Induction coil heating structure of vacuum furnace and vacuum furnace

Abstract

The utility model discloses a kind of induction coil heating structure and vacuum furnace of vacuum furnace, including at least one set of induction coil group, it is constituted by at least 1 induction coil and is located in the vacuum cavity of furnace body, cup body is placed in the induction coil, the getter in the cup body can be heated to activation temperature by the induction coil;Copper pipe assembly, the induction coil is installed on the copper pipe assembly;Quenching machine, with the copper pipe assembly is connected.The utility model has the beneficial effects that: using induction coil heating can rapidly heat, the temperature of cup bottom reaches the activation temperature of getter, in shorter time, getter in cup bottom is activated, this kind of getter activation mode can reduce energy consumption and production cost.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum welding of thermos cups, and in particular to an induction coil heating structure and a vacuum furnace. Background Technology

[0002] Currently, the thermos cup industry generally uses a double-chamber vacuum furnace for vacuuming. The glass substrate is made of brazing material, which is expensive. The melting and sealing temperature needs to reach above 500 degrees Celsius. This vacuuming process starts from low vacuuming at room temperature, then moves to high vacuuming at high temperature, and then cools down. This process requires a lot of energy and has a long processing cycle, resulting in relatively low production efficiency and energy saving. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide an induction coil heating structure for a vacuum furnace. The vacuum furnace uses infrared heating tubes for rapid heating and utilizes the induction coil to instantly heat and activate the getter, thereby reducing energy consumption and shortening the production cycle.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution: an induction coil heating structure for a vacuum furnace, comprising at least one set of induction coils, which consists of at least one induction coil and is disposed in the vacuum cavity of the furnace body, a cup being placed inside the induction coil, and the getter inside the cup being heated to the activation temperature by the induction coil; a copper tube assembly, on which the induction coil is mounted; and a quenching machine connected to the copper tube assembly.

[0005] Preferably, the getter is located at the bottom of the cup body and within the gap layer of the cup body.

[0006] Preferably, the vacuum pores of the cup body are sealed by brazing after the getter is activated by heating.

[0007] Preferably, it also includes a quenching machine base and a cooling system; the quenching machine base is installed on the rear facade of the furnace body, the quenching machine is placed on the quenching machine base, and the cooling system provides cooling water to the induction coil assembly through the copper pipe assembly.

[0008] Preferably, the portion of the copper tube assembly located inside the vacuum chamber is connected to the induction coil, and the portion located outside the vacuum chamber is connected to the quenching machine.

[0009] Preferably, each furnace body is provided with 4 sets of induction coil heating structures, each set of induction coil heating structures is provided with 1 set of quenching machine and 5 sets of induction coils, wherein each time the quenching machine works, only one set of induction coils is turned on, and each set of induction coils is provided with at least 2 induction coils connected in series.

[0010] A vacuum furnace includes the aforementioned induction coil heating structure, and further includes a vacuum pump assembly and at least one set of infrared heating tube assemblies; the vacuum pump assembly is connected to the furnace body and is used for evacuating the vacuum chamber, and the infrared heating tube assemblies include infrared heating tubes disposed on the inner side wall of the furnace body and are used for heating the vacuum chamber.

[0011] Preferably, it also includes a furnace door opening and closing mechanism; the top surface of the furnace body is provided with a furnace opening, and the furnace door opening and closing mechanism is used to open and close the furnace opening, so that the cup on the induction coil assembly can be picked up and put down through the furnace opening.

[0012] Preferably, the furnace door opening and closing mechanism includes a furnace door covering the furnace opening and a pressure cap pressing on the cup body.

