Clean room air supply device

Abstract

The utility model relates to a kind of air supply devices of clean room, including filter box, air inlet pipe, air outlet pipe and negative pressure discharge pipe are provided on the filter box, louver, first filter screen and second filter screen are sequentially provided in the filter box inside along the air flow reverse direction, the device further includes filter screen cleaning assembly and louver cleaning assembly, during cleaning process, the filter screen cleaning assembly moves from top to bottom to clean every filter screen two sides simultaneously, the louver cleaning assembly moves along horizontal direction to clean louver, the utility model can clean filter screen two sides simultaneously, and the utility model is set louver in filter screen front end, and larger particle dust in airflow can be removed by louver.

Description

Technical Field

[0001] This utility model relates to the field of cleanroom equipment technology, and in particular to an air supply device for a cleanroom. Background Technology

[0002] Cleanrooms require high air cleanliness and generally necessitate dedicated air supply and ventilation systems to filter out particles and dust from the air entering the cleanroom. Since airborne dust particles vary in size, relying solely on filters may result in large particles accumulating on the front-end filter, requiring frequent cleaning and yielding unsatisfactory filtration. For example, patent announcement number CN218421661U discloses an air supply device for a semiconductor factory cleanroom, including a ventilation duct. One end of the ventilation duct is connected to a filter box via an air inlet pipe, and the other side of the filter box is fixedly connected to an air outlet pipe. The filter box contains a filter assembly, including a first filter screen, a second filter screen, and a brush slidably connected vertically. It has the following drawbacks: First, the brush can only clean one side of the filter screen, and dust will also fall off the other side of the filter screen during the cleaning process; Second, the partition has two discharge slots, which means that some of the airflow entering the filter box from the ventilation pipe enters the second filter screen along the two discharge slots without being processed by the filter screen. That is, some airflow only undergoes one filtration process, which makes the filtration effect not reach the expected effect. Utility Model Content

[0003] The technical problem to be solved by this utility model is that the brush can only clean and remove dust from one side of the filter screen. The airflow entering the filter box relies entirely on the filter screen for dust removal. During the dust removal process, some airflow escapes, resulting in a reduction in the number of dust removal times and thus an insignificant dust removal effect. In view of the above-mentioned defects of the prior art, an air supply device for cleanrooms is provided.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is to construct an air supply device for a cleanroom, including a filter box. The filter box is equipped with an air inlet pipe, an air outlet pipe, and a negative pressure discharge pipe. Inside the filter box, louvers, a first filter screen, and a second filter screen are arranged sequentially in the opposite direction of airflow. The device is characterized by further including a filter screen cleaning component and a louver cleaning component. During the cleaning process, the filter screen cleaning component moves from top to bottom to clean both sides of each filter screen simultaneously, and the louver cleaning component moves horizontally to clean the louvers.

[0005] Preferably, a first lead screw is provided between the top and bottom walls of the filter box between the first and second filter screens. The first lead screw is driven to rotate by a first motor located at the top of the filter box. Guide rods are symmetrically arranged on both sides of the first lead screw. The filter screen cleaning assembly is located between the two filter screens through the first lead screw and the guide rods. The filter screen cleaning assembly is driven to move up and down by the rotation of the first lead screw.

[0006] Preferably, the filter cleaning assembly includes a slide, a first brush, and a second brush. The first brush is fixedly mounted on both sides of the slide via a connecting rod. Narrow slits are provided along the length of the side frames of the first / second filter (the two side frames are a pair of opposing frames, such as a pair of vertical frames). The second brush is positioned opposite to the first brush across the filter (of course, the bristles of both the first and second brushes are in contact with the filter). The side edges of the first and second brushes are fixedly connected by a connecting plate set in the narrow slit. The first and second brushes clean the sides of the two filters, that is, the two ends of the first brush are in contact with one side of the frame of the first / second filter, and the two ends of the second brush are connected to the two ends of the first brush across the connecting plate set in the narrow slit, so as to ensure that the second brush can move synchronously with the first brush.

