston, the piston is located in the valve body. The valve of the utility model can carry out synchronous cutting off and back suction processing to liquid medium, avoid liquid medium from the valve and flow too much, lead to the situation that appears pollution.

Description

Technical Field

[0001] This utility model belongs to the field of valve technology, and in particular relates to a valve that has both shut-off and backflow functions. Background Technology

[0002] In the semiconductor and medical device industries, valves are typically used to simultaneously cut off and draw back fluid media to meet the operational requirements of external products. In the semiconductor industry, when cleaning wafers, traditional valves cannot simultaneously cut off and draw back the cleaning fluid in actual use, which can lead to excessive use of cleaning fluid and affect the wafer. To prevent excess cleaning fluid from dripping, valves are needed to cut off and draw back the cleaning fluid to prevent contamination. Utility Model Content

[0003] This invention overcomes the shortcomings of the prior art by providing a valve that simultaneously has both shut-off and back-suction functions, thereby solving the problems existing in the prior art.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is: a valve that simultaneously possesses cut-off and backflow functions, comprising...

[0005] The valve body is provided with an inlet and an outlet, and the inlet and outlet are connected by a connecting groove;

[0006] The cut-off section is located within the valve body and includes a cut-off mounting base, a cut-off spring, and a cut-off diaphragm. The cut-off mounting base is fixed within the valve body, the cut-off spring is disposed on the cut-off mounting base, and the cut-off diaphragm is connected to the cut-off spring to open or close the communicating groove.

[0007] The back suction section is located in the valve body. The back suction section includes a back suction mounting base, a back suction spring, and a back suction diaphragm. The back suction mounting base is fixed in the valve body. The back suction spring is disposed on the back suction mounting base. The back suction spring pushes the back suction diaphragm to reset the back suction diaphragm.

[0008] A piston, located within the valve body, is used to push the back-suction diaphragm.

[0009] In a preferred embodiment of the present invention, the valve body includes a first valve seat, a second valve seat, and a third valve seat arranged sequentially. The cut-off portion is located inside the first valve seat, the liquid inlet and the liquid outlet are respectively located at both ends of the second valve seat, and the back suction portion is located inside the third valve seat.

[0010] In a preferred embodiment of this utility model, the piston is located inside the third valve seat, and an air inlet is provided on one side of the third valve seat to introduce gas to drive the piston.

[0011] In a preferred embodiment of this utility model, an adjusting screw is provided inside the third valve seat, and the bottom end of the adjusting screw contacts the piston to push the piston out.

[0012] In a preferred embodiment of this utility model, an adjusting mounting block is fixedly provided on the top of the third valve seat. The adjusting mounting block is threadedly connected to the adjusting screw. When the adjusting screw rotates, the adjusting screw moves along its own length direction.

[0013] In a preferred embodiment of this utility model, an operating handwheel is provided at the top of the adjusting screw to drive the adjusting screw to rotate.

[0014] In a preferred embodiment of the present invention, the truncated diaphragm is provided with a sinking cavity, and the reabsorption diaphragm is provided with a protrusion, the protrusion cooperating with the sinking cavity.

[0015] This utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0016] 1. The valve of this utility model can simultaneously cut off and back-suction the liquid medium, preventing excessive liquid medium from flowing out of the valve and causing pollution, and also effectively preventing the waste of liquid medium;

[0017] 2. The adjusting screw of this utility model can adjust the initial position of the piston, change the initial position of the back suction diaphragm, and thus adjust the back suction amount of the back suction diaphragm to meet the back suction requirements of the liquid medium. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0019] Figure 1 This is a schematic diagram of the overall structure of a preferred embodiment of the present invention;

[0020] Figure 2 This is a cross-sectional schematic diagram of a preferred embodiment of the present invention;

[0021] Figure 3 This is a partial structural schematic diagram of a preferred embodiment of the present invention;

[0022] Figure 4 for Figure 3 A sectional view;

[0023] In the diagram: 10. Valve body; 11. First valve seat; 12. Second valve seat; 13. Third valve seat; 131. Air inlet; 101. Liquid inlet; 102. Liquid outlet; 20. Cut-off section; 21. Cut-off mounting base; 22. Cut-off spring; 23. Cut-off diaphragm; 231. Lower cavity; 30. Back suction section; 31. Back suction mounting base; 32. Back suction spring; 33. Back suction diaphragm; 331. Protrusion; 40. Piston; 50. Adjusting screw; 60. Adjusting mounting block; 70. Operating handwheel. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0025] This embodiment provides a valve that simultaneously has the functions of shut-off and back suction. This valve can simultaneously shut off and back suction the liquid medium, preventing excessive liquid medium from flowing out of the valve and causing pollution, and can also effectively prevent the liquid medium from being wasted.

