Air push type photoetching glue dropping device

Abstract

The utility model provides a kind of air push type photoetch glue dropping device, it is related to photoetch glue coating field, including operation platform, the inside fixed mounting of operation platform is equipped with electric slide rail, the outside sliding installation of electric slide rail is equipped with glue dropping box, the inside fixed communication of glue dropping box is equipped with glue storage cylinder, the upper fixed mounting of glue dropping box is equipped with flowmeter, the bottom end fixed communication of glue storage cylinder is equipped with glue dropping head, the outside of glue storage cylinder is provided with back suction mechanism, the component such as flowmeter, glue storage cylinder, glue dropping head and back suction mechanism are set in this application, flowmeter is used for real-time monitoring gas quantity filled in glue storage cylinder, it is convenient that device can be according to glue dropping demand accurate control glue dropping dosage, avoid causing photoetch glue waste, back suction mechanism is convenient to the photoetch glue in glue dropping head and is sucked back to glue storage cylinder, avoid photoetch glue and be polluted by air for long time to stay in glue dropping head, reduce the probability of photoetch glue solidification, improve the quality of subsequent glue spreading operation.

Description

Technical Field

[0001] This utility model relates to a dispensing device, specifically an air-push photolithography dispensing device, belonging to the field of photolithography coating technology. Background Technology

[0002] Photolithography dispensing equipment is a key piece of equipment in semiconductor manufacturing used to uniformly coat photoresist on the surface of wafers. Its core function is to form a photoresist film with controllable thickness and high uniformity by precisely controlling the material delivery parameters.

[0003] According to patent CN221934398U, a high-viscosity photoresist dispensing device is disclosed, which includes a glue cylinder and a glue tube connected to the glue cylinder, and also includes a TEL coating machine control unit. The glue tube is connected to the bottom of the glue cylinder, and a nitrogen tube is connected to the top of the glue cylinder.

[0004] The above-mentioned solutions replace the photoresist pump with a glue cartridge and nitrogen tube, enabling pump-free operation and adapting to various photoresist viscosities. However, these solutions are difficult to precisely control the amount of photoresist dispensed, easily leading to photoresist waste. Furthermore, they are inconvenient to control photoresist backflow, and excess photoresist in the cartridge can solidify in the dispensing head, affecting the homogenization quality. Therefore, we provide an air-push photoresist dispensing device to solve these problems. Utility Model Content

[0005] The purpose of this invention is to provide an air-push photolithography dispensing device to solve the above-mentioned problems, thereby addressing the difficulties in accurately controlling the amount of dispensing material and the inconvenience in re-suctioning the photoresist in the dispensing head of common dispensing devices in the prior art.

[0006] This utility model is achieved through the following technical solution: a pneumatic photolithography dispensing device, comprising a working platform, an electric slide rail fixedly installed inside the working platform, a dispensing box slidably installed outside the electric slide rail, a glue storage cylinder fixedly connected inside the dispensing box, a flow meter fixedly installed above the dispensing box, the top end of the glue storage cylinder fixedly connected to the output end of the flow meter, a dispensing head fixedly connected to the bottom end of the glue storage cylinder, and a back suction mechanism provided outside the glue storage cylinder, the back suction mechanism including a pressure relief pipe fixedly connected to the glue storage cylinder, and a pressure relief piston slidably connected inside the pressure relief pipe.

[0007] Preferably, a slide rod is fixedly connected to the outer surface of the pressure relief piston, and a spring is sleeved on the outer surface of the slide rod, the spring providing power for the reset of the pressure relief piston.

[0008] Preferably, a fixing ring is fixedly connected inside the pressure relief pipe, the slide rod is slidably connected to the fixing ring, and the two ends of the spring are fixedly connected to the pressure relief piston and the fixing ring respectively. The fixing ring provides support for the installation and compression of the spring.

[0009] Preferably, a plug is fixedly connected to the end of the slide rod, and a valve is fixedly installed inside the pressure relief pipe. The valve is used to control the opening and closing of the internal passage of the pressure relief pipe.

[0010] Preferably, the inside of the glue storage cylinder is slidably connected to a dispensing piston and a pneumatic piston, and the outer surface of the glue storage cylinder is fixedly connected to an addition tube, which facilitates the addition of photoresist to the glue storage cylinder by the operator.

[0011] Preferably, a one-way valve is fixedly installed inside the adding tube, and a solenoid valve is fixedly installed at the bottom end of the glue storage cylinder. The solenoid valve is used to control the opening and closing of the channel at the bottom end of the glue storage cylinder.

[0012] Preferably, the outer surface of the dispensing box is hinged with a hinged door, which serves to protect the internal structure of the dispensing box.

