A two-dimensional large-angle fast mirror device based on rigid support

Abstract

The utility model relates to fast reflecting mirror technical field, concretely relates to a two -dimensional big angle fast reflecting mirror device based on rigid support, include: moving magnet type electromagnetic drive subassembly and electric eddy current sensor subassembly set up in the four around of inside center position of base, moving magnet type electromagnetic drive subassembly drive rigid support subassembly drive reflecting mirror lens to deflect in the setting angle, electric eddy current sensor subassembly is used for detecting the deflection angle of reflecting mirror lens, rigid support subassembly includes mirror holder, support frame, support long axle and support short axle, reflecting mirror lens is connected with mirror holder, and mirror holder is set up in support frame through support long axle, and support frame is connected with base through support short axle, mirror holder rotates through support long axle in the first direction, rotates through support short axle in the second direction, the utility model drives rigid support subassembly through moving magnet type electromagnetic drive subassembly, makes reflecting mirror lens respectively around support long axle and support short axle deflect in two orthogonal directions, breaks through the restriction that the existing reflecting mirror system deflection angle is small, can realize two -dimensional big angle, high accuracy's light beam deflection.

Description

TECHNICAL FIELD

[0001] The utility model relates to fast reflecting mirror technical field, concretely relates to a two -dimensional big angle fast reflecting mirror device based on rigid support. BACKGROUND

[0002] The reflecting mirror deflection device is a key component in modern optical systems, and is widely used in the fields of laser radar, target tracking, image stabilization, space communication and beam scanning. The traditional reflecting mirror driving mode mainly includes piezoelectric ceramic actuator, micro motor, voice coil motor and the like. These driving schemes realize the fast deflection control of the reflecting mirror to a certain extent, but there are still significant deficiencies in key performance parameters.

[0003] Among them, the deflection angle is too small one of the main technical bottlenecks of the prior art. The common piezoelectric drive or micro motor drive structure is limited by the stroke or mechanism design, and the deflection angle of the reflecting mirror is usually only a few milliradians to tens of milliradians, which is difficult to meet the application requirements of large range scanning or large angle light path regulation. In addition, in the realization of two-dimensional deflection, the existing system usually realizes two-dimensional rotation by stacking two groups of independent single-axis driving structures or flexible hinge mechanisms, but such structures have problems such as low system resonance frequency, poor motion stability, complex control, etc.

[0004] On the other hand, the moving magnet type electromagnetic driving technology has shown good application prospects in small precision optical machine systems due to its fast response speed, compact structure and easy control. However, the moving magnet type driving structure applied to the reflecting mirror device is mainly concentrated in single-axis deflection. In the realization of two-dimensional large-angle deflection, it still faces technical difficulties such as unstable support structure, low deflection precision, large backlash and lagging sensing detection means, especially in the realization of large-angle, continuous and controllable two-dimensional deflection, there is still a lack of a complete solution with optimized structure, accurate response and closed-loop detection. UTILITY MODEL CONTENTS

[0005] (I) Utility model purpose

[0006] The utility model aims at providing a moving magnet type electromagnetic driving assembly driving a rigid support assembly, so that the reflecting mirror lens is deflected in two orthogonal directions around the support long axis and the support short axis, breaking through the limitation of small deflection angle of the existing reflecting mirror system, and realizing a two-dimensional large-angle fast reflecting mirror device based on rigid support with two-dimensional large-angle and high-precision beam deflection.

[0007] (II) Technical scheme

[0008] In order to solve the above problems, the utility model provides a two-dimensional large-angle fast reflecting mirror device based on rigid support, which comprises:

[0009] The mirror lens, the rigid support assembly, the moving-magnet electromagnetic driving assembly, the eddy current sensor assembly and the base;

[0010] The mirror lens is connected with the base through the rigid support assembly;

[0011] The mirror lens, the rigid support assembly and the base are coaxially connected in sequence;

[0012] The moving-magnet electromagnetic driving assembly and the eddy current sensor assembly are arranged around the inner center position of the base; the moving-magnet electromagnetic driving assembly drives the rigid support assembly to drive the mirror lens to deflect within a set angle, and the eddy current sensor assembly is used for detecting the deflection angle of the mirror lens;

[0013] The rigid support assembly comprises a mirror holder, a support frame, a support long shaft and a support short shaft;

[0014] The mirror lens is connected with the mirror holder, the mirror holder is arranged in the support frame through the support long shaft, and the support frame is connected with the base through the support short shaft;

[0015] The mirror holder is rotated in a first direction through the support long shaft and is rotated in a second direction through the support short shaft.