[0026] Combination Figures 1 to 4 As shown, the valve in this embodiment includes a valve body 10, a shut-off section 20, a back suction section 30, and a piston 40. The valve body 10 is provided with an inlet 101 and an outlet 102, which are connected by a connecting groove. The shut-off section 20 performs opening and closing operations on the connecting groove. When the shut-off section 20 opens the connecting groove, the liquid medium reaches the outlet 102 from the inlet 101. When the shut-off section 20 closes the connecting groove, the liquid medium cannot reach the outlet 102 from the inlet 101. The back suction section 30 can perform back suction of the liquid medium when the connecting groove is closed, preventing excess liquid medium from being discharged from the outlet 102. The piston 40 can drive the back suction section 30, which in turn drives the shut-off section 20, causing the shut-off section 20 to perform opening and closing operations on the connecting groove.

[0027] In this embodiment, the valve body 10 includes a first valve seat 11, a second valve seat 12, and a third valve seat 13 arranged sequentially. The cut-off part 20 is located inside the first valve seat 11. The liquid inlet 101 and the liquid outlet 102 are located at both ends of the second valve seat 12, respectively. The back suction part 30 is located inside the third valve seat 13. The piston 40 is located inside the third valve seat 13. An air inlet 131 is provided on one side of the third valve seat 13 to introduce gas to drive the piston 40. In the initial state, the cut-off part 20 closes the connecting groove, and the valve is in the closed state. When it is necessary to open the valve, gas is introduced through the air inlet 131. The piston 40 pushes the cut-off part 20 through the back suction part 30, causing the cut-off part 20 to open the connecting groove, and the valve is in the open state. When it is necessary to close the valve, the air inlet 131 stops introducing gas, and the cut-off part 20 and the back suction part 30 automatically reset, closing the valve. At the same time, the back suction part 30 performs back suction treatment on the liquid medium.

[0028] Furthermore, in this embodiment, an adjusting screw 50 is provided inside the third valve seat 13. The bottom end of the adjusting screw 50 contacts the piston 40 to push the piston 40 out. An adjusting mounting block 60 is fixedly provided on the top of the third valve seat 13. The adjusting mounting block 60 is threadedly connected to the adjusting screw 50. When the adjusting screw 50 rotates, the adjusting screw 50 moves along its own length. An operating handwheel 70 is provided at the top of the adjusting screw 50 to drive the adjusting screw 50 to rotate. In this embodiment, the adjusting screw 50 is driven by the operating handwheel 70 to rotate. Since the adjusting mounting block 60 is threadedly connected to the adjusting screw 50, the adjusting screw 50 can move along its own length, thereby adjusting the initial position of the piston 40 and changing the initial position of the back suction diaphragm 33, thereby adjusting the back suction amount of the back suction diaphragm 33 to meet the back suction requirements of the liquid medium.

[0029] Combination Figures 2 to 4As shown, in this embodiment, the cut-off section 20 is located inside the valve body 10. The cut-off section 20 includes a cut-off mounting base 21, a cut-off spring 22, and a cut-off diaphragm 23. The cut-off mounting base 21 is fixed inside the valve body 10, the cut-off spring 22 is disposed on the cut-off mounting base 21, and the cut-off diaphragm 23 is connected to the cut-off spring 22 to open or close the connecting groove. The suction section 30 is located inside the valve body 10. The suction section 30 includes a suction mounting base 31, a suction spring 32, and a suction diaphragm 33. The suction mounting base 31 is fixed inside the valve body 10, and the suction spring 32 is disposed on the suction mounting base 31. The suction spring 32 pushes the suction diaphragm 33 to reset the suction diaphragm 33. The piston 40 is located inside the valve body 10 to push the suction diaphragm 33. When the valve is in the closed state, the cut-off spring 22 of the cut-off section 20 is in the normal state. The diaphragm 23 blocks the connecting groove. When the valve needs to be opened, gas is introduced through the air inlet 131, causing the piston 40 to drive the back suction diaphragm 33 until the back suction diaphragm 33 pushes the cut-off diaphragm 23. At this time, the back suction spring 32 is in a stretched state and the cut-off spring 22 is in a compressed state. After the cut-off diaphragm 23 is pressed down, the connecting groove opens and the valve opens. When the valve needs to be closed again, the air inlet 131 no longer introduces gas. At this time, the cut-off spring 22 and the back suction spring 32 reset, causing the cut-off diaphragm 23 to cut off the connecting groove, and the back suction diaphragm 33 sucks up the residual liquid medium, preventing the residual liquid medium from being discharged from the outlet 102. In this embodiment, the back suction diaphragm 33 is provided with a back suction groove. When the back suction diaphragm 33 resets, the liquid medium is located in the back suction groove, thereby realizing the back suction treatment of the liquid medium.

