A device for heating nitrogen

Abstract

The utility model relates to a device for nitrogen heating, including EP grade 316L stainless steel pipe, heating wire, multilayer golden finger adhesive tape layer that golden finger adhesive tape constitutes, temperature measuring probe and heat insulation cotton. The utility model relates to a device for nitrogen heating, heats nitrogen through heating wire in the process of conveying nitrogen, can produce hot nitrogen quickly, significantly improves the blow -dry speed of wafer surface. Meanwhile, temperature measuring probe real -time monitoring temperature, ensure the accurate control of heating process, and will not produce impurity. Heat insulation cotton reduces heat loss, improves heating efficiency. The device simple structure, easy to install and maintain, is applicable to the developing cleaning process of semiconductor manufacturing field, and the utility model relates to a device for nitrogen heating can conveniently replace or reformation upgrading to original pipeline, need not additional configuration heater to realize online heating function.

Description

Technical Field

[0001] This utility model relates to a heating device, and more particularly to a device for heating nitrogen gas, mainly used in the developing and cleaning process, to quickly dry the wafer surface by heating with hot nitrogen gas, belonging to the field of semiconductor manufacturing equipment technology. Background Technology

[0002] Currently, the developing and cleaning process is one of the key steps in semiconductor manufacturing. In this process, nitrogen gas is used to dry the wafer surface to remove residual liquid. In traditional methods, nitrogen is typically at room temperature, resulting in slow drying speeds and impacting production efficiency. Therefore, a device capable of rapidly heating nitrogen is needed to increase drying speed and improve production efficiency. Chinese patent CN201820483095.0, "A Nitrogen Drying Module for Wafer Wet Cleaning," discloses a method of heating the nitrogen pipeline using an "online heater." However, this requires an additional online heater, undoubtedly increasing the complexity and size of the equipment, hindering miniaturization and integration. Summary of the Invention

[0003] This invention aims to provide a device for nitrogen heating, which heats nitrogen through a heating wire to quickly generate hot nitrogen, thereby accelerating the drying speed of the wafer surface and improving production efficiency. Furthermore, this invention provides a device for nitrogen heating that can easily replace or upgrade existing pipelines, achieving online heating without the need for additional heaters.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a device for nitrogen heating, comprising a stainless steel tube, an inner gold finger tape layer formed by wrapping gold finger tape around the outer wall of the stainless steel tube, a heating wire spirally wrapped around the inner gold finger tape layer, a middle gold finger tape layer formed by wrapping gold finger tape around the heating wire, and at least one temperature probe attached to the middle gold finger tape layer, and then an outer gold finger tape layer formed by wrapping gold finger tape around the middle gold finger tape layer.

[0005] Preferably, the outer gold finger tape layer is wrapped with heat insulation cotton.

[0006] Preferably, the stainless steel pipe is made of EP grade 316L.

[0007] Preferably, the heating wire is a nickel-chromium alloy heating wire. Preferably, the temperature probe is a type K thermocouple temperature probe. Preferably, the insulation cotton is glass fiber insulation cotton.

[0008] Preferably, the stainless steel tube is 1 meter long, has an inner diameter of 4 millimeters, and an outer diameter of 6 millimeters; the heating wire is 5 meters long; and the insulation cotton is 5 millimeters thick.

[0009] The beneficial effects of this utility model are as follows: This invention heats nitrogen gas using a heating wire, rapidly generating hot nitrogen and significantly improving the drying speed of wafer surfaces. The device is simple in structure, easy to install and maintain, and can easily replace or upgrade existing piping. It achieves online heating without the need for an additional heater, making it suitable for large-scale production applications. Simultaneously, the device uses a temperature probe to monitor the temperature in real time, ensuring precise control of the heating process and improving process stability. Insulation cotton reduces heat loss, improves heating efficiency, and lowers energy consumption. Attached Figure Description

[0010] Figure 1 This is a cross-sectional view of a device for heating nitrogen.

