A measuring mechanism based on white light triangulation principle

Abstract

The utility model relates to a kind of measurement mechanism based on white light triangle principle, including connecting backplate, illumination light path mechanism and camera imaging mechanism;Illumination light path mechanism is fixed on connecting backplate, for fixed light source, light source generates illumination light path;Camera imaging mechanism includes mounting shell, and the one end of mounting shell is connected with multiple different mesh objectives;The inside of mounting shell is connected with barrel lens, and barrel lens is coaxially arranged with one of objective and forms receiving light path;The other end of mounting shell is connected with camera by adjusting assembly, and adjusting assembly is used to adjust the position of camera;Camera is located on receiving light path and is used for shooting imaging, and illumination light path and receiving light path are perpendicular to each other and are parallel with connecting backplate.The connecting backplate provides working surface for illumination light path mechanism and camera imaging mechanism, and object is located on the right angle intersection of receiving light path and receiving light path.The adjustment and installation difficulty of white light triangle scheme are reduced.

Description

Technical Field

[0001] This utility model relates to the field of optical measurement technology, and more specifically, to a measurement mechanism based on the white light triangulation principle. Background Technology

[0002] Bump bonding is a commonly used interconnect technology in 3D packaging. This technology uses conductive bump junctions to achieve electrical interconnection between chips and between chips and substrates. If the bump height is inconsistent or too high or too low, it will lead to problems such as poor contact, short circuits, and open circuits in the chip package, resulting in a serious decrease in chip yield. Therefore, it is necessary to measure the height online during the bump fabrication process.

[0003] One method for measuring the height of a convex point is the white light triangulation scheme, which consists of an illumination optical path module and an imaging optical path module. In this scheme, in addition to the optical elements in the imaging optical path module being in place, it is also necessary to ensure that the illumination optical path module and the imaging optical path module are simultaneously focused on the working plane and are symmetrical with respect to the normal plane of the working plane. This requires a large number of adjustment dimensions and is quite difficult to adjust.

[0004] The difficulty in installing and adjusting the white light triangular scheme mainly stems from the fact that the imaging and illumination light paths are not perpendicular to the working surface, which makes it easy for the adjustment dimensions of each light path to be coupled. The adjustment needs to be iterated repeatedly. In addition, the illumination light path and the imaging light path have a relatively strict symmetry requirement under the premise of being coplanar, and the actual included angle needs to be determined according to the angle of the working plane. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a measurement mechanism based on the principle of white light triangulation, which reduces the difficulty of adjustment and installation by decoupling the adjustment of each dimension and reducing the volume of the adjustment components.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A measurement mechanism based on the white light triangulation principle is characterized by comprising a connecting backplate, an illumination optical path mechanism, and a camera imaging mechanism. The lighting optical path mechanism is fixed on the connecting back plate and is used to fix the light source, which generates the lighting optical path; The camera imaging mechanism includes a mounting housing, one end of which is connected to an objective lens switcher, and multiple objective lenses of different eye counts are connected to the objective lens switcher; a tube lens is connected inside the mounting housing, and the tube lens and one of the objective lenses are arranged coaxially to form a receiving optical path; The other end of the mounting housing is connected to a camera via an adjustment component, which is used to adjust the position of the camera. The camera is located in the receiving optical path and is used to capture images. The illumination optical path is perpendicular to the receiving optical path and is parallel to the connecting back plate.

[0007] The beneficial effects of this utility model are as follows: The connecting back plate provides a working surface for the illumination optical path mechanism and the camera imaging mechanism, ensuring that the illumination optical path mechanism and the camera imaging mechanism are coplanar and parallel to the working surface. The illumination optical path formed by the light source, the receiving optical path formed by the objective lens and the tube lens, and the connecting back plate form a right-angled triangle structure. The axes of the receiving optical path and the receiving optical path itself serve as the two right-angled sides of the triangle, with the connecting back plate as the hypotenuse. The object is located at the right-angled intersection of the receiving optical path and the receiving optical path. This reduces the difficulty of adjusting and installing the white light triangle scheme. The position of the camera can be adjusted by adjusting the components to ensure that the camera is always located on the receiving optical path.

[0008] Based on the above technical solution, the present invention can be further improved as follows.