[0030] In this embodiment, the severing diaphragm 23 is provided with a sinking cavity 231, and the back suction diaphragm 33 is provided with a protrusion 331. The protrusion 331 cooperates with the sinking cavity 231 so that the severing diaphragm 23 can completely cut off the connecting groove, and the back suction diaphragm 33 can not affect the flow of the liquid medium.

[0031] In this embodiment, the valve, which simultaneously possesses both shut-off and backflow functions, allows the liquid medium to enter through the inlet 101 and exit through the outlet 102. When the valve is closed, the shut-off spring 22 of the shut-off section 20 is in its normal state, and the shut-off diaphragm 23 blocks the connecting channel. When the valve needs to be opened, gas is introduced through the air inlet 131, causing the piston 40 to drive the backflow diaphragm 33 until the backflow diaphragm 33 pushes the shut-off diaphragm 23. After the shut-off diaphragm 23 is pressed down, the connecting channel opens, allowing the valve to open. At this time, the backflow spring 32 is in a stretched state, and the shut-off spring 22 is in a compressed state. When the valve needs to be closed again, the air inlet 131 no longer introduces gas, and the shut-off spring 22 and the backflow spring 32 reset, causing the shut-off diaphragm 23 to cut off the connecting channel, and the backflow diaphragm 33 sucks up the remaining liquid medium, preventing the remaining liquid medium from being discharged from the outlet 102. Thus, the valve simultaneously possesses both shut-off and backflow functions.

[0032] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A valve that simultaneously possesses both shut-off and backflow functions, characterized in that, include The valve body (10) is provided with an inlet (101) and an outlet (102), and the inlet (101) and the outlet (102) are connected by a connecting groove. Cut-off section (20), the cut-off section (20) is located inside the valve body (10), the cut-off section (20) includes a cut-off mounting seat (21), a cut-off spring (22) and a cut-off diaphragm (23), the cut-off mounting seat (21) is fixed inside the valve body (10), the cut-off spring (22) is disposed on the cut-off mounting seat (21), and the cut-off diaphragm (23) is connected to the cut-off spring (22) to open or close the communicating groove; A suction section (30) is located inside the valve body (10). The suction section (30) includes a suction mounting base (31), a suction spring (32), and a suction diaphragm (33). The suction mounting base (31) is fixed inside the valve body (10). The suction spring (32) is disposed on the suction mounting base (31). The suction spring (32) pushes the suction diaphragm (33) to reset the suction diaphragm (33). A piston (40) is located inside the valve body (10) to push the back-suction diaphragm (33).

2. The valve with both shut-off and backflow functions as described in claim 1, characterized in that, The valve body (10) includes a first valve seat (11), a second valve seat (12) and a third valve seat (13) arranged in sequence. The cut-off part (20) is located in the first valve seat (11), the liquid inlet (101) and the liquid outlet (102) are located at both ends of the second valve seat (12) respectively, and the back suction part (30) is located in the third valve seat (13).

3. A valve with both shut-off and backflow functions as described in claim 2, characterized in that, The piston (40) is located inside the third valve seat (13), and the third valve seat (13) has an air inlet (131) on one side to introduce gas to drive the piston (40).

4. A valve with both shut-off and backflow functions as described in claim 2, characterized in that, An adjusting screw (50) is provided inside the third valve seat (13). The bottom end of the adjusting screw (50) contacts the piston (40) to push the piston (40) out.

5. A valve with both shut-off and backflow functions as described in claim 4, characterized in that, An adjusting mounting block (60) is fixedly provided on the top of the third valve seat (13). The adjusting mounting block (60) is threadedly connected to the adjusting screw (50). When the adjusting screw (50) rotates, the adjusting screw (50) moves along its own length direction.

6. A valve with both shut-off and backflow functions as described in claim 4, characterized in that, The top of the adjusting screw (50) is provided with an operating handwheel (70) to drive the adjusting screw (50) to rotate.

7. A valve with both shut-off and backflow functions as described in claim 1, characterized in that, The cut-off diaphragm (23) is provided with a sinking cavity (231), and the back-suction diaphragm (33) is provided with a protrusion (331), which cooperates with the sinking cavity (231).

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