Control valve with valve plate stack and fluid control device

Abstract

The utility model relates to control valve technical field, concretely relates to a valve plate laminated control valve and fluid control device, including the guide vane, valve plate and bottom plate that laminated in turn along the thickness direction, the first flow path, second flow path and flow path interval part between first flow path and second flow path are arranged at the interval on the guide vane, the bottom plate is threaded with the air inlet opening that is arranged opposite with flow path interval part, still have flow path forming part with second flow path opposite arrangement, the valve plate has the deformation part and the joint part that connect with each other, and the part of the outer circumferential edge of deformation part is not connected with joint part and forms the slit with second flow path opposite arrangement, the utility model does not have the convex structure that protrudes in the plane for providing the pre-tightening force of diaphragm in the prior art, and each component of flow path control valve is all flat plate structure, and the whole laminated joint, is favorable to further promote the thin degree of air leakage valve.

Description

Technical Field

[0001] This utility model relates to the field of control valve technology, specifically to a control valve and fluid control device with stacked valve plates. Background Technology

[0002] The valve control unit (VCU) is a core component of a fluid control device, and its structural and functional reliability and stability are closely related to the performance of the fluid control device. A prior application, CN115325213A, discloses a lateral venting control valve with a stacked structure, which greatly facilitates the miniaturization of the VCU. Furthermore, it employs a plate-hole mating method to construct the check valve and shapes the valve seat, placing the first air inlet at or near the center of the second flange. The valve plate abuts against the rounded transition area between the first and second flanges to form a seal, which improves the reverse shut-off capability of the check valve to a certain extent and reduces the risk of valve failure.

[0003] However, in practical engineering applications, the aforementioned lateral venting control valve has also revealed some technical problems that urgently need to be overcome, mainly in the following aspects:

[0004] (1) The flange protruding into the surface will inevitably make it difficult to achieve the maximum reduction in the thickness of the valve control unit, which restricts the further improvement of the product's thinness.

[0005] (2) In order to provide the pre-tightening force of the check valve, the diaphragm is generally made of a membrane material with high elasticity, such as silicone membrane. However, due to the different materials of each material layer, the coefficient of linear expansion is greatly different. When the temperature changes, the valve plate will loosen or tighten, resulting in unstable valve function characteristics or even failure.

[0006] (3) Adhesive is usually used to bond the layers together. However, adhesive bonding inevitably has the characteristics of creep aging. After a period of time, the valve plate will loosen, causing the valve control unit to fail and affecting the product stability. Utility Model Content

[0007] The technical problem to be solved by this utility model is: in order to overcome the shortcomings of the prior art, a control valve and fluid control device with stacked valve plates are provided.

[0008] The technical solution adopted by this utility model to solve its technical problem is: a control valve with stacked valve plates, including a guide plate, a valve plate and a base plate stacked sequentially along the thickness direction;

[0009] The guide plate is provided with a first flow path, a second flow path, and a flow path spacing portion located between the first flow path and the second flow path;

[0010] The base plate has an air inlet opening disposed opposite to the flow path spacing portion, and also has a flow path forming portion disposed opposite to the second flow path;

[0011] The valve plate has a deformable portion and a joint portion connected to each other. The two sides of the joint portion are respectively joined to the guide plate and the bottom plate. The first flow path, the flow path interval portion and the second flow path are all arranged opposite to the side surface of the deformable portion facing the guide plate. The side surface of the deformable portion facing the bottom plate covers the air intake opening and the flow path forming portion. The joint portion is arranged in a closed loop around the outer periphery of the deformable portion. A part of the outer periphery edge of the deformable portion is not connected to the joint portion and forms a slit arranged opposite to the second flow path.

[0012] When pressurized gas is introduced into the air inlet, the portion of the deformable part opposite to the flow path partition presses against the flow path partition to block the first flow path, and the portion of the deformable part opposite to the flow path forming part elastically deforms toward the second flow path to separate from the bottom plate, forming a second flow passage. The second flow passage forms a channel opening at the slit, and the air inlet is connected to the second flow path through the second flow passage and the channel opening.

[0013] When pressurized gas is introduced into the second flow path, the portion of the deformable part opposite to the flow path forming part presses against the flow path forming part to block the air inlet opening, and the portion of the deformable part opposite to the flow path spacing part elastically deforms toward the air inlet opening and separates from the flow path spacing part, forming a first flow passage connecting the first flow path and the second flow path.

[0014] Furthermore, the air intake opening includes a first air intake hole disposed opposite to the flow path spacing portion and at least one second air intake hole that penetrates the flow path forming portion, is opposite to the second flow path, and is spaced apart from the slit.

[0015] Furthermore, the deformable portion includes a discretely arranged first deformable portion and a second deformable portion. The first deformable portion covers the first air inlet, and the second deformable portion covers the second air inlet and the flow path forming portion. A portion of the outer peripheral edge of the second deformable portion is not connected to the joint portion to form the slit.

[0016] Furthermore, the flow path forming part has an intake roughening area and an intake sealing area on the side facing the valve plate, and the roughness of the intake roughening area is greater than the roughness of the intake sealing area.

[0017] The air intake texturing area is located around the outside of the second air intake hole and between the second air intake hole and the air intake sealing area. When the deformable part abuts against the flow path forming part of the bottom plate, the air intake sealing area completely covers the channel opening of the second flow channel. The air intake sealing area is used to form a seal with the deformable part.

[0018] Furthermore, the surface of the flow path partition facing the valve plate has a venting roughening area and a venting sealing area, and the roughness of the venting roughening area is greater than the roughness of the venting sealing area.

[0019] The venting texturing zone is located on the side surface of the flow path interval facing the valve plate, adjacent to the second flow path, and between the venting sealing zone and the second flow path. When the deformable part abuts against the flow path interval of the guide plate, the venting sealing zone and the deformable part form a seal.

[0020] Furthermore, the first flow path is formed as a stepped flow path.

[0021] Furthermore, the second flow path is formed as a stepped flow path.

[0022] Furthermore, the guide plate is also provided with a guide port that communicates with the second flow path, and the guide port is provided adjacent to the flow path spacing portion;

[0023] The projection of the guide port on the base plate has an area that overlaps with the air intake opening, and the projection of the guide port on the base plate is completely offset from the flow path forming part. The part between the guide port and the second flow path is formed as a guide interval part.

[0024] Furthermore, the first flow path is formed into a plurality of first flow paths, which are spaced apart around the second flow path.

[0025] Furthermore, it also includes a support plate, which is engaged with the side of the guide plate opposite to the bottom plate;

[0026] The support plate covers the second flow path, and the support plate has a vent hole that communicates with the second flow path;

[0027] The support plate covers the first flow path, and the support plate has an exhaust hole that communicates with the first flow path; or, the first flow path extends to the outer wall surface of the guide plate, and the support plate covers the first flow path and cooperates with the guide plate to form an exhaust hole.