[0016] In another aspect of the utility model, preferably, the center lines of the mirror holder, the support long shaft and the support frame coincide, a pair of first through holes are arranged at the two ends of the support frame along a first center line, and the support long shaft penetrates through the pair of first through holes to rotationally connect the mirror holder with the support frame.

[0017] In another aspect of the utility model, preferably, the support short shaft is arranged in a pair, a pair of second through holes are arranged at the two ends of the support frame along a second center line, and a pair of the support short shafts are arranged in the pair of second through holes respectively.

[0018] The outer periphery of the support short shaft is sequentially sleeved with a spacer ring, a micro deep groove ball bearing and a wave spring, the micro deep groove ball bearing is used for providing low-friction support when the support frame rotates relative to the base along the second direction, and the wave spring is used for applying an axial pre-tightening force to the micro deep groove ball bearing.

[0019] In another aspect of the utility model, preferably, the eddy current sensor assembly comprises an eddy current circuit board and at least two pairs of eddy current sensor probes; the eddy current sensor probe comprises a multi-layer coil, the multi-layer coil is arranged on the eddy current circuit board in a printing manner, and each pair of the eddy current sensor probes is symmetrically arranged on the eddy current circuit board.

[0020] In another aspect of this utility model, preferably, the base includes a base body, a base circuit board, and a base bottom cover; the base circuit board is disposed at the end of the base body away from the reflector lens; the base bottom cover seals the base circuit board; and the eddy current circuit board is disposed at the end of the base body close to the reflector lens.

[0021] The eddy current circuit board includes solder pins, and the base body is provided with solder pin through holes. The solder pins and solder pin through holes are adapted to each other, and the eddy current circuit board is connected to the base circuit board through the solder pins and solder pin through holes.

[0022] In another aspect, preferably, the present invention further includes a limiting block, which abuts the eddy current circuit board against the base body.

[0023] In another aspect of this utility model, preferably, the moving magnet type electromagnetic drive assembly includes two pairs of permanent magnets and two pairs of drive coils, wherein the drive coils and permanent magnets are arranged symmetrically in pairs around the central axis of the reflector lens.

[0024] The two pairs of drive coils are vertically embedded in the mounting slots on the base body, and the permanent magnets are correspondingly arranged inside the drive coils.

[0025] In another aspect of this invention, preferably, the end of the permanent magnet away from the reflector lens is configured as a conical structure, or as a structure combining a conical and an arc shape.

[0026] In another aspect, preferably, the present invention further includes a connecting piece, wherein the end of the permanent magnet near the reflector lens is connected to the mirror holder via the connecting piece.

[0027] In another aspect of this utility model, preferably, the bottom of the lens holder is provided with a connecting groove, the position and number of the connecting grooves correspond to the connecting piece, and the moving magnet electromagnetic drive assembly is fixedly connected to the lens holder through the connecting piece and the connecting groove.

[0028] (III) Beneficial Effects

[0029] The above-mentioned technical solution of this utility model has the following beneficial technical effects:

[0030] This invention utilizes a moving-magnetic drive assembly to drive a rigid support assembly, causing the reflector lens to deflect in two orthogonal directions around the support's long and short axes. This overcomes the limitation of small deflection angles in existing reflector systems, enabling two-dimensional, large-angle, high-precision beam deflection to meet the application requirements of wide-range scanning and pointing control. The rigid support assembly includes a mirror holder, a support frame, and the support's long and short axes, employing a rigid shaft connection and embedded fit. The overall structure is compact, with minimal movement clearance and high support stiffness, improving the stability and response consistency of the reflector during dynamic deflection and avoiding the nonlinearity and hysteresis problems found in flexible mechanisms. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present utility model;

[0032] Figure 2 This is a cross-sectional view of the overall structure of one embodiment of the present invention;

