Exhaust port structure for high-temperature purification furnace

Abstract

The utility model relates to a kind of suction port structures for high-temperature purification furnace, belong to thermal equipment field;Solve the problem that existing high-temperature purification furnace body is difficult to clean with suction port structure, and there is the risk of reverse contaminant material purity;Technical scheme: including several suction jacket tubes, multiple suction jacket tubes can be disassembled and penetrate in the first heat insulating felt of the furnace body inside setting, multiple suction jacket tubes are communicated with the hot field in the suction port of the furnace body outer side wall and the furnace body inside, the end of suction jacket tube away from suction port is provided with clamping part, the end of suction port away from furnace body is provided with connecting pipeline, the end of connecting pipeline away from suction port is detachably connected with plugging piece and vacuum pump group pipeline, the end of vacuum pump group pipeline away from connecting pipeline is connected on vacuum pump, second heat insulating felt is provided in connecting pipeline and suction port, third heat insulating felt is provided on the side of plugging piece close to connecting pipeline;The utility model is applied to high-temperature purification furnace body.

Description

Technical Field

[0001] This utility model relates to the field of thermal equipment technology, specifically to a gas extraction port structure for a high-temperature purification furnace. Background Technology

[0002] When high-temperature purification is carried out, high-temperature vacuum purification furnaces inevitably produce various byproducts such as dust, acidic gases, and water vapor. To prevent these byproducts from interfering with the purification process and affecting the final purification quality, the equipment uses its own vacuum system to extract these substances in a timely manner through the exhaust port of the high-temperature purification furnace, thereby ensuring the stable and efficient progress of the purification operation.

[0003] However, there is a significant temperature difference between the exhaust port and the interior of the high-temperature vacuum purification furnace. These high-temperature byproducts discharged from the vacuum system are highly susceptible to condensation upon passing through the exhaust port, adhering to various parts of the port. Due to limitations in the traditional exhaust port design, cleaning the condensed impurities is difficult, and the cleaning process often damages the insulation felt inside the high-temperature vacuum purification furnace, increasing the cost and difficulty of equipment maintenance.

[0004] More importantly, if the impurities condensed at the exhaust port are not cleaned in a timely and thorough manner, these impurities will seriously contaminate the purity of the material during the subsequent purification process, thereby significantly weakening the purification effect of the equipment and affecting the quality of the final product. Utility Model Content

[0005] To address the technical problem that the existing high-temperature purification furnace exhaust port structure is difficult to clean and poses a risk of reverse contamination of material purity, this utility model proposes an exhaust port structure for high-temperature purification furnaces.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a gas extraction port structure for a high-temperature purification furnace, including a furnace body and several gas extraction sleeves. The multiple gas extraction sleeves are detachably inserted through the ventilation holes reserved in the first heat insulation felt laid on the inner side wall of the furnace body. The multiple gas extraction sleeves are connected to the gas extraction port set on the outer side wall of the furnace body and the heat field inside the furnace body, so that the process gas in the heat field inside the furnace body flows through all the gas extraction sleeves and enters the gas extraction port. A snap-fit ​​element is provided at the end of the air extraction sleeve away from the air extraction port, and the snap-fit ​​element is coupled to the first insulation felt. The end of the extraction sleeve away from the first insulation felt is connected to the extraction port. The end of the extraction port away from the furnace body is provided with a connecting pipe. The end of the connecting pipe away from the extraction port is detachably connected to a sealing component and a vacuum pump assembly pipe. The end of the vacuum pump assembly pipe away from the connecting pipe is connected to the vacuum pump assembly. A second insulation felt is installed inside the connecting pipe and the air extraction port, and a third insulation felt is installed on the side of the sealing component near the connecting pipe, with the second insulation felt and the third insulation felt abutting each other.

[0007] Furthermore, the maximum diameter of a single extraction sleeve is smaller than the minimum diameter of the extraction port.

[0008] Furthermore, the connecting pipes are coaxially arranged with the air extraction port.

[0009] Furthermore, the cross-sections of the extraction sleeve, the extraction port, and the connecting sleeve are all circular.