[0007] The width of the narrow slit is smaller than the diameter of the holes in the first and second filter screens, so as to prevent dust from passing through the narrow slit and affecting the filtration effect.

[0008] Preferably, the louver includes a frame, on which a first louver group and a second louver group are provided. The blades of the first louver group are inclined downward from the outside to the inside, and the blades of the second louver group are inclined upward from the inside to the outside. The blades of the first louver group and the blades of the second louver group are staggered.

[0009] Preferably, a wind baffle is provided between the bottommost blade in the second louver group and the lower edge of the frame, and a dust guide is provided below the bottommost blade in the first louver group. One side of the dust guide is connected to the wind baffle, and the other side extends to the bottom edge of the frame.

[0010] Preferably, the louver cleaning assembly includes a second motor, a second lead screw, a first cleaning part fitted on the blades of the first louver group, and a second cleaning part fitted on the blades of the second louver group. The second lead screw is horizontally disposed between the front and rear side walls of the filter box. The second lead screw is driven to rotate by the second motor disposed on the front / rear side walls of the filter box. The first cleaning part and the second cleaning part are connected as a whole, and a sliding plate is fixedly connected to one side of the first cleaning part. The sliding plate is disposed on the second lead screw, and the rotation of the lead screw drives the sliding plate to move along the axial direction of the lead screw.

[0011] Preferably, both the first cleaning section and the second cleaning section include a plurality of scrapers, each scraper having an upper blade and a lower blade, the ends of the upper blade and the lower blade being connected by a connecting arm, and the plurality of scrapers being connected into a whole by a connecting plate; the upper blade is located on the upper side of the blade, and the lower blade is located on the lower side of the blade.

[0012] Preferably, the bottom of the filter box is funnel-shaped, and the top is provided with a removable top cover. The negative pressure discharge pipe is located at the bottom of the filter box and is connected to an external negative pressure device through a connecting pipe.

[0013] Preferably, the device further includes a bottom baffle plate, which is composed of two symmetrical half plates. A first lead screw through hole and a guide rod through hole are opened on one side of the joint of the two half plates. When air is supplied, the two half plates are inserted into the baffle plate mounting grooves preset at the bottom of the filter box. When cleaning, the two half plates are pulled away from the sides of the filter box to ensure that the dust that falls off the two filter screens and louvers can enter the bottom of the filter box.

[0014] Preferably, valves are provided at the inlet and outlet pipes, and a discharge valve is provided between the negative pressure discharge pipe and the external negative pressure equipment. When cleaning the equipment, the valves connected to the inlet and outlet pipes are closed, and the discharge valve is open. When supplying air, the valves connected to the inlet and outlet pipes are open, and the discharge valve is closed.

[0015] Preferably, the filter box is a box-shaped structure with an open top. The open top is sealed by a top cover to form a closed filtration space. The top cover is bolted to the open part of the filter box.

[0016] The beneficial effects of this utility model are as follows: This invention enables filter cleaning by setting up a filter cleaning component. The cleaning component includes a first brush and a second brush, which are connected to each other on both sides of the filter via a connecting plate. The first brush and the second brush contact both sides of the filter, allowing the first brush and the second brush to clean both sides of the filter simultaneously. This method is more efficient and produces a more significant cleaning effect than existing single-sided brushes.

[0017] The filter box of this utility model has a louver at the beginning of the airflow direction. Two louver blades arranged opposite each other on the louver can remove particulate dust in the airflow. In addition, a special cleaning component is provided on the louver to automatically clean the louver.

[0018] This invention features baffles at the bottom of the filter screen and louvers. During air supply, the two half-plates are inserted into the pre-set baffle mounting slots at the bottom of the filter box. The baffles prevent airflow from escaping from the bottom of the filter screen or louvers and instead allow it to flow forward around the filter screen or louvers. During cleaning, the two half-plates are pulled away to the sides of the filter box to ensure that the dust that falls off the two filter screens and louvers can enter the bottom of the filter box. In this way, the dust that falls off can directly fall into the funnel at the bottom of the filter box.