[0033] Figure 3 This is a bottom view of a rigid support component according to an embodiment of the present invention;

[0034] Figure 4 This is a schematic diagram of an eddy current sensor assembly according to an embodiment of the present invention;

[0035] Figure 5 This is a schematic diagram of a permanent magnet according to an embodiment of the present invention;

[0036] Figure 6 This is a cross-sectional view of the base according to an embodiment of the present invention;

[0037] Figure 7 This is a block diagram illustrating the input-output relationship of one embodiment of the present invention;

[0038] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet electromagnetic drive assembly according to an embodiment of this utility model;

[0039] Figure 9 This is a schematic diagram of the signal output of an eddy current sensor assembly according to an embodiment of the present invention.

[0040] Figure label:

[0041] 1: Reflector lens,

[0042] 2: Rigid support component; 210: Lens holder; 220: Support frame; 230: Support for long axis; 240: Support for short axis.

[0043] 3: Moving magnet type electromagnetic drive assembly; 310: Permanent magnet; 320: Drive coil.

[0044] 4: Eddy current sensor assembly; 410: Eddy current circuit board; 411: Solder pin; 420: Eddy current sensor probe.

[0045] 5: Base; 510: Base body; 520: Base circuit board; 530: Base bottom cover.

[0046] 6: Limit block, 7: Connecting piece, 8: Motor wire, 9: Communication cable. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0048] The accompanying drawings show structural schematic diagrams according to embodiments of the present invention. These drawings are not drawn to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0049] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0050] In the description of this utility model, it should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0051] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0052] The present invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the parts in the drawings are not drawn to scale.

[0053] Example 1

[0054] A two-dimensional, large-angle, fast-reflecting mirror device based on rigid support. Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present utility model;Figure 2 This is a cross-sectional view of the overall structure of one embodiment of the present invention; as shown... Figure 1 and Figure 2 As shown, it includes:

[0055] The device comprises a reflector lens 1, a rigid support assembly 2, a moving-magnetic drive assembly 3, an eddy current sensor assembly 4, and a base 5. The reflector lens 1 is an optical element used to reflect externally incident laser or visible light beams, serving as the core execution unit for rapid spatial beam control. This lens is typically made of a metal-coated material with high reflectivity to improve reflection efficiency and reduce light loss; in this embodiment, the reflector lens 1 has a diameter of 40mm ± 0.05mm. The lens thickness can be selected from 1.8mm, 2mm, 2.2mm, etc., with a typical thickness of 1.8mm ± 0.05mm. The lens substrate material can be any reflector material such as fused silica, K9, or aluminum; in this embodiment, fused silica is used, and the reflector lens 1 has a silver-plated mirror surface. The base 5 serves as the fixed support part of the device, providing a stable mounting base for the other components.

[0056] The reflector lens 1 is connected to the base 5 via a rigid support assembly 2; the rigid support assembly 2 is used to connect the reflector lens 1 and the base 5, and is responsible for supporting the reflector lens 1 and transmitting the driving force of the moving magnet electromagnetic drive assembly 3.

[0057] The reflector lens 1, the rigid support assembly 2, and the base 5 are coaxially connected in sequence.

[0058] The moving magnet electromagnetic drive assembly 3 and the eddy current sensor assembly 4 are arranged around the center of the base 5; the moving magnet electromagnetic drive assembly 3 drives the rigid support assembly 2 to deflect the reflector lens 1 within a set angle, and the eddy current sensor assembly 4 is used to detect the deflection angle of the reflector lens 1.

[0059] Figure 3 This is a bottom view of a rigid support component according to an embodiment of the present invention, as shown below. Figure 3 As shown, the rigid support assembly 2 includes a mirror holder 210, a support frame 220, a support long axis 230, and a support short axis 240; the rigid support assembly 2 adopts a dual-axis structure design to realize two-dimensional deflection control of the reflector lens in space, corresponding to free rotation in two orthogonal directions respectively.

[0060] The reflector lens 1 is connected to the mirror holder 210. The mirror holder 210 is disposed within the support frame 220 via the long support axis 230. The support frame 220 is connected to the base 8 via the short support axis 240. The mirror holder 210 rotates in a first direction via the long support axis 230 and in a second direction via the short support axis 240. Further, in this embodiment, the first and second directions are perpendicular.

