Electronic gas negative pressure storage container

Abstract

The utility model provides an electronic gas negative pressure storage container, including bottle body, bottle valve connected with bottle mouth and adsorbing material arranged in the bottle, and filter device is arranged at the gas outlet in the bottle, and the adsorbing material includes at least one cake adsorbing material, and at least one through -hole is arranged on the cake adsorbing material, and the through -hole is filled with granular adsorbent, and the utility model discloses a structure design of adsorbent material ensures that gas can flow through the whole bottle body with minimum resistance, and every inch space in the bottle is effectively used for adsorption, so that the maximization of adsorption capacity is realized in the limited volume.

Description

Technical Field

[0001] This utility model relates to a gas storage container, and more particularly to an electronic gas negative pressure storage container. Background Technology

[0002] Electronic specialty gases (EGS) are indispensable key raw materials in high-end electronics industries such as semiconductor manufacturing, display panels, and photovoltaic energy. Their purity and stability directly determine the performance and yield of integrated circuits. However, key electronic specialty gases such as arsine, phosphine, and diborane are usually extremely dangerous due to their high toxicity, flammability, explosiveness, and corrosiveness. The safety of their storage and transportation has always been a research and development focus for the industry.

[0003] The negative pressure packaging technology pioneered by ATMI in the United States, while effectively preventing the leakage of toxic gases by fixing gas molecules with adsorbents to create negative pressure inside the bottle, still has limitations in actual performance due to the adsorbent material and structural design. Traditional adsorbents have insufficient specific surface area and pore volume, resulting in limited adsorption capacity; unreasonable structures lead to localized gas adsorption, long diffusion paths, high mass transfer resistance, and poor thermal management performance, significantly reducing filling and gas supply efficiency; in addition, particulate adsorbents are easily pulverized by friction during transportation, which not only contaminates the gas path but also directly affects service life. These factors together restrict the safety and application effectiveness of this technology in the field of high-standard electronic specialty gas storage. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide an electronic gas negative pressure storage container that can solve the problem of low gas adsorption capacity in existing systems, which leads to incomplete adsorption / desorption.

[0005] To achieve the above-mentioned technical objectives, this application provides an electronic gas negative pressure storage container, including a bottle body, a bottle valve connected to the bottle mouth, and an adsorbent material disposed inside the bottle. A filter device is provided at the gas outlet inside the bottle. The adsorbent material includes at least one cake-shaped adsorbent material, and the cake-shaped adsorbent material has at least one through hole, and the through hole is filled with particulate adsorbent material.

[0006] Furthermore, the average particle size of the particulate adsorbent material is 1 mm to 5 mm.

[0007] Furthermore, the cake-shaped adsorbent material has multiple through holes arranged in a honeycomb pattern, and the through holes are filled with particulate adsorbent material.

[0008] Furthermore, there are multiple disc-shaped adsorbent materials, which are stacked inside the bottle, and the projections of the through holes on adjacent disc-shaped adsorbent materials in the vertical direction do not overlap at least partially.

[0009] Furthermore, there are multiple cake-shaped adsorbent materials, which are stacked inside the bottle. Each cake-shaped adsorbent material has a through hole in its center, and the adsorbent material inside the bottle forms a through hole that runs vertically through the bottle. The through hole is filled with granular adsorbent material.

[0010] Furthermore, an annular intermediate layer of adsorbent material is added between the cake-shaped adsorbent material and the granular adsorbent material.

[0011] Furthermore, the outer ring of the annular intermediate adsorption material has several semi-circular grooves.

[0012] Furthermore, particulate adsorbents account for 40%-60% of the total volume of the adsorbent.