[0013] Preferably, a dispensing air pump is fixedly installed above the work platform. The output end of the dispensing air pump is fixedly connected to an air pipe, which is connected to the input end of a flow meter. The dispensing air pump is used to fill the glue storage cylinder with nitrogen.

[0014] This invention provides an air-driven photolithography dispensing device, which has the following beneficial effects: 1. This application incorporates components such as a flow meter, a storage tank, a dispensing head, and a back suction mechanism. The flow meter monitors the amount of gas filling the storage tank in real time, allowing the device to accurately control the amount of photoresist used according to dispensing requirements, thus avoiding waste. The back suction mechanism facilitates the back suction of photoresist from the dispensing head back into the storage tank, preventing the photoresist from remaining in the dispensing head for extended periods and becoming contaminated by air. This also reduces the probability of photoresist solidification and improves the quality of subsequent homogenization operations.

[0015] 2. This application, through the setting of components such as pressure relief pipe, pressure relief piston, spring and valve, facilitates the release of gas inside the glue storage cylinder by the staff, thereby creating a pressure difference inside the glue storage cylinder. The pressure difference is used to draw the photoresist in the dispensing head back into the glue storage cylinder, thereby effectively preventing the photoresist from remaining in the dispensing head and solidifying, and ensuring the normal use of the photoresist. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a partial structural schematic diagram of the present invention; Figure 3 This is a schematic diagram of the internal structure of the dispensing box of this utility model; Figure 4 This is a cross-sectional view of the internal structure of the glue storage cylinder of this utility model; Figure 5 This is a cross-sectional view of the back suction mechanism of this utility model.

[0017] [Explanation of Key Component Symbols] 1. Working platform; 2. Electric slide rail; 3. Glue dispensing tank; 4. Glue storage cylinder; 5. Glue dispensing head; 6. Glue dispensing piston; 7. Pneumatic piston; 8. Addition tube; 9. Back suction mechanism; 901. Pressure relief pipe; 902. Pressure relief piston; 903. Slide rod; 904. Spring; 905. Retaining ring; 906. Plug; 907. Valve; 10. Check valve; 11. Solenoid valve; 12. Hinged door; 13. Flow meter; 14. Dispenser air pump; 15. Air hose. Detailed Implementation

[0018] This utility model provides an air-push type photolithography dispensing device. Example 1

[0019] Please see Figure 1 The device includes a work platform 1, with an electric slide rail 2 fixedly installed inside. The work platform 1 provides support for the installation and use of the device. The work platform 1 includes a control console for the operation of various electrical devices in the control device, and also has a dispensing stage for placing wafers. The electric slide rail 2 can drive the dispensing box 3 to move, thereby facilitating the device to perform dispensing operations at designated locations. The structural structures of each component shown in the accompanying drawings of this application are all exemplary illustrations. Their specific real-time operation should be adapted and optimized by combining the functional requirements, assembly conditions and process limitations in the actual application scenario, and adjusting the structural parameters, size specifications and connection methods accordingly.

[0020] A dispensing pump 14 is fixedly installed above the work platform 1. The output end of the dispensing pump 14 is fixedly connected to an air pipe 15. The air pipe 15 is connected to the input end of the flow meter 13. The dispensing pump 14 is connected to a nitrogen tank, which can fill the glue storage cylinder 4 with nitrogen through the air pipe 15 and the flow meter 13, thereby providing power for the air-push dispensing operation. The air pipe 15 has a certain degree of plasticity and will not obstruct the movement of the dispensing box 3.

[0021] Please see Figure 1 , Figure 2 and Figure 3A flow meter 13 is fixedly installed above the dispensing tank 3. The top of the glue storage cylinder 4 is fixedly connected to the output end of the flow meter 13. The flow meter 13 is used to detect the instantaneous flow rate and cumulative flow rate of nitrogen input in the pipeline. The operator inputs the amount of glue to be dispensed in advance through the control panel. The control panel can calculate the volume of nitrogen to be filled based on the input quantity and control the dispensing air pump 14 to start according to the calculation result. When the flow meter 13 detects that the gas filling amount has reached the set value, the control panel controls the dispensing air pump 14 to shut down, so that the dispensing air pump 14 can accurately fill the gas, which facilitates the device to accurately control the amount of glue dispensed and avoids waste of photoresist. Example 2

[0022] Please refer to it again. Figure 1 , Figure 2 and Figure 3 The electric slide rail 2 has a dispensing tank 3 slidably mounted on its exterior. The outer surface of the dispensing tank 3 is hinged to a hinged door 12, which protects the internal components of the dispensing tank 3. Both the dispensing cylinder 4 and the hinged door 12 have observation windows supported by tempered glass, allowing staff to directly observe the amount of photoresist inside the dispensing cylinder 4. This facilitates timely addition of photoresist to the dispensing cylinder 4 when the amount is insufficient, preventing insufficient photoresist from affecting subsequent coating operations.