[0009] Furthermore, the lighting optical path mechanism includes a light source base plate, a first sliding plate, and a side-shifting set screw, with the light source located on the first sliding plate; The light source base plate is fixed to the connecting back plate, and the light source base plate is provided with a first sliding groove, which is perpendicular to the lighting light path and parallel to the connecting back plate; the first sliding plate is slidably connected in the first sliding groove, and the bottom of the first sliding plate is provided with a protruding top block, and the middle of the first sliding groove is also provided with a cavity for the top block to move; the side of the light source base plate is provided with a threaded hole that penetrates into the cavity, and the lateral displacement set screw is threadedly connected to the threaded hole and abuts against the top block.

[0010] The beneficial effect of adopting the above-mentioned further solution is that the light source can be adjusted in the X direction perpendicular to its own axis through the sliding connection between the first slide plate and the light source base plate.

[0011] Furthermore, the side-shifting set screws are provided in two sets, with the two sets of side-shifting set screws located on both sides of the top block, and threaded holes penetrating into the cavity are provided on both sides of the light source base plate.

[0012] The beneficial effect of adopting the above-mentioned further solution is that the two sets of set screws abut against the top block of the first slide, realizing X-direction adjustment while clamping and fixing the position of the first slide.

[0013] Furthermore, the lighting optical path mechanism also includes a second sliding plate, an adjusting screw, and a light source bracket; the light source is fixed to the second sliding plate via the light source bracket; The first slide plate has a boss, and the second slide plate has a second groove, which is perpendicular to the first groove. The second slide plate is slidably connected to the first slide plate, and the boss is embedded in the second groove. The adjusting screw is arranged along the length of the second groove and is threadedly connected to the boss. The end of the adjusting screw is rotatably connected to the second slide plate.

[0014] The beneficial effect of adopting the above-mentioned further solution is that the light source can be adjusted along its own axis in the Y direction through the sliding connection between the second slide plate and the first slide plate.

[0015] Furthermore, the adjusting screw is provided with two smooth sections and one threaded section, the threaded section being disposed between the two smooth sections and threadedly connected to the boss; A first connecting seat is fixed at the opening of the second slide groove, and a second connecting seat is fixed inside the second slide groove. The boss is located between the first connecting seat and the second connecting seat, and the first connecting seat and the second connecting seat are rotatably connected to two smooth sections respectively.

[0016] The advantage of adopting the above-mentioned further solution is that the two sets of smooth sections ensure the rotational connection between the adjusting screw and the second slide plate, so that the adjusting screw can drive the second slide plate to move along the length direction of the second slide groove.

[0017] Furthermore, on one side of the light source base plate, which is higher than the bottom surface of the first slide plate, a first pressure block is connected to the other side of the light source base plate, and the first pressure block is in contact with the side of the first slide plate. The second slide plate is provided with a protruding guide block at one end away from the first connecting seat. The first slide plate is located on one side of the second slide plate, which is higher than the bottom surface of the first connecting seat and the guide block. A second pressure block is connected to the other side of the first slide plate. The second pressure block is in contact with the side of the first connecting seat and the guide block.

[0018] The beneficial effect of adopting the above-mentioned further solution is that the first pressing block limits and guides the position of the first sliding plate, and the second pressing block limits and guides the position of the second sliding plate.

[0019] Furthermore, a semi-transparent and semi-reflective mirror is fixed inside the mounting housing to divide the image of the receiving optical path into two groups; a camera is connected to the end and one side of the mounting housing respectively, and the two groups of cameras capture the two groups of images respectively.

[0020] The beneficial effect of adopting the above-mentioned further solution is that the system needs to capture images at a frame rate of 6000, while the frame rate of a single camera is only 3000. It requires two cameras to shoot at intervals. The semi-transparent and semi-reflective mirror means that half of it can pass through to one set of cameras, while the other half cannot pass through and is reflected to another set of cameras, thereby enabling two sets of cameras to capture images.

[0021] Furthermore, the adjustment assembly includes a camera mounting plate and a camera mounting cylinder. The mounting housing has a through hole corresponding to the semi-transparent mirror. The camera mounting plate is fixed at the through hole. The lower end of the camera mounting cylinder is connected to the camera mounting plate, and its upper end is connected to the camera.

[0022] The advantage of adopting the above-mentioned further solution is that it achieves a stable connection between the camera and the mounting housing, and ensures that the camera and the semi-transparent mirror correspond to each other.

[0023] Furthermore, a camera tall cylinder is connected to the camera mounting cylinder via an internal thread, the camera is connected to the camera tall cylinder, and an actuating ring is fixed on the outer side wall of the camera tall cylinder for adjusting the distance between the camera and the semi-transparent mirror.

