Etching device cover water mist removal device

Abstract

The etching device cover plate water mist removing device provided by the utility model, comprising a purge pipe and a dry air supply unit connected with the purge pipe, the purge pipe is arranged on the cover plate, the dry air supply unit can provide compressed dry air for the purge pipe, the surface of the cover plate is blown by the compressed dry air, so that the water mist on the cover plate of the etching device is effectively removed, which is beneficial to avoid the condensation of the water mist on the cover plate into water drops, beneficial to reduce the probability of defects of the substrate in the etching process, and beneficial to improve the product quality and the quality of the etching.

Description

Technical Field

[0001] This utility model belongs to the field of etching equipment. Specifically, this utility model relates to a water mist removal device for the cover plate of an etching device. Background Technology

[0002] In the etching process, water mist condenses on the cover plate of the inlet (before entering the etching tank), the NT unit after exiting the etching tank, and the rinsing section. This water drips onto the cover plate of the etching equipment. When the substrate passes through, the water droplets fall onto the substrate, easily causing etching mura and affecting product quality. Simultaneously, if the water droplets remain on the cover plate for an extended period without cleaning, bacteria can easily grow, further impacting product quality. Existing technologies use manual scrapers to remove only a small portion of the water mist for observing the etching chamber.

[0003] To address the aforementioned issues, patent application number 2021216133352 discloses a water mist cleaning device for the cleaning section of an RTP production line. This device includes a pipe with a water removal box and a shut-off valve installed sequentially from top to bottom. The water removal box comprises a box body, a box cover, and a sponge block installed inside the box body. The box body has an opening at the front, and the box cover is installed on the opening. The pipe connects to the top and bottom of the box body. A conical support mesh is also installed inside the box body at the pipe location at the bottom of the box body. The bottom of the sponge block has a groove that mates with the support mesh, and the periphery of the sponge block contacts the inner wall of the box body. However, this device fails to solve the aforementioned problems.

[0004] Therefore, in order to improve or solve at least one of the above problems, a water mist removal device for etching equipment cover plate is provided, which is conducive to removing water mist from the cover plate, preventing water mist from condensing into water droplets on the cover plate, reducing the probability of defects in the substrate during the etching process, and improving the quality of etched products. Summary of the Invention

[0005] This utility model is designed to solve the aforementioned problems. Its purpose is to provide a water mist removal device for etching equipment covers that facilitates the removal of water mist from the cover plate, prevents condensation into water droplets, reduces the probability of defects in the substrate during etching, and improves the quality of etched products. To achieve these objectives, the technical solution adopted by this utility model is as follows: This utility model provides a water mist removal device for an etching apparatus cover plate, which includes a purge pipe and a dry air supply unit connected to the purge pipe, with the purge pipe disposed on the cover plate.

[0006] The etching device cover plate water mist removal device provided by this utility model may also have the following feature: the purging pipe is arranged along the edge of the cover plate, and the purging pipe is provided with purging holes, which are evenly arranged on the purging pipe.

[0007] The etching device cover plate water mist removal device provided by this utility model may also have the following features: the dry air supply unit includes an air compressor, a cooler, a compressed air purification component, an air tank and a compressed air supply pipe. The air compressor is connected to one end of the compressed air supply pipe, the cooler is installed on the compressed air supply pipe, the compressed air purification component is installed on the compressed air supply pipe, and the air tank is connected to the other end of the compressed air supply pipe.

[0008] The etching device cover plate water mist removal device provided by this utility model may also have the following feature: the air inlet of the air compressor is connected to a primary air filter.

[0009] The etching device cover plate water mist removal device provided by this utility model may also have the following feature: the compressed air purification component includes a pre-filter, a post-filter, and a dryer, which are sequentially arranged on the compressed air supply pipe.