[0061] Furthermore, in this embodiment, the center lines of the mirror holder 210, the supporting long axis 230, and the supporting frame 220 coincide. The supporting frame 220 has a pair of first through holes at both ends along the first center line. The supporting long axis 230 passes through the pair of first through holes, rotatably connecting the mirror holder 210 and the supporting frame 220. The mirror holder 210 is a supporting component for mounting the reflector lens 1. Its structure is a plate design, possessing good flatness and rigidity to ensure stable installation and uniform force distribution of the reflector lens. The mirror holder 210 is installed inside the supporting frame 220 via the supporting long axis 230, constituting the first degree of rotational freedom. The supporting long axis 230 serves as a rotating shaft connecting the mirror holder and the supporting frame; its axis is defined as the first center line, corresponding to the rotation of the reflector lens in the first direction. Both ends of the supporting long axis 230 pass through a pair of first through holes on the supporting frame 220, forming a symmetrical rotational connection. In use, the mirror holder 210 can rotate precisely around the supporting long axis 230, thereby enabling angle adjustment of the lens in the first direction.

[0062] The supporting short shafts 240 are configured as a pair, and the supporting frame 220 is provided with a pair of second through holes at both ends along the second center line, and the pair of supporting short shafts 240 are respectively disposed in the pair of second through holes;

[0063] The outer periphery of the supporting short shaft 240 is sequentially fitted with a spacer ring, a miniature deep groove ball bearing, and a wave spring. The miniature deep groove ball bearing provides low-friction support when the supporting frame 220 rotates relative to the base 5 in a second direction, and the wave spring applies axial preload to the miniature deep groove ball bearing. The supporting frame 220 is the skeleton structure of the entire rigid support assembly, used to support the mirror holder 210 and form a second degree of freedom connection with the base 5. The supporting frame 220 has high overall strength and bending rigidity, ensuring the stability of the reflector during dynamic movement. A pair of second through holes are provided at both ends along the second centerline direction for the supporting short shaft 240 to pass through. The supporting short shafts 240 are a pair, symmetrically arranged, with their axis defined as the second centerline, orthogonal to the first centerline. Through the supporting short shafts 240, the supporting frame 220 can rotate relative to the base 5 around the second direction, thus forming a cross-axis rotation mechanism. To ensure smooth and accurate rotation, the outer periphery of the supporting short shaft 240 is sequentially fitted with a spacer ring, a miniature deep groove ball bearing, and a wave spring. Miniature deep groove ball bearings are the core rotating support element of this structure. They have advantages such as compact structure, low rotational resistance, and stable operation, making them suitable for applications involving small rotation angles and high-frequency motion. By using miniature deep groove ball bearings, frictional loss can be effectively reduced when the support frame 220 rotates relative to the base 5 in the second direction, thereby improving angle control accuracy and response speed.

[0064] Meanwhile, to prevent problems such as loosening and runout of the bearing during long-term operation, the wave spring is installed on one side of the bearing, applying a constant axial preload to it, thus serving a dual purpose of compression and vibration damping. The wave spring is an elastic element with good compression characteristics and restoring ability; its placement helps maintain the operational stability and long service life of the bearing system.

[0065] The rigid support assembly 2 achieves high-precision rotational movement of the reflector lens in two-dimensional orthogonal directions. Furthermore, the optimized combination of bearings and springs effectively enhances the overall system's mechanical stability, rotational sensitivity, and long-term reliability. In addition, the centerlines of the lens holder, support shaft, and support frame are designed to coincide, further strengthening the symmetry and balance of the assembly, reducing eccentric torque, and avoiding nonlinear errors and mechanical coupling interference during lens rotation.