[0024] The advantage of adopting the above-mentioned further solution is that it allows for adjustment of the distance between the camera and the semi-transparent mirror, thereby ensuring the clarity of the image captured by the camera.

[0025] Furthermore, an adjustment ring is also clamped on the outer side of the camera mounting cylinder, and an adjustment block protrudes radially from one side of the adjustment ring; An adjustment seat is fixed on the mounting housing, and a micrometer head is connected to the adjustment seat. The end of the micrometer head abuts against the adjustment block.

[0026] The advantage of adopting the above-mentioned further solution is that after fine-tuning the camera angle by using a micrometer head to push the adjustment ring, the screw is tightened. Attached Figure Description

[0027] Figure 1 The front view of the measurement mechanism based on the white light triangle principle provided by this utility model; Figure 2 An isometric view of the measurement mechanism based on the white light triangulation principle provided by this utility model; Figure 3 This is a schematic diagram of the lighting optical path mechanism provided by this utility model; Figure 4 This is a schematic diagram of the structure of the second sliding plate provided by this utility model; Figure 5 This is a schematic diagram illustrating the adjustment of the first sliding plate provided by this utility model; Figure 6 This is a schematic diagram illustrating the adjustment of the second sliding plate provided by this utility model; Figure 7 This is a structural schematic diagram of the telescope mounting component provided by this utility model; Figure 8 This is a schematic diagram of the structure of the adjustment component provided by this utility model; Figure 9 This is a cross-sectional schematic diagram of the adjustment component provided by this utility model.

[0028] The attached diagram lists the components represented by each number as follows: 1. Connecting back plate; 21. Light source; 22. Light source bracket; 23. Light source base plate; 24. First sliding plate; 241. Top block; 242. Boss; 25. Second sliding plate; 251. Second slide groove; 252. First connecting seat; 253. Second connecting seat; 254. Guide block; 26. Adjusting screw; 27. Set screw; 28. First pressure block; 29. ​​Second pressure block; 31. Mounting housing; 32. Objective lens switcher; 33. Objective lens; 34. Tube lens; 341. Tube lens mounting component; 342. Locking screw; 343. Slot; 344. Adjusting screw; 35. Semi-transparent mirror; 36. Camera; 361. Camera mounting plate; 362. Camera mounting tube; 363. Adjusting ring; 364. Adjusting seat; 365. Adjusting block; 366. Toggle ring; 367. Camera telescope; 368. Arc groove; 37. Microscope head. Detailed Implementation

[0029] The principles and features of this utility model are described below. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0030] according to Figures 1 to 9 As shown, this utility model provides a measurement mechanism based on the white light triangulation principle, characterized in that it includes a connecting back plate 1, an illumination optical path mechanism, and a camera imaging mechanism. The lighting optical path mechanism is fixed on the connecting back plate 1 and is used to fix the light source 21, which generates the lighting optical path. The camera imaging mechanism includes a mounting housing 31, one end of which is connected to an objective lens switcher 32, and multiple objective lenses 33 with different eye counts are connected to the objective lens switcher 32; a tube lens 34 is connected inside the mounting housing 31, and the tube lens 34 and one of the objective lenses 33 are arranged coaxially to form a receiving optical path. The other end of the mounting housing 31 is connected to a camera 36 via an adjustment component, which is used to adjust the position of the camera 36. The camera 36 is located on the receiving optical path and is used to capture images. The illumination optical path is perpendicular to the receiving optical path and is parallel to the connecting back plate 1.

[0031] In this embodiment, the connecting backplate provides a working surface for the illumination optical path mechanism and the camera imaging mechanism, ensuring that the illumination optical path mechanism and the camera imaging mechanism are coplanar and parallel to the working surface. A right-angled triangle structure is formed by the illumination optical path formed by the light source 21, the receiving optical path formed by the objective lens 32 and the tube lens 34, and the connecting backplate 1. The axes of the receiving optical path and the receiving optical path itself serve as the two right-angled sides of the triangle, with the connecting backplate 1 serving as the hypotenuse. The object is located at the right-angled intersection of the receiving optical path and the receiving optical path. This reduces the difficulty of adjusting and installing the white light triangle scheme. The position of the camera 36 can be adjusted using the adjustment components to ensure that the camera 36 is always located on the receiving optical path.