[0013] The beneficial effects of this invention are: the heating by the induction coil can rapidly raise the temperature of the bottom of the cup to the activation temperature of the getter, and activate the getter at the bottom of the cup in a short time. This method of activating the getter can reduce energy consumption and production costs. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the induction coil heating structure described in this utility model; Figure 2 This is a schematic diagram of the structure of the furnace body described in this utility model; Figure 3 This is a schematic diagram of the structure of the infrared heating tube assembly described in this utility model; Figure 4 This is a schematic diagram of the furnace door opening and closing mechanism described in this utility model; Figure 5 This is a schematic diagram of the overall structure of the dual-chamber vacuum furnace described in this utility model. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. The described embodiments are some, but not all, of the embodiments of this utility model. Example 1

[0016] Reference Figure 1 As illustrated, to achieve induction coil heating in a vacuum furnace, this embodiment proposes an induction coil heating structure, including at least one induction coil assembly 1, a copper tube assembly 2, and a quenching machine 3. The induction coil assembly 1 is used to heat the cup body M, thereby heating the getter inside the cup body M to the activation temperature. The quenching machine 3 is used to generate a changing magnetic field that is transmitted to the induction coil assembly 1. The copper tube assembly 2 is used to connect the induction coil assembly 1 and the quenching machine 3.

[0017] Specifically, at least one set of induction coil assembly 1, consisting of at least one induction coil 11, is disposed within the vacuum chamber S of the furnace body 4. The cup body M is placed inside the induction coil 11. The induction coil 11 heats the getter inside the cup body M to the activation temperature. The induction coil 11 is mounted on the copper tube assembly 2, and the quenching machine 3 is connected to the copper tube assembly 2. The getter is located at the bottom of the cup body M and within the gap layer of the cup body M.

[0018] The furnace body 4 provides a vacuum and heating environment for the cup body M. The cup body M is placed inside the induction coil 11 and heated in a vacuum environment. After being activated by heating with a getter, the vacuum hole of the cup body M is sealed by brazing, that is, the glass substrate can be used as the brazing material, and the vacuum hole of the cup body M is welded and sealed after heating.

[0019] The cup body M is placed inside the coil of the induction coil 11 of the induction coil group 1. The quenching machine 3 generates an alternating magnetic field, thereby generating an induced current of the same frequency in the cup body M. The induced current is unevenly distributed in the cup body M, strong on the surface and very weak in the interior, approaching 0 at the center, which rapidly heats the surface of the cup body M, thus achieving induction heating of the cup body M.

[0020] It should be noted that the induction coil assembly 1, located within the vacuum chamber S, induction heats the cup body M to raise the getter to its activation temperature. The getter is typically fixed at the bottom of the cup body M and located in the gap layer of the cup body M. The induction coil assembly 1 rapidly activates the getter through heating, enabling it to function. Conventional vacuum equipment processing methods require heating to a certain high temperature, which takes a considerable amount of time; while induction heating rapidly heats the bottom M of the cup to the getter activation temperature. At this temperature, the getter is quickly activated, reducing energy consumption and shortening the processing time.

[0021] Furthermore, in one embodiment, the induction coil heating structure also includes a quenching machine base 5 and a cooling system 6, used for mounting the quenching machine 3 and cooling the induction coil assembly 1, respectively. The quenching machine base 5 is mounted on the rear facade of the furnace body 4, and the quenching machine 3 is placed on the quenching machine base 5. The cooling system 6 also includes a cooling water inlet 61 and an outlet 62, and provides cooling water to the induction coil assembly 1 through a copper pipe assembly 2. The portion of the copper pipe assembly 2 located inside the vacuum chamber S is connected to the induction coil 11, and the portion located outside the vacuum chamber S is connected to the quenching machine 3.