[0028] Furthermore, the guide plate, valve plate, and base plate are all flat plate components;

[0029] At least two of the guide plate, valve plate, and base plate are made of polymer materials, and the valve plate and base plate are made of polymer materials.

[0030] Furthermore, at least the valve plate and the base plate are made of materials with the same or similar coefficients of linear expansion.

[0031] Furthermore, at least the valve plate is laminated to the base plate by heat fusion.

[0032] Furthermore, at least the valve plate is laminated and bonded to the base plate without prestress.

[0033] This utility model also provides a fluid control device, including the control valve with the above-mentioned valve plate stack.

[0034] The beneficial effects of this utility model are:

[0035] 1) The control valve of this utility model with stacked valve plates does not have the protruding structure that provides pre-tightening force to the diaphragm in the prior art. All components of the flow path control valve have a flat plate structure and are stacked together as a whole, which is conducive to further improving the thinness of the leakage valve.

[0036] 2) The control valve of this utility model with stacked valve plates is joined together without prestress. The valve plate does not need to be made of a membrane material with high elasticity. The flat plate components can even be made of the same or similar material with the same or similar coefficient of linear expansion. This effectively solves the problem of poor temperature stability or failure caused by temperature changes that is common in valve control units in the prior art.

[0037] 3) The control valve with stacked valve plates of this utility model increases the sealing friction by staggering and distancing the outlet end of the flow channel from the air inlet, which can prevent failure due to poor sealing caused by foreign objects entering, and greatly improves the anti-foreign object interference capability and sealing reliability of the flow path control valve.

[0038] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0039] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0040] Figure 1 This is a schematic diagram of the deflector in this application;

[0041] Figure 2 This is a schematic diagram showing the relative positional relationship between Region 1, Region 2, Region 3, the air intake opening and the flow path forming part and the base plate in this application;

[0042] Figure 3 This is a schematic diagram showing the relative positional relationship between Region 1, Region 2, Region 3, the air inlet and flow path forming part and the valve plate in this application;

[0043] Figure 4 This is a schematic diagram of the valve plate forming a slit using a cutting process in this application;

[0044] Figure 5 This is a cross-sectional schematic diagram of the control valve with stacked valve plates in Embodiment 1;

[0045] Figure 6 This is a three-dimensional schematic diagram of one side of the control valve in the valve plate stacking in Example 1;

[0046] Figure 7 This is a three-dimensional schematic diagram of the other side of the control valve in the valve plate stacking in Example 1;

[0047] Figure 8 This is a schematic diagram of pressurized gas being introduced through the air inlet in Example 1;

[0048] Figure 9 This is a schematic diagram of pressurized gas being introduced into the second flow path in Example 1;

[0049] Figure 10 This is a schematic diagram showing a tiny gap between the deformable part and the guide plate;

[0050] Figure 11 This is a cross-sectional schematic diagram of the control valve with stacked valve plates in Embodiment 8;

[0051] Figure 12 This is a three-dimensional schematic diagram of one side of the control valve in the valve plate stack in Example 8;

[0052] Figure 13 This is a three-dimensional schematic diagram of the other side of the control valve in the valve plate stack in Embodiment 8;

[0053] Figure 14 This is a schematic diagram showing the relative positional relationship between Region 1, Region 2, Region 3, the air inlet and the flow path forming part and the valve plate in Embodiment 8;

[0054] Figure 15 This is a cross-sectional schematic diagram of the control valve with stacked valve plates in Embodiment 2;

[0055] Figure 16 This is a schematic diagram showing the relative positional relationship between Region 1, Region 2, Region 3, the first air inlet, the second air inlet 312, the flow path forming part, and the bottom plate in Embodiment 3.

[0056] Figure 17 This is a schematic diagram showing the relative positional relationship between Region 1, Region 2, Region 3, the first air inlet, the second air inlet 312, the flow path forming part, and the valve plate in Embodiment 3.

[0057] Figure 18 This is a schematic diagram of the valve plate forming a slit using a cutting process in Example 3;

[0058] Figure 19 This is a cross-sectional schematic diagram of the control valve with stacked valve plates in Example 3;

[0059] Figure 20 This is a schematic diagram of pressurized gas being introduced through the first air inlet and the second air inlet 312 in Embodiment 3;

[0060] Figure 21 This is a schematic diagram of pressurized gas being introduced into the second flow path in Example 3;

[0061] Figure 22 This is a schematic diagram showing that the flow path partition has a venting texturing area and a venting sealing area;

[0062] Figure 23 This is a schematic diagram showing that the flow path forming section has an intake texturing area and an intake sealing area;

[0063] Figure 24 This is a cross-sectional schematic diagram of the control valve with stacked valve plates in Embodiment 5;

[0064] Figure 25 This is a cross-sectional schematic diagram of the control valve with stacked valve plates in Embodiment 6.

[0065] Figure 26 This is a cross-sectional schematic diagram of the control valve in Embodiment 7, in which the exhaust port is located on the valve plate stacked on the support plate;

[0066] Figure 27 This is a cross-sectional schematic diagram of the control valve in Embodiment 7, in which the support plate and the guide plate cooperate to form an exhaust hole.

[0067] In the figure: 1. Baffle plate, 11. First flow path, 12. Second flow path, 13. Flow path interval, 13a. Venting texturing zone, 13b. Venting sealing zone, 14. Baffle interval, 15. Baffle port;

[0068] 2. Valve plate; 21. Deformable part; 211. First deformable part; 212. Second deformable part; 22. Joint; 23. Slit;

[0069] 3. Base plate; 31. Air inlet opening; 311. First air inlet hole; 312. Second air inlet hole; 32. Flow path forming part; 32a. Air inlet texturing area; 32b. Air inlet sealing area; 3-1. Region 1; 3-2. Region 2; 3-3. Region 3;

[0070] 4. First flow channel;

[0071] 5. Second flow channel; 51. Channel opening;

[0072] 6. Support plate; 61. Exhaust hole; 62. Vent hole. Detailed Implementation

[0073] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention. Therefore, they only show the components relevant to the present invention. Orientations and references (e.g., up, down, left, right, etc.) are only used to aid in the description of the features in the drawings. Therefore, the following specific embodiments are not intended to be restrictive, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0074] Example 1,

[0075] like Figures 1-10 As shown, a control valve with stacked valve plates includes a guide plate 1, a valve plate 2, and a base plate 3 that are stacked together in sequence along the thickness direction to form an integral structure.

[0076] The flow guide plate 1 is provided with a first flow path 11, a second flow path 12 and a flow path spacing part 13 located between the first flow path 11 and the second flow path 12, and the flow path spacing part 13 separates the first flow path 11 and the second flow path 12.