[0010] Furthermore, there are seven extraction sleeves, and the geometric center axis of the seven extraction sleeves is parallel to the geometric center axis of the extraction port.

[0011] Furthermore, the sealing component can be detachably connected to the end of the connecting pipe away from the exhaust port, so that the thermal field inside the furnace, the exhaust sleeve, the exhaust port, the connecting pipe and the vacuum pump group are connected in sequence to form a relatively sealed space.

[0012] Furthermore, the extraction sleeve and the snap-fit ​​fitting form an integral molded structure.

[0013] Furthermore, the sealing component is a flange.

[0014] The advantages of this utility model over the prior art are as follows: 1. The multiple extraction sleeves of this utility model can effectively reduce the dissipation of heat carried by the process gas from the thermal field inside the furnace, so that the temperature drop of the process gas is smaller when it flows through the extraction port. As a result, impurities in the process gas condense in the connecting pipe far from the extraction port, which not only reduces the adhesion of impurities on the extraction sleeves, but also further reduces the condensation of impurities at the extraction port, greatly reducing the contamination of materials inside the furnace and improving the purification effect of the high-temperature purification furnace. At the same time, the multiple extraction sleeve structure can disperse the heat radiation carried by the process gas and avoid damage to the components outside the extraction port caused by high temperature.

[0015] 2. This utility model facilitates the removal and cleaning of the air extraction sleeve by snapping it into the first insulation felt; and facilitates the removal and cleaning of the second insulation felt by detachably connecting the sealing component to the connecting pipe. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 for Figure 1 An enlarged schematic diagram of part A in the middle.

[0017] In the diagram: 1 is the first insulation felt, 2 is the air extraction port, 3 is the air extraction sleeve, 4 is the connecting pipe, 5 is the second insulation felt, 6 is the sealing component, 7 is the third insulation felt, 8 is the vacuum pump group pipeline, 9 is the vacuum pump group, 10 is the hot zone, 11 is the furnace body, and 12 is the snap-fit ​​component. Detailed Implementation

[0018] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0019] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0020] like Figures 1 to 2 As shown, this utility model provides a gas extraction port structure for a high-temperature purification furnace, including a furnace body 11 and several gas extraction sleeves 3. The multiple gas extraction sleeves 3 are detachably inserted through ventilation holes pre-reserved in the first insulation felt 1 laid on the inner wall of the furnace body 11. The multiple gas extraction sleeves 3 are connected to the gas extraction port 2 fixedly connected to the outer wall of the furnace body 11 and the heat field 10 inside the furnace body 11. In this embodiment, seven gas extraction sleeves 3 are provided, and the geometric center axes of the seven gas extraction sleeves 3 are parallel to the geometric center axis of the gas extraction port 2. The maximum diameter of a single gas extraction sleeve 3 is smaller than the minimum diameter of the gas extraction port 2, ensuring that the process gas inside the furnace body 11 can smoothly enter the gas extraction port 2 after flowing through all the gas extraction sleeves 3. The gas extraction sleeves 3 are made of graphite material to adapt to the high-temperature operating environment of the furnace body 11.

[0021] The heat carried by the process gas from the internal heat field 10 of the furnace body 11 can be effectively reduced by multiple extraction sleeves 3, resulting in a smaller temperature drop when the process gas flows through the extraction port 2. This causes impurities in the process gas to condense at a location far from the extraction port 2, which reduces the adhesion of impurities on the extraction sleeves 3 and further reduces the condensation of impurities at the extraction port 2, significantly reducing the contamination of the materials inside the furnace body 11 by impurities and improving the purification effect of the high-temperature purification furnace. At the same time, the structure of multiple extraction sleeves 3 can disperse the heat radiation carried by the process gas and prevent high temperature from damaging the components outside the extraction port 2.

