A multi-sample holder for a scanning electron microscope

Abstract

The utility model relates to the field of detection, concretely is a kind of for scanning electron microscope's multiple sample carrying platform, including table body, the surface of table body is evenly provided with threaded hole to be used for each carrying platform threaded fixing, carrying platform includes block body carrying platform, block body carrying platform includes the threaded column of screw thread cooperation with threaded hole, first carrying platform is independently provided on the threaded column of block body carrying platform, first carrying platform is screw thread cooperation with threaded column to adjust lifting height, the threaded column of block body carrying platform and the threaded arrangement direction of first carrying platform are same;Block body carrying platform is also provided with the clamping seat for fixed positioning screw, the lifting track position of clamping seat and first carrying platform is avoided, positioning screw is along block body carrying platform radial and clamping seat screw thread cooperation, sample positioning screw on block body carrying platform is clamped and is positioned to resist interface.The utility model effectively prevents that block sample is displaced in the electron microscope scanning process due to vibration or inclination, guarantees the test accuracy, and greatly improves test efficiency.

Description

Technical Field

[0001] This utility model relates to the field of detection, specifically a multi-sample stage for scanning electron microscopes. Background Technology

[0002] Scanning electron microscopes (SEMs) are precision microstructure analysis instruments with nanometer-level spatial resolution and powerful extended functions. They are widely used in basic scientific research fields such as materials science, physics, and biology, as well as industrial production fields such as engineering manufacturing and pharmaceutical preparation. Because SEMs are equipped with large vacuum chambers, they can accommodate multiple samples for testing simultaneously. SEMs are typically paired with high-precision electromechanical stages that translate and move the sample stage into and out of the SEM chamber. Currently, commonly used sample stages usually have multiple mounting areas on their surface, with different areas used to hold different types of samples, such as powdered and bulk samples. The samples are usually fixed to the stage using conductive adhesive. Specifically, conductive adhesive is applied to the stage, bulk samples are fixed to the conductive adhesive surface, and powdered samples are coated onto the conductive adhesive surface. After the conductive adhesive solidifies, the stage is pushed into the SEM for testing.

[0003] However, conductive adhesives require a stabilization period before bonding to ensure a strong sample bond. The duration of this stabilization period varies depending on the adhesive's composition. This can lead to situations where, for example, blocky samples may still move with the uncured adhesive during scanning electron microscopy (SEM) testing, affecting accuracy. Furthermore, cleaning the conductive adhesive after SEM testing is also challenging. The adhesive, already bonded to the sample stage, is strong and sticky, making it difficult to clean completely and affecting stage cleanliness. A significant amount of time is required to clean the adhesive after each test, impacting experimental efficiency. Therefore, a solution is urgently needed. Utility Model Content

[0004] To avoid and overcome the technical problems existing in the prior art, this invention provides a multi-sample stage for scanning electron microscopes. This invention effectively prevents bulk samples from shifting due to vibration or tilting during electron microscope scanning, ensuring testing accuracy and significantly improving testing efficiency.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A multi-sample stage for scanning electron microscopy includes a stage body with threaded holes uniformly distributed on its surface for threaded fixation of each stage. The stage includes a block stage, each block stage comprising a threaded post that engages with the threaded holes. A first mounting platform is independently mounted on the threaded post of the block stage, and the first mounting platform engages with the threaded post to adjust its lifting height. The threaded post of the block stage and the first mounting platform have the same thread arrangement direction. A clamping seat for fixing a positioning screw is also provided on the block stage. The clamping seat avoids the lifting trajectory of the first mounting platform. The positioning screw engages with the clamping seat radially along the block stage, and the sample on the block stage is positioned by the contact of the positioning screw.

[0006] As a further embodiment of this utility model: a first spring is coaxially sleeved on the outer ring of the threaded column of the block mounting platform, and the two ends of the first spring abut against the platform body and the first mounting platform, respectively.

[0007] As a further improvement of this utility model: two sets of clamping seats are symmetrically arranged on the block mounting platform, and the two clamping seats enclose a mounting cavity, the width of which corresponds to the diameter of the first mounting platform.