[0077] The base plate 3 has an air inlet 31 disposed opposite to the flow path interval 13, and also has a flow path forming part 32 disposed opposite to the second flow path 12;

[0078] The valve plate 2 has a deformable portion 21 and a connecting portion 22 connected to each other. The deformable portion 21 can deform under pressure. The two sides of the connecting portion 22 are respectively connected to the guide plate 1 and the bottom plate 3. The first flow path 11, the flow path spacing portion 13 and the second flow path 12 are all arranged opposite to the side surface of the deformable portion 21 facing the guide plate 1. That is, the side surface of the deformable portion 21 facing the guide plate 1 is connected to the first flow path 11 and the second flow path 12. The side surface of the deformable portion 21 facing the bottom plate 3 covers the air intake opening 31 and the flow path forming portion 32. The connecting portion 22 is arranged in a closed loop around the outer periphery of the deformable portion 21. A part of the outer periphery edge of the deformable portion 21 is not connected to the connecting portion 22 and forms a slit 23 that is arranged opposite to the second flow path 12.

[0079] When pressurized gas is introduced into the air inlet 31, the portion of the deformable part 21 opposite to the flow path partition 13 presses against the flow path partition 13 under the action of the gas pressure difference, thus blocking the first flow path 11. The portion of the deformable part 21 opposite to the flow path forming part 32 elastically deforms toward the second flow path 12 under the action of the gas pressure difference and separates from the bottom plate 3, forming a second flow passage 5. The second flow passage 5 forms a channel opening 51 at the slit 23. In other words, the portion of the deformable part 21 opposite to the flow path forming part 32 forms a second flow passage 5 in the area between it and the flow path forming part 32 under the action of the gas pressure difference. The air inlet 31 is connected to the second flow path 12 through the second flow passage 5 and the channel opening 51.

[0080] When pressurized gas is introduced into the second flow path 12, the portion of the deformable portion 21 opposite to the flow path forming portion 32 presses against the flow path forming portion 32 under the action of the gas pressure difference, thus blocking the air inlet opening 31. The portion of the deformable portion 21 opposite to the flow path spacing portion 13 elastically deforms toward the air inlet opening 31 and separates from the flow path spacing portion 13, forming a first flow passage 4 that connects the first flow path 11 and the second flow path 12. The area between the portion of the deformable portion 21 opposite to the flow path spacing portion 13 and the flow path spacing portion 13 forms the first flow passage 4.

[0081] To better understand the flow control valve in this embodiment, it will be further explained and described below. The bottom plate 3 facing the guide plate 1 is defined as facing upward, and the guide plate 1 facing the bottom plate 3 is defined as facing downward, but it is not limited to this.

[0082] The guide plate 1 is provided with a first flow path 11, a second flow path 12, and a flow path partition 13 located between the first flow path 11 and the second flow path 12. The flow path partition 13 separates the first flow path 11 and the second flow path 12. Specifically, for example, the first flow path 11 can be a channel penetrating the guide plate 1, and the second flow path 12 can be a slot penetrating the guide plate 1. Correspondingly, the portion between the channel forming the first flow path 11 and the slot forming the second flow path 12 is the flow path partition 13. In this embodiment, the flow path control valve is described with one first flow path 11 and one second flow path 12, but this does not constitute a limitation on the present invention. Figure 1 As shown.

[0083] The base plate 3 is disposed opposite to the guide plate 1. The base plate 3 is provided with a through first air inlet 311. In this embodiment, the first air inlet 311 is equivalent to the air inlet opening 31 in this application. It also has a flow path forming part 32 disposed opposite to the second flow path 12. In this embodiment, the flow path forming part 32 is located on the outer periphery of the first air inlet 311. Ideally, the first air inlet 311 is disposed opposite to the first flow path 11, the flow path spacing part 13 and the second flow path 12. The first air inlet 311 covers the flow path spacing part 13 and has a directly opposite area that overlaps with the first flow path 11 and the second flow path 12. That is to say, The projection of the first air inlet 311 onto the guide plate 1 can cover a portion of the first flow path 11, completely cover the flow path spacing portion 13, and cover a portion of the second flow path 12; the flow path forming portion 32 is disposed opposite to the second flow path 12, and the second flow path 12 covers the flow path forming portion 32 and has a portion that extends beyond the flow path forming portion 32 and overlaps with the base plate 3 in the opposite area. Here, the flow path forming portion 32 is formed on the base plate 3 by the portion extending outward from the edge of the first air inlet 311. That is, the flow path forming portion 32 is connected to the first air inlet 311 and extends in a direction away from the first air inlet 311, such as... Figure 2As shown, the region of the base plate 3 opposite to the first flow path 11 is region 1 3-1, the region of the base plate 3 opposite to the second flow path 12 is region 2 3-2, and the region of the base plate 3 opposite to the flow path spacing portion 13 is region 3-3. Figure 2 The three dashed boxes in the image, from left to right, represent Region 1 (3-1), Region 3 (3-3), and Region 2 (3-2), respectively. Figure 2 The double-dotted line box in the figure represents the flow path forming section 32.

[0084] Valve plate 2 is located between guide plate 1 and bottom plate 3. Valve plate 2 has a deformable portion 21 and a connecting portion 22. Valve plate 2 is connected to guide plate 1 and bottom plate 3 through connecting portion 22. Deformable portion 21 can deform within the elastic range under the action of pressure difference. In this embodiment, deformable portion 21 is a continuous single deformable portion 21. The deformable portion 21 is connected to the first flow path 11 and the second flow path 12 on one side surface of guide plate 1. Specifically, deformable portion 21 is respectively disposed opposite to the first flow path 11, the flow path interval 13 and the second flow path 12. Deformable portion 21 covers the flow path interval 13 and has a directly opposite area that overlaps with the first flow path 11 and the second flow path 12. The side surface of deformable portion 21 facing bottom plate 3 covers the first air inlet 311 and the flow path forming portion 32.

[0085] In this way, the portion of the deformable part 21 opposite to the flow path spacing portion 13 separates from the guide plate 1 and cooperates with the guide plate 1 to form a first flow passage 4 when deformed towards the bottom plate 3. The first flow passage 4 connects the first flow path 11 and the second flow path 12. The portion of the deformable part 21 opposite to the flow path forming portion 32 separates from the bottom plate 3 and cooperates with the bottom plate 3 to form a second flow passage 5 when deformed towards the guide plate 1. A portion of the outer peripheral edge of the deformable part 21 is not connected to the joint portion 22 and forms a slit 23 opposite to the second flow path 12. The surface of the flow path forming portion 32 facing the valve plate 2... A portion of the outer periphery does not engage with the deformable portion 21, allowing the deformable portion 21 and the flow path forming portion 32 to form a channel opening 51 through which gas can flow. This channel opening 51 forms the outlet end of the second flow passage 5. In other words, the outer periphery of the deformable portion 21 is not a closed loop engaged with the base plate 3. The second flow passage 5 connects the air inlet opening 31 and the second flow path 12. In this embodiment, the outlet end of the second flow passage 5 is formed by the outer periphery of the flow path forming portion 32 facing the valve plate 2, away from the air inlet opening 31, not engaging with the deformable portion 21. However, this is not a limitation. Figure 3 As shown, the three dashed boxes in the figure represent region 1 (3-1), region 3 (3-3), and region 2 (3-2) from left to right, respectively. The double-dotted box on the left represents the first air inlet 311, and the double-dotted box on the right represents the flow path forming section 32.