[0023] The inside of the dispensing tank 3 is fixedly connected to a photoresist storage cylinder 4. The bottom end of the photoresist storage cylinder 4 is fixedly connected to a dispensing head 5. A solenoid valve 11 is fixedly installed at the bottom end of the photoresist storage cylinder 4. The photoresist storage cylinder 4 is used to store photoresist, so that the photoresist can be dripped from the dispensing head 5 onto the wafer for coating. The solenoid valve 11 is used to control the opening and closing of the bottom end of the photoresist storage cylinder 4 to prevent the photoresist sucked back into the photoresist storage cylinder 4 from coming into contact with air and solidifying or becoming contaminated, thus ensuring the normal use of the photoresist.

[0024] Please see Figure 3 and Figure 4 The glue storage cylinder 4 has a sliding connection between a dispensing piston 6 and a pneumatic piston 7. An adding tube 8 is fixedly connected to the outer surface of the glue storage cylinder 4. A one-way valve 10 is fixedly installed inside the adding tube 8. Both the dispensing piston 6 and the pneumatic piston 7 are sealed to the glue storage cylinder 4. When the dispensing pump 14 injects nitrogen into the glue storage cylinder 4 through the air pipe 15, the pneumatic piston 7 descends under the pressure of the nitrogen. This descent of the pneumatic piston 7 pushes the dispensing piston 6 downwards, allowing the dispensing piston 6 to push the photoresist in the glue storage cylinder 4 from the dispensing head 5, completing the dispensing operation. The adding tube 8 facilitates the addition of photoresist to the glue storage cylinder 4, and the one-way valve 10 controls the flow direction in the adding tube 8 to prevent gas inside the glue storage cylinder 4 from escaping through the adding tube 8 during photoresist addition. Example 3

[0025] Please see Figure 3 , Figure 4 and Figure 5 The external part of the glue storage cylinder 4 is provided with a back suction mechanism 9. The back suction mechanism 9 includes a pressure relief pipe 901 fixedly connected to the glue storage cylinder 4. A valve 907 is fixedly installed inside the pressure relief pipe 901. The valve 907 is used to control the opening and closing of the pressure relief pipe 901, which facilitates the pressure relief operation of the pressure relief pipe 901 and effectively prevents nitrogen from escaping through the pressure relief pipe 901. Through the setting of the back suction mechanism 9, the dispensing piston 6 can be raised under the action of air pressure by pressure relief, thereby back suctioning the photoresist in the glue storage cylinder 4 and the dispensing head 5, preventing the photoresist from staying in the dispensing head 5 for a long time and being contaminated by air, while reducing the probability of photoresist solidification and improving the quality of subsequent homogenization operations.

[0026] A pressure relief piston 902 is slidably connected inside the pressure relief pipe 901. A slide rod 903 is fixedly connected to the outer surface of the pressure relief piston 902. A plug 906 is fixedly connected to the end of the slide rod 903. The pressure relief piston 902 and the pressure relief pipe 901 have good sealing performance. A pressure relief hole is opened on the surface of the pressure relief pipe 901. The end of the plug 906 has a pull ring. When the dispensing operation is completed, if the operator wants to suck the excess photoresist in the dispensing head 5 back into the storage tank 4, the operator first turns on the valve 907 to open the pressure relief pipe 901, and then pulls the pull ring of the plug 906. The plug 906 is subjected to force and drives the pressure relief piston 902 to slide inside the pressure relief pipe 901 through the slide rod 903. When the pressure relief piston 902 slides to the point of being misaligned with the pressure relief hole, the nitrogen gas inside the storage tank 4 will be quickly discharged through the pressure relief hole, thereby allowing the dispensing piston 6 and the air-push piston 7 to rise, and finally complete the back suction operation of the photoresist in the dispensing head 5.

[0027] A spring 904 is fitted on the outer surface of the slide rod 903, and a fixing ring 905 is fixedly connected inside the pressure relief pipe 901. The slide rod 903 is slidably connected to the fixing ring 905. The two ends of the spring 904 are fixedly connected to the pressure relief piston 902 and the fixing ring 905, respectively. The spring 904 has a large elastic potential energy. When the plug 906 is pulled, the pressure relief piston 902 will compress the spring 904 and slide inside the pressure relief pipe 901. After the pressure relief is completed, the operator releases the plug 906. At this time, the pressure relief piston 902 will reset under the action of the elastic potential energy of the spring 904 and seal the pressure relief hole, thereby preventing the gas in the glue storage cylinder 4 from flowing out and ensuring the stability of the gas pressure in the glue storage cylinder 4.