[0032] Based on the above technical solution, the present invention can be further improved as follows.

[0033] Preferably, in an embodiment, the lighting optical path mechanism includes a light source base plate 23, a first sliding plate 24, and a side-shifting set screw 27, with the light source 21 located on the first sliding plate 24.

[0034] The light source base plate 23 is fixed to the connecting back plate 1, and a first sliding groove is formed on the light source base plate 23. The first sliding groove is perpendicular to the illumination light path and parallel to the connecting back plate 1. The first sliding plate 24 is slidably connected in the first sliding groove, and a protruding top block 241 is provided at the bottom of the first sliding plate 24. A cavity for displacement of the top block 241 is also formed in the middle of the first sliding groove. A threaded hole penetrating the cavity is formed on the side of the light source base plate 23. The lateral displacement screw 27 is threadedly connected to the threaded hole and abuts against the top block 241. Through the sliding connection between the first sliding plate 24 and the light source base plate 23, the light source 21 can be adjusted in the X direction perpendicular to its own axis. Specifically, according to Figure 3 and Figure 5 As shown, the first slide plate 24 is guided and limited by the first slide groove. The light source 21, camera 36, ​​and connecting back plate 1 form a right-angled triangle structure. The axis of the light source 21 and the axis of the camera 36 serve as the two right-angled sides of the triangle, and the connecting back plate 1 serves as the hypotenuse. The extension direction of the first slide groove is perpendicular to the axis of the light source 21, allowing the first slide plate 24 to slide along the first slide groove. The light source 21 is fully connected to the first slide plate 24, thus allowing the light source 21 to be adjusted in the X direction. In addition, to accommodate the effective movement of the first slide plate 24 on the light source base plate 23, the first slide plate 24 and the light source base plate 23 are connected by an oblong hole. The length direction of the oblong hole is consistent with the displacement direction of the first slide plate 24. When adjusted to a suitable position, the bolt in the oblong hole can be tightened to fix the first slide plate 24 and the light source base plate 23 relatively.

[0035] Preferably, in this embodiment, two sets of lateral shifting screws 27 are provided, with the two sets of lateral shifting screws 27 located on both sides of the top block 241, and threaded holes penetrating into the cavity are provided on both sides of the light source base plate 23. The two sets of screws 27 abut against the top block 241 of the first sliding plate 24, realizing X-axis adjustment while clamping and fixing the position of the first sliding plate 24. Specifically, according to Figure 5 As shown, the top block 241 is embedded in the first slide groove. The distance between the first slide grooves is the displacement of the first slide plate 24. Two sets of top screws 27 are located on both sides of the top block 241. When adjustment is required, one of the top screws 27 needs to be pushed out a certain distance first, and then the position of the first slide plate 24 is adjusted by the other top screw 27 until the appropriate position is reached. It is necessary to ensure that both top screws 27 are against the top block 241 to prevent the first slide plate 24 from sliding freely between the two top screws 27.

[0036] Preferably, in the embodiment, the lighting optical path mechanism further includes a second sliding plate 25, an adjusting screw 26, and a light source bracket 22; the light source 21 is fixed on the second sliding plate 25 by the light source bracket 22.

[0037] The first sliding plate 24 has a boss 242, and the second sliding plate 25 has a second groove 251, which is perpendicular to the first groove. The second sliding plate 25 is slidably connected to the first sliding plate 24, and the boss 242 is embedded in the second groove 251. The adjusting screw 26 is arranged along the length of the second groove 251 and is threadedly connected to the boss 242. The end of the adjusting screw 26 is rotatably connected to the second sliding plate 25. Through the sliding connection between the second sliding plate 25 and the first sliding plate 24, the light source 21 can be adjusted along its own axial direction in the Y direction.

[0038] Specifically, according to Figure 3 , Figure 4 as well as Figure 6As shown, the sliding connection between the first slide plate 24 and the light source base plate 23, and the sliding connection between the second slide plate 25 and the first slide plate 24, are independent of each other and do not affect each other. The second slide plate 25 has a second groove 251, into which the boss 242 on the first slide plate 24 is embedded, thus forming a sliding stroke between the first slide plate 24 and the second slide plate 25. The adjusting screw 26 is threadedly connected to the boss 242. Since the first groove and the second groove 251 are perpendicular to each other, relative movement between the adjusting screw 26 and the first slide plate 24 can be achieved. The end of the adjusting screw 26 is rotatably connected to the second slide plate 25, thus achieving a traction effect on the second slide plate 25, and consequently, relative displacement between the second slide plate 25 and the first slide plate 24. In addition, in order to accommodate the effective movement of the second slide plate 25 on the first slide plate 24, the second slide plate 25 and the first slide plate 24 are connected by a waist-shaped hole. The length direction of the waist-shaped hole is consistent with the displacement direction of the second slide plate 25. When adjusted to a suitable position, the bolt in the waist-shaped hole can be tightened to fix the second slide plate 25 and the first slide plate 24 relatively.