[0086] Furthermore, when the deformed portion 21 and the joining portion 22 of the valve plate 2 are continuous structures at this local location, a cutting process, such as laser cutting, can be used to form a cleavage line at this location. This separates the edge of the deformed portion 21 from the edge of the joining portion 22 at this local location, allowing the edge of the deformed portion 21 at this local location to separate from the base plate 3 and cooperate with the base plate 3 to form a channel opening 51 through which gas can flow. Figure 4 As shown, the three dashed boxes in the figure represent region 1 (3-1), region 3 (3-3), and region 2 (3-2) from left to right, respectively. The double-dotted box on the left represents the first air inlet 311, and the double-dotted box on the right represents the flow path forming section 32.

[0087] In this embodiment, the guide plate 1, valve plate 2 and base plate 3 are all flat plate components, but this is not a limitation.

[0088] It is easy to understand that the flow path forming section 32 is positioned opposite the second flow path 12, and when viewed along the thickness direction, the two have overlapping opposing areas, thus providing sufficient deformation space for the deformable section 21 to deform towards the guide plate 1 to form the second flow channel 5; the flow path spacing section 13 is positioned opposite the first air inlet 311, and when viewed along the thickness direction, the two have overlapping opposing areas, thus providing sufficient deformation space for the deformable section 21 to deform towards the bottom plate 3 to form the first flow channel 4, such as... Figures 5-7 As shown.

[0089] The flow path control valve of this application is used in a fluid control device and can control the flow direction of the fluid, specifically,

[0090] In the first flow direction, compressed gas with a certain pressure acts on the deformable part 21 of the valve plate 2 through the first air inlet 311. A pressure difference is formed on both sides of the deformable part 21. Under the action of the gas pressure difference on both sides, the deformable part 21 deforms towards the guide plate 1. The part of the deformable part 21 opposite to the flow path partition 13 presses against the guide plate 1, closing the first flow passage 4. At the same time, the part of the deformable part 21 opposite to the flow path forming part 32 separates from the bottom plate 3, opening the second flow passage 5, thereby forming a connecting path connecting the first air inlet 311, the second flow passage 5, the channel opening 51, and the second flow path 12. Figure 8 As shown.

[0091] In the second flow direction, compressed gas with a certain pressure acts on the deformable part 21 of the valve plate 2 through the second flow path 12. A pressure difference is formed on both sides of the deformable part 21. Under the action of the gas pressure difference on both sides, the deformable part 21 deforms towards the side away from the guide plate 1. The part of the deformable part 21 opposite to the flow path forming part 32 presses against the bottom plate 3, closing the second flow passage 5, thereby cutting off the communication path between the first air inlet 311, the second flow passage 5, the channel opening 51, and the second flow path 12. At the same time, the part of the deformable part 21 opposite to the flow path spacing part 13 separates from the guide plate 1, opening the first flow passage 4, thereby forming a communication path connecting the first flow path 11, the first flow passage 4, and the second flow path 12. Figure 9 As shown.

[0092] It should be noted that, in this embodiment, the deformed portion 21 of the valve plate 2 facing the guide plate 1 can be in contact with the guide plate 1 rather than connected, so that both the flow path spacing portion 13 and the flow path forming portion 32 are in contact with the deformed portion 21, such as... Figure 5 As shown, there is a small gap between the deformed part 21 and the guide plate 1 on the side facing the guide plate 1, such as... Figure 10 As shown. For example, this can be achieved by thinning the deformed portion 21 of the valve plate 2 either entirely or partially.

[0093] The guide plate 1, valve plate 2, and base plate 3 can be square, rectangular, circular, polygonal, or other shapes, and are not limited here. In this embodiment, the guide plate 1, valve plate 2, and base plate 3 are all square for illustration.

[0094] In addition, at least one of the flow guide plate 1, valve plate 2, and base plate 3 is made of a polymer material. Alternatively, all three materials can be polymers, such as polyester, polyether, polyurethane, or polycarbonate polymers, or one or more of these. Polymers are lightweight, which is beneficial for valve weight reduction. They are also readily available and inexpensive. More importantly, the interlayer bonding process for polymers is relatively mature, making it easier to achieve adhesive-free bonding. For example, layers can be joined together by thermal fusion, such as ultrasonic thermal fusion or high-frequency electromagnetic wave thermal fusion, or other methods. It should also be noted that the fusion process may involve the placement of a transition layer or coating between layers, but this does not constitute a limitation of this invention. This avoids the valve failure problem caused by long-term adhesive creep aging that occurs when using adhesives for interlayer bonding in existing technologies. However, ideally, at least valve plate 2 and base plate 3 should be made of polymer materials. Ideally, at least the materials of valve plate 2 and base plate 3 should be the same or similar polymer materials, or even the materials of guide plate 1, valve plate 2, and base plate 3 should all be the same or similar materials. This is because valve plate 2 is joined to base plate 3 and guide plate 1; the deformable portion 21 of valve plate 2 cooperates with the flow path forming portion 32 on base plate 3 to form the check valve / intermediate valve in the flow path control valve; and the deformable portion 21 of valve plate 2 cooperates with the flow path spacing portion 13 on guide plate 1 to form the exhaust valve / vent valve in the flow path control valve. These are the main functional units of the flow path control valve. Failure of either of them will cause the flow path control valve to fail, especially the check valve / intermediate valve. Since valve plate 2 and base plate 3 should be made of the same or similar polymer materials, such as polyester film materials, and after they are joined together by adhesive-free heat fusion, the shape of valve plate 2 is basically fixed. This prevents it from being affected by environmental factors (such as temperature and humidity), thus ensuring the long-term functional stability of the check valve / intermediate valve.

[0095] Additionally, it should be noted that the channel opening 51 and the air inlet opening 31 on the base plate 3 must be staggered, and, while ensuring complete staggering, they should be as far apart as possible along the in-plane direction in the area opposite to the second flow path 12. This ensures that even if foreign objects (such as lint or dust) enter the second flow channel 5, it will not hinder the effective sealing of the second flow channel 5 during the venting stroke. Figures 3-10 As shown.

[0096] Therefore, compared with the prior art, the guide plate 1, valve plate 2, and base plate 3 constituting the flow control valve of this utility model are all flat plate components, without the protruding structure that provides pre-tightening force to the diaphragm in the prior art, which is conducive to further thinning of the valve control unit; in addition, the flat plate components are joined without pre-stress, the valve plate 2 does not need to be selected with a membrane material with high elasticity, and the flat plate components can even be selected with the same or similar materials with the same or similar coefficient of linear expansion (the difference in the coefficient of linear expansion is less than 10%), thus avoiding the poor temperature stability of the prior art. Failure issues may arise due to temperature changes. For example, the materials constituting the valve plate 2 and the base plate 3 can both be polyethylene terephthalate (PET) film, or the material constituting the valve plate 2 can be polyethylene naphthalate (PEN) film, while the material constituting the base plate 3 can be polyethylene terephthalate (PET) film. Furthermore, by staggering and distancing the channel opening 51 of the second flow channel 5 from the air inlet opening 31, this invention can avoid failure due to poor sealing caused by foreign objects entering, thus significantly improving the flow path control valve's resistance to foreign object interference.

