A crystal ingot thickness detection device
Patent Information
- Application Number
- CN202522258440.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-25
- Publication Date
- 2026-09-15
- Estimated Expiration
- 2035-10-25
AI Technical Summary
[0002]在晶锭减薄磨削前，需对其厚度进行精确测量，以确定来料实际厚度，对比设置的去除量得出工艺加工的最优参数，并能有效监控产品加工效果，现有技术中多采用单点测量方式，但由于晶锭本身存在厚度不均、表面不平整等问题，单点测量结果往往不能代表晶锭整体厚度，导致后续减薄过程中出现磨削不到位或者过度磨削损伤晶锭的问题，影响成品率和材料利用率，因此急需进行改进
[0011] By adopting the above technical solution, the practical ingot detection device, through the setting of a rotating disk base for fixing the ingot, enables the thickness sensor to measure the thickness of the ingot at multiple points, thereby improving the accuracy and reliability of ingot thickness measurement.
Smart Images
Figure CN224757801U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a detection device, and more specifically, to a crystal ingot thickness detection device. Background Technology
[0002] Before thinning and grinding an ingot, its thickness needs to be accurately measured to determine the actual thickness of the incoming material. By comparing this with the set removal amount, the optimal parameters for the process can be obtained, and the product processing effect can be effectively monitored. In the existing technology, single-point measurement is often used. However, due to the uneven thickness and surface of the ingot itself, the single-point measurement result often cannot represent the overall thickness of the ingot. This leads to problems such as inadequate grinding or excessive grinding that damages the ingot during the subsequent thinning process, affecting the yield and material utilization rate. Therefore, it is urgent to improve this method. Utility Model Content
[0003] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a crystal ingot thickness detection device that can improve the accuracy and reliability of crystal ingot thickness measurement.
[0004] To achieve the above objectives, this utility model provides the following technical solution: a crystal ingot thickness detection device, comprising a thickness measuring platform, a rotating disk seat on the platform surface, a vacuum suction cup for adsorbing and fixing the crystal ingot fixed at the end of the rotating disk seat, a vent at the center of the bottom of the vacuum suction cup, a connecting hole communicating with the vent through the rotating disk seat, an adjusting bracket on one side of the thickness measuring platform relative to the rotating disk seat, and a thickness sensor for measuring the thickness of the crystal ingot mounted on the adjusting bracket above the vacuum suction cup. The unit is equipped with a rotating mechanism for driving the rotating disk base to rotate. The rotating mechanism includes a drive motor and a rotating shaft mounted on the thickness measuring platform through a bushing. The rotating shaft is hollow and forms a venting cavity. The end of the rotating shaft is fixedly mounted on the bottom of the rotating disk base, and the venting cavity is connected to a connecting hole. The bottom of the rotating shaft extends to the bottom of the thickness measuring platform. The drive motor is mounted on the bottom of the thickness measuring platform to drive the rotating shaft to rotate. A connecting joint for connecting the venting cavity is fixed at the bottom of the rotating shaft, and the connecting joint is connected to a vacuum generator.
[0005] The present invention is further configured such that: the adjusting bracket includes a fixed bracket vertically fixed on the thickness measuring platform, a plurality of threaded holes are arranged vertically on the fixed bracket, a horizontally arranged fixed rod is provided on the fixed bracket, an adjusting bolt is provided on the fixed rod and threadedly connected and fixed to the threaded holes, and the thickness measuring sensor is fixedly installed at the end of the fixed rod.
[0006] The present invention is further configured such that: the rotating disk base includes an upper rotating base and a lower rotating base that are fixed to each other by fixing bolts; the bottom of the upper rotating base is provided with fixing bolts for fixing the vacuum suction cup to the upper rotating base; and the surface of the lower rotating base is provided with a plurality of fixing bolts for fixing and connecting the rotating shaft.
[0007] The present invention is further configured such that: a motor mounting bracket is provided at the bottom of the thickness measuring platform, the drive motor is fixedly mounted on the motor mounting bracket, a first gear is provided on the output shaft of the drive motor, a second gear is provided on the rotating shaft, and the first gear and the second gear are connected by a transmission belt.