[0022] The end of the extraction sleeve 3 away from the extraction port 2 is integrally formed with a snap-fit ​​part 12. The snap-fit ​​part 12 is coupled to the first insulation felt 1, which facilitates the installation and disassembly of the extraction sleeve 3. When the furnace body 11 stops the high-temperature purification operation, the snap-fit ​​part 12 is first separated from the first insulation felt 1. Then, the extraction sleeve 3 is pulled out from the furnace body 11 along the axis of the extraction sleeve 3 away from the extraction port 2 from the first insulation felt 1, so as to facilitate the cleaning of impurities on the surface of the extraction sleeve 3.

[0023] The end of the extraction sleeve 3 away from the first insulation felt 1 is abutted against the extraction port 2. The end of the extraction port 2 away from the furnace body 11 is detachably connected to the connecting pipe 4. The connecting pipe 4 is coaxially arranged with the extraction port 2. The end of the connecting pipe 4 away from the extraction port 2 is detachably connected to the sealing part 6 and the vacuum pump group pipe 8. The end of the vacuum pump group pipe 8 away from the connecting pipe 4 is connected to the vacuum pump group 9.

[0024] The sealing element 6 is detachably connected to the end of the connecting pipe 4 away from the exhaust port 2, so that the internal heat field 10, exhaust sleeve 3, exhaust port 2, connecting pipe 4 and vacuum pump group pipe 8 are sequentially connected and form a relatively sealed space. In this embodiment, the sealing element 6 is a flange.

[0025] In this embodiment, the cross-sections of the extraction sleeve 3, the extraction port 2, and the connecting sleeve are all circular.

[0026] A second insulating felt 5 is abutted against the exhaust port 2 inside the connecting pipe 4. A third insulating felt 7 is fixedly connected to the sealing component 6 on the side near the connecting pipe 4, and the second insulating felt 5 and the third insulating felt 7 abut against each other. The arrangement of the second insulating felt 5 and the third insulating felt 7, combined with multiple exhaust sleeves 3, can further reduce the temperature drop of the extracted process gas, causing impurities in the process gas to condense at the end of the second insulating felt 5 in the connecting pipe 4 away from the exhaust port 2, thereby further reducing the impurities condensed at the exhaust port 2 and reducing contamination of the materials inside the furnace body 11.

[0027] The second insulation felt 5 has no fixing components on its edge or surface that are connected to the pipe wall of the connecting pipe 4 or the inner wall of the air extraction port 2. It relies on the shape of the second insulation felt 5 itself to form a close fit and constraint with the pipe wall of the connecting pipe 4 and the inner wall of the air extraction port 2, which meets the disassembly requirement of "extraction as a whole". There is no risk of the second insulation felt 5 breaking or falling off during the extraction process, and there are no residual adhesion marks on the pipe wall of the connecting pipe 4 and the inner wall of the air extraction port 2.

[0028] After the furnace body 11 stops high-temperature purification, first remove the sealing part 6 on the connecting pipe 4, and then pull the second insulation felt 5 out of the pipe along the axial direction of the connecting pipe 4 to the side away from the exhaust port 2. Then the second insulation felt 5 can be cleaned, maintained or replaced.

[0029] The melting and boiling points of the process gas are much lower than the operating temperatures of the extraction sleeve 3, extraction port 2, connecting pipe 4, and vacuum pump group 9. Under the temperature environment of the extraction sleeve 3, extraction port 2, connecting pipe 4, and vacuum pump group 9, it always remains in a gaseous state and will not condense.

[0030] The melting and boiling points of impurities in the process gas are higher than the operating temperatures of the extraction sleeve 3, extraction port 2, connecting pipe 4, and vacuum pump group 9, but lower than the high temperature of the internal thermal field 10 of the furnace body 11. In the high-temperature environment of the internal thermal field 10 of the furnace body 11, the impurities and process gas remain in a gaseous state together. When the impurities flow with the process gas through the lower-temperature extraction sleeve 3, extraction port 2, connecting pipe 4, and vacuum pump group 9, the temperature of the impurities will drop below their own boiling point, changing from a gaseous state to a liquid or solid state, and then adhering to the pipe wall of the extraction sleeve 3, the second insulation felt 5 inside the extraction port 2 and connecting pipe 4, and the pipe wall of the vacuum pump group 9.