[0097] Example 2

[0098] like Figure 15 As shown, the difference between this embodiment and Embodiment 1 is that the base plate 3 is provided with a through first air inlet 311 and at least one second air inlet 312. In this embodiment, the first air inlet 311 and the second air inlet 312 together correspond to the air inlet opening 31 in this application. The first air inlet 311 is disposed opposite to the flow path spacing portion, and the second air inlet 312 penetrates the flow path forming portion and is disposed opposite to the second flow path and spaced apart from the slit.

[0099] Ideally, the second air inlet 312 is located on the flow path forming part 32 on the base plate 3 at a position relatively far from the air outlet end of the second flow channel 5; if the dimensions are limited, in order to facilitate the arrangement of the orifices, the cross-sectional area of ​​the second air inlet 312 may be smaller than the cross-sectional area of ​​the first air inlet 311.

[0100] Example 3

[0101] like Figure 16-18As shown, the difference between this embodiment and embodiment 2 is that the valve plate 2 has a deformable portion 21 and a connecting portion 22 connected to each other. Specifically, the deformable portion 21 includes a first deformable portion 211 and a second deformable portion 212 that are discretely arranged. The first flow path 11, the flow path spacing portion 13 and the second flow path 12 are all arranged opposite to the side surface of the first deformable portion 211 facing the guide plate 1. That is, the side surface of the first deformable portion 211 facing the guide plate 1 is connected to the first flow path 11 and the second flow path 12. The side surface of the first deformable portion 211 facing the bottom plate 3 covers the first air inlet 311. The side surface of the second deformable portion 212 facing the bottom plate 3 covers the flow path forming portion 32, that is, covers the second air inlet 312. The connecting portion 22 is arranged in a closed loop around the outer periphery of the first deformable portion 211 and the second deformable portion 212. A part of the outer periphery edge of the second deformable portion 212 is not connected to the connecting portion 22 and forms a slit 23 that is arranged opposite to the second flow path 12.

[0102] When pressurized gas is introduced into the air inlet 31, under the action of the gas pressure difference, the first deformable part 211 presses the flow path partition 13 to block the first flow path 11, and the second deformable part 212 elastically deforms toward the second flow path 12 and separates from the bottom plate 3 to form the second flow passage 5. The second flow passage 5 forms a channel opening 51 at the slit 23, and the second air inlet 312 is connected to the second flow path 12 through the second flow passage 5 and the channel opening 51.

[0103] When pressurized gas is introduced into the second flow path 12, under the action of the gas pressure difference, the second deformation part 212 presses against the flow path forming part 32 and blocks the second air inlet 312. The first deformation part 211 elastically deforms toward the first air inlet 311 and separates from the flow path spacing part 13, forming a first flow passage 4 that connects the first flow path 11 and the second flow path 12.

[0104] It is easy to understand that in this embodiment, the flow path forming portion 32 is formed on the base plate 3 at a certain distance from the first air inlet 311. In other words, the flow path forming portion 32 is formed at a position on the base plate 3 that is spaced apart from the first air inlet 311. Figure 16 As shown, the region of the base plate 3 opposite to the first flow path 11 is region 1 3-1, the region of the base plate 3 opposite to the second flow path 12 is region 2 3-2, and the region of the base plate 3 opposite to the flow path spacing portion 13 is region 3-3. Figure 16 The three dashed boxes in the image, from left to right, represent Region 1 (3-1), Region 3 (3-3), and Region 2 (3-2), respectively. Figure 16 The double-dotted line box in the figure represents the flow path forming section 32.

[0105] The valve plate 2 is located between the guide plate 1 and the bottom plate 3. The valve plate 2 has a deformable part 21 and a connecting part 22. Specifically, the deformable part 21 includes a first deformable part 211 and a second deformable part 212 that are discretely arranged. The valve plate 2 is connected to the guide plate 1 and the bottom plate 3 through the connecting part 22. The first deformable part 211 and the second deformable part 212 can produce deformation within the elastic range under the action of pressure difference. That is, the deformable part 21 in this embodiment is not continuous.

[0106] The first deformable portion 211 is defined by the first air inlet 311. When viewed along the thickness direction, the first deformable portion 211 at least covers the first air inlet 311. Ideally, the portion of the valve plate 2 opposite to the first air inlet 311 is formed as the first deformable portion 211, which is beneficial to simplify the manufacturing process. The second deformable portion 212 is jointly defined by the second flow path 12 and the flow path forming portion 32.

[0107] The second flow path 12 must provide sufficient deformation space for the deformation of the second deformable portion 212 toward the guide plate 1, while the second deformable portion 212 must cover the flow path forming portion 32. Ideally, the portion of the valve plate 2 opposite to the flow path forming portion 32 is formed as the second deformable portion 212, which simplifies the manufacturing process. This allows the first deformable portion 211 and the second deformable portion 212 of the valve plate 2 to deform under gas pressure.

[0108] In this way, the portion of the first deformable portion 211 opposite to the flow path spacing portion 13 separates from the guide plate 1 and cooperates with the guide plate 1 to form a first flow passage 4 when deformed towards the bottom plate 3. The first flow passage 4 connects the first flow path 11 and the second flow path 12. The portion of the second deformable portion 212 opposite to the flow path forming portion 32 separates from the bottom plate 3 and cooperates with the bottom plate 3 to form a second flow passage 5 when deformed towards the guide plate 1. A portion of the outer peripheral edge of the second deformable portion 212 is not connected to the joint portion 22 and forms a slit 23 opposite to the second flow path 12. The outer peripheral edge of the flow path forming portion 32 facing the valve plate 2... In this embodiment, the second deformable portion 212 is not engaged with the second deformable portion 212, so that the second deformable portion 212 and the flow path forming portion 32 cooperate at this local position to form a channel opening 51 through which gas can flow. This channel opening 51 forms the outlet end of the second flow passage 5. That is to say, the outer periphery of the second deformable portion 212 is not a closed loop engaged with the bottom plate 3. The second flow passage 5 connects the second air inlet 312 and the second flow path 12. In this embodiment, the outlet end of the second flow passage 5 is formed by the outer periphery of the flow path forming portion 32 facing the valve plate 2 side surface away from the first air inlet 311 not engaging with the second deformable portion 212. However, this is not a limitation. Figure 17As shown, the three dashed boxes in the figure represent region 1 (3-1), region 3 (3-3), and region 2 (3-2) from left to right. The double-dotted box on the left represents the first air intake 311, and the double-dotted box on the right represents the flow path forming section 32. The dashed circular hole in the flow path forming section 32 represents the second air intake 312.