[0022] Furthermore, regarding the configuration of the number of induction coil groups 1 and furnace bodies 4, in one embodiment, the furnace bodies 4 consist of two sets forming a double-chamber vacuum furnace. Each furnace body 4 contains four sets of induction coil heating structures, and each set contains one quenching machine 3 and five sets of induction coil groups 1. Each operation of the quenching machine 3 corresponds to only one set of induction coil groups 1 being activated. Each set of induction coil groups 1 contains at least two induction coils 11 connected in series. Therefore, in this embodiment, each set of induction coil groups 1 contains four induction coils 11 connected in series, corresponding to four cup positions: cup 1, cup 2, cup 3, and cup 4. It is easy to understand that the number of furnace bodies 4, induction coil groups 1, and induction coils 11 can be set according to actual needs. The number of sets of induction coil groups 1, and the number of induction coils 11 connected in series in each set, depends on the power of the quenching machine 3. Example 2

[0023] Reference Figures 2-5 As illustrated, this embodiment proposes a vacuum furnace, including the induction coil heating structure described in the above embodiment, and further including a vacuum pump assembly 7, at least one set of infrared heating tubes 8, and a furnace door opening and closing mechanism 9. The vacuum pump assembly 7 is connected to the furnace body 4 and is used for evacuating the vacuum chamber S. The infrared heating tube assembly 8 includes infrared heating tubes 81 disposed on the inner side wall of the furnace body 4 and is used for heating the vacuum chamber S.

[0024] Specifically, the furnace body 4 consists of two sets forming a double-chamber vacuum furnace, with the vacuum pump group 7 positioned between the two furnace bodies 4. The furnace body 4 includes a fixed-end furnace door 42, a transition plate group 43, a heat insulation layer 44, and a stainless steel quartz wool layer 45. The fixed-end furnace door 42 and the transition plate group 43 are respectively located on two opposite sides of the furnace body 4. The fixed-end furnace door 42, the transition plate group 43, and the upper, lower, and side walls of the vacuum chamber S are all provided with heat insulation layers 44.

[0025] In detail, the furnace body 4 has four furnace legs 46 installed at the bottom to support it; a fixed furnace door 42 is provided at the outer end of the furnace body 4; a transition plate group 43 is provided between the furnace body 4 and the vacuum pump group 7; the upper wall, lower wall and side walls of the inner cavity of the furnace body 4 are provided with heat insulation layer 44 to keep the heat in place and prevent heat conduction and diffusion; the four walls of the cup-placement opening at the top of the furnace body 4 are provided with stainless steel quartz wool layer 45; cooling water pipes 47 are installed on the top two sides and the bottom two sides of the rear end of the furnace body 4.

[0026] Furthermore, each furnace body 4 contains twelve sets of infrared heating tubes 8, with six sets installed on the front side of the furnace body 4, three sets on the left side, and three sets on the right side, and a protective cover 48 covering every three sets; the rear side of the furnace body 4 also has six sets installed, three sets on the left side and three sets on the right side, and a protective cover 48 covering every three sets as well.

[0027] Each infrared heating tube assembly 8 consists of an infrared heating tube 81, a high-temperature resistant ceramic tube 82, a long ceramic sleeve 83, a high-frequency ceramic cap 84, a stainless steel double-ended threaded rod 85, a large nut sleeve 86, a small nut sleeve 87, a Teflon end cap 88, and a connecting component 89, which is composed of a high-temperature resistant OT terminal, a high-temperature resistant conductive wire, and a high-temperature resistant ceramic bead.

[0028] Specifically, a stainless steel double-ended threaded rod 85 is inserted into a high-temperature resistant ceramic tube 82, with a certain length protruding. Then, a ceramic tube O-ring and spacer are inserted into one end of the high-temperature resistant ceramic tube 82, and this end is inserted into the hole of a large nut sleeve 86. On the stainless steel double-ended threaded rod 85 passing through the large nut sleeve 86, screw O-rings and spacers are installed in sequence. A small nut sleeve 87 is used to press the spacer against the screw O-ring, at which point the stainless steel double-ended threaded rod 85 is sealed. A Teflon end cap 88 is installed on the outer end face of the small nut sleeve 87 for insulation. A stainless steel nut is installed on the other end of the Teflon end cap 88 and the high-temperature resistant ceramic tube 82 to lock and fix the stainless steel double-ended threaded rod 85. After the entire unit is installed, it is tightened onto the heating tube mounting port.