[0031] The working principle of this utility model: Before carrying out high-temperature purification operations in the high-temperature vacuum purification furnace, first insert the extraction sleeve 3 into the first insulation felt 1, so that the end of the extraction sleeve 3 away from the clamping piece 12 abuts against the extraction port 2, and then clamp the clamping piece 12 onto the side of the first insulation felt 1 away from the extraction port 2; at the same time, insert the second insulation felt 5 into the channel connecting the extraction port 2 and the connecting pipe 4, and fix the sealing piece 6 to the end of the connecting pipe 4 away from the extraction port 2, so that the second insulation felt 5 abuts against the first insulation felt 1 and the third insulation felt 7 at the same time, and then the high-temperature purification operation can be carried out.

[0032] When the high-temperature vacuum purification furnace is performing high-temperature purification operations, under the action of the vacuum pump group 9, the process gas and its impurities in the furnace body 11 pass through the extraction sleeve 3 and the connecting pipe 4 in sequence and enter the vacuum pump group pipe 8. During this process, the impurities in the process gas condense upon cooling and are deposited in the extraction sleeve 3, the second insulation felt 5 in the extraction sleeve 3 and the connecting pipe 4, and the vacuum pump group 9 pipe and other flow parts. When the high-temperature vacuum purification furnace stops high-temperature purification operations, the extraction sleeve 3 is pulled out from the furnace body 11 to clean the extraction sleeve 3, and the sealing part 6 is removed and the second insulation felt 5 is pulled out to clean the second insulation felt 5.

[0033] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A gas extraction port structure for a high-temperature purification furnace, characterized in that: It includes a furnace body (11) and several exhaust sleeves (3). The multiple exhaust sleeves (3) are detachably inserted through the ventilation holes reserved in the first insulation felt (1) laid on the inner side wall of the furnace body (11). The multiple exhaust sleeves (3) are connected to the exhaust port (2) set on the outer side wall of the furnace body (11) and the heat field (10) inside the furnace body (11), so that the process gas in the heat field (10) inside the furnace body (11) flows through all the exhaust sleeves (3) and enters the exhaust port (2). A snap-fit ​​connector (12) is provided at the end of the air extraction sleeve (3) away from the air extraction port (2), and the snap-fit ​​connector (12) is coupled to the first insulation felt (1); The end of the suction sleeve (3) away from the first insulation felt (1) is connected to the suction port (2). The end of the suction port (2) away from the furnace body (11) is provided with a connecting pipe (4). The end of the connecting pipe (4) away from the suction port (2) is detachably connected with a sealing part (6) and a vacuum pump group (9) pipe. The end of the vacuum pump group (9) pipe away from the connecting pipe (4) is connected to the vacuum pump group (9). A second insulation felt (5) is provided inside the connecting pipe (4) and the air extraction port (2), and a third insulation felt (7) is provided on the side of the sealing component (6) near the connecting pipe (4), and the second insulation felt (5) and the third insulation felt (7) abut against each other.

2. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: The maximum diameter of a single suction sleeve (3) is smaller than the minimum diameter of the suction port (2).

3. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: The connecting pipe (4) is coaxially set with the air extraction port (2).

4. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: The cross-sections of the extraction sleeve (3), the extraction port (2), and the connecting sleeve are all circular.

5. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: There are seven suction sleeves (3), and the geometric center axis of the seven suction sleeves (3) is parallel to the geometric center axis of the suction port (2).

6. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: The sealing component (6) is detachably connected to the end of the connecting pipe (4) away from the exhaust port (2), so that the heat field (10), exhaust sleeve (3), exhaust port (2), connecting pipe (4) and vacuum pump group (9) in the furnace body (11) are connected in sequence to form a relatively closed space.

7. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: The air extraction sleeve (3) and the snap-fit ​​component (12) form an integral molded structure.

8. The exhaust port structure for a high-temperature purification furnace according to claim 1, characterized in that: The sealing component (6) is a flange.

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