[0109] Furthermore, when the second deformed portion 212 and the joining portion 22 of the valve plate 2 are continuous structures at this local location, a cutting process, such as laser cutting, can be used to form a cleavage at this location. This separates the edge of the deformed portion 21 and the edge of the joining portion 22 at this local location, allowing the edge of the deformed portion 21 at this local location to separate from the base plate 3 and cooperate with the base plate 3 to form a channel opening 51 through which gas can flow. Figure 18 As shown in the figure, the three dashed boxes from left to right represent region 1 3-1, region 3-3 and region 2 3-2 respectively. The double-dotted box on the left represents the first air inlet 311, and the double-dotted box on the right represents the flow path forming part 32. The dashed circular hole in the flow path forming part 32 represents the second air inlet 312.

[0110] It is easy to understand that the flow path forming section 32 is positioned opposite the second flow path 12, and when viewed along the thickness direction, the two have overlapping opposing areas, thus providing sufficient deformation space for the second deformable section 212 to deform towards the guide plate 1 to form the second flow channel 5; the flow path spacing section 13 is positioned opposite the first air inlet 311, and when viewed along the thickness direction, the two have overlapping opposing areas, thus providing sufficient deformation space for the first deformable section 211 to deform towards the bottom plate 3 to form the first flow channel 4, such as... Figure 19 As shown.

[0111] The flow path control valve of this application is used in a fluid control device and can control the flow direction of the fluid, specifically,

[0112] In the first flow direction, compressed gas with a certain pressure acts on the deformable part 21 of the valve plate 2 through the inlet opening 31. A pressure difference is formed on both sides of the second deformable part 212. Under the action of the gas pressure difference on both sides, the second deformable part 212 deforms towards the guide plate 1. The first deformable part 211 presses against the guide plate 1, closing the first flow passage 4. At the same time, the part of the second deformable part 212 opposite to the flow path forming part 32 separates from the bottom plate 3, opening the second flow passage 5, thereby forming a connecting path connecting the inlet opening 31, the second flow passage 5, the passage opening 51, and the second flow path 12. Figure 20 As shown.

[0113] In the second flow direction, compressed gas with a certain pressure acts on the deformable part 21 of the valve plate 2 through the second flow path 12. A pressure difference is formed on both sides of the deformable part 21. Under the action of the gas pressure difference on both sides, the first deformable part 211 deforms towards the side away from the guide plate 1. The part of the second deformable part 212 opposite to the flow path forming part 32 presses against the bottom plate 3, closing the second flow passage 5, thereby cutting off the communication path between the air inlet 31, the second flow passage 5, the passage opening 51, and the second flow path 12. At the same time, the part of the first deformable part 211 opposite to the flow path spacing part 13 separates from the guide plate 1, opening the first flow passage 4, thereby forming a communication path connecting the first flow path 11, the first flow passage 4, and the second flow path 12. Figure 21 As shown.

[0114] Similarly, in this embodiment, the deformed portion 21 of the valve plate 2 facing the guide plate 1 can be in contact with the guide plate 1 rather than connected, so that the flow path spacing portion 13 is in contact with the first deformed portion 211, the flow path forming portion 32 is in contact with the second deformed portion 212, or at least there is a small gap between the second deformed portion 212 and the guide plate 1. For example, this can be achieved by thinning the deformed portion 21 of the valve plate 2 as a whole or partially. Further details will not be provided here.

[0115] Example 4

[0116] The difference between this embodiment and embodiments 2 and 3 is that the flow path forming part 32 has an intake roughening area 32a and an intake sealing area 32b on the side facing the valve plate 2, and the roughness of the intake roughening area 32a is greater than that of the intake sealing area 32b.

[0117] The air intake texturing area 32a is wrapped around the outside of the second air intake hole 312 and located between the second air intake hole 312 and the air intake sealing area 32b. When the deformable part 21 is pressed against the flow path forming part 32 of the bottom plate 3, the air intake sealing area 32b completely covers the channel opening 51 of the second flow passage 5. The air intake sealing area 32b is used to form a seal with the deformable part 21.

[0118] or and,

[0119] The flow path partition 13 has a venting roughened area 13a and a venting sealing area 13b on the side surface facing the valve plate 2. The roughness of the venting roughened area 13a is greater than that of the venting sealing area 13b. The venting roughened area 13a is located on the side surface of the flow path partition 13 facing the valve plate 2, adjacent to the second flow path 12, and is located between the venting sealing area 13b and the second flow path 12. When the deformable part 21 abuts against the flow path partition 13 of the guide plate 1, the venting sealing area 13b and the deformable part 21 form a seal.

[0120] Specifically:

[0121] During the process of the deformable part 21 deforming towards the guide plate 1 to close the first flow passage 4 under the action of the gas pressure difference on both sides, or deforming towards the side away from the guide plate 1 to open the first flow passage 4, it is necessary to ensure both rapid and timely response and good sealing. Ideally, the area of ​​the flow path partition 13 facing the valve plate 2 adjacent to the second flow path 12 is roughened to increase the roughness of the area, so that during the exhaust stroke, the first deformable part 211 can more easily separate from the guide plate 1 under the action of the gas pressure of the first flow path 11 and open the first flow passage 4.

[0122] For example, the surface of the flow path partition 13 near the valve plate 2 is a venting mating part, which has a venting roughened area 13a and a venting sealing area 13b. The roughness of the venting roughened area 13a is greater than the roughness of the venting sealing area 13b. Figure 22 As shown;

[0123] The venting texturing zone 13a is adjacent to the second flow path 12, and the venting sealing zone 13b is located between the first flow path 11 and the venting texturing zone 13a. When the deformed part 21 is pressed against the guide plate 1, the venting sealing zone 13b and the deformed part 21 form a seal.

[0124] The venting roughening zone 13a is roughened to make it more coarse, so that the deformed part 21 can be easily separated from the guide plate 1 and the first flow passage 4 is opened; the venting sealing zone 13b is smoother so that it fits more tightly against the deformed part 21 to form a good seal, thereby closing the first flow passage 4.

[0125] Similarly, during the process of the deformable part 21 deforming towards the side away from the guide plate 1 to close the second flow passage 5 or deforming towards the side of the guide plate 1 to open the second flow passage 5 under the action of the gas pressure difference on both sides, it is necessary to ensure both rapid and timely response and good sealing. Ideally, the area of ​​the flow path forming part 32 adjacent to the second air inlet 312 on the side surface facing the valve plate 2 should be roughened to increase the roughness of the area. This makes it easier for the deformable part 21 of the valve plate 2 to separate from the bottom plate 3 under the action of gas pressure during the inflation stroke, thereby releasing the blockage of the second air inlet 312 and opening the second flow passage 5.