[0011] in: 1. Stainless steel tube; 2. Heating wire; Inner gold finger tape layer 3.1, middle gold finger tape layer 3.2, outer gold finger tape layer 3.3; 4. Insulation cotton; 5. Temperature probe. Detailed Implementation

[0012] See Figure 1 This utility model relates to a device for nitrogen heating, comprising a stainless steel tube 1 located at the center. The stainless steel tube 1 is 1 meter long, has an inner diameter of 4 mm, and an outer diameter of 6 mm. The stainless steel tube 1 is made of EP grade 316L. A gold finger tape is tightly and evenly wound around the outer wall of the stainless steel tube 1 to form an inner gold finger tape layer 3.1. A heating wire 2, which is a nickel-chromium alloy heating wire, is spirally wound around the inner gold finger tape layer 3.1. The heating wire 2 is 5 meters long. Gold finger tape is tightly and evenly wound around the heating wire 2. A middle gold finger tape layer 3.2 is formed. Then, at least one temperature probe 5 is attached to the middle gold finger tape layer 3.2. A gold finger tape is then tightly and evenly wrapped around the middle gold finger tape layer 3.2 to form an outer gold finger tape layer 3.3, thereby tightly wrapping the temperature probe 5 between the middle gold finger tape layer 3.2 and the outer gold finger tape layer 3.3. The temperature probe 5 is a K-type thermocouple temperature probe. Finally, heat insulation cotton 4 is wrapped around the outer gold finger tape layer 3.3 to achieve heat preservation. The heat insulation cotton 4 is glass fiber heat insulation cotton with a thickness of 5 mm.

[0013] The working principle of this utility model is as follows: After assembling the nitrogen heating device, install or replace it on the equipment. Nitrogen gas is introduced through the EP-grade 316L stainless steel pipe 1 into the equipment. Simultaneously, the heating wire 2 is electrically heated. The heating wire 2 generates heat when energized, which heats the stainless steel pipe 1, and then the nitrogen gas flowing through it is heated. This allows for online heating of nitrogen gas while maintaining normal gas supply.

[0014] Meanwhile, the temperature probe 5 monitors the temperature of the stainless steel pipe 1 in real time and feeds the data back to the control system to ensure that the nitrogen temperature inside the stainless steel pipe 1 reaches the set value. The presence of the heat insulation cotton 4 can effectively reduce heat loss and improve heating efficiency.

[0015] Additionally, it should be noted that the above-described specific implementation is merely an optimized solution of this patent, and any modifications or improvements made by those skilled in the art based on the above concept are within the scope of protection of this patent.

Claims

1. An apparatus for heating nitrogen, comprising a stainless steel tube (1), characterized in that: The outer wall of the stainless steel tube (1) is wrapped with gold finger tape to form an inner gold finger tape layer (3.1). The inner gold finger tape layer (3.1) is spirally wrapped with a heating wire (2). The heating wire (2) is wrapped with gold finger tape to form a middle gold finger tape layer (3.2). At least one temperature probe (5) is attached to the middle gold finger tape layer (3.2). Gold finger tape is then wrapped around the middle gold finger tape layer (3.2) to form an outer gold finger tape layer (3.3).

2. The apparatus for nitrogen heating according to claim 1, characterized in that: The outer gold finger tape layer (3.3) is wrapped with heat insulation cotton (4).

3. The apparatus for nitrogen heating according to claim 1, characterized in that: The stainless steel pipe (1) is made of EP grade 316L.

4. The apparatus for nitrogen heating according to claim 1, characterized in that: The heating wire (2) is a nickel-chromium alloy heating wire.

5. The apparatus for nitrogen heating according to claim 1, characterized in that: The temperature probe (5) is a K-type thermocouple temperature probe.

6. The apparatus for nitrogen heating according to claim 2, characterized in that: The insulation cotton (4) is glass fiber insulation cotton.

7. The apparatus for nitrogen heating according to claim 2, characterized in that: The stainless steel pipe (1) is 1 meter long, has an inner diameter of 4 mm and an outer diameter of 6 mm, the heating wire (2) is 5 meters long, and the insulation cotton (4) is 5 mm thick.

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