[0008] As a further improvement of this utility model, the back surfaces of the two clamping seats are parallel to each other, so as to allow the U-shaped fastening clamp to clamp and screw.

[0009] As a further embodiment of this utility model: the mounting platform also includes a planar mounting platform, the planar mounting platform including a threaded post that is threaded to engage with the threaded hole, and a second mounting platform for mounting powdered samples is coaxially arranged on the threaded post of the planar mounting platform.

[0010] As a further improvement of this utility model: a second spring is coaxially sleeved on the outer ring of the threaded column of the planar mounting platform, and the two ends of the second spring abut against the platform body and the second mounting platform, respectively.

[0011] Compared with the prior art, the beneficial effects of this utility model are: 1. This utility model facilitates the fixing of different functional mounting platforms by setting evenly distributed threaded holes on the platform body. After a single test, different types of mounting platforms can be directly removed by screwing on the threads. After the mounting platform is removed by screwing, a new mounting platform can be immediately screwed on to prepare for the next test, which greatly improves the testing efficiency. The block mounting platform design, through the cooperation of the threaded lifting first mounting platform and the radially screwed positioning screw, allows the block sample to be placed on the first mounting platform. By adjusting the lifting and lowering of the first mounting platform and the horizontal position of the positioning screw, the sample can be clamped vertically or horizontally, effectively preventing the block sample from shifting due to vibration or tilt during electron microscope scanning, thus ensuring the testing accuracy.

[0012] 2. The threaded connection between each mounting platform and the platform body in this utility model allows for adjustment of the sample height on each mounting platform by lifting and lowering the threads, making the height of each sample nearly uniform, reducing adjustment difficulties caused by differences in the height of different samples, and improving testing efficiency; the springs on each mounting platform, by utilizing the elastic force generated by the compression of the springs, increase the friction between the mounting platform and the internal threads of the threaded hole, thereby improving the fastening between the mounting platform and the platform body.

[0013] 3. The two clamping seats symmetrically arranged on the block mounting platform of this utility model have their back surfaces designed as parallel planes. The clamping seats can be clamped by using U-shaped fasteners or wrenches, which facilitates the tightening operation and improves the testing efficiency.

[0014] 4. This invention standardizes the stage components, significantly improving the space utilization of the stage and increasing the efficiency of scanning electron microscopy (SEM) testing. By greatly reducing the use of conductive adhesives and other bonding materials to fix samples, it effectively prevents such materials from contaminating the SEM cavity and the laboratory environment, reduces the types of consumables, and improves the operation and maintenance efficiency of the SEM equipment. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model.

[0016] Figure 2 This is a schematic diagram of the block mounting platform in this utility model.

[0017] Figure 3 This is a schematic diagram of the fastening clamp in this utility model.

[0018] In the picture: 1. Platform; 11. Threaded hole; 2. Block mounting platform; 21. Clamping seat; 22. Positioning screws; 23. First mounting platform; 24. First spring; 25. Mounting cavity; 3. Planar mounting platform; 31. Second mounting platform; 32. Second spring; Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figures 1-3In this embodiment of the invention, a multi-sample stage for a scanning electron microscope includes a stage body 1. Multiple threaded holes 11 are evenly distributed on the surface of the stage body 1 for mounting different types of stages. Each stage is fixed to the stage body 1 via a threaded connection and can be arranged according to the sample type and testing requirements.

[0021] In this embodiment, the mounting platform includes a block mounting platform 2 for mounting the block and a planar mounting platform 3 for mounting the powder sample. Each mounting platform has parallel cut edges, and the platform size and shape can be adjusted according to sample requirements.

[0022] The block mounting platform 2 is used to fix block-shaped or regularly shaped samples, including a threaded post that mates with the threaded hole 11 of the platform body 1. The upper end of the threaded post is provided with a first mounting platform 23. The first mounting platform 23 has a two-section stepped columnar structure that is narrow at the bottom and wide at the top. The narrow diameter section at the bottom mates with the internal thread of the threaded post of the block mounting platform 2 through a thread, and can be adjusted by rotation to accommodate samples of different sizes.