[0126] For example, the surface of the flow path forming part 32 near the valve plate 2 is an intake mating part, and the second intake hole 312 is provided in the intake mating part. The intake mating part has an intake roughening area 32a and an intake sealing area 32b. The roughness of the intake roughening area 32a is greater than the roughness of the intake sealing area 32b. Figure 23 As shown;

[0127] The air intake texturing area 32a is wrapped around the outside of the second air intake hole 312 and is located between the second air intake hole 312 and the air intake sealing area 32b. When the deformable part 21 is pressed against the bottom plate 3, the air intake sealing area 32b completely covers the outlet end of the second flow channel 5, and the air intake sealing area 32b and the deformable part 21 form a seal.

[0128] The intake roughening zone 32a is roughened to make it more coarse, so that the deformed part 21 can be easily separated from the base plate 3, thus releasing the blockage of the second intake hole 312 and opening the second flow channel 5. The intake sealing zone 32b is smoother so that it fits more tightly against the deformed part 21 to form a good seal. It is easy to understand that the intake sealing zone 32b surrounding the second intake hole 312 must form a closed surrounding area to achieve a reliable seal, while the intake roughening zone 32a located between the second intake hole 312 and the intake sealing zone 32b does not need to form a closed surrounding area to achieve the purpose of making the deformed part 21 easy to separate from the base plate 3.

[0129] Example 5

[0130] The difference between this embodiment and embodiments 1 to 4 is that the channel penetrating the guide plate 1 is formed as a stepped channel, so that the first flow path 11 is formed as a stepped flow path. The stepped flow path can be formed on the guide plate 1, which is composed of a single-layer structure, or on the guide plate 1, which is composed of at least two layers. Figure 24 As shown, preferably, when a stepped flow path is required, the guide plate 1 is formed as a guide plate 1 with at least two stacked layers, which helps to simplify the processing technology.

[0131] Example 6

[0132] The difference between this embodiment and embodiments 1 to 5 is that the slot through the guide plate 1 is formed as a stepped slot, so that the second flow path 12 is formed as a stepped flow path. The stepped flow path can be formed on the guide plate 1 which is composed of a single layer structure or on the guide plate 1 which is composed of at least two layers. Preferably, when it is necessary to form a stepped flow path, the guide plate 1 is formed as a guide plate 1 with at least two stacked layers, which is beneficial to simplifying the processing technology.

[0133] The guide plate 1 is also provided with a guide port 14 communicating with the second flow path 12. The guide port 14 is located adjacent to the flow path spacing portion 13. The projection of the guide port 14 on the base plate 3 has an area that overlaps with the air intake opening 31, and the projection of the guide port 14 on the base plate 3 is completely offset from the flow path forming portion 32. The portion between the guide port 14 and the second flow path 12 is formed as the guide spacing portion 14. Figure 25 As shown.

[0134] When pressurized gas is introduced into the second flow path 12, the second flow path 12 is connected to the first flow path 11 through the guide port 14 and the first flow passage 4. The valve body joint 22 can be engaged with the guide interval 15 to improve stability.

[0135] Example 7

[0136] The difference between this embodiment and embodiments 1 to 6 is that it also includes a support plate 6, which is joined to the side of the guide plate 1 away from the bottom plate 3.

[0137] The support plate 6 covers the second flow path 12, and the support plate 6 has a vent 62 that connects to the second flow path 12.

[0138] The support plate 6 covers the first flow path 11, and the support plate 6 has an exhaust hole 61 that communicates with the first flow path 11; alternatively, the first flow path 11 extends to the outer wall surface of the guide plate 1, and the support plate 6 covers the first flow path 11 and cooperates with the guide plate 1 to form the exhaust hole 61. The outer wall surface of the guide plate 1 refers to the area between the two side surfaces of the guide plate 1 in the thickness direction, extending to the sides around the perimeter. Figures 26-27 As shown.

[0139] The control valve of this embodiment is typically used in conjunction with a miniature piezoelectric pump to form a modular component capable of rapid inflation and deflation. It is mainly used in electronic devices with blood pressure measurement functions, such as wrist blood pressure monitors, smartwatches, and smart bracelets, but is not limited thereto. Any device, apparatus, or instrument that needs to fill the air storage compartment (such as an air bladder or cuff) with compressed air and discharge the air from the air storage compartment can utilize the control valve of this embodiment. The working process of the control valve of this embodiment will be described below using the rapid inflation and deflation module formed by the control valve of this embodiment and the miniature piezoelectric pump.

[0140] The side of the support plate 6 facing away from the guide plate 1 provides a connection interface for the air storage unit, which is connected to the vent 62. The miniature piezoelectric pump is attached to the side of the base plate 3 facing away from the support plate 6, and the air storage unit is attached to the side of the support plate 6 facing away from the guide plate 1. The air inlet 31 is connected to the pressurized gas outlet of the miniature piezoelectric pump.

[0141] During inflation, a miniature pneumatic pump (not shown in the figure) starts working, generating compressed gas with a certain pressure. The compressed gas acts on the deformable part 21 of the valve plate 2 through the air inlet 31, creating a pressure difference on both sides of the deformable part 21. Under the action of the gas pressure difference on both sides, the deformable part 21 deforms towards the support plate 6, closing the first flow passage 4. At the same time, the second flow passage 5 is opened, thus forming a connecting path that connects the air inlet 31, the second flow passage 5, and the second flow path 12. The compressed gas enters the second flow path 12 through the connecting path and then flows into the air storage part (not shown in the figure) through the vent 62, completing the inflation stroke.

[0142] When deflation occurs, the miniature pneumatic pump stops working, and the remaining pressurized gas between the miniature pneumatic pump and the base plate 3 is quickly leaked out in the reverse direction through the miniature pneumatic pump to restore normal pressure. Meanwhile, the pressurized gas stored in the air storage section during the previous inflation stroke flows in the reverse direction through the vent 62 and enters the second flow path 12, thereby creating a pressure difference on both sides of the deformable section 21. Under the action of the gas pressure difference on both sides, the deformable section 21 deforms towards the side away from the support plate 6, closing the second flow passage 5. At the same time, the first flow passage 4 is opened, and the pressurized gas can pass through the second flow path 12, the first flow passage 4, the first flow path 11, and finally be discharged through the exhaust port 61.

[0143] It is easy to understand that when the first flow path 11 does not extend to the outer wall surface of the guide plate 1, the support plate 6 covers the first flow path 11. Since the first flow path 11 needs to communicate with the outside, an exhaust hole 61 that penetrates the support plate 6 and communicates with the first flow path 11 must be provided on the support plate 6. Thus, the control valve of this embodiment has the function of positive inflation and positive exhaust along the thickness direction. When the first flow path 11 extends to the outer wall surface of the guide plate 1, the support plate 6 covers the first flow path 11 and cooperates with the guide plate 1 to form an exhaust hole 61 that allows the first flow path 11 to communicate with the outside. Thus, the flow path control valve of this application has the function of positive inflation along the thickness direction and lateral exhaust along the plane direction perpendicular to the thickness direction.