[0066] in, Figure 4 This is a schematic diagram of an eddy current sensor assembly according to an embodiment of the present invention, as shown below. Figure 4As shown, the base 5 includes a base body 510, a base circuit board 520, and a base bottom cover 530. The eddy current sensor assembly 4 includes an eddy current circuit board 410 and at least two pairs of eddy current sensor probes 420. Each eddy current sensor probe 420 includes a multi-layer coil, which is printed on the eddy current circuit board 410, and each pair of eddy current sensor probes 420 is symmetrically arranged on the eddy current circuit board 410. In this embodiment, the eddy current sensor assembly 4 is disposed inside the base 5 and is mainly used to monitor the deflection angle of the reflector lens in real time, thereby realizing closed-loop control and precise adjustment of the reflection system. The eddy current sensor probes 420 are used to detect the deflection angle of the reflector assembly 1. The eddy current circuit board 410 serves as the carrier for the eddy current sensor assembly 4, responsible for supporting and connecting each eddy current sensor probe 420. The eddy current sensor probe 420 is a non-contact detection component for angular displacement, its structure consisting of multi-layered micro-coils integrated onto the surface of the eddy current circuit board 410 using precision printed circuit technology. Compared to traditional mechanical sensors, it features a simpler design, lower cost, and better consistency, making it particularly suitable for applications involving high-frequency vibration and rapid scanning. Each pair of eddy current sensor probes 420 is symmetrically arranged on the eddy current circuit board 410. In this embodiment, two pairs of probes are vertically positioned in a cross shape to sense the angular changes of the reflector assembly in two orthogonal directions. Each pair of eddy current sensor probes 420 is symmetrically arranged on the circuit board 410, located at corresponding positions outside the mirror holder 210 or support frame 220. This symmetrical arrangement allows for differential measurement, improving the anti-interference capability and stability of the detection; it also enables multi-axis measurement of two-dimensional angles, i.e., monitoring the deflection of the lens on two orthogonal rotation axes. A tiny gap is maintained between the eddy current sensor probe 420 and the mirror holder. The deflection of the mirror causes a change in this gap, which in turn alters the electromagnetic parameters sensed by the probe. The eddy current circuit board calculates these minute changes in voltage, inductance, or impedance, ultimately outputting a displacement or angle signal proportional to the angle change. Four eddy current sensor probes 420 can measure the deflection of the mirror assembly in four directions, maintaining a preset distance from the center of the mirror holder. Furthermore, the number of sensors is not limited; the number can be increased as long as it is sufficient to measure and provide feedback on the deflection of the mirror assembly.

[0067] The moving-magnetic electromagnetic drive assembly 3 includes two pairs of permanent magnets 310 and two pairs of drive coils 320. The drive coils 320 and permanent magnets 310 are arranged symmetrically in pairs around the central axis of the reflector lens 1. A driving torque is generated through the interaction of the magnetic field and the current to achieve high-response angle adjustment of the reflector lens in space. This structure not only simplifies the complex mechanical structure of traditional rotary motors but also has significant advantages such as fast response speed, high control precision, and compact structure.

[0068] Two pairs of drive coils 320 are vertically embedded in mounting slots on the base body 510 and bonded to the sidewalls of the mounting slots of the base body 510 by epoxy resin injection. The permanent magnets 310 are correspondingly positioned inside the drive coils 320. This symmetrical layout effectively balances the magnetic force distribution of the system, reduces system vibration and structural displacement caused by uneven torque, and improves drive stability and deflection symmetry. The two pairs of drive coils 320 are vertically embedded in pre-set mounting slots on the base body 510 for easy installation. Each permanent magnet 310 is correspondingly positioned inside its respective drive coil 320, so that when a control current is applied to the drive coil 320, a spatially varying magnetic field is generated around the permanent magnet. This magnetic field interacts with the inherent magnetic field of the permanent magnet, thereby generating an electromagnetic force or torque acting on the reflector support structure. This torque is transmitted to the reflector lens through a rigid support assembly, achieving deflection of the lens in a predetermined direction. By controlling the magnitude and sequence of the current, the deflection angle and direction of the reflector can be precisely controlled, meeting the application requirements of two-dimensional large-angle control. The permanent magnet 310 and the driving coil 320 are respectively disposed within the coil cavity, serving as the main body for electromagnetic force response. The magnets are made of magnetic materials such as AlNiCo, FeChCrCo, ferrite, Samarium Cobalt, and Neodymium Iron Boron. Preferably, in this embodiment, Neodymium Iron Boron is used as the permanent magnet material to ensure high remanence, high coercivity, and stable magnetic properties. The driving coil 320 can be made of conductive materials such as copper, aluminum, iron, silver, and gold. Preferably, in this embodiment, copper enameled wire is used as the coil material.