[0029] Outside the furnace body 4, a high-temperature resistant ceramic bead and a high-temperature resistant OT terminal are installed at one end of each infrared heating tube 81, and a high-temperature resistant ceramic bead is also installed at the other end. The high-temperature resistant conductive wire is threaded through the high-temperature resistant ceramic bead, and every two infrared heating tubes 81 are connected together through the high-temperature resistant OT terminal. After this work is completed, every two infrared heating tubes 81 form a group and are fixed to the inner wall of the furnace body 4 by heating tube clamps.

[0030] After the above work is completed, connect the high-temperature OT terminal wires, install it on the stainless steel double-ended threaded rod 85 and tighten it with a stainless steel nut, then install the long ceramic sleeve 83 and tighten it with a high-frequency ceramic cap 84. After all the wires outside the furnace body 4 are connected, install the protective cover 48.

[0031] Inside the furnace body 4, a high-temperature OT terminal is installed at one end of each stainless steel double-ended threaded rod 85 and tightened with a stainless steel nut. Then, a long ceramic sleeve 83 is installed and tightened with a high-frequency ceramic cap 84. At this point, the infrared heating tube assembly 8 has completed all the installation work.

[0032] Furthermore, in order to enable the cup M to be placed or removed within the furnace body 4, in one embodiment, the vacuum furnace also includes a furnace door opening and closing mechanism 9; the top surface of the furnace body 4 is provided with a furnace opening 41, and the furnace door opening and closing mechanism 9 is used to open and close the furnace opening 41, so that the cup M on the induction coil assembly 1 can be placed or removed through the furnace opening 41.

[0033] Specifically, the furnace door opening and closing mechanism 9 includes a furnace door 91 that covers the furnace opening 41 and a pressure cap 92 that presses on the cup body M. The furnace body 4 has a furnace opening 41 on its top surface. The furnace door opening and closing mechanism 9 is used to open and close the furnace opening 41, and the cup body M on the induction coil assembly 1 is picked up and put on through the furnace opening 41.

[0034] Specifically, the furnace door opening and closing mechanism 9 also includes a furnace door 91, a pressure cover 92, a rotating frame 93, a pin 94, and a pin seat 95. The furnace door 91 covers the furnace opening 41; the rotating frame 93 is connected to the furnace door 91 and is located in the pin seat 95, which is locked in conjunction with the pin 94.

[0035] The fixed frame 96 is installed at the rear end of the furnace body 4 and is used to support the rotating frame 93. The push cylinder 97 is set at the top of the fixed frame 96 through the hinge seat 98, the guide seat 99 is set at the bottom of the fixed frame 96, the pin cylinder is set on the guide seat 99, and the pin 94 is connected to the pin cylinder. The pin 94 moves in the guide seat 99 under the action of the air source. The rotating frame 93 is installed at the rear end of the top surface of the furnace body 4 through the hinge seat 98. Under the action of the push cylinder 97, it rotates around the rotating shaft through the movable joint 910. When it rotates to a certain angle, the sensor detects that the furnace door 91 is opened to the position. The pin cylinder pushes the pin 94 into the pin seat 95 to prevent safety hazards when taking out or putting in the cup M in case of insufficient air source or malfunction. The other end of the rotating frame 93 is connected to the furnace door 91. The bottom of the furnace door 91 is equipped with a heat insulation layer 44 to prevent heat dissipation.

[0036] In one embodiment, a laser welding method is proposed to weld the cup M. Specifically, a pressure cap 92 and glass are provided on the furnace door 91, allowing the laser head to weld the cup M inside the furnace body 4 through the glass. The pressure cap 92 has a through-hole in the center, which is sealed by the glass. While pressing down on the cup M, the laser head can still weld the cup M inside the furnace body 4 through the glass.