[0008] The present invention is further configured such that: the motor mounting bracket includes an upper mounting block fixed to the bottom of the thickness measuring platform and a lower mounting block arranged at intervals below the upper mounting block; connecting rods fixedly connecting the lower mounting blocks are provided at the four corners of the upper mounting block; the drive motor is fixedly installed at the bottom of the lower mounting block; and the output shaft of the drive motor passes through the space between the upper mounting block and the lower mounting block.
[0009] The present invention is further configured such that: a sealing ring is provided between the vacuum suction cup and the rotating disk seat, the upper rotating seat and the lower rotating seat, and the lower rotating seat and the rotating shaft.
[0010] The present invention is further configured such that: an origin sensor for detecting the rotational position of the rotating disk is provided on the thickness measuring platform.
[0011] By adopting the above technical solution, the practical ingot detection device, through the setting of a rotating disk base for fixing the ingot, enables the thickness sensor to measure the thickness of the ingot at multiple points, thereby improving the accuracy and reliability of ingot thickness measurement. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a partial structural cross-sectional view of the present invention.
[0013] 1. Thickness measuring platform; 2. Rotary disc base; 20. Connecting hole; 21. Upper rotating base; 22. Lower rotating base; 3. Vacuum suction cup; 30. Vent; 4. Adjusting bracket; 40. Fixed bracket; 41. Threaded hole; 42. Fixed rod; 43. Adjusting bolt; 5. Thickness sensor; 6. Rotating mechanism; 60. Drive motor; 600. First gear; 61. Bushing; 62. Rotating shaft; 620. Vent chamber; 621. Second gear; 63. Connecting joint; 64. Transmission belt; 7. Motor mounting bracket; 70. Upper mounting block; 71. Lower mounting block; 72. Connecting rod; 8. Origin sensor. Detailed Implementation
[0014] Reference Figures 1 to 2 The embodiments of this utility model will be further described below.
[0015] This utility model discloses a crystal ingot thickness detection device, including a thickness measuring platform 1. A rotating disk base 2 is provided on the platform 1. A vacuum suction cup 3 for adsorbing and fixing the crystal ingot is fixed to the end of the rotating disk base 2. The vacuum suction cup 3 is a high-density vacuum suction cup 3. An air vent 30 is located at the center of the bottom of the vacuum suction cup 3. A connecting hole 20 communicating with the air vent 30 is provided through the rotating disk base 2. An adjusting bracket 4 is provided on one side of the thickness measuring platform 1 relative to the rotating disk base 2. A thickness sensor 5 for measuring the thickness of the crystal ingot is installed on the adjusting bracket 4, located above the vacuum suction cup 3. A device for driving the rotation is provided at the bottom of the thickness measuring platform 1. The rotating mechanism 6 of the rotating disk base 2 includes a drive motor 60 and a rotating shaft 62 mounted on the thickness measuring platform 1 via a bushing 61. The rotating shaft 62 is hollow, forming a venting cavity 620. The end of the rotating shaft 62 is fixedly mounted on the bottom of the rotating disk base 2, and the venting cavity 620 communicates with the connecting hole 20. The bottom of the rotating shaft 62 extends below the thickness measuring platform 1. The drive motor 60 is mounted on the bottom of the thickness measuring platform 1 to drive the rotating shaft 62 to rotate. A connecting joint 63 connecting to the venting cavity 620 is fixed at the bottom of the rotating shaft 62, and the connecting joint 63 is connected to a vacuum generator. When the vacuum suction cup 3 is working, the air source passes through the venting cavity 620 and the connecting hole 20 to connect to the vent 30 of the vacuum suction cup 3, thereby creating a negative pressure by evacuating the vacuum suction cup 3, and using the atmospheric pressure difference to achieve the adsorption and fixation of the crystal ingot. Furthermore, the adjusting bracket 4 includes a fixed bracket 40 vertically fixed on the thickness measuring platform 1. Multiple threaded holes 41 are arranged vertically on the fixed bracket 40, and a horizontally arranged fixed rod 42 is provided on the fixed bracket 40. An adjusting bolt 43 is provided on the fixed rod 42 and threadedly connected to the threaded holes 41. Because multiple threaded holes 41 are arranged vertically on the fixed bracket 40, the fixed rod 42 can be fixed at different heights. The thickness sensor 5 is fixedly installed at the end of the fixed rod 42. The thickness sensor 5 can be adjusted vertically using the adjusting bracket 4, allowing for vertical adjustment when detecting ingots of different thicknesses. During adjustment, simply unscrew the adjusting bolt 43, remove it, hold the fixed rod 42 to adjust the thickness sensor 5 to the desired height, and then use the adjusting bolt 43 to re-fix the fixed rod 42 to the fixed bracket 40 to achieve rapid height adjustment of the thickness sensor 5.