[0069] Figure 5 This is a schematic diagram of a permanent magnet according to an embodiment of the present invention, as shown below. Figure 5 As shown, the end of the permanent magnet 310 furthest from the reflector lens 1 is configured as a conical structure, or a combination of conical and arc-shaped structures. Compared to traditional cylindrical or square permanent magnets, the conical structure reduces the bottom volume while maintaining magnetic performance, making the entire moving magnet assembly more compact and providing greater operating space. The near-conical magnet provides ample room for movement, preventing collisions between the magnet and the coil due to excessive deflection angles when the reflector deflects at large angles. The vertically placed coil reduces assembly difficulty and costs.

[0070] Figure 6This is a cross-sectional view of the base according to an embodiment of the present invention, as shown below. Figure 6 As shown, the base circuit board 520 is disposed at the end of the base body 510 away from the reflector lens 1; the base bottom cover 530 seals the base circuit board 520; the eddy current circuit board 410 is disposed at the end of the base body 510 close to the reflector lens 1; the base circuit board 520 is mounted to the bottom of the base body by screws, slots, or guide rails, and is sealed and encapsulated below by the base bottom cover 530 to achieve functions such as structural protection, dustproof, moisture-proof, and electromagnetic shielding. The bottom cover material can be metal or high-strength plastic, and a silicone gasket is provided in the sealing area to improve environmental adaptability.

[0071] The eddy current circuit board 410 includes solder pins 411, and the base body 510 has solder pin through holes. The solder pins 411 and the solder pin through holes are adapted to each other, and the eddy current circuit board 410 is connected to the base circuit board 520 through the solder pins 411 and the solder pin through holes. At one end of the base body 510 near the reflector lens 1, an eddy current circuit board 410 is provided. This circuit board integrates multiple eddy current sensor probes 420 for non-contact real-time monitoring of the lens deflection angle and transmitting the signal acquisition results to the base circuit board 520 below for processing. Signal transmission on the eddy current circuit board 410 is achieved through solder pins 411 disposed on its surface. The base body 510 has solder pin through holes at corresponding positions for a plug-in vertical connection between the eddy current circuit board 410 and the base circuit board 520. The solder pins 411 pass through these solder pin through holes and are inserted into corresponding sockets in the base circuit board 520 below, thereby achieving circuit connection. It avoids problems such as poor contact and easy breakage that may occur in traditional ribbon cable connection methods, improves connection reliability and vibration resistance, and is especially suitable for use in long-term operation and high-frequency vibration conditions.

[0072] The system also includes a limiting block 6, which abuts the eddy current circuit board 410 against the base body 510. To ensure the eddy current circuit board 410 is securely fixed inside the base body 510 and does not shift, the limiting block 6 is provided. The limiting block 6 is made of a rigid material, such as POM, aluminum alloy, or stainless steel, and its structure can be L-shaped, wedge-shaped, or groove-shaped, precisely fitting the shape of the base body's internal cavity. During assembly, the limiting block 6 is installed between the eddy current circuit board 410 and the base body 510, mechanically limiting the circuit board to the preset mounting surface, preventing loosening, displacement, or unstable connection due to vibration during operation. Through the layered circuit system, vertical plug-in electrical connection scheme, and limiting structure design, compact integration, stable connection, and reliable support of each functional module are achieved.