[0028] Working Principle: During operation, the operator first places the wafer on the dispensing stage of the work platform 1, sets the required amount of photoresist via the control panel, calculates the volume of nitrogen gas needed, and starts the dispensing pump 14. The dispensing pump 14 injects nitrogen gas into the reservoir 4 via the gas pipe 15 and flow meter 13. The gas-push piston 7 descends inside the reservoir 4, propelled by the nitrogen gas, and the dispensing piston 6 also descends accordingly, pushing the photoresist in the reservoir 4 from the dispensing head 5 onto the wafer, completing the dispensing operation. During the dispensing process, the flow meter 13 monitors the instantaneous and cumulative flow rates of nitrogen gas in the pipeline in real time to ensure precise control of the dispensing amount. After the dispensing operation is completed, if excess photoresist in the dispensing head 5 needs to be drawn back into the storage cylinder 4, the operator will operate valve 907 to open the pressure relief pipe 901, and then pull the pull ring of the plug 906. The plug 906 will drive the pressure relief piston 902 to slide inside the pressure relief pipe 901 via the slide rod 903. When the pressure relief piston 902 is misaligned with the pressure relief hole, nitrogen gas in the storage cylinder 4 will be quickly discharged through the pressure relief hole, causing the dispensing piston 6 and the air-push piston 7 to slide and rise inside the storage cylinder 4. The pressure change will then drive the photoresist in the dispensing head 5 back into the storage cylinder 4. Then, the operator will release the plug 906 and pull valve 907 to reset. At this time, the pressure relief piston 902 will reset under the elastic potential energy of the spring 904, sealing the pressure relief hole and ensuring stable air pressure in the storage cylinder 4. Finally, the operator will close the lower channel of the storage cylinder 4 by controlling the solenoid valve 11.

[0029] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A pneumatic photolithography dispensing apparatus, comprising a working platform (1), characterized in that: An electric slide rail (2) is fixedly installed inside the working platform (1). A glue dispensing box (3) is slidably installed outside the electric slide rail (2). A glue storage cylinder (4) is fixedly connected inside the glue dispensing box (3). A flow meter (13) is fixedly installed above the glue dispensing box (3). The top of the glue storage cylinder (4) is fixedly connected to the output end of the flow meter (13). A glue dispensing head (5) is fixedly connected to the bottom of the glue storage cylinder (4). A back suction mechanism (9) is provided outside the glue storage cylinder (4). The back suction mechanism (9) includes a pressure relief pipe (901) that is fixedly connected to the glue storage cylinder (4), and a pressure relief piston (902) is slidably connected inside the pressure relief pipe (901).

2. The air-push type photolithography dispensing device according to claim 1, characterized in that: The outer surface of the pressure relief piston (902) is fixedly connected to a slide rod (903), and a spring (904) is sleeved on the outer surface of the slide rod (903).

3. The air-pumped photolithography dispensing apparatus according to claim 2, characterized in that: The pressure relief pipe (901) is internally fixedly connected to a fixing ring (905), the slide rod (903) is slidably connected to the fixing ring (905), and the two ends of the spring (904) are fixedly connected to the pressure relief piston (902) and the fixing ring (905) respectively.

4. The air-pumped photolithography dispensing apparatus according to claim 2, characterized in that: A plug (906) is fixedly connected to the end of the slide rod (903), and a valve (907) is fixedly installed inside the pressure relief pipe (901).

5. The air-pumped photolithography dispensing apparatus according to claim 1, characterized in that: The glue storage cylinder (4) is internally slidably connected to a dripping piston (6) and a pneumatic piston (7), and the outer surface of the glue storage cylinder (4) is fixedly connected to an adding tube (8).

6. The air-pumped photolithography dispensing apparatus according to claim 5, characterized in that: A one-way valve (10) is fixedly installed inside the adding tube (8), and a solenoid valve (11) is fixedly installed at the bottom of the glue storage cylinder (4).

7. The air-pumped photolithography dispensing apparatus according to claim 1, characterized in that: The outer surface of the dispensing box (3) is hinged to a hinged door (12).

8. The air-push type photolithography dispensing device according to claim 1, characterized in that: An air pump (14) for dispensing is fixedly installed above the work platform (1). An air pipe (15) is fixedly connected to the output end of the air pump (14). The air pipe (15) is connected to the input end of the flow meter (13).

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