[0019] The top of the filter box of this utility model is detachable, so that after a long period of filtration operation and multiple cleaning operations of the filter cleaning component and the louver cleaning component, the brush in the filter cleaning component and the scraper in the louver cleaning component can be cleaned by removing the top cover. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the utility model will be further described below in conjunction with the accompanying drawings and embodiments. The drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Note that the top of the channel is not shown in the following drawings. Figure 1 The three-dimensional representation of this utility model Figure 1 .

[0021] Figure 2 The three-dimensional representation of this utility model Figure 2 .

[0022] Figure 3 Cross-sectional perspective of this utility model Figure 1 .

[0023] Figure 4 Cross-sectional perspective of this utility model Figure 2 .

[0024] Figure 5 This is a cross-sectional view of the present invention.

[0025] Figure 6 This is a cross-sectional view of the louver of this utility model.

[0026] Figure 7 This is a perspective view of the first and second cleaning parts in the louver cleaning assembly of this utility model. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, a clear and complete description will be provided below in conjunction with the technical solutions in the embodiments of this utility model. Obviously, the described embodiments are some, but not all, embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] like Figure 1-7As shown in the preferred embodiment of the present invention, an air supply device for a clean room includes a filter box 1. The filter box 1 has an approximately square structure and is hollow inside. The filter box 1 is provided with an air inlet pipe 11, an air outlet pipe 12, and a negative pressure discharge pipe 13. Inside the filter box 1, louvers 2, a first filter screen 3, and a second filter screen 4 are arranged sequentially in the opposite direction of the airflow. In this way, the louvers 2, the first filter screen 3, and the second filter screen 4 can sequentially process the airflow.

[0029] Furthermore, in some embodiments, the device further includes a filter cleaning assembly 5 and a louver cleaning assembly 6. The filter cleaning assembly 5 is used to clean dust adhering to the first filter 3 and the second filter 4, and the louver cleaning assembly 6 is used to clean dust adhering to the louvers of the louvers 2. During the cleaning process, the filter cleaning assembly 5 moves from top to bottom to clean both sides of each filter simultaneously, and the louver cleaning assembly 6 moves horizontally to clean the louvers.

[0030] To automate the filter cleaning assembly, a first lead screw 7 is installed between the top and bottom walls of the filter box 1, between the first filter 3 and the second filter 4. Bearings are installed at both ends of the first lead screw 7 and the filter box 1 to ensure its rotation. The first lead screw 7 is driven to rotate by a first motor 8 located at the top of the filter box 1. Guide rods 9 are symmetrically arranged on both sides of the first lead screw 7, and are fixedly connected to the top and bottom of the filter box 1. The filter cleaning assembly 5 is positioned between the two filters via the first lead screw 7 and the guide rods 9, and its vertical movement is driven by the rotation of the first lead screw 7. The aforementioned first lead screw 7 and guide rods 9 are parallel to each other.

[0031] It should be noted that both the first filter screen 3 and the second filter screen 4 are composed of a frame and a mesh, and the first filter screen 3 and the second filter screen 4 are set in the filter screen mounting groove preset inside the filter box 1.

[0032] Specifically, the filter cleaning assembly 5 includes a slide 51, a first brush 52, and a second brush 53. The slide 51 has a first lead screw through hole, and on both sides of the first lead screw through hole are guide holes corresponding to the guide rod 9. The first lead screw through hole has a thread, and the slide 51 is threadedly connected to the first lead screw 7. The first brush 52 is fixedly mounted on both sides of the slide 51 via a connecting rod. More specifically, the first brush 52 is located on both sides of the guide holes. The second brush 53 is positioned opposite the first brush 52, separated from the filter screen. The first brush 52 and the second brush 53 respectively contact both sides of the filter screen (i.e., the first brush 52 and the second brush 53 are naturally in contact with the two sides of the filter screen). All bristles of brush 3 are in contact with the filter screen, and the two ends of the two brushes are in contact with one side of the frame of the first filter screen 3 / second filter screen 4. Narrow slits are provided along the length of the frame on the two vertical frames of the first filter screen 3 / second filter screen 4 (the narrow slits are not shown in the attached figure). The second brush 53 and the first brush 52 are arranged opposite each other with the screen, and the side of the first brush 52 and the side of the second brush 53 are fixedly connected by a connecting plate provided in the narrow slit. In this way, the second brush 53 and the first brush 52 are connected as a whole through the first filter screen 3 / second filter screen 4 by the connecting plate, and the second brush 53 can move synchronously with the first brush 52.