[0039] Preferably, in the embodiment, the adjusting screw 26 is provided with two smooth sections and one threaded section, the threaded section is disposed between the two smooth sections and is threadedly connected to the boss 242; A first connecting seat 252 is fixed at the opening of the second slide groove 251, and a second connecting seat 253 is fixed inside the second slide groove 251. The boss 242 is located between the first connecting seat 252 and the second connecting seat 253, and the first connecting seat 252 and the second connecting seat 253 are rotatably connected to two smooth sections respectively. The two sets of smooth sections ensure the rotatable connection between the adjusting screw 26 and the second sliding plate 25, allowing the adjusting screw 26 to drive the second sliding plate 25 to move along the length of the second slide groove 251. Specifically, according to... Figure 4 As shown, this is a structural schematic diagram of the second slide plate 25. The first connecting seat 252 and the second connecting seat 253 are part of the second slide plate 25, and the three are integrally formed. The boss 242 is located between the first connecting seat 252 and the second connecting seat 253. The distance between the first connecting seat 252 and the second connecting seat 253 is the displacement of the second slide plate 25. The rotational connection between the first connecting seat 252 and the second connecting seat 253 and the two smooth sections of the adjusting screw 26 can ensure that the displacement of the adjusting screw 26 in the boss 242 can effectively pull the second slide plate 25 to move.

[0040] Preferably, in an embodiment, the light source base plate 23 has one side of the first slide plate 24 that is higher than the bottom surface of the first slide plate 24, and the other side is connected to a first pressure block 28, which is in contact with the side of the first slide plate 24.

[0041] The second slide plate 25 has a protruding guide block 254 at one end away from the first connecting seat 252. The first slide plate 24 is located on one side of the second slide plate 25, higher than the bottom surface of the first connecting seat 252 and the guide block 254. A second pressing block 29 is connected to the other side of the first slide plate 25, and the second pressing block 29 is in close contact with the side surface of the first connecting seat 252 and the guide block 254. The first pressing block 28 limits and guides the position of the first slide plate 24, and the second pressing block 29 limits and guides the position of the second slide plate 25. Specifically, according to... Figure 3 As shown, the first pressure block 28 is located on one side of the first slide plate 24 and is parallel to the displacement direction of the first slide plate 24, effectively restricting the position of the first slide plate 24 without hindering its displacement on the light source base plate 23. The second pressure block 29 is located on one side of the first connecting seat 252 and the guide block 254 and is parallel to the displacement direction of the second slide plate 25, effectively restricting the position of the second slide plate 25 without hindering its displacement on the first slide plate 24. However, there are two second pressure blocks 29, which can limit the amount of displacement of the second slide plate 25.

[0042] Preferably, in this embodiment, a semi-transparent mirror 35 is also fixed inside the mounting housing 31 to divide the image from the receiving optical path into two groups. Cameras 36 are connected to the end and one side of the mounting housing 31, respectively, and the two sets of cameras 36 capture the two sets of images. Since the system requires 6000 frames per second for image capture, and a single camera 36 only has a frame rate of 3000, two cameras 36 need to capture images at intervals. The semi-transparent mirror 35, with one half penetrating to one set of cameras 36 and the other half reflecting to the other set of cameras 36, allows for image capture by both sets of cameras 36.

[0043] Preferably, in this embodiment, the adjustment assembly includes a camera mounting plate 361 and a camera mounting cylinder 362. The mounting housing 31 has a through hole corresponding to the semi-transparent mirror 35. The camera mounting plate 361 is fixed at the through hole. The lower end of the camera mounting cylinder 362 is connected to the camera mounting plate 361, and its upper end is connected to the camera 36. This achieves a stable connection between the camera 36 and the mounting housing 31, and ensures that the camera 36 and the semi-transparent mirror 35 correspond to each other.