[0013] Furthermore, the filter device includes an inner tube, an end cap, and a spring. The inner tube is nested inside the end cap. The upper end of the outer wall of the inner tube is provided with an external thread. The lower end of the outer wall of the inner tube extends outward in an L-shape and matches the upper end of the inner wall of the end cap extending inward in an L-shape to form a movable limiting structure. The bottom of the end cap is provided with several filter holes. A spring is provided between the lower end extension structure of the outer wall of the inner tube and the bottom of the end cap.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] The through-hole structure design of the adsorbent of this invention adopts radial short-path diffusion, which allows the gas to flow through the entire bottle with minimal resistance. During vacuuming, low resistance means that the target vacuum level can be reached more quickly and energy consumption is also lower. During gas supply, it can also ensure that the gas flows out quickly and stably, meeting the stringent requirements of semiconductor process equipment for gas flow stability.

[0016] The structural design of the adsorbent in this invention enables the gas to achieve excellent thermal management performance. During the adsorption and desorption processes of electronic special gases, there may be exothermic adsorption and endothermic desorption. This structure can dissipate heat in a timely manner and will not cause local temperature rise.

[0017] The structural design of this novel adsorbent maximizes adsorption capacity. The disc-shaped structure itself may also possess a certain adsorption capacity, complementing the granular adsorbent to achieve maximum adsorption capacity within a limited volume, thereby storing more valuable electronic gases. The robust disc-shaped framework firmly confines the granules within the pores, greatly reducing particle frictional pulverization caused by vibration and impact during transportation and pressure cycling. This effectively prevents dust contamination of the gas and valve blockage, extending the container's service life. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present utility model.

[0019] Figure 2 This is a schematic diagram of the structure of Embodiment 2 of the present utility model.

[0020] Figure 3 This is a schematic diagram of the structure of embodiment 3 of the present utility model.

[0021] Figure 4 This is a cross-sectional view of the adsorbent material in Embodiment 3 of this utility model.

[0022] Figure 5 This is a cross-sectional view of the filter device of this utility model.

[0023] Explanation of the attached figures: 1. Bottle valve; 2. Bottle body; 3. Filter device; 4. Particulate adsorbent material; 5. Disc-shaped adsorbent material; 6. Intermediate annular adsorbent material; 7. Semi-circular groove; 8. Inner tube; 9. End cap; 10. Spring; 11. Filter hole. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0025] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0027] In some embodiments, the electronic gas includes, but is not limited to, one of arsine, phosphine, silane, diborane, germanium tetrafluoride, boron trifluoride, and hydrogen sulfide.

[0028] In some implementations, the adsorbent material is derived from activated carbon, MOFs (metal-organic frameworks), zeolite molecular sieves, hydrous kaolin, attapulgite, alumina, etc.

[0029] The preferred adsorbent material of this invention is a synthetic carbon molecular sieve or polymer-derived activated carbon prepared by pyrolysis and activation processes using polyvinylidene chloride as a precursor. It is a high-performance, high-purity carbon-based adsorbent material with a designable pore structure, and is particularly suitable for storing high-value and highly toxic electronic gases.

[0030] In some embodiments, the bottle body is made of carbon steel or stainless steel, and the filter device is made of stainless steel.

[0031] like Figure 1 As shown, this structure is embodiment 1 of this application. This solution provides an electronic gas negative pressure storage container, including a bottle body (2) and a bottle valve (1). The bottle valve (1) is connected to the bottle mouth in a sealed manner by a thread. A filter device (3) is provided at the gas outlet inside the bottle. Adsorbent material is placed inside the bottle. The shape of the adsorbent material includes a cake shape (5) and a granular shape (4). There are multiple cake-shaped adsorbent materials (5) and they are stacked inside the bottle. A through hole is opened in the center of each cake-shaped adsorbent material (5). The adsorbent material inside the bottle forms a through hole that runs through the top and bottom. The granular adsorbent material (4) is filled in the through hole.

[0032] In some embodiments, the average particle size of the particulate adsorbent (4) is 0.1 mm to 5 mm, and its shape may include regular shape and irregular shape. Regular shape includes conventional regular shapes such as sphere, cylinder, square, and ellipse.