[0073] Furthermore, in this embodiment, a connecting piece 7 is also included. The end of the permanent magnet 310 near the reflector lens 1 is connected to the mirror holder 210 via the connecting piece 7. A connecting groove is provided at the bottom of the mirror holder 210, and the position and number of the connecting grooves correspond to the connecting piece 7. The moving magnet electromagnetic drive assembly 3 is fixedly connected to the mirror holder 210 via the connecting piece 7 and the connecting groove. The end of the permanent magnet 310 near the reflector lens 1 is connected to the mirror holder 210 via the connecting piece 7, realizing the rigid force transmission from the magnetic force generating component to the mirror support component. The connecting piece 7, as an intermediate connecting component, has one end fixedly connected to the permanent magnet 310, and the other end inserted into or embedded in the connecting groove at the bottom of the mirror holder 210, forming a stable mechanical connection. During the driving process, electromagnetic force is effectively transmitted to the mirror holder, thereby driving the reflector lens to complete a precise angular deflection. The number and position of the connecting grooves correspond one-to-one with the arrangement of the connecting piece 7, ensuring that the connecting piece can achieve precise positioning and obtain sufficient clamping force after insertion. By adding a connecting piece between the permanent magnet and the mirror holder, and setting a matching connecting slot at the bottom of the mirror holder, a high-strength, assemblable, and easy-to-maintain rigid connection method is achieved between the moving magnet electromagnetic drive component and the core bearing structure of the reflector.

[0074] Figure 7 An input-output relationship block diagram of one embodiment of the present invention is shown, as follows: Figure 7 As shown,

[0075] The host computer outputs control commands to the moving magnet electromagnetic drive component 3 through the motor line 8. The eddy current sensor probe 420 detects the deflection signal and transmits it to the base circuit board 520. The base circuit board 520 generates an analog signal and transmits it to the host computer through the communication cable for closed-loop control.

[0076] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet electromagnetic drive assembly according to an embodiment of this utility model; Figure 9 This is a schematic diagram of the signal output of an eddy current sensor assembly according to an embodiment of the present invention, as shown below. Figure 8 and Figure 9As shown, it also includes a motor cable 8, which connects to the moving magnet electromagnetic drive assembly 3 and the host computer at both ends. The motor cable 8 includes four sets of control cables, each set including one positive wire and one negative wire. The moving magnet electromagnetic drive assembly 3 is controlled by the host computer. The motor cable includes four sets of cables: X red wire, X black wire, Y red wire, and Y black wire, which control the X+, X-, Y+, and Y- direction coils, respectively. Each set of cables contains two cables, one positive and one negative, for a total of eight cables. These cables are assembled with a DLL-5557-8Y connector to control the voice coil motor. The DLL-5557-8Y connector has eight interfaces, arranged in four groups of two, one above the other. Each group of interfaces corresponds to one set of cables, which connect to the X red wire, X black wire, Y red wire, and Y black wire from left to right.

[0077] The sensor assembly integrates the measured rotation angle information of the fast-reflecting mirror into the FH62S-10S-0.5SH connector via a circuit board. Communication cable 9 connects to the connector to directly feed back the angle information to the user as an analog signal. The FH62S-10S-0.5SH connector contains ten interfaces. Interfaces 1, 3, 5, and 8 are grounded; interfaces 2 and 4 are connected to -5.5V and +5.5V voltages respectively; and interfaces 6, 7, 9, and 10 output ADY-, ADY+, ADX-, and ADX+ signals respectively.

[0078] This invention utilizes a moving-magnetic drive assembly to drive a rigid support assembly, causing the reflector lens to deflect in two orthogonal directions around the support's long and short axes. This overcomes the limitation of small deflection angles in existing reflector systems, enabling two-dimensional, large-angle, high-precision beam deflection to meet the application requirements of wide-range scanning and pointing control. The rigid support assembly includes a mirror holder, a support frame, and the support's long and short axes, employing a rigid shaft connection and embedded fit. The overall structure is compact, with minimal movement clearance and high support stiffness, improving the stability and response consistency of the reflector during dynamic deflection and avoiding the nonlinearity and hysteresis problems found in flexible mechanisms.

[0079] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

[0080] The above description does not provide detailed explanations of the technical aspects of each layer's patterning and etching. However, those skilled in the art should understand that various methods existing in the prior art can be used to form layers and regions of the desired shape. Furthermore, to form the same structure, those skilled in the art can also design methods that are not entirely identical to those described above.

[0081] The present invention has been described above with reference to embodiments thereof. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the present invention, and all such substitutions and modifications should fall within the scope of the present invention.

[0082] Although the embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions and modifications can be made to the embodiments of the present invention without departing from the spirit and scope of the present invention.

