A high voltage voltage doubler circuit

Abstract

The utility model discloses a kind of high-voltage voltage doubler circuits, it is related to voltage doubler circuit field, including positive voltage doubler circuit and negative voltage doubler circuit, the positive voltage doubler circuit and negative voltage doubler circuit are electrically connected with high-voltage voltage doubler circuit output end;The positive voltage doubler circuit is used to generate positive voltage doubler voltage Vout1 after input voltage Vin1 voltage doubling, the negative voltage doubler circuit is used to generate negative voltage doubler voltage Vout2 opposite to positive voltage doubler voltage Vout1 after input voltage Vin2 voltage doubling, high-voltage voltage doubler circuit generates output voltage Vout according to positive voltage doubler voltage Vout1 and negative voltage doubler voltage Vout2 and is exported by the output end of high-voltage voltage doubler circuit, wherein, the difference of positive voltage doubler voltage Vout1 and negative voltage doubler voltage Vout2 is configured as preset target voltage Vexp.This circuit can realize more extensive voltage output, and with the advantages of high stability, strong reliability.

Description

Technical Field

[0001] This utility model relates to the field of voltage multiplier circuits, and in particular to a high voltage multiplier circuit. Background Technology

[0002] In semiconductor manufacturing, a high-voltage power supply is required to power an ion source, enabling it to generate an ion beam for various processes such as etching and spraying. High-voltage power supplies typically use switching circuits, transformers, and other technologies to convert low voltage to thousands or tens of thousands of volts. Considering factors such as device voltage rating, conversion efficiency, and insulation, such as... Figure 1 For example, different circuits are used in high-voltage power supplies to raise voltages in different ranges, gradually obtaining the final required high voltage. Among them, the voltage multiplier circuit related to this application is responsible for raising the voltage of the subsequent kilovolt level in the high-voltage power supply.

[0003] Commonly used voltage multiplier circuits, such as Figure 2-4 As shown, the circuit input Vin is AC. When Vin is negative at the top and positive at the bottom, the circuit behaves as follows. Figure 3 At this time, diode D1 conducts, and Vin begins to charge C1 until the voltage across C1 equals Vin; when Vin is positive at the top and negative at the bottom, the circuit is as follows. Figure 4 At this point, diode D2 conducts, and C1 and Vin begin charging C2 until the voltage across C2 equals 2Vin, thus achieving twice the output voltage. Afterward, each additional capacitor and diode increases the voltage across the capacitor by Vin. Figure 2 Once the circuit voltage stabilizes, the voltage across capacitor Cn is n times Vin. If Vin is taken as the reference ground, then the voltage of Vout to ground is 2n*Vin. The desired output voltage can be obtained by adjusting the effective value of Vin.

[0004] Semiconductor manufacturing processes have strict requirements for voltage stability and accuracy. Voltage fluctuations can cause changes in production speed and accuracy, reducing product yield. Meanwhile, due to the special nature of high voltage, high-voltage power supplies must have their output voltage limited to prevent uncontrolled output and damage to other components of the machine in the event of a power supply failure. Figure 2 The commonly used voltage multiplier circuit shown has an output voltage of 2n*Vin to ground under ideal conditions, which is suitable for applications where voltage accuracy is not high. However, in actual use, due to factors such as diode voltage drop, capacitor value, and temperature drift, the final output will be offset and difficult to calculate, so it cannot be directly used in semiconductor production. Utility Model Content

[0005] In response to the aforementioned problems and technical requirements, the applicant has proposed a high-voltage voltage multiplier circuit.

[0006] The technical solution of this utility model is as follows: A high voltage multiplier circuit includes a positive voltage multiplier circuit and a negative voltage multiplier circuit, wherein the positive voltage multiplier circuit and the negative voltage multiplier circuit are electrically connected to the output terminal of the high voltage multiplier circuit. The positive voltage multiplier circuit is used to multiply the input voltage Vin1 to generate a positive voltage multiplier Vout1. The negative voltage multiplier circuit is used to multiply the input voltage Vin2 to generate a negative voltage multiplier Vout2 that is opposite to the positive voltage multiplier Vout1. The high voltage multiplier circuit generates an output voltage Vout based on the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 and outputs it from the output terminal of the high voltage multiplier circuit. The difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 is configured as a preset target voltage Vexp.