[0010] The etching device cover plate water mist removal device provided by this utility model may also have the following feature: a CDA pipeline is provided between the purge pipe and the gas storage tank, one end of the CDA pipeline is connected to the purge pipe, and the other end of the CDA pipeline is connected to the gas storage tank.

[0011] The etching device cover plate water mist removal device provided by this utility model may also have the following feature: a shut-off valve is provided on the CDA pipeline.

[0012] The etching device cover plate water mist removal device provided by this utility model may also have the following feature: a check valve is provided on the CDA pipeline.

[0013] The technical effects of this utility model are as follows: The etching apparatus cover plate water mist removal device provided by this utility model includes a blow pipe and a dry air supply unit connected to the blow pipe. The blow pipe is set on the cover plate, and the dry air supply unit can provide compressed dry air to the blow pipe. By blowing the surface of the cover plate with compressed dry air, the water mist on the etching apparatus cover plate is effectively removed. This helps to prevent water mist from condensing into water droplets on the cover plate, which helps to reduce the probability of defects in the substrate during the etching process, and helps to improve the quality of the etched products. Attached Figure Description

[0014] This manual includes the following figures, which illustrate the following: Figure 1This is a schematic diagram of the water mist removal device for the etching device cover plate in an embodiment of this utility model.

[0015] The following are marked in the diagram: cover plate-1, purge pipe-10, CDA pipeline-11, shut-off valve-12, check valve-13, dry air supply unit-20, air compressor-21, cooler-22, compressed air purification assembly-23, air tank-24, compressed air supply pipe-25, primary air filter-26. Detailed Implementation

[0016] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of the present invention, and to facilitate its implementation.

[0017] Figure 1 This is a schematic diagram of the water mist removal device for the etching device cover plate in an embodiment of this utility model.

[0018] like Figure 1 As shown, the etching apparatus cover plate water mist removal device provided by this utility model includes a purge pipe 10 and a dry air supply unit 20 connected to the purge pipe 10. The purge pipe 10 is disposed on the cover plate 1, and the dry air supply unit 20 can provide compressed dry air to the purge pipe 10. By blowing the surface of the cover plate 1 with compressed dry air, the water mist on the etching apparatus cover plate 1 is effectively removed. This helps to prevent the water mist from condensing into water droplets on the cover plate 1, which helps to reduce the probability of defects in the substrate during the etching process and helps to improve the quality of the etched products.

[0019] The purge pipe 10 is arranged along the edge of the cover plate 1. The purge pipe 10 is provided with purge holes, which are evenly arranged on the purge pipe 10. The purge pipe 10 is square in shape to match the cover plate 1, thereby improving the purge effect on the surface of the cover plate 1, improving the removal effect of water mist on the cover plate 1, and improving reliability.

[0020] The dry air supply unit 20 includes an air compressor 21, a cooler 22, a compressed air purification component 23, an air tank 24, and a compressed air supply pipe 25. The air compressor 21 is connected to one end of the compressed air supply pipe 25. The air compressor 21 can compress atmospheric air to the required working pressure. In this embodiment, the pressure range is 0.6MPa~1.0MPa. The cooler 22 is installed on the compressed air supply pipe 25. The cooler 22 is used to cool the compressed air. The temperature of the compressed air needs to be cooled to near the ambient temperature, usually ≤40℃, to facilitate subsequent removal of water from the compressed air. In preparation, the cooler 22 is also connected to a condensate pre-separator to collect liquid water during the compressed air cooling process. The compressed air purification component 23 is installed on the compressed air supply pipe 25, located on the side of the cooler 22 away from the air compressor 21. The compressed air purification component 23 is used to remove oil (oil mist, oil vapor), moisture (liquid water, water vapor) and small impurities (dust, particles) from the compressed air to ensure the cleanliness and dryness of the compressed dry air. The air storage tank 24 is connected to the other end of the compressed air supply pipe 25 to store compressed dry air for purging.