[0037] The working process of the vacuum furnace in this embodiment is as follows: Both furnace bodies 4 operate simultaneously, with the same working principle. Taking the left furnace body 4 as an example, the specific implementation steps are as follows: S1: Before vacuuming the cup, the furnace body 4 is filled with gas. It should be noted that when operating this equipment, if the furnace body 4 is not heated before opening the furnace door 91, the corresponding vacuum pump and valve can be turned off to directly fill with gas; if the furnace body 4 has been heated and the temperature is higher than 150°C, the corresponding vacuum pump and valve must be turned off and the furnace temperature must be lowered to about 150°C before filling with gas.

[0038] S2: After the furnace body 4 is fully inflated, the opening and closing mechanisms of the four sets of furnace doors 91 operate simultaneously. The movable joint 910 of the cylinder 97, under the action of the air source, pushes the rotating shaft to drive the hinge frame and the furnace door 91 to rotate around the hinge seat 98. When the sensor detects that the furnace door 91 is fully open, a pair of pin cylinders in the opening and closing mechanism of each set of furnace doors 91 push the pin 94 into the pin seat 95 to lock the furnace door 91, preventing the furnace door 91 from closing due to insufficient air source or malfunction when taking out or putting in cups, thus preventing personal injury.

[0039] S3: The furnace door 91 is fully open, and manual or robotic arms begin to remove and place cups. After the cups are placed, a pair of pin cylinders in the opening and closing mechanism of each furnace door 91 pulls the pin 94 out of the pin seat 95. The furnace door 91 rotates around the hinge seat 98 under the action of the movable joint 910 and slowly closes. When the sensor detects that the furnace door 91 is closed, the relevant vacuum pumps and valves in the vacuum pump group 7 are opened, and low-level pumping begins. When the vacuum level reaches 4×10⁻⁶, the pumping continues until the vacuum level reaches 100°C. 2 When the vacuum level reaches 1 × 10⁻⁶ Pa, the infrared heating tube assembly 8 is turned on to start heating; when the vacuum level reaches 1 × 10⁻⁶ Pa, heating is initiated. -1 When the vacuum level reaches 3 × 10⁻⁶ Pa, high-pressure pumping operation begins; when the vacuum level reaches 3 × 10⁻⁶ Pa, the high-pressure pumping operation begins. -3 When the temperature reaches 300 degrees Celsius, start heat preservation for 3 minutes.

[0040] S4: During the heat preservation process of furnace body 4, the welding position is moved to the first group of induction coil heating structure, and the No. 1 cup of the first group of induction coils is photographed in preparation for welding. When the furnace body has been kept warm for 3 minutes, the first set of induction coil heating structure turns on, while the other four sets of induction coils turn off, and the cups No. 1, No. 2, No. 3 and No. 4 of the first set of induction coils are heated simultaneously. When cups 1-4 are welded, the first set of induction coils in the first group of induction coil heating structures is cut off, while the second set of induction coils is turned on. Only one set of induction coils 1 can be turned on at a time. The cycle of turning on and off each set of induction coils 1 is repeated until cups 1, 2, 3, and 4 in each set of induction coils 1 are welded. The above actions are repeated for the second, third, and fourth sets of induction coil heating structures until all cups in the furnace body 4 are welded.

[0041] S5: After all the cups inside the furnace body 4 are welded, the relevant vacuum pumps and valves in the vacuum pump group 7 are closed, and cooling begins; when the furnace temperature drops to about 150°C, gas filling begins; under the action of the gas source, the movable joint 910 pushes the rotating shaft to drive the hinge frame and the furnace door 91 to rotate around the hinge seat 98; when the sensor detects that the furnace door 91 is open in place, a pair of pin cylinders in the opening and closing mechanism of each furnace door 91 push the pin 94 into the pin seat 95, locking the furnace door 91, and the cups are collected, thus completing the production of one batch of cups.