[0044] Preferably, in this embodiment, a camera mounting cylinder 367 is internally threaded into the camera mounting cylinder 362, the camera 36 is connected to the camera cylinder 367, and an actuating ring 366 is fixed on the outer wall of the camera cylinder 367 for adjusting the distance between the camera 36 and the semi-transparent mirror 35. Adjusting the distance between the camera 36 and the semi-transparent mirror 35 ensures the clarity of the image captured by the camera 36. Specifically, according to... Figure 8 and Figure 9 As shown, the camera cylinder 367 is located inside the camera mounting cylinder 362, and the two are connected by threads. A toothed actuating ring 366 is mounted on the camera cylinder 367 to facilitate operation. The depth of the camera cylinder 367 within the camera mounting cylinder 362 is adjusted via the threads between the two cylinders. Furthermore, both the camera cylinder 367 and the camera mounting cylinder 362 are hollow structures to ensure that the camera 36 corresponds to the semi-transparent mirror 35.

[0045] Preferably, in this embodiment, an adjustment ring 363 is also held on the outer side of the camera mounting cylinder 362, and an adjustment block 365 protrudes radially from one side of the adjustment ring 363. An adjustment seat 364 is fixed on the mounting housing 31, and a micrometer head 37 is connected to the adjustment seat 364. The end of the micrometer head 37 abuts against the adjustment block 365. After fine-tuning the angle of the camera 36 by pushing the adjustment ring 363 with the micrometer head 37, the screw 342 is tightened. Specifically, according to Figure 8 and Figure 9 As shown, the adjustment mechanism is replaced with an open ring structure. The opening can be adjusted via bolts to control the clamping tightness of the camera mounting cylinder 362. An adjustment block 365 extends radially from one side of the adjustment ring 363. Fine-tuning of the camera 36 is achieved by the contact between the micrometer head 37 and the adjustment block 365. Furthermore, to accommodate the adjustment of the micrometer head 37, multiple arc-shaped grooves 368 are formed on the base of the camera mounting cylinder 362, connecting it to the camera mounting plate 361 via these grooves. After the micrometer head 37 adjusts the camera 36 to the appropriate position, the bolts in the arc-shaped grooves 368 are tightened.

[0046] Preferably, in this embodiment, the tube lens 34 is fixed inside the mounting housing 31 by a tube lens mounting member 341. The tube lens mounting member 341 is an L-shaped plate structure, wherein the horizontal surface is connected to the mounting housing 31 by a locking screw 342, and the vertical surface is used to fix the tube lens 34. The vertical surface should have through holes corresponding to the tube lens 34 and the objective lens 33. Furthermore, according to... Figure 7 As shown, the telescope mounting component 341 has a transverse slot 343 on its horizontal surface. An adjusting screw 344 is also connected to the horizontal surface. The adjusting screw 344 is used to adjust the opening degree of the slot 343, thereby making the telescope mounting component 341 tilted as a whole, ensuring that the telescope 34 transmits the image to the semi-transparent mirror 35. In addition, in order to meet the adjustment conditions of the adjusting screw 344 on the slot 343, there is no threaded connection between the locking screw 342 and the horizontal surface. The locking screw 342 is only threadedly connected to the mounting housing 31.

[0047] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0050] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0051] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0052] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A measurement mechanism based on the white light triangulation principle, characterized in that, Includes a connecting backplate (1), an illumination optical path mechanism, and a camera imaging mechanism; The lighting optical path mechanism is fixed on the connecting back plate (1) and is used to fix the light source (21), which generates the lighting optical path; The camera imaging mechanism includes a mounting housing (31), one end of which is connected to an objective lens switcher (32), and multiple objective lenses (33) with different eye counts are connected to the objective lens switcher (32); a tube lens (34) is connected inside the mounting housing (31), and the tube lens (34) is coaxially arranged with one of the objective lenses (33) to form a receiving optical path. The other end of the mounting housing (31) is connected to a camera (36) via an adjustment component, which is used to adjust the position of the camera (36). The camera (36) is located on the receiving optical path and is used to capture images. The illumination optical path is perpendicular to the receiving optical path and is parallel to the connecting back plate (1).