[0033] In some embodiments, the width of the slit is smaller than the diameter of the pores in the first and second filter screens, and a flexible sealing strip is provided on each of the two sidewalls of the slit, with the two flexible sealing strips in contact with each other to prevent dust from passing through the slit and affecting the filtration effect. In some embodiments, the louver 2 includes a frame 21, with a first louver group 22 and a second louver group 23 disposed on the inner side of the frame 21. Both the first louver group 22 and the second louver group 23 are arranged vertically. The blades of the first louver group 22 are inclined downward from the outside to the inside, while the blades of the second louver group 23 are inclined upward from the inside to the outside, and the blades of the first louver group 22 and the second louver group 23 are staggered. The first louver group 22 and the second louver group 23 can change the airflow direction and have a flow-around effect, thereby making it easier for dust in the airflow to be blocked by the two louver groups.

[0034] Preferably, a baffle plate 24 is provided between the bottommost blade in the second louver group 23 and the lower edge of the frame to prevent airflow from escaping directly from the bottom of the louver 2. A dust guide plate 25 is provided below the bottommost blade in the first louver group 22. One side of the dust guide plate 25 is connected to the baffle plate 24, and the other side extends to the bottom edge of the frame. In this way, when the louver cleaning component 6 cleans the dust on the louver, it falls onto the dust guide plate 25 and can slide down along the dust guide plate 25 away from the louver 2, thus preventing dust from accumulating on the louver frame.

[0035] The louver cleaning assembly 6 includes a second motor 61, a second lead screw 62, a first cleaning part 63 mounted on the blades of the first louver group, and a second cleaning part 64 mounted on the blades of the second louver group. The second lead screw 62 is horizontally disposed between the front and rear side walls of the filter box 1. Specifically, the second lead screw 62 is mounted on the front and rear side walls of the filter box 1 via bearings. The second lead screw 62 is driven to rotate by the second motor 61, which is disposed on the outer side of the front / rear side walls of the filter box 1. The first cleaning part 63 and the second cleaning part 64 are connected as a whole, and a sliding plate 65 is fixedly connected to one side of the first cleaning part 63. The sliding plate 65 is disposed on the second lead screw 62, and the rotation of the second lead screw 62 drives the sliding plate 65 to move axially along the second lead screw 62.

[0036] Specifically, both the first cleaning section 63 and the second cleaning section 64 include several scrapers, each scraper having an upper blade and a lower blade, the ends of which are connected by a connecting arm. The scrapers are connected as a whole by a connecting plate. The upper blade is located on the upper side of the blade, and the lower blade is located on the lower side of the blade. To reduce dust accumulation on the scrapers during cleaning, the blades are made of high-hardness steel and are thin strips. The thinner blades reduce the adhesion area, making it less prone to dust accumulation.

[0037] To facilitate dust cleaning, the bottom of filter box 1 is funnel-shaped, allowing dust to accumulate towards the center. A removable top cover facilitates cleaning of dust accumulated on the internal cleaning components and also allows for easy maintenance and replacement of the filter screen and louvers. A negative pressure discharge pipe 13 is located at the bottom of filter box 1 and connects to external negative pressure equipment via a connecting pipe. Filter box 1 is a box-shaped structure with an open top, which is sealed by a top cover to form a closed filtration space. The top cover is bolted to the open end of the filter box.