[0042] It should be noted that this embodiment aims to propose an implementation of the induction coil heating structure of a vacuum furnace, focusing on the spatial structure and operational connection between the heating components (induction coil assembly 1, copper tube assembly 2, quenching machine 3) and the cup body M inside the vacuum furnace, and on the implementation of induction coil heating application, rather than the implementation of the heating principle itself, i.e., the structural component connection. The functional implementation principle and some of the functions of the vacuum furnace itself are already well-established technologies. For example, how the induction coil 11, quenching machine 3, and copper tube assembly 2 generate an alternating magnetic field to heat the cup body M at the principle level... For example, how the vacuum pump group 7 evacuates the furnace body 4, how the infrared heating tube group 8 heats the furnace body 4 with infrared radiation, how the brazing specifically seals the vacuum hole of the cup body M, and the working principle of the getter after it is heated to the activation temperature and activated, etc. The above are just examples of technical issues. Of course, there should also be other technical issues that are the same or similar to the above, which are all existing and very mature technologies. The technical features corresponding to the technical problems to be solved are also non-essential technical features of this application. When judging whether this application is fully disclosed, it should not deviate from the core meaning. Therefore, it will not be described in detail here.

[0043] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit the scope of protection of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description and ideas. It is neither necessary nor possible to exhaustively describe all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the technical solution of this utility model should be covered within the scope of protection of the claims of this utility model.

Claims

1. An induction coil heating structure of a vacuum furnace, characterized by: include, At least one set of induction coils (1), which consists of at least one induction coil (11) and is located in the vacuum chamber (S) of the furnace body (4), and the cup body (M) is placed in the induction coil (11). The induction coil (11) can heat the getter in the cup body (M) to the activation temperature. A copper tube assembly (2), on which the induction coil (11) is mounted; The quenching machine (3) is connected to the copper tube assembly (2).

2. The induction coil heating structure of the vacuum furnace according to claim 1, characterized in that: The getter is located at the bottom of the cup (M) and within the gap layer of the cup (M).

3. The induction coil heating structure of a vacuum furnace according to claim 1, characterized by: The vacuum pore of the cup body (M) is sealed by brazing after being activated by heating the getter.

4. The induction coil heating structure of a vacuum furnace according to claim 1, characterized by: It also includes a quenching base (5) and a cooling system (6); The quenching machine base (5) is installed on the rear side of the furnace body (4), the quenching machine (3) is placed on the quenching machine base (5), and the cooling system (6) provides cooling water to the induction coil group (1) through the copper pipe assembly (2).

5. The induction coil heating structure of the vacuum furnace according to claim 1, characterized in that: The portion of the copper tube assembly (2) located inside the vacuum chamber (S) is connected to the induction coil (11), and the portion located outside the vacuum chamber (S) is connected to the quenching machine (3).

6. The induction coil heating structure of a vacuum furnace according to claim 1, characterized by: Each furnace body (4) is provided with 4 sets of induction coil heating structures. Each set of induction coil heating structures is provided with 1 set of quenching machine (3) and 5 sets of induction coil groups (1). Each time the quenching machine (3) works, only one set of induction coil groups (1) is turned on. Each set of induction coil groups (1) is provided with at least 2 induction coils (11) connected in series.

7. A vacuum furnace characterized by: The system includes the induction coil heating structure as described in any one of claims 1-6, and further includes a vacuum pump assembly (7) and at least one set of infrared heating tubes (8). The vacuum pump assembly (7) is connected to the furnace body (4) and is used to evacuate the vacuum chamber (S). The infrared heating tube assembly (8) includes an infrared heating tube (81) disposed on the inner side wall of the furnace body (4) and is used to heat the vacuum chamber (S).

8. The vacuum furnace of claim 7, wherein: It also includes a furnace door opening and closing mechanism (9); The top surface of the furnace body (4) is provided with a furnace opening (41), and the furnace door opening and closing mechanism (9) is used to open and close the furnace opening (41). The cup (M) on the induction coil group (1) is picked up and put down by the furnace opening (41).

9. The vacuum furnace of claim 8, wherein: The furnace door opening and closing mechanism (9) includes a furnace door (91) covering the furnace opening (41) and a pressure cap (92) pressing on the cup body (M).

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