[0007] A further technical solution is that the positive voltage multiplier circuit includes n1 positive voltage multiplier units connected in series, and each positive voltage multiplier unit includes capacitor C1, capacitor C2, diode D1, and diode D2, wherein... The second terminal of capacitor C1 is connected to the negative terminal of diode D1, the positive terminal of diode D1 is connected to the first terminal of capacitor C2, the second terminal of capacitor C2 is connected to the negative terminal of diode D2, the negative terminal of diode D1 is connected to the positive terminal of diode D2, the first terminal of capacitor C2 forms the first connection terminal of the positive voltage multiplier unit, the first terminal of capacitor C1 forms the second connection terminal of the positive voltage multiplier unit, the positive terminal of diode D2 forms the third connection terminal of the positive voltage multiplier unit, and the negative terminal of diode D2 forms the fourth connection terminal of the positive voltage multiplier unit. In n1 series-connected positive voltage multiplier units, the third connection terminal of each positive voltage multiplier unit is connected to the second connection terminal of the next positive voltage multiplier unit, and the fourth connection terminal of each positive voltage multiplier unit is connected to the first connection terminal of the next positive voltage multiplier unit. The first connection terminal of the first positive voltage multiplier unit is connected to the input voltage Vin1, and the second connection terminal of the first positive voltage multiplier unit is grounded.

[0008] A further technical solution is that the negative voltage multiplier circuit includes n² negative voltage multiplier units connected in series, each negative voltage multiplier unit including capacitor C1', capacitor C2', diode D1', and diode D2', wherein... The second terminal of capacitor C1' is connected to the positive terminal of diode D1', the negative terminal of diode D1' is connected to the first terminal of capacitor C2', the second terminal of capacitor C2' is connected to the positive terminal of diode D2', the positive terminal of diode D1' is connected to the negative terminal of diode D2', the first terminal of capacitor C1' forms the first connection terminal of the negative voltage multiplier unit, the first terminal of capacitor C2' forms the second connection terminal of the negative voltage multiplier unit, the positive terminal of diode D2' forms the third connection terminal of the negative voltage multiplier unit, and the negative terminal of diode D2' forms the fourth connection terminal of the negative voltage multiplier unit. In the n2 series-connected negative voltage multiplier units, the third connection terminal of each negative voltage multiplier unit is connected to the second connection terminal of the next negative voltage multiplier unit, and the fourth connection terminal of each negative voltage multiplier unit is connected to the first connection terminal of the next negative voltage multiplier unit. The first connection terminal of the first negative voltage multiplier unit is grounded, and the second connection terminal of the first negative voltage multiplier unit is connected to the input voltage Vin2.

[0009] The further technical solution is that n1=n2=n, where n is a positive integer.

[0010] The further technical solution is that the positive voltage multiplier Vout1 = 2nVin1 and the negative voltage multiplier Vout2 = 2nVin2.

[0011] A further technical solution is to configure the difference between the input voltage Vin1 and the input voltage Vin2 as a preset input voltage Vexpin, so that the difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 is a preset target voltage Vexp, where Vexpin = Vexp / 2n.

[0012] A further technical solution is that the high-voltage multiplier circuit also includes a monitoring circuit, which is used to monitor the difference between the positive multiplier voltage Vout1 and the negative multiplier voltage Vout2. The monitoring circuit includes resistors R1 and R2, and a gas discharge tube E1. In the negative voltage multiplier circuit, the third connection terminal of the last negative voltage multiplier unit is connected to the second terminal of the gas discharge tube E1 and the first terminal of the resistor R1. The first terminal of the gas discharge tube is connected to the first terminal of the resistor R2, and the second terminal of the resistor R1 is connected to the second terminal of the resistor R2.