[0023] The block mounting platform 2 is also equipped with a clamping seat 21 for installing positioning screws 22. The lifting path of the clamping seat 21 is staggered from that of the first mounting platform 23 to avoid obstruction. The positioning screws 22 are threaded into the clamping seat 21 along the radial direction of the block mounting platform 2, and the horizontal position can be adjusted by screwing them in or out. The height of the first mounting platform 23 is adjusted by screwing in or out according to the height of the block sample. After the sample is placed on the first mounting platform 23, the positioning screws 22 can be tightened to abut against the side of the block sample and make the other side of the sample abut against the other inner side of the clamping seat 21, thus completing the clamping and fixing of the block sample.

[0024] A first spring 24 is coaxially sleeved on the outside of the threaded post of the block mounting platform 2. The two ends of the first spring 24 abut against the surface of the platform 1 and the bottom of the block mounting platform 21, respectively, thereby applying an elastic preload to the block mounting platform 2.

[0025] Two sets of clamping seats 21 are symmetrically arranged, forming a mounting cavity 25 between them. The width of the mounting cavity 25 matches the diameter of the first mounting platform 23. The back faces of the two sets of clamping seats 21 are parallel planes, facilitating the use of U-shaped fasteners or other tools for auxiliary tightening operations, thus improving clamping efficiency. The fastener structure is as follows: Figure 3 As shown, two sets of clamping seats 21 are clamped by the U-shaped clamping surface.

[0026] The planar mounting platform 3 is suitable for carrying powdery or granular samples. It includes a threaded post that mates with the threaded hole 11 of the platform body 1, and a second mounting platform 31 is coaxially fixed to the upper end of the threaded post. The second mounting platform 31 has a planar structure, which facilitates the application and placement of powdery or granular samples.

[0027] A second spring 32 is also fitted on the outside of the threaded column of the planar mounting platform 3. The two ends of the spring abut against the bottom of the platform 1 and the second mounting platform 31 respectively, and apply an elastic preload to the second mounting platform 31.

[0028] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0029] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0030] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A multi-sample holder for a scanning electron microscope, characterized by, The table body (1) is uniformly provided with threaded holes (11) on the surface for fixing the loading tables by threads, the loading tables include block loading tables (2), the block loading tables (2) include threaded columns matched with the threaded holes (11), the threaded columns of the block loading tables (2) are independently provided with first loading platforms (23), the first loading platforms (23) are matched with the threaded columns to adjust the lifting height, the threaded columns of the block loading tables (2) and the threaded arrangement directions of the first loading platforms (23) are same.

2. The multi-sample holder for a scanning electron microscope according to claim 1, wherein The outer circle of the threaded column of the block loading table (2) is coaxially sleeved with a first spring (24), and the two ends of the first spring (24) are respectively abutted with the table body (1) and the first loading platform (23).

3. The multi-sample holder for a scanning electron microscope according to claim 1, wherein The block loading table (2) is symmetrically provided with two groups of clamping seats (21), and the two clamping seats (21) are surrounded to form a loading cavity (25), and the width of the loading cavity (25) corresponds to the diameter of the first loading platform (23).

4. The multi-sample holder for a scanning electron microscope according to claim 1, wherein The back surfaces of the two clamping seats (21) are parallel to each other, so that the U-shaped fastening clamp is clamped and screwed.

5. The multi-sample holder for a scanning electron microscope according to claim 1, wherein The loading table further includes a planar loading table (3), the planar loading table (3) includes a threaded column matched with the threaded hole (11), and the threaded column of the planar loading table (3) is coaxially provided with a second loading platform (31) for loading a powdery sample.

6. The multi-sample holder for a scanning electron microscope according to claim 1, wherein The outer circle of the threaded column of the planar loading table (3) is coaxially sleeved with a second spring (32), and the two ends of the second spring (32) are respectively abutted with the table body (1) and the second loading platform (31).

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