[0144] In this embodiment, the control valve can also be arranged to have the function of inflating in the forward direction along the thickness direction and venting in the opposite direction along the thickness direction. That is, a reverse venting hole communicating with the venting hole 61 is provided on the guide plate 1. The specific structure of the reverse venting hole and the venting hole 61 can be found in Embodiment 3 of the leak valve and fluid control device disclosed in Chinese Patent No. CN120007814A. The venting chamber 7 in that patent corresponds to the first flow path 11 in this patent.

[0145] Example 8

[0146] like Figure 11-14 As shown, the difference between this embodiment and embodiments 1 to 7 is that multiple first flow paths 11 are formed, and these multiple first flow paths 11 are spaced apart around the second flow path 12. This allows the second flow direction controlled by the flow path control valve in this embodiment to have multiple flow paths, which can be applied to the dispersion or dispensing control of gas. In this embodiment, for example, two first flow paths 11 are formed, located on both sides of the second flow path 12 in the circumferential direction, but this is not a limitation.

[0147] Example 9

[0148] A fluid control device is provided, comprising a control valve with valve plate stacked according to any of the above embodiments. The fluid control device further includes a pump assembly, such as a miniature piezoelectric pump according to the present application embodiment. The miniature piezoelectric pump and the flow path control valve are coupled to enable the fluid control device to have the function of inflation and deflation. It can be widely used in electronic devices with blood pressure measurement functions such as wrist blood pressure monitors, smartwatches, and smart bracelets, but is not limited thereto.

[0149] The above description, based on the preferred embodiments of this utility model, provides inspiration. Those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification but must be determined according to the claims.

Claims

1. A control valve with stacked valve plates, characterized in that: It includes a flow guide plate, a valve plate, and a base plate stacked sequentially along the thickness direction; The guide plate is provided with a first flow path, a second flow path, and a flow path spacing portion located between the first flow path and the second flow path; The base plate has an air inlet opening disposed opposite to the flow path spacing portion, and also has a flow path forming portion disposed opposite to the second flow path; The valve plate has a deformable portion and a joint portion connected to each other. The two sides of the joint portion are respectively joined to the guide plate and the bottom plate. The first flow path, the flow path interval portion and the second flow path are all arranged opposite to the side surface of the deformable portion facing the guide plate. The side surface of the deformable portion facing the bottom plate covers the air intake opening and the flow path forming portion. The joint portion is arranged in a closed loop around the outer periphery of the deformable portion. A part of the outer periphery edge of the deformable portion is not connected to the joint portion and forms a slit arranged opposite to the second flow path. When pressurized gas is introduced into the air inlet, the portion of the deformable part opposite to the flow path partition presses against the flow path partition to block the first flow path, and the portion of the deformable part opposite to the flow path forming part elastically deforms toward the second flow path to separate from the bottom plate, forming a second flow passage. The second flow passage forms a channel opening at the slit, and the air inlet is connected to the second flow path through the second flow passage and the channel opening. When pressurized gas is introduced into the second flow path, the portion of the deformable part opposite to the flow path forming part presses against the flow path forming part to block the air inlet opening, and the portion of the deformable part opposite to the flow path spacing part elastically deforms toward the air inlet opening and separates from the flow path spacing part, forming a first flow passage connecting the first flow path and the second flow path.

2. The control valve with stacked valve plates according to claim 1, characterized in that: The air intake opening includes a first air intake hole disposed opposite to the flow path spacing portion and at least one second air intake hole that penetrates the flow path forming portion, is opposite to the second flow path, and is spaced apart from the slit.

3. The control valve with stacked valve plates according to claim 2, characterized in that: The deformable portion includes a discretely arranged first deformable portion and a second deformable portion. The first deformable portion covers the first air inlet, and the second deformable portion covers the second air inlet and the flow path forming portion. A portion of the outer peripheral edge of the second deformable portion is not connected to the joint portion to form the slit.

4. The control valve with stacked valve plates according to claim 2, characterized in that: The flow path forming section has an intake roughening area and an intake sealing area on the side facing the valve plate, and the roughness of the intake roughening area is greater than that of the intake sealing area. The air intake texturing area is located around the outside of the second air intake hole and between the second air intake hole and the air intake sealing area. When the deformable part abuts against the flow path forming part of the bottom plate, the air intake sealing area completely covers the channel opening of the second flow channel. The air intake sealing area is used to form a seal with the deformable part.

5. The control valve with stacked valve plates according to claim 1, characterized in that: The surface of the flow path partition facing the valve plate has a venting roughening area and a venting sealing area, and the roughness of the venting roughening area is greater than that of the venting sealing area. The venting texturing zone is located on the side surface of the flow path interval facing the valve plate, adjacent to the second flow path, and between the venting sealing zone and the second flow path. When the deformable part abuts against the flow path interval of the guide plate, the venting sealing zone and the deformable part form a seal.

6. The control valve with stacked valve plates according to any one of claims 1-5, characterized in that: The first flow path is formed as a stepped flow path.

7. The control valve with stacked valve plates according to any one of claims 1-5, characterized in that: The second flow path is formed as a stepped flow path.

8. The control valve with stacked valve plates according to claim 7, characterized in that: The guide plate is also provided with a guide port that communicates with the second flow path, and the guide port is provided adjacent to the flow path interval. The projection of the guide port on the base plate has an area that overlaps with the air intake opening, and the projection of the guide port on the base plate is completely offset from the flow path forming part. The part between the guide port and the second flow path is formed as a guide interval part.

9. The control valve with stacked valve plates according to any one of claims 1-5, characterized in that: The first flow path is formed in multiple ways, and the multiple first flow paths are arranged at intervals around the second flow path.

10. The control valve with stacked valve plates according to any one of claims 1-5, characterized in that: It also includes a support plate, which is engaged with the side of the guide plate opposite to the base plate; The support plate covers the second flow path, and the support plate has a vent hole that communicates with the second flow path; The support plate covers the first flow path, and the support plate has an exhaust hole that communicates with the first flow path; or, the first flow path extends to the outer wall surface of the guide plate, and the support plate covers the first flow path and cooperates with the guide plate to form an exhaust hole.

11. The control valve with stacked valve plates according to claim 1, characterized in that: The guide plate, valve plate and base plate are all flat plate components; At least two of the guide plate, valve plate, and base plate are made of polymer materials, and the valve plate and base plate are made of polymer materials.

12. The control valve with stacked valve plates according to claim 11, characterized in that: At least the valve plate and the base plate are made of materials with the same or similar coefficients of linear expansion.

13. The control valve with stacked valve plates according to claim 11, characterized in that: At least the valve plate is laminated to the base plate by heat fusion.

14. The control valve with stacked valve plates according to claim 11, characterized in that: At least the valve plate is laminated to the base plate without prestress.

15. A fluid control device, characterized in that: The control valve comprising the valve plate stack as described in any one of claims 1-14.

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