[0033] like Figure 2 As shown, this structure is embodiment 2 of this application. This solution provides an electronic gas negative pressure storage container, including a bottle body (2) and a bottle valve (1). The bottle valve (1) is connected to the bottle mouth in a sealed manner by a thread. A filter device (3) is provided at the gas outlet inside the bottle. Adsorbent material is placed inside the bottle. The shape of the adsorbent material includes a cake shape (5) and a granular shape (4). The cake-shaped adsorbent material (5) is provided with multiple through holes in a honeycomb shape. The multiple through holes are filled with granular material (4).

[0034] In some embodiments, the cake-shaped adsorbent material (5) is stacked in the container, with the honeycomb-shaped through-holes on each upper and lower layer of adsorbent material distributed in a non-overlapping orthographic projection. After being staggered, the gas flowing out of the through-holes of the upper layer cannot smoothly enter the through-holes of the lower layer. It must pass laterally (radially) through the body of the current layer of cake-shaped adsorbent to find the next inlet. This process forces the gas to contact more cake-shaped adsorbents, making full use of its micropores, thereby significantly improving the overall volumetric adsorption capacity. In addition, the staggered design actively increases the complexity of gas flow and disrupts the formation of stable channel flow. It makes the gas more evenly distributed across the cross-section of the bottle, ensuring that all adsorbents from the center to the edge can participate in the adsorption process, making the adsorption / desorption process more thorough and consistent.

[0035] like Figure 3 , Figure 4 As shown, this structure is embodiment 3 of this application. This solution provides an electronic gas negative pressure storage container, including a bottle body (2) and a bottle valve (1). The bottle valve is connected to the bottle mouth in a sealed manner by a thread. A filter device (3) is provided at the gas outlet inside the bottle. Adsorbent material is placed inside the bottle. The shape of the adsorbent material includes a cake shape (5) and a granular shape (4). There are multiple cake-shaped adsorbent materials (5) and they are stacked inside the bottle. A through hole is opened in the center of each cake-shaped adsorbent material (5). The adsorbent material inside the bottle forms a through hole that runs through the top and bottom. The through hole is filled with granular adsorbent material (4). An annular intermediate layer adsorbent material (6) is added between the cake-shaped adsorbent material (5) and the granular adsorbent material (4). The outer ring of the annular intermediate layer adsorbent material (6) is provided with several semi-circular grooves (7).

[0036] In some embodiments, the outer ring of the annular intermediate layer adsorbent material (6) is provided with several semi-circular grooves (7). In this application, it is preferred that the outer ring of the intermediate layer adsorbent material is provided with 8-14 semi-circular grooves (7), the radius of the semi-circular grooves is 5-8 mm. The outer ring of the intermediate layer is matched and nested with the disc adsorbent material. The two are connected by a small through hole formed by the semi-circular groove (7). After the airflow comes out from the central channel, it can be redistributed and slowed down through the small through hole, and become multiple more uniform and gentler airflows that enter the outer disc adsorbent. The distributed airflow diffuses smoothly in the pores of the disc adsorbent, achieving efficient adsorption. This avoids the gas from only passing through certain areas and ensures that the adsorbent from the center to the edge can be used uniformly and fully, thereby improving the overall adsorption capacity and efficiency.

[0037] In some embodiments, the particulate adsorbent (4) accounts for 40%-60% of the total volume of the adsorbent. Through long-term combined experiments, it was found that when the proportion of particulate adsorbent (4) increases to more than 60%, the capacity growth becomes very slow, while the pressure drop and temperature rise begin to increase sharply.

[0038] In some implementations, such as Figure 5 As shown, the filter device includes an inner tube (8), an end cap (9), and a spring (10). The inner tube is nested inside the end cap. The upper end of the outer wall of the inner tube is provided with an external thread. The lower end of the outer wall of the inner tube (8) extends outward in an L-shape and matches the upper end of the inner wall of the end cap extending inward in an L-shape to form a movable limiting structure. The bottom of the end cap is provided with several vent holes (11). A spring (10) is provided between the lower end of the outer wall of the inner tube (8) and the bottom of the end cap (9). The inner tube (8), the end cap (9), and the spring (10) are fitted together in a movable manner, so that the end cap can move along the inner tube. When the adsorbent material is filled, the elastic expansion and contraction function of the filter device can limit the movement of the adsorbent material and improve the problem of frictional pulverization of the adsorbent material caused by shaking during the transportation of the container.