[0038] To prevent airflow from escaping from the bottom of the filter screen or louvers, the device also includes a bottom baffle plate 10. The baffle plate 10 consists of two symmetrical half-plates, which are easy to install and disassemble. A first lead screw through-hole and a guide rod through-hole are correspondingly opened on one side where the two half-plates meet. During air supply, the two half-plates are inserted into the pre-set baffle plate mounting slots at the bottom of the filter box 1. During cleaning, the two half-plates are pulled away from both sides of the filter box 1 to ensure that dust falling from the two filters and louvers 2 can enter the bottom of the filter box 1. It should be noted that the upper ends of the louvers 2, the first filter screen 3, and the second filter screen 4 contact the lower side of the top wall of the filter box 1, while the lower ends of the louvers 2, the first filter screen 3, and the second filter screen 4 contact the upper side of the baffle plate 10 to prevent dust from escaping through the top and bottom ends of the filters or louvers.

[0039] To reduce dust escape from the gaps between the filter screen, louver edges and the inner wall of the filter box, a sealing ring is installed around the outer perimeter of the filter screen and louver frames to seal the gaps between the filter screen, louver edges and the inner wall of the filter box.

[0040] To facilitate the removal and placement of the barrier plate 10, a handle or gripper is provided on the outside of the barrier plate 10.

[0041] Of course, in order to control the flow of air and change the direction of airflow, valves are installed at the inlet and outlet pipes, and a discharge valve is installed between the negative pressure discharge pipe and the external negative pressure equipment. When cleaning the equipment, the valves connected to the inlet and outlet pipes are closed, and the discharge valve is open. When supplying air, the valves connected to the inlet and outlet pipes are open, and the discharge valve is closed.

[0042] Finally, it should be noted that the air inlet pipe 11 is located near the bottom of the filter box, and the end of the air inlet pipe 11 located inside the filter box is bent upwards at an angle, so that the airflow is sprayed in an upward direction onto the lower side of the blades of the first louver group 22 of the louver 2. In this way, the blades of the first louver group 22 can directly intercept larger dust particles in the airflow.

[0043] It should be noted that, under non-maintenance conditions, after the filter cleaning component 5 and the louver cleaning component 6 remove the dust from their respective cleaning positions, most of the dust removed by the filter cleaning component 5 falls directly off, and the dust removed by the louver cleaning component will fall off from the louvers and scraper under the action of airflow inside the filter box 1. There will be no large accumulation or caking on the cleaning components. Only when the equipment has been used for a long time will the amount of residual dust on the cleaning components affect the cleaning effect. Therefore, during use, the cleaning components can be periodically unpacked and cleaned according to the frequency of use of the cleaning components and the dust content during the process.

[0044] The cleaning process or working principle of this utility model is as follows: close the inlet and outlet valves, open the discharge valve, pull the two half plates away from both sides of the filter box 1, move the filter screen cleaning component up and down to clean both sides of the filter screen, move the louver cleaning component horizontally to clean the louvers, and the dust is sucked away by negative pressure.

[0045] Finally, it should be noted that the above embodiment also includes an additional controller. This controller has a pre-set control module with different control programs for different processing environments. During use, it periodically activates the cleaning components to remove dust. The control program records the number of cleaning cycles and, based on the number of cycles, opens the cover to clean the cleaning components (i.e., the brushes and scrapers) to prevent dust accumulation on the brushes and scrapers from affecting the cleaning effect during prolonged cleaning. Finally, it should be noted that, in practice, even if some dust accumulates on the brushes and scrapers, the brushes still contact the filter and the scrapers still contact the louver surface. Therefore, the cleaning function of the brushes and scrapers still exists, only weakened to some extent compared to the initial state, and the overall impact on the cleaning and filtration effect is not significant.

[0046] It should be understood that this utility model has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of this utility model. Furthermore, under the teachings of this utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of this utility model.