[0013] A further technical solution is that the high-voltage multiplier circuit also includes a light-load circuit, wherein the resistance value of resistor R2 is less than the resistance value of resistor R1, and the resistance value of resistor R1 is less than the equivalent resistance of the light-load circuit; the light-load circuit includes a parallel resistor string, which includes multiple resistors, the first ends of the multiple resistors are connected to form the first end of the parallel resistor string, and the second ends of the multiple resistors are connected to form the second end of the parallel resistor string; the first end of the parallel resistor string is connected to the second end of resistor R2 and the output terminal of the high-voltage multiplier circuit, and the second end of the parallel resistor string is connected to the fourth connection terminal of the last positive voltage multiplier unit in the positive voltage multiplier circuit.

[0014] A further technical solution is that the high voltage multiplier circuit also includes a sampling circuit. The sampling circuit is used to sample the output voltage Vout to generate a sampling voltage VSENSE and transmit it to the host computer. The host computer adjusts the input voltage Vin1 and input voltage Vin2 according to the sampling voltage VSENSE. The sampling circuit includes resistors R3 and R4. The second end of resistor R4 is connected to the output end of the high voltage multiplier circuit. The first end of resistor R4 is connected to the second end of resistor R3 and the sampling output end. The sampling output end is connected to the host computer. The first end of resistor R3 is grounded.

[0015] A further technical solution is that the sampling circuit also includes TVS diodes TVS1 and TVS diodes TVS2. The negative terminal of TVS diode TVS1 is grounded, the positive terminal of TVS diode TVS1 is connected to the positive terminal of TVS diode TVS2, and the second terminal of TVS diode TVS2 is connected to the first terminal of resistor R4.

[0016] The beneficial technical effects of this utility model are: The high-voltage multiplier circuit provided by this invention generates the final output voltage based on the output voltages of the positive and negative multiplier circuits. When the output voltage of the positive multiplier circuit decreases, the remaining charge in the capacitor flows to the negative multiplier circuit due to the voltage difference. This design allows the power supply output to span positive and negative voltages, obtaining small voltages at the 0V and 100V levels, thus improving the linearity and performance of the power supply. Traditional multiplier circuits, on the other hand, cannot achieve a true 0V due to the residual charge in the capacitor. In noisy environments, introducing positive and negative voltages helps reduce common-mode interference and improves the accuracy of signal processing. Furthermore, this circuit features high output stability and reliability. It incorporates sampling and monitoring circuits to sample and adjust the output voltage in real time, resulting in a stable output. In the event of a circuit fault, it will not damage other circuits, and the sampling output terminal can still report the fault normally. Attached Figure Description

[0017] Figure 1 This is a block diagram of the high-voltage power supply principle provided in this application.

[0018] Figure 2 This is the circuit diagram of the conventional voltage multiplier circuit provided in this application.

[0019] Figure 3 This is a schematic diagram of the current flow direction of the conventional voltage multiplier circuit provided in this application when Vin is negative at the top and positive at the bottom.

[0020] Figure 4 This is a schematic diagram of the current flow direction of the conventional voltage multiplier circuit provided in this application when Vin is positive at the top and negative at the bottom.

[0021] Figure 5This is a circuit diagram of one embodiment of the high voltage multiplier circuit provided in this application. Detailed Implementation

[0022] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this disclosure.

[0023] This utility model provides a high voltage multiplier circuit, including a positive voltage multiplier circuit 1 and a negative voltage multiplier circuit 2, wherein the positive voltage multiplier circuit 2 and the negative voltage multiplier circuit 2 are electrically connected to the output terminal of the high voltage multiplier circuit. The positive voltage multiplier circuit 1 is used to multiply the input voltage Vin1 to generate a positive voltage multiplier Vout1. The negative voltage multiplier circuit 2 is used to multiply the input voltage Vin2 to generate a negative voltage multiplier Vout2 that is opposite to the positive voltage multiplier Vout1. The high voltage multiplier circuit generates an output voltage Vout based on the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 and outputs it from the output terminal of the high voltage multiplier circuit. The difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 is configured as a preset target voltage Vexp.