[0016] Furthermore, the rotating disk base 2 includes an upper rotating base 21 and a lower rotating base 22 fixed to each other by fixing bolts. The bottom of the upper rotating base 21 is provided with fixing bolts for fixing the vacuum suction cup 3 to the upper rotating base 21, and the surface of the lower rotating base 22 is provided with multiple fixing bolts for fixing and connecting the rotating shaft 62. By configuring the rotating disk base 2 as an upper rotating base 21 and a lower rotating base 22 fixed to each other by fixing bolts, the installation of the rotating disk base 2, the vacuum suction cup 3, and the rotating shaft 62 can be facilitated. During installation, the lower rotating base 22 can be installed on the rotating shaft 62 first, then the upper rotating base 21 can be installed on the bottom of the vacuum suction cup 3, and finally the upper rotating base 21 can be installed on the lower rotating base 22, thus achieving convenient assembly and making installation very convenient.
[0017] Furthermore, a motor mounting bracket 7 is provided at the bottom of the thickness measuring platform 1, and the drive motor 60 is fixedly mounted on the motor mounting bracket 7. A first gear 600 is provided on the output shaft of the drive motor 60, and a second gear 621 is provided on the rotating shaft 62. The first gear 600 and the second gear 621 are connected by a transmission belt 64. By using a transmission belt 64, shock absorption and smooth operation can be achieved, and the rotating shaft 62 is driven more stably.
[0018] Furthermore, the motor mounting bracket 7 includes an upper mounting block 70 fixed to the bottom of the thickness measuring platform 1 and lower mounting blocks 71 spaced apart below the upper mounting block 70. Connecting rods 72 are provided at the four corners of the upper mounting block 70 to fix and connect to the lower mounting blocks 71. The drive motor 60 is fixedly mounted on the bottom of the lower mounting block 71, and the output shaft of the drive motor 60 passes between the upper mounting block 70 and the lower mounting block 71. By configuring the motor mounting bracket 7 to accommodate the upper mounting block 70 and the lower mounting block 71, the installation of the drive motor 60 is more convenient, and the replacement of the transmission belt 64 during use is also easier, making maintenance more convenient.
[0019] Furthermore, sealing rings are provided between the vacuum suction cup 3 and the rotating disk seat 2, the upper rotating seat 21 and the lower rotating seat 22, and the lower rotating seat 22 and the rotating shaft 62. The use of sealing rings improves the sealing performance between the various components, preventing the vacuum suction cup 3 from leaking and failing.
[0020] Furthermore, an origin sensor 8 is provided on the thickness measuring platform 1 to detect the rotational position of the rotating disk 2. By providing the origin sensor 8, the rotating disk 2 can be calibrated to its original position, thereby improving the accuracy and efficiency of thickness measurement.