[0021] The air compressor 21 is connected to a primary air filter 26 at its air inlet. The primary air filter 26 is used to filter out large particulate impurities, dust, insects and other particles in the air, protecting the core components of downstream equipment such as cylinders and pistons, preventing wear or blockage, and improving reliability and service life.

[0022] The compressed air purification assembly 23 includes a pre-filter 231, a post-filter 232, and a dryer 233. The pre-filter 231, post-filter 232, and dryer 233 are sequentially arranged on the compressed air supply pipe 25. The pre-filter 231 has a filtration accuracy of 1μm to 5μm and is used to remove liquid oil, liquid water, and large particulate impurities from the compressed air, protecting the dryer 233. The post-filter 232 has a filtration accuracy of 0.01μm to 0.1μm and is used to remove fine dust and residual oil mist. The dryer 233 can be a refrigerated dryer or an adsorption dryer to remove moisture from the compressed air.

[0023] A CDA (Compressed Dry Air) line 11 is provided between the purge pipe 10 and the air storage tank 24. One end of the CDA line 11 is connected to the purge pipe 10, and the other end of the CDA line 11 is connected to the air storage tank 24. A shut-off valve 12 is provided on the CDA line 11 to control the opening or closing of the CDA line 11. A check valve 13 is provided on the CDA line 11 to prevent the dry compressed air from flowing back, thereby improving the reliability of the structure.

[0024] The etching apparatus cover plate water mist removal device provided by this utility model includes a purge pipe 10 and a dry air supply unit 20 connected to the purge pipe 10. The purge pipe 10 is disposed on the cover plate 1. The dry air supply unit 20 can provide compressed dry air to the purge pipe 10. By blowing the surface of the cover plate 1 with compressed dry air, the water mist on the etching apparatus cover plate 1 is effectively removed. This helps to prevent the water mist from condensing into water droplets on the cover plate 1, which helps to reduce the probability of defects in the substrate during the etching process and helps to improve the quality of the etched products.

Claims

1. A water mist removal device for an etching apparatus cover plate, characterized in that, It includes a purge pipe (10) and a dry air supply unit (20) connected to the purge pipe (10), the purge pipe (10) being disposed on a cover plate (1).

2. The water mist removal device for the etching apparatus cover plate according to claim 1, characterized in that, The purge pipe (10) is arranged along the edge of the cover plate (1), and the purge pipe (10) is provided with purge holes, which are evenly arranged on the purge pipe (10).

3. The etching apparatus cover plate water mist removal device according to claim 2, characterized in that, The dry air supply unit (20) includes an air compressor (21), a cooler (22), a compressed air purification component (23), an air tank (24), and a compressed air supply pipe (25). The air compressor (21) is connected to one end of the compressed air supply pipe (25), the cooler (22) is installed on the compressed air supply pipe (25), the compressed air purification component (23) is installed on the compressed air supply pipe (25), and the air tank (24) is connected to the other end of the compressed air supply pipe (25).

4. The water mist removal device for the etching apparatus cover plate according to claim 3, characterized in that, The air compressor (21) is connected to a primary air filter (26) at its air inlet.

5. The etching apparatus cover plate water mist removal device according to claim 4, characterized in that, The compressed air purification assembly (23) includes a pre-filter (231), a post-filter (232), and a dryer (233), which are sequentially arranged on the compressed air supply pipe (25).

6. The water mist removal device for the etching apparatus cover plate according to claim 5, characterized in that, A CDA pipeline (11) is provided between the purge pipe (10) and the gas storage tank (24). One end of the CDA pipeline (11) is connected to the purge pipe (10), and the other end of the CDA pipeline (11) is connected to the gas storage tank (24).

7. The etching apparatus cover plate water mist removal device according to claim 6, characterized in that, The CDA pipeline (11) is equipped with a shut-off valve (12).

8. The water mist removal device for the etching apparatus cover plate according to claim 6, characterized in that, A check valve (13) is provided on the CDA pipeline (11).

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