[0039] In some embodiments, the adsorbent material inside the container is arranged in multiple layers, with complete disc-shaped adsorbent material placed at the bottom and top. This can limit the movement space of the granular adsorbent material in the fixed middle section and reduce the problem of frictional pulverization caused by shaking.

[0040] Work process: After molding, the bottle body needs to undergo electropolishing and passivation to form an ultra-clean inner wall with low surface activity, followed by multiple cleaning and drying processes.

[0041] After pretreatment, an adsorbent with a specific structure is filled according to the design in the above embodiments. After filling, the adsorbent is sealed after special treatment (the sealing method includes, but is not limited to, welding, threading, etc.).

[0042] After sealing, the cylinder needs to be evacuated to thoroughly remove pre-adsorbed moisture, air, and other impurities from the micropores of the adsorbent, restoring it to its maximum adsorption activity. Once completed, the valve is closed, and the cylinder remains under high vacuum, ready for filling.

[0043] When filling with the target gas, the valve is opened, and gas molecules, driven by the partial pressure difference, diffuse from the gas phase space of the cylinder into the pores of the adsorbent and are eventually adsorbed. This adsorption storage method not only increases the gas storage density but also significantly improves the safety of transportation and use.

[0044] After filling, the cylinders undergo homogenization and rigorous component analysis to ensure the gas purity meets electronic-grade standards. End users can then obtain stable and pure electronic gas using the accompanying desorption equipment.

[0045] It should be noted that the terms used to describe positional relationships in the above examples and accompanying drawings are for illustrative purposes only and should not be construed as limiting this patent. The various embodiments of this utility model described above are merely examples to clearly illustrate this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description, and it is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. An electronic gas negative pressure storage container, comprising a bottle body, a bottle valve connected to the bottle opening, and an adsorbent material disposed inside the bottle, characterized in that, A filter device is provided at the gas outlet inside the bottle. The adsorbent material includes at least one cake-shaped adsorbent material, and the cake-shaped adsorbent material has at least one through hole, which is filled with particulate adsorbent material.

2. The electronic gas negative pressure storage container according to claim 1, characterized in that, The average particle size of the particulate adsorbent is 1 mm to 5 mm.

3. The electronic gas negative pressure storage container according to claim 1, characterized in that, The cake-shaped adsorbent material has multiple through holes arranged in a honeycomb pattern, and the through holes are filled with particulate adsorbent material.

4. The electronic gas negative pressure storage container according to claim 1, characterized in that, The disc-shaped adsorbent material comprises multiple materials, which are stacked inside the bottle, and the projections of the through holes on adjacent disc-shaped adsorbent materials in the vertical direction do not overlap at least partially.

5. The electronic gas negative pressure storage container according to claim 1, characterized in that, The disc-shaped adsorbent material consists of multiple pieces, which are stacked inside the bottle. Each disc-shaped adsorbent material has a through hole in its center, and the adsorbent material inside the bottle forms a through hole that runs vertically through the bottle. The through hole is filled with particulate adsorbent material.

6. The electronic gas negative pressure storage container according to claim 5, characterized in that, An annular intermediate layer of adsorbent material is added between the cake-shaped adsorbent material and the granular adsorbent material.

7. The electronic gas negative pressure storage container according to claim 6, characterized in that, The outer ring of the annular intermediate layer adsorbent material has several semi-circular grooves.

8. The electronic gas negative pressure storage container according to claim 1, characterized in that, The filter device includes an inner tube, an end cap, and a spring. The inner tube is nested inside the end cap. The upper end of the outer wall of the inner tube is provided with an external thread. The lower end of the outer wall of the inner tube extends outward in an L-shape and matches the upper end of the inner wall of the end cap extending inward in an L-shape to form a movable limiting structure. The bottom of the end cap is provided with several filter holes. A spring is provided between the lower end extension structure of the outer wall of the inner tube and the bottom of the end cap.

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