[0021] Working Principle: When using this practical ingot thickness detection device, the rotating disk base 2 is first leveled, and then the thickness sensor 5 is adjusted to its initial position. Next, the ingot is placed on the vacuum chuck 3. After the ingot is roughly positioned, the vacuum chuck 3 draws a vacuum to adhere and fix the ingot. After the ingot is fixed, the thickness sensor 5 measures the ingot and calculates the actual thickness based on the calibration data. Then, the rotating mechanism 6 drives the rotating disk base 2 to rotate, thereby measuring the thickness at multiple points on the ingot. The thickness data from multiple points can be transmitted to the control unit in real time. The control unit automatically compares multiple measured values using an algorithm and selects the maximum value as the final reference thickness of the ingot, outputting it to the process unit. Based on this thickness, the system guides the subsequent thinning process to perform quantitative removal, achieving precise product processing results.
[0022] This practical ingot detection device, by setting a rotating disk 2 to fix the ingot, enables the thickness sensor 5 to measure the thickness of the ingot at multiple points, thereby improving the accuracy and reliability of ingot thickness measurement.
[0023] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.
Claims
1. A crystal ingot thickness detection device, comprising a thickness measuring platform, characterized in that: The thickness measuring platform has a rotating disk base. A vacuum chuck for adsorbing and fixing crystal ingots is fixed to the end of the rotating disk base. A vent is located at the center of the bottom of the vacuum chuck. A connecting hole communicating with the vent is provided through the rotating disk base. An adjustment bracket is provided on one side of the thickness measuring platform relative to the rotating disk base. A thickness sensor for measuring the thickness of the crystal ingot is installed on the adjustment bracket above the vacuum chuck. A rotating mechanism for driving the rotating disk base to rotate is provided at the bottom of the thickness measuring platform. The rotating mechanism includes a drive motor and a rotating shaft mounted on the thickness measuring platform via a bushing. The rotating shaft is hollow, forming a vent cavity. The end of the rotating shaft is fixed to the bottom of the rotating disk base, and the vent cavity communicates with the connecting hole. The bottom of the rotating shaft extends below the thickness measuring platform. The drive motor is installed at the bottom of the thickness measuring platform to drive the rotating shaft to rotate. A connecting joint for connecting the vent cavity is fixed to the bottom of the rotating shaft, and the connecting joint is connected to a vacuum generator.
2. The ingot thickness detection device according to claim 1, characterized in that: The adjusting bracket includes a fixed bracket that is vertically fixed on the thickness measuring platform. Multiple threaded holes are arranged vertically on the fixed bracket. A horizontally arranged fixed rod is provided on the fixed bracket. An adjusting bolt is provided on the fixed rod that is threadedly connected and fixed to the threaded holes. The thickness measuring sensor is fixedly installed at the end of the fixed rod.
3. The ingot thickness detection device according to claim 1, characterized in that: The rotating disk base includes an upper rotating base and a lower rotating base that are fixed to each other by fixing bolts. The bottom of the upper rotating base is provided with fixing bolts for fixing the vacuum suction cup to the upper rotating base, and the surface of the lower rotating base is provided with a plurality of fixing bolts for fixing and connecting the rotating shaft.
4. The ingot thickness detection device according to claim 1, characterized in that: The thickness measuring platform is equipped with a motor mounting bracket at its bottom. The drive motor is fixedly mounted on the motor mounting bracket. A first gear is provided on the output shaft of the drive motor, and a second gear is provided on the rotating shaft. The first gear and the second gear are connected by a transmission belt.
5. The ingot thickness detection device according to claim 4, characterized in that: The motor mounting bracket includes an upper mounting block fixed to the bottom of the thickness measuring platform and lower mounting blocks spaced apart below the upper mounting block. Connecting rods that are fixedly connected to the lower mounting blocks are provided at the four corners of the upper mounting block. The drive motor is fixedly mounted at the bottom of the lower mounting block, and the output shaft of the drive motor passes through the space between the upper and lower mounting blocks.
6. The ingot thickness detection device according to claim 3, characterized in that: Sealing rings are provided between the vacuum suction cup and the rotating disk seat, the upper rotating seat and the lower rotating seat, and the lower rotating seat and the rotating shaft.
7. The ingot thickness detection device according to claim 1, characterized in that: An origin sensor for detecting the rotational position of the rotating disk is installed on the thickness measuring platform.