2. The measurement mechanism based on the white light triangulation principle according to claim 1, characterized in that, The lighting optical path mechanism includes a light source base plate (23), a first sliding plate (24), and a side-shifting set screw (27), wherein the light source (21) is located on the first sliding plate (24); The light source base plate (23) is fixed on the connecting back plate (1), and the light source base plate (23) is provided with a first sliding groove. The first sliding groove is perpendicular to the lighting light path and parallel to the connecting back plate (1). The first sliding plate (24) is slidably connected in the first sliding groove, and the bottom of the first sliding plate (24) is provided with a protruding top block (241). The middle part of the first sliding groove is also provided with a cavity for the top block (241) to move. The side of the light source base plate (23) is provided with a threaded hole that penetrates into the cavity. The side-shifting screw (27) is threadedly connected to the threaded hole and abuts against the top block (241).

3. The measurement mechanism based on the white light triangulation principle according to claim 2, characterized in that, The side-shifting set screw (27) is provided in two sets, and the two sets of side-shifting set screws (27) are located on both sides of the top block (241). The two sides of the light source base plate (23) are provided with threaded holes that penetrate into the cavity.

4. The measurement mechanism based on the white light triangulation principle according to claim 2, characterized in that, The lighting optical path mechanism also includes a second sliding plate (25), an adjusting screw (26), and a light source bracket (22); the light source (21) is fixed on the second sliding plate (25) by the light source bracket (22); The first slide plate (24) is provided with a boss (242), and the second slide plate (25) is provided with a second groove (251), which is perpendicular to the first groove. The second slide plate (25) is slidably connected to the first slide plate (24), and the boss (242) is embedded in the second groove (251). The adjusting screw (26) is set along the length direction of the second groove (251) and is threadedly connected to the boss (242). The end of the adjusting screw (26) is rotatably connected to the second slide plate (25).

5. The measurement mechanism based on the white light triangulation principle according to claim 4, characterized in that, The adjusting screw (26) is provided with two smooth sections and one threaded section. The threaded section is located between the two smooth sections and is threadedly connected to the boss (242). A first connecting seat (252) is fixed at the opening of the second slide groove (251), and a second connecting seat (253) is fixed inside the second slide groove (251). The boss (242) is located between the first connecting seat (252) and the second connecting seat (253), and the first connecting seat (252) and the second connecting seat (253) are rotatably connected to the two smooth sections respectively.

6. The measurement mechanism based on the white light triangulation principle according to claim 5, characterized in that, The light source base plate (23) is located on one side of the first slide plate (24) which is higher than the bottom surface of the first slide plate (24), and the other side is connected to a first pressure block (28). The first pressure block (28) is in contact with the side of the first slide plate (24). The second slide plate (25) is provided with a protruding guide block (254) at one end away from the first connecting seat (252). The first slide plate (24) is located on one side of the second slide plate (25) and is higher than the bottom surface of the first connecting seat (252) and the guide block (254). The other side of the first slide plate (24) is connected to a second pressure block (29). The second pressure block (29) is in contact with the side surface of the first connecting seat (252) and the guide block (254).

7. A measurement mechanism based on the white light triangulation principle according to any one of claims 1 to 6, characterized in that, The mounting housing (31) also has a semi-transparent mirror (35) fixed inside, which is used to divide the image of the receiving optical path into two groups; the end of the mounting housing (31) and one side are respectively connected to a camera (36), and the two cameras (36) respectively capture two groups of images.

8. The measurement mechanism based on the white light triangulation principle according to claim 7, characterized in that, The adjustment assembly includes a camera mounting plate (361) and a camera mounting tube (362). The mounting housing (31) has a through hole corresponding to the semi-transparent mirror (35). The camera mounting plate (361) is fixed at the through hole. The lower end of the camera mounting tube (362) is connected to the camera mounting plate (361), and its upper end is connected to the camera (36).

9. The measurement mechanism based on the white light triangulation principle according to claim 8, characterized in that, The camera mounting cylinder (362) is connected to the camera cylinder (367) by an internal thread. The camera (36) is connected to the camera cylinder (367), and an actuating ring (366) is fixed on the outer wall of the camera cylinder (367) for adjusting the distance between the camera (36) and the semi-transparent mirror (35).

10. A measurement mechanism based on the white light triangulation principle according to claim 9, characterized in that, An adjustment ring (363) is also held on the outside of the camera mounting cylinder (362), and an adjustment block (365) protrudes radially from one side of the adjustment ring (363). An adjustment seat (364) is fixed on the mounting housing (31), and a micrometer head (37) is connected to the adjustment seat (364). The end of the micrometer head (37) abuts against the adjustment block (365).

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