[0024] Specifically, the high-voltage multiplier circuit in this embodiment further includes a monitoring circuit 3 and a light-load circuit 5. The negative multiplier circuit 2 is connected to the second terminal of the monitoring circuit 3, and the positive multiplier circuit 1 is connected to the second terminal of the light-load circuit 5. The first terminals of both the light-load circuit 5 and the monitoring circuit 3 are connected to the output terminal. The positive multiplier voltage Vout1 is applied to the second terminal of the light-load circuit 5, and the negative multiplier voltage Vout2 is applied to the second terminal of the monitoring circuit 3. The output voltage Vout is obtained by voltage division by the voltage divider network formed by the resistors in the monitoring circuit 3 and the light-load circuit 5. The difference between the positive multiplier voltage Vout1 and the negative multiplier voltage Vout2 is configured as a preset target voltage Vexp to maintain a stable output voltage Vout. The preset target voltage Vexp can be determined based on the desired output voltage Vout and the voltage division of the voltage divider network formed by the resistors in the monitoring circuit 3 and the light-load circuit 5. The specific forms of the monitoring circuit 3 and the light-load circuit 5 can be referred to the following description. Further, please refer to Figure 5 The positive voltage multiplier circuit 1 includes n1 positive voltage multiplier units connected in series. Each positive voltage multiplier unit includes capacitor C1, capacitor C2, diode D1, and diode D2. The second terminal of capacitor C1 is connected to the negative terminal of diode D1, the positive terminal of diode D1 is connected to the first terminal of capacitor C2, the second terminal of capacitor C2 is connected to the negative terminal of diode D2, the negative terminal of diode D1 is connected to the positive terminal of diode D2, the first terminal of capacitor C2 forms the first connection terminal of the positive voltage multiplier unit, the first terminal of capacitor C1 forms the second connection terminal of the positive voltage multiplier unit, the positive terminal of diode D2 forms the third connection terminal of the positive voltage multiplier unit, and the negative terminal of diode D2 forms the fourth connection terminal of the positive voltage multiplier unit. In the n1 series-connected positive voltage multiplier units, the third connection terminal of each positive voltage multiplier unit is connected to the second connection terminal of the next positive voltage multiplier unit, and the fourth connection terminal of each positive voltage multiplier unit is connected to the first connection terminal of the next positive voltage multiplier unit; the first connection terminal of the first positive voltage multiplier unit is connected to the input voltage Vin1, and the second connection terminal of the first positive voltage multiplier unit is grounded.

[0025] The negative voltage multiplier circuit 2 includes n² negative voltage multiplier units connected in series. Each negative voltage multiplier unit includes capacitor C1', capacitor C2', diode D1', and diode D2'. The second terminal of capacitor C1' is connected to the positive terminal of diode D1', the negative terminal of diode D1' is connected to the first terminal of capacitor C2', the second terminal of capacitor C2' is connected to the positive terminal of diode D2', the positive terminal of diode D1' is connected to the negative terminal of diode D2', the first terminal of capacitor C1' forms the first connection terminal of the negative voltage multiplier unit, the first terminal of capacitor C2' forms the second connection terminal of the negative voltage multiplier unit, the positive terminal of diode D2' forms the third connection terminal of the negative voltage multiplier unit, and the negative terminal of diode D2' forms the fourth connection terminal of the negative voltage multiplier unit. In the n2 series-connected negative voltage multiplier units, the third connection terminal of each negative voltage multiplier unit is connected to the second connection terminal of the next negative voltage multiplier unit, and the fourth connection terminal of each negative voltage multiplier unit is connected to the first connection terminal of the next negative voltage multiplier unit; the first connection terminal of the first negative voltage multiplier unit is grounded, and the second connection terminal of the first negative voltage multiplier unit is connected to the input voltage Vin2.

[0026] In this embodiment, n1=n2=n, where n is a positive integer. In practical applications, n can be selected according to the voltage multiplication requirements. The working principle of the positive voltage multiplier circuit 1 and the negative voltage multiplier circuit 2 is consistent with the working principle of the traditional voltage multiplier circuit in the background technology, and will not be repeated here. The fourth connection terminal of the last positive voltage multiplier unit in the positive voltage multiplier circuit 1 outputs the positive voltage multiplier Vout1, and the third connection terminal of the last negative voltage multiplier unit in the negative voltage multiplier circuit 1 outputs the negative voltage multiplier Vout2. The positive voltage multiplier Vout1 obtained after voltage multiplication is 2nVin1, and the negative voltage multiplier Vout2 is 2nVin2.

[0027] In specific implementation, by configuring the difference between input voltage Vin1 and input voltage Vin2 as a preset input voltage Vexpin, the difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 is set to a preset target voltage Vexp, where Vexpin = Vin1 - Vin2 = Vexp / 2n. In this embodiment, the preset target voltage Vexp is 20kV. Therefore, the relationship between input voltage Vin1 and input voltage Vin2 satisfies: Vin1 - Vin2 = 10 / n. By setting Vin1 and Vin2 according to the above formula, Vout1 - Vout2 = Vexp can be maintained. For example, the output range of Vout1 can be 0-20kV, and the corresponding output range of Vout2 can be -20-0kV, thus maintaining Vout1 - Vout2 = 20kV.

[0028] Furthermore, the monitoring circuit 3 is used to monitor the difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2. The monitoring circuit 3 includes resistors R1 and R2 and a gas discharge tube E1. The third connection terminal of the last negative voltage multiplier unit in the negative voltage multiplier circuit 2 is connected to the second terminal of the gas discharge tube E1 (i.e., the second terminal of the monitoring circuit 3) and the first terminal of resistor R1. The first terminal of the gas discharge tube is connected to the first terminal of resistor R2, and the second terminal of resistor R1 is connected to the second terminal of resistor R2. The light-load circuit 5 includes a parallel resistor string, which comprises multiple resistors. The first ends of the multiple resistors are connected to the first end of the parallel resistor string (i.e., the first end of the aforementioned light-load circuit 5), and the second ends of the multiple resistors are connected to the second end of the parallel resistor string (i.e., the second end of the aforementioned light-load circuit 5). The first end of the parallel resistor string is connected to the second end of resistor R2 (i.e., the first end of the aforementioned monitoring circuit 3) and the output terminal of the high-voltage multiplier circuit. The second end of the parallel resistor string is connected to the fourth connection terminal of the last positive voltage multiplier unit in the positive voltage multiplier circuit 1. In this embodiment, as... Figure 5 As shown, the parallel resistor series includes resistors R5-R9 connected in parallel. The first end of resistor R5-R9 is connected to the second end of resistor R2, and the second end of resistor R5-R9 is connected to the fourth connection terminal of the last positive voltage multiplier unit in positive voltage multiplier circuit 1.

[0029] The purpose of setting up the light load circuit 5 is to enable the power output terminal to have a light load when the high voltage multiplier circuit is applied in a high voltage power supply, thereby improving the stability of the power output. The resistance of resistor R2 is much smaller than that of resistor R1, and the resistance of resistor R1 is smaller than the equivalent resistance of the light-load circuit. In the monitoring circuit 3, the gas discharge tube E1 is configured to conduct when Vout1-Vout2 exceeds the protection voltage value, so as to monitor Vout1-Vout2 by monitoring the voltage across resistor R1. For example, if the preset target voltage Vexp is 20kV, when Vout1-Vout2 is maintained at 20kV, the output terminal outputs the voltage after voltage division by resistor R1 and parallel resistor series. However, at a certain moment, Vout1-Vout2 exceeds 25kV. At this time, the gas discharge tube E1 in the monitoring circuit 3 conducts, and resistor R2 and resistor R1 are connected in parallel and then divided by the parallel resistor series. At this time, the voltage across resistor R1 becomes very small. By monitoring the voltage across resistor R1, it can be determined that Vout1-Vout2 exceeds the protection voltage value, and the voltage output needs to be stopped immediately to protect the downstream circuit.

[0030] Furthermore, the high-voltage multiplier circuit also includes a sampling circuit 4. The sampling circuit 4 samples the output voltage Vout to generate a sampling voltage VSENSE and transmits it to the host computer. The host computer adjusts the input voltages Vin1 and Vin2 based on the sampling voltage VSENSE to stabilize the output voltage Vout. The sampling circuit 4 includes resistors R3 and R4. The second end of resistor R4 is connected to the output terminal of the high-voltage multiplier circuit, and the first end of resistor R4 is connected to the second end of resistor R3 and the sampling output terminal. The sampling output terminal is connected to the host computer, and the first end of resistor R3 is grounded. Resistors R3 and R4 divide the output voltage Vout to generate the sampling voltage VSENSE, which is output to the host computer from the sampling output terminal. If the host computer determines, based on the sampling voltage VSENSE, that the output voltage Vout deviates from the required output voltage due to various reasons (diode voltage drop, capacitor value, device temperature drift, etc.), it can actively fine-tune the input voltage to calibrate the output voltage Vout, making the output relatively stable.

[0031] The sampling circuit 4 also includes TVS diodes TVS1 and TVS2. The negative terminal of TVS1 is grounded, and the positive terminal of TVS1 is connected to the positive terminal of TVS2. The second terminal of TVS2 is connected to the first terminal of resistor R4. TVS diodes TVS1 and TVS2 serve a protective function to prevent abnormal output from damaging the sampling circuit. When the output voltage is too high, they clamp the voltage across resistor R3, allowing the host computer to still determine whether the output voltage Vout is normal based on the sampled voltage VSENSE.

[0032] In the description of this specification, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] The use of terms such as "one embodiment / mode," "some embodiments / modes," "example," "specific example," or "some examples," etc., refers to a specific feature, structure, material, or characteristic described in connection with that embodiment / mode or example, which is included in at least one embodiment / mode or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment / mode or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments / modes or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments / modes or examples described in this specification, as well as the features of different embodiments / modes or examples.

[0034] The above descriptions are merely preferred embodiments of the present invention, and the present invention is not limited to the above embodiments. It is understood that other improvements and variations that can be directly derived or conceived by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included within the protection scope of the present invention.

Claims

1. A high-voltage voltage multiplier circuit, characterized in that, It includes a positive voltage multiplier circuit and a negative voltage multiplier circuit, which are electrically connected to the output terminal of the high voltage multiplier circuit. The positive voltage multiplier circuit is used to multiply the input voltage Vin1 to generate a positive voltage multiplier Vout1. The negative voltage multiplier circuit is used to multiply the input voltage Vin2 to generate a negative voltage multiplier Vout2 that is opposite to the positive voltage multiplier Vout1. The high voltage multiplier circuit generates an output voltage Vout based on the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 and outputs it from the output terminal of the high voltage multiplier circuit. The difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 is configured as a preset target voltage Vexp.

2. The high-voltage multiplier circuit according to claim 1, characterized in that, The positive voltage multiplier circuit includes n1 positive voltage multiplier units connected in series. Each positive voltage multiplier unit includes capacitor C1, capacitor C2, diode D1, and diode D2. The second terminal of capacitor C1 is connected to the negative terminal of diode D1, the positive terminal of diode D1 is connected to the first terminal of capacitor C2, the second terminal of capacitor C2 is connected to the negative terminal of diode D2, the negative terminal of diode D1 is connected to the positive terminal of diode D2, the first terminal of capacitor C2 forms the first connection terminal of the positive voltage multiplier unit, the first terminal of capacitor C1 forms the second connection terminal of the positive voltage multiplier unit, the positive terminal of diode D2 forms the third connection terminal of the positive voltage multiplier unit, and the negative terminal of diode D2 forms the fourth connection terminal of the positive voltage multiplier unit. In n1 series-connected positive voltage multiplier units, the third connection terminal of each positive voltage multiplier unit is connected to the second connection terminal of the next positive voltage multiplier unit, and the fourth connection terminal of each positive voltage multiplier unit is connected to the first connection terminal of the next positive voltage multiplier unit. The first connection terminal of the first positive voltage multiplier unit is connected to the input voltage Vin1, and the second connection terminal of the first positive voltage multiplier unit is grounded.

3. The high-voltage multiplier circuit according to claim 2, characterized in that, The negative voltage multiplier circuit includes n² negative voltage multiplier units connected in series. Each negative voltage multiplier unit includes capacitor C1', capacitor C2', diode D1', and diode D2'. The second terminal of capacitor C1' is connected to the positive terminal of diode D1', the negative terminal of diode D1' is connected to the first terminal of capacitor C2', the second terminal of capacitor C2' is connected to the positive terminal of diode D2', the positive terminal of diode D1' is connected to the negative terminal of diode D2', the first terminal of capacitor C1' forms the first connection terminal of the negative voltage multiplier unit, the first terminal of capacitor C2' forms the second connection terminal of the negative voltage multiplier unit, the positive terminal of diode D2' forms the third connection terminal of the negative voltage multiplier unit, and the negative terminal of diode D2' forms the fourth connection terminal of the negative voltage multiplier unit. In the n2 series-connected negative voltage multiplier units, the third connection terminal of each negative voltage multiplier unit is connected to the second connection terminal of the next negative voltage multiplier unit, and the fourth connection terminal of each negative voltage multiplier unit is connected to the first connection terminal of the next negative voltage multiplier unit. The first connection terminal of the first negative voltage multiplier unit is grounded, and the second connection terminal of the first negative voltage multiplier unit is connected to the input voltage Vin2.

4. The high-voltage multiplier circuit according to claim 3, characterized in that, n1=n2=n, where n is a positive integer.

5. The high-voltage multiplier circuit according to claim 4, characterized in that, The positive voltage multiplier Vout1 = 2nVin1, and the negative voltage multiplier Vout2 = 2nVin2.

6. The high-voltage multiplier circuit according to claim 4, characterized in that, By configuring the difference between input voltage Vin1 and input voltage Vin2 as a preset input voltage Vexpin, the difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2 is set to a preset target voltage Vexp, where Vexpin = Vexp / 2n.

7. The high-voltage multiplier circuit according to claim 3, characterized in that, The high-voltage multiplier circuit also includes a monitoring circuit for monitoring the difference between the positive voltage multiplier Vout1 and the negative voltage multiplier Vout2. The monitoring circuit includes resistors R1 and R2, and a gas discharge tube E1. In the negative voltage multiplier circuit, the third connection terminal of the last negative voltage multiplier unit is connected to the second terminal of the gas discharge tube E1 and the first terminal of the resistor R1. The first terminal of the gas discharge tube is connected to the first terminal of the resistor R2, and the second terminal of the resistor R1 is connected to the second terminal of the resistor R2.

8. The high-voltage multiplier circuit according to claim 7, characterized in that, The high-voltage multiplier circuit also includes a light-load circuit, wherein the resistance value of resistor R2 is less than the resistance value of resistor R1, and the resistance value of resistor R1 is less than the equivalent resistance of the light-load circuit; the light-load circuit includes a parallel resistor string, which includes multiple resistors, the first ends of the multiple resistors are connected to form the first end of the parallel resistor string, and the second ends of the multiple resistors are connected to form the second end of the parallel resistor string; the first end of the parallel resