Multi-axis adjustable microscopy apparatus and imaging system adapted for vacuum cavities

Abstract

The utility model discloses a kind of multi-axis adjustable microscopes and imaging systems suitable for vacuum cavity, which comprises bottom plate, vacuum cavity on the bottom plate by fixed and mobile device, and a pair of objective lens symmetrically arranged on both sides of vacuum cavity.The objective lens is connected with the bottom plate by sliding component, and the objective lens can be adjusted to approach or move away from the vacuum cavity, so that reflective or transmissive microscopic imaging module is flexibly formed on both sides of the vacuum cavity.The device is stable in structure, convenient to adjust, and effectively meets the needs of multi-angle microscopic observation in vacuum environment.

Description

Technical Field

[0001] This invention belongs to the field of microscopic spectral detection technology, and more specifically, relates to a multi-axis adjustable microscopic device and imaging system adapted to a vacuum cavity. Background Technology

[0002] Micro-area spectroscopy is an advanced characterization method that integrates high spatial resolution imaging and spectral analysis. Its core lies in the high-precision analysis of multi-dimensional information, such as chemical composition, molecular structure, and optical properties, within micron- to nanometer-scale regions on or inside a sample surface. This method overcomes the limitations of traditional spectral techniques' "average" analysis, effectively revealing the inhomogeneities of samples at the microscale, such as compositional distribution, structural differences, and defect states. Therefore, it has broad application value in numerous fields, including materials science, biomedicine, semiconductor devices, and geology and mineralogy.

[0003] In materials spectral analysis, special environments such as vacuum and low temperatures can significantly reduce external interference factors (e.g., gas molecule absorption, thermal noise, undesirable chemical reactions) while effectively controlling the microscopic state of materials (e.g., electronic structure, lattice vibrations, defect behavior), thus playing an irreplaceable role. These environments not only help reveal the intrinsic spectral properties of materials and eliminate interference from factors such as air and temperature, but also induce new phenomena such as quantum state transitions and phase transition-related spectral changes under extreme conditions, becoming an important tool for in-depth mechanistic research in materials science, physics, chemistry, and other fields.

[0004] However, due to the compact structure and limited space of traditional optical microscopes, existing vacuum / cryostat chambers are often incompatible with them, severely restricting the application of micro-area spectral detection technology in such environments. Therefore, there is an urgent need to develop a new type of microscopic device that can flexibly adapt to special experimental environments (such as vacuum, low temperature, strong magnetic field, electric field, etc.) and meet its comprehensive requirements in terms of optical path control, sample manipulation, signal collection, and other functions and performance. Utility Model Content

[0005] To address the aforementioned deficiencies or improvement needs of existing technologies, in a first aspect, this utility model provides a multi-axis adjustable microscope device adapted to a vacuum cavity, the microscope device comprising: Base plate; A vacuum cavity mounted on a base plate via a fixed and movable device; and, A pair of objective lenses are arranged opposite each other on both sides of the vacuum cavity, and each pair of objective lenses is connected to a pair of multi-axis objective lens adjustment frames. The pair of multi-axis objective lens adjustment frames are connected to the base plate through a pair of sliding components to adjust the pair of objective lenses to move closer to or further away from the vacuum cavity. Among them, a pair of objectives form a reflective or transmissive microscope module on both sides of the vacuum cavity, a pair of multi-axis objective adjustment frames are used to adjust the orientation of the pair of objectives in various positions in the optical path system, and a pair of sliding components are used to adjust the pair of multi-axis objective adjustment frames to move closer to or further away from the vacuum cavity.

[0006] In the first aspect, each of the pair of said multi-axis objective lens adjustment mounts includes: The first single-axis precision slide is slidably connected to the sliding assembly; The second single-axis precision slide is slidably connected to the first single-axis precision slide. The third single-axis precision slide is connected to the second single-axis precision slide via a connector, and the single-axis precision slide can slide relative to the connector. The first single-axis precision slide (41), the second single-axis precision slide (42) and the third single-axis precision slide (44) are used to adjust the orientation of the pair of objectives in the X, Y and Z axes of the optical path system.

[0007] In the first aspect, the third single-axis precision slide is further provided with a pitch adjustment bracket on the side opposite to the connector. The pitch adjustment bracket is used to detachably connect the third single-axis precision slide and the objective lens, and the pitch adjustment bracket is used to adjust the pitch angle of the objective lens in the optical path.

[0008] In the first aspect, the outer wall of the third single-axis precision slide groove on the side opposite to the connector has a plurality of spaced connection holes, and the pitch adjustment frame can be installed on any one of the connection holes.

[0009] In the first aspect, the connector is L-shaped and has a pair of perpendicular connecting plates, one of which is connected to the second single-axis precision slide and the other connecting plate is connected to the third-axis precision slide.

[0010] In the first aspect, a pair of connecting plates are further provided with reinforcing ribs on the side opposite to the second single-axis precision slide or the third axis precision slide, and the reinforcing ribs fix the pair of connecting plates together.

[0011] In the first aspect, the sliding assembly includes a groove and a slider adapted to each other, the groove being oriented toward the vacuum cavity, and the slider being provided with the multi-axis objective lens adjustment frame.

[0012] In the first aspect, the sliding assembly further includes a slider set screw, which passes through the slider and extends from the outside of the slider to the position of the inner groove of the slider.

[0013] In the first aspect, the fixing and moving device includes: The Z-axis lifting platform is located on the base plate; The X-axis translation stage is located on top of the Z-axis lifting stage; A support assembly is located on top of the X-axis translation stage to support and clamp the vacuum chamber.

[0014] In the first aspect, the support assembly includes an arc-shaped support bottom structure, the outer arc surface of the middle portion of the arc-shaped support bottom structure being connected to the X-axis translation stage; and a pair of support top structures correspondingly connected to a pair of free ends of the arc-shaped support bottom structure to form a clamping portion for clamping the vacuum cavity.

[0015] Secondly, this application provides a microscopic imaging system, which includes the multi-axis adjustable microscopic device adapted to a vacuum cavity as described in any one of the above claims.

[0016] In summary, compared with the prior art, the above-described technical solution conceived by this utility model can achieve the following beneficial effects: 1. This device significantly improves the ease of operation and functionality of the microscopy system in a vacuum environment by symmetrically positioning a pair of objectives on both sides of the vacuum chamber and using a sliding assembly to enable rapid insertion and removal of the objectives. This layout naturally supports the rapid construction and flexible switching between reflection and transmission microscopy modes, effectively meeting diverse micro-area spectral detection needs. It also greatly simplifies the optical path adjustment and sample replacement process, making it particularly suitable for efficient and precise experimental operations in special environments such as vacuum and low temperatures. Furthermore, the symmetrical mechanical structure and multi-axis adjustable objective positioning method ensure high alignment and stability of the optical path. This design not only guarantees the spatial resolution and signal quality of microscopic imaging and spectral acquisition, but its integrated overall chamber movement function also enables precise addressing and scanning of the sample area, providing a reliable and efficient technical means for the study of the microscopic properties of materials under extreme conditions.

[0017] 2. Furthermore, the orientation of the objective lens in the X, Y, and Z directions of the optical path system is adjusted by a pair of multi-axis objective lens adjustment mounts, and the pitch angle of the objective lens in the optical path system is adjusted by setting up a pitch adjustment mount. In summary, the combination of the multi-axis objective lens adjustment mount and the pitch adjustment mount enables fine adjustment of the objective lens in the XYZ axes and pitch direction, ensuring precise calibration of the objective lens. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the multi-axis adjustable microscope device adapted to the vacuum cavity in this embodiment of the present invention. Figure 2 This is a schematic diagram of the slide and multi-axis objective lens adjustment frame of the multi-axis adjustable microscope device adapted to the vacuum cavity in this embodiment of the present invention. Figure 1 ; Figure 3 This is a schematic diagram of the slide and multi-axis objective lens adjustment frame of the multi-axis adjustable microscope device adapted to the vacuum cavity in this embodiment of the present invention. Figure 2 ; Figure 4 This is a schematic diagram of the fixing and moving device structure of the multi-axis adjustable microscope device adapted to the vacuum cavity in an embodiment of this utility model; Explanation of reference numerals in the attached figures: 1. Base plate; 2. First sliding component; 3. Second sliding assembly; 4. First multi-axis objective lens adjustment frame; 5. Second multi-axis objective lens adjustment frame; 6. First objective lens; 7. Second objective lens; 8. Fixed and movable devices; 9. Vacuum chamber; 21. Slide groove; 22. Slider; 23. Sliding screw; 41. First single-axis precision slide; 42. Second single-axis precision slide; 43. Connectors; 44. Third single-axis precision slide; 45. First adjustment knob; 46. ​​Second adjustment knob; 47. Pitch adjustment frame; 81. Z-axis lifting platform; 811. Lifting platform adjustment knob; 82. X-axis translation stage; 821. Translation stage adjustment knob; 83. Base structure of the support frame; 84. Top structure of the bracket; 841. Fixing screw for the bracket; 842. Fixing hole for the clamping component. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model. Furthermore, the technical features involved in the various embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0020] Example 1: like Figure 1-4As shown, this utility model provides a multi-axis adjustable microscope device adapted to a vacuum cavity. The microscope device includes: a base plate 1; a vacuum cavity 9 disposed on the base plate 1 via a fixing and moving device 8; and a pair of objective lenses disposed opposite to each other on both sides of the vacuum cavity 9, specifically including a first objective lens 6 and a second objective lens 7. The pair of objective lenses are connected to each other via a pair of multi-axis objective lens adjustment frames and a pair of pitch adjustment frames. The pair of multi-axis objective lens adjustment frames are connected to the base plate 1 via a pair of sliding components to adjust the pair of objective lenses to move closer to or further away from the vacuum cavity 9. The sliding components include a first sliding component 2 and a second sliding component 3. Among them, a pair of objectives form a reflective or transmissive microscope module on both sides of the vacuum cavity 9, a pair of multi-axis objective adjustment frames are used to adjust the attitude of the pair of objectives in various positions in the optical path system, a pair of pitch adjustment frames are used to adjust the pitch angle of the pair of objectives in the optical path system, and a pair of sliding components are used to adjust the pair of multi-axis objective adjustment frames to move closer to or further away from the vacuum cavity.

[0021] Specifically, the multi-axis adjustable microscopy device adapted to a vacuum chamber 9 in this embodiment significantly improves the ease of operation and functionality of the microscopy system in a vacuum environment by symmetrically arranging a pair of objectives on both sides of the vacuum chamber 9 and using a sliding assembly to achieve rapid entry and exit of the objectives. This layout naturally supports the rapid construction and flexible switching of both reflection and transmission microscopy modes, effectively meeting diverse micro-area spectral detection needs, while greatly simplifying the optical path adjustment and sample replacement process. It is particularly suitable for efficient and precise experimental operations in special environments such as vacuum and low temperature. In addition, the symmetrical mechanical structure and multi-axis adjustable objective positioning method ensure the high alignment and stability of the optical path. This design not only guarantees the spatial resolution and signal quality of microscopic imaging and spectral acquisition, but its integrated overall chamber movement function also enables precise addressing and scanning of the sample area, providing a reliable and efficient technical means for the study of the microscopic properties of materials under extreme conditions. Furthermore, a pair of multi-axis objective lens adjustment mounts are used to adjust the objective lens's attitude in the X, Y, and Z directions of the optical path system, and a pitch adjustment mount is used to adjust the objective lens's pitch angle in the optical path system. In summary, the combination of the multi-axis objective lens adjustment mount and the pitch adjustment mount enables fine adjustment of the objective lens in the XYZ axes and pitch direction, ensuring precise calibration of the objective lens.

[0022] In one method of adjusting the objective lens, a pair of multi-axis objective lens adjustment frames specifically includes a first multi-axis objective lens adjustment frame 4 and a second multi-axis objective lens adjustment frame 5, which are respectively connected to the pair of objective lenses to adjust the displacement of the pair of objective lenses in the X-axis, Y-axis and Z-axis directions.

[0023] Furthermore, the multi-axis objective lens adjustment frame includes: The first single-axis precision slide 41 is slidably connected to the sliding assembly; The second single-axis precision slide 42 is slidably connected to the first single-axis precision slide 41; The third single-axis precision slide 44 is connected to the second single-axis precision slide 42 via a connector 43, and the single-axis precision slide can slide relative to the connector 43.

[0024] In one specific embodiment, the connector 43 is L-shaped and has a pair of mutually perpendicular connecting plates. One connecting plate is connected to the second single-axis precision slide 42, and the other connecting plate is connected to the third-axis precision slide. The third-axis precision slide is connected to the second objective lens 7 through a pitch adjustment bracket 47. The pitch adjustment bracket 47 is provided with a first adjustment knob 45 and a second adjustment knob 46 for adjusting the attitude of the pitch adjustment bracket 47 relative to the third-axis precision slide.

[0025] Another adjustment method for the objective lens is to adjust the pitch angle through the pitch adjustment bracket 47. The pitch adjustment bracket 47 is located on the side of the third single-axis precision slide 44 away from the connector. The pitch adjustment bracket 47 is used to detachably connect the third single-axis precision slide 44 and the objective lens. The pitch adjustment bracket 47 is used to adjust the pitch angle of the objective lens in the optical path through the first adjustment knob 45 and the second adjustment knob 46. Furthermore, the third single-axis precision slide 44 has several spaced connection holes on the outer wall of the side opposite to the connector, and the pitch adjustment frame 47 can be installed on any one of the connection holes.

[0026] In one specific embodiment, a pair of connecting plates are further provided with reinforcing ribs on the side opposite to the second single-axis precision slide 42 or the third axis precision slide, and the reinforcing ribs fix the pair of connecting plates together.

[0027] In one specific embodiment, the sliding assembly includes a sliding groove 21 and a slider 22 that are adapted to each other. The opening direction of the sliding groove 21 is towards the vacuum cavity 9, and the slider 22 is provided with the multi-axis objective lens adjustment frame.

[0028] In one specific embodiment, the sliding assembly further includes a slider set screw 23, which passes through the slider 22 and extends from the outside of the slider 22 to the position of the inner groove 21 of the slider 22.

[0029] In one specific embodiment, the fixing and moving device 8 includes: a Z-axis lifting platform 81, disposed on the base plate 1, which is controlled to move up and down in the Z-axis direction by a lifting platform adjustment knob 811; an X-axis translation platform 82, disposed on the top of the Z-axis lifting platform 81, which is displaced in the X-axis direction by a translation platform adjustment knob 821; and a support assembly, disposed on the top of the X-axis translation platform 82, to support and clamp the vacuum chamber 9.

[0030] In one specific embodiment, the support assembly includes an arc-shaped support bottom structure 83, the outer arc surface of which is connected to the X-axis translation stage 82; and a pair of support top structures 84, which are correspondingly connected to a pair of free ends of the arc-shaped support bottom structure 83 to form a clamping part for clamping the vacuum cavity 9. Specifically, the connection positions of the support top structure 84 and the support bottom structure 83 are provided with corresponding clamping member fixing holes 842, and a connecting rod is inserted into the corresponding fixing hole for connection.

[0031] Furthermore, a fixing bracket top screw 841 is rotatably provided on the top structure 84 of the pair of brackets, which penetrates the top structure 84 of the brackets and is used to move closer to or away from the inner side of the arc-shaped space by rotation.

[0032] In summary, this application has the following technical effects: The multi-axis adjustable microscope device adapted to the vacuum chamber 9 of this application consists of two sets of multi-axis adjustable microscope devices, which are arranged on both sides of the vacuum chamber 9, including a slide, a multi-axis objective lens adjustment frame, and an objective lens. This can meet the construction requirements of reflection and transmission microscope systems.

[0033] The multi-axis adjustable microscope apparatus adapted to the vacuum chamber 9 of this application is designed with a rapidly moving bottom slide fixed to the base plate 1 of the apparatus. Through the sliding and locking function of the slide, the objective lens can be quickly inserted and removed from the optical path system, ensuring convenient operation of the apparatus in situations such as testing and sample replacement.

[0034] The multi-axis adjustable microscope device adapted to the vacuum chamber 9 of this application has a multi-axis objective adjustment frame with fine adjustment functions for the XYZ three axes and the pitch orientation, ensuring the fine calibration of the objectives of the transmission and reflection microscope system.

[0035] The multi-axis adjustable microscope device adapted to the vacuum chamber 9 of this application includes a chamber fixing and moving device 8 comprising a two-axis displacement stage and a clamping and fixing component for the vacuum chamber, which enables the entire vacuum chamber 9 to move, and the sample inside the chamber moves accordingly.

[0036] Example 2: This embodiment provides a microscopic imaging system, which includes the multi-axis adjustable microscopic device adapted to a vacuum cavity as described in any of the above embodiments.

[0037] Furthermore, to better understand the working principle of the microscopic device, this second embodiment further explains the operation steps of the microscopic device, which includes: an operation method for a multi-axis adjustable microscopic device based on an adaptable vacuum cavity, the method being: Step S1: Device initialization, placing the sample inside the vacuum chamber 9; Step S2, fix the vacuum chamber 9 to the fixing and moving device 8; specifically, the fixing and moving device includes a bracket assembly that is directly clamped and connected to the vacuum chamber 9. The bracket assembly includes an arc-shaped bracket bottom structure 83 and a pair of bracket top structures 84. The bracket top structures 84 are correspondingly connected to a pair of free ends of the arc-shaped bracket bottom structure 83 to form a clamping part for clamping the vacuum chamber 9. Step S3: The first objective lens 6 and the second objective lens 7 are moved by the first sliding assembly 2 and the second sliding assembly 3, so that the pair of objective lenses are initially focused on the vacuum cavity 9. Step S4: Adjust the orientation of the pair of objectives in various positions in the optical path system using the multi-objective adjustment frame to ensure precise calibration of the objectives in the transmission and reflection microscopy system; specifically, the first single-axis precision slide 41, the second single-axis precision slide 42 and the third single-axis precision slide 44 are used to adjust the orientation of the pair of objectives in the X, Y and Z axes of the optical path system, and the pitch adjustment frame is used to adjust the pitch angle of the pair of objectives in the optical path; Step S5: The vacuum chamber 9 is moved along with the sample using the Z-axis lifting stage 81 and the X-axis translation stage 82; the detection site is changed, and micro-area detection is performed multiple times; In step S6, the first sliding component 2 and the second sliding component 3 drive the first objective lens 6 and the second objective lens 7 to move, so that the pair of objective lenses can be quickly moved out of the vicinity of the vacuum chamber 9, which facilitates the opening of the chamber and the removal of the sample.

[0038] Those skilled in the art will readily understand that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multi-axis adjustable microscope device adapted to a vacuum cavity, characterized in that, The microscope device includes: Base plate (1); A vacuum cavity (9) is mounted on a base plate (1) via a fixed and movable device (8); and, A pair of objective lenses are arranged opposite each other on both sides of the vacuum cavity (9), and the pair of objective lenses are connected by a pair of multi-axis objective lens adjustment frames. The pair of multi-axis objective lens adjustment frames are connected to the base plate (1) by a pair of sliding components. Among them, a pair of objectives form a reflective or transmissive microscope module on both sides of the vacuum cavity (9), a pair of multi-axis objective adjustment frames are used to adjust the orientation of the pair of objectives in various positions in the optical path system, and a pair of sliding components are used to adjust the pair of multi-axis objective adjustment frames to move closer to or further away from the vacuum cavity (9).

2. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 1, characterized in that, Each pair of the aforementioned multi-axis objective lens adjustment frames includes: The first single-axis precision slide (41) is slidably connected to the sliding assembly; The second single-axis precision slide (42) is slidably connected to the first single-axis precision slide (41); The third single-axis precision slide (44) is connected to the second single-axis precision slide (42) via a connector (43), and the single-axis precision slide can slide relative to the connector (43); The first single-axis precision slide (41), the second single-axis precision slide (42) and the third single-axis precision slide (44) are used to adjust the orientation of the pair of objectives in the X, Y and Z axes of the optical path system.

3. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 2, characterized in that: The third single-axis precision slide (44) is also provided with a pitch adjustment frame on the side away from the connector (43). The pitch adjustment frame is used to detachably connect the third single-axis precision slide (44) and the objective lens. The pitch adjustment frame is used to adjust the pitch angle of the objective lens in the optical path.

4. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 3, characterized in that: The outer wall of the third single-axis precision slide groove on the side opposite to the connector has several spaced connection holes, and the pitch adjustment frame can be installed on any one of the connection holes.

5. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 4, characterized in that: The sliding assembly includes a sliding groove (21) and a slider (22) that are adapted to each other. The opening direction of the sliding groove (21) is towards the vacuum cavity (9), and the slider (22) is provided with the multi-axis objective lens adjustment frame.

6. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 5, characterized in that, The sliding assembly also includes a slider set screw (23), which passes through the slider (22) and extends from the outside of the slider (22) to the position of the inner groove (21) of the slider (22).

7. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 6, characterized in that, The fixed and movable device (8) includes: Z-axis lifting platform (81) is located on the base plate (1). The X-axis translation stage (82) is located on top of the Z-axis lifting stage (81); A support assembly is provided on top of the X-axis translation stage (82) to support and clamp the vacuum chamber (9).

8. The multi-axis adjustable microscope device adapted to a vacuum cavity according to claim 7, characterized in that: The support assembly includes an arc-shaped support bottom structure (83), the outer arc surface of which is connected to the X-axis translation stage (82); and a pair of support top structures (84) correspondingly connected to a pair of free ends of the arc-shaped support bottom structure (83) to form a clamping portion for clamping the vacuum cavity (9).

9. A microscopic imaging system, characterized in that: The microscopic imaging system includes a multi-axis adjustable microscopic device adapted to a vacuum cavity (9) as described in any one of claims 1-8.

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