[0083] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A two-dimensional large-angle fast-reflecting mirror device based on rigid support, characterized in that, include: The reflector lens (1), rigid support assembly (2), moving magnet electromagnetic drive assembly (3), eddy current sensor assembly (4) and base (5); The reflector lens (1) is connected to the base (5) via a rigid support assembly (2); The reflector lens (1), rigid support assembly (2) and base (5) are coaxially connected in sequence; The moving magnet type electromagnetic drive assembly (3) and the eddy current sensor assembly (4) are arranged around the center of the base (5); the moving magnet type electromagnetic drive assembly (3) drives the rigid support assembly (2) to drive the reflector lens (1) to deflect within a set angle; the eddy current sensor assembly (4) is used to detect the deflection angle of the reflector lens (1). The rigid support assembly (2) includes a mirror holder (210), a support frame (220), a support long axis (230), and a support short axis (240). The mirror lens (1) is connected to the mirror holder (210), the mirror holder (210) is set in the support frame (220) through the support long axis (230), and the support frame (220) is connected to the base (5) through the support short axis (240); The mirror holder (210) rotates in a first direction via the long support axis (230) and in a second direction via the short support axis (240).

2. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 1, characterized in that, The center lines of the mirror holder (210), the support long axis (230) and the support frame (220) coincide. The support frame (220) is provided with a pair of first through holes at both ends along the first center line. The support long axis (230) passes through the pair of first through holes to rotatably connect the mirror holder (210) and the support frame (220).

3. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 1, characterized in that, The supporting short shafts (240) are configured as a pair, and the supporting frame (220) is provided with a pair of second through holes at both ends along the second center line, and the pair of supporting short shafts (240) are respectively disposed in the pair of second through holes; The outer periphery of the support short shaft (240) is sequentially fitted with a spacer ring, a miniature deep groove ball bearing and a wave spring. The miniature deep groove ball bearing is used to provide low-friction support when the support frame (220) rotates relative to the base (5) in a second direction. The wave spring is used to apply axial preload to the miniature deep groove ball bearing.

4. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 1, characterized in that, The eddy current sensor assembly (4) includes an eddy current circuit board (410) and at least two pairs of eddy current sensor probes (420); the eddy current sensor probes (420) include multi-layer coils, which are printed on the eddy current circuit board (410), and each pair of eddy current sensor probes (420) is symmetrically arranged on the eddy current circuit board (410).

5. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 4, characterized in that, The base (5) includes a base body (510), a base circuit board (520), and a base bottom cover (530). The base circuit board (520) is disposed at the end of the base body (510) away from the reflector lens (1). The base bottom cover (530) seals the base circuit board (520). The eddy current circuit board (410) is disposed at the end of the base body (510) close to the reflector lens (1). The eddy current circuit board (410) includes a solder pin (411), and the base body (510) is provided with a solder pin through hole. The solder pin (411) and the solder pin through hole are adapted to each other. The eddy current circuit board (410) is connected to the base circuit board (520) through the solder pin (411) and the solder pin through hole.

6. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 5, characterized in that, It also includes a limiting block (6) that abuts the eddy current circuit board (410) against the base body (510).

7. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 5, characterized in that, The moving magnet type electromagnetic drive assembly (3) includes two pairs of permanent magnets (310) and two pairs of drive coils (320). The drive coils (320) and the permanent magnets (310) are arranged symmetrically in pairs around the central axis of the reflector lens (1). Two pairs of drive coils (320) are vertically embedded in the mounting slots on the base body (510), and the permanent magnets (310) are correspondingly arranged inside the drive coils (320).

8. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 7, characterized in that, The end of the permanent magnet (310) away from the reflector lens (1) is configured as a conical structure, or as a structure combining a conical and an arc shape.

9. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 7, characterized in that, It also includes a connecting piece (7), and one end of the permanent magnet (310) near the mirror lens (1) is connected to the mirror holder (210) through the connecting piece (7).

10. The two-dimensional large-angle fast-reflecting mirror device based on rigid support according to claim 9, characterized in that, The bottom of the mirror holder (210) is provided with a connection slot. The position and number of the connection slots correspond to the connection piece (7). The moving magnet type electromagnetic drive assembly (3) is fixedly connected to the mirror holder (210) through the connection piece (7) and the connection slot.

Images