Claims

1. An air supply device for a cleanroom, comprising a filter box, wherein the filter box is provided with an air inlet pipe, an air outlet pipe, and a negative pressure discharge pipe, and wherein louvers, a first filter screen, and a second filter screen are sequentially arranged inside the filter box in the opposite direction to the airflow, characterized in that, The device also includes a filter cleaning assembly and a louver cleaning assembly. During the cleaning process, the filter cleaning assembly moves from top to bottom to clean both sides of each filter simultaneously, and the louver cleaning assembly moves horizontally to clean the louvers.

2. The air supply device for a cleanroom according to claim 1, characterized in that, A first lead screw is installed between the top and bottom walls of the filter box between the first and second filter screens. The first lead screw is driven to rotate by a first motor installed at the top of the filter box. Guide rods are symmetrically arranged on both sides of the first lead screw. The filter screen cleaning assembly is installed between the two filter screens through the first lead screw and the guide rods. The filter screen cleaning assembly moves up and down by rotating the first lead screw.

3. The air supply device for a cleanroom according to claim 2, characterized in that, The filter cleaning assembly includes a slide, a first brush, and a second brush. The first brush is fixedly mounted on both sides of the slide via a connecting rod. Narrow slits are provided on the side frames of the first / second filter along the length of the frame. The second brush is positioned opposite to the first brush, and the side of the first brush and the side of the second brush are fixedly connected by a connecting plate provided in the narrow slit. The first brush and the second brush are used to clean the sides of the two filters.

4. The air supply device for a cleanroom according to claim 3, characterized in that, The slit width is smaller than the diameter of the holes in the first and second filter screens.

5. The air supply device for a cleanroom according to claim 1, characterized in that, The louver includes a frame, on which a first louver group and a second louver group are provided. The blades of the first louver group are inclined downward from the outside to the inside, and the blades of the second louver group are inclined upward from the inside to the outside. The blades of the first louver group and the second louver group are staggered.

6. The air supply device for a cleanroom according to claim 5, characterized in that, In the second louver group, a wind baffle is installed between the bottommost blade and the bottom edge of the frame. In the first louver group, a dust guide is installed below the bottommost blade. One side of the dust guide is connected to the wind baffle, and the other side extends to the bottom edge of the frame.

7. The air supply device for a cleanroom according to claim 6, characterized in that, The louver cleaning assembly includes a second motor, a second lead screw, a first cleaning part fitted on the blades of the first louver group, and a second cleaning part fitted on the blades of the second louver group. The second lead screw is horizontally disposed between the front and rear side walls of the filter box. The second lead screw is driven to rotate by the second motor disposed on the front / rear side walls of the filter box. The first cleaning part and the second cleaning part are connected as a whole, and a sliding plate is fixedly connected to one side of the first cleaning part. The sliding plate is disposed on the second lead screw, and the rotation of the lead screw drives the sliding plate to move along the axial direction of the lead screw.

8. The air supply device for a cleanroom according to claim 7, characterized in that, The first cleaning section and the second cleaning section each include a plurality of scrapers, each scraper having an upper blade and a lower blade, the ends of the upper blade and the lower blade being connected by a connecting arm, and the plurality of scrapers being connected into a whole by a connecting plate; the upper blade is located on the upper side of the blade, and the lower blade is located on the lower side of the blade.

9. The air supply device for a cleanroom according to claim 1, characterized in that, The bottom of the filter box is funnel-shaped, and the top is equipped with a removable top cover. The negative pressure discharge pipe is located at the bottom of the filter box and is connected to an external negative pressure device through a connecting pipe.

10. A cleanroom air supply device according to any one of claims 1-9, characterized in that, The device also includes a bottom baffle plate, which consists of two symmetrical half plates. The first lead screw through hole and the guide rod through hole are opened on one side of the joint of the two half plates. When air is supplied, the two half plates are inserted into the baffle plate mounting grooves preset at the bottom of the filter box. When cleaning, the two half plates are pulled away from the sides of the filter box to ensure that the dust that falls off the two filter screens and louvers can enter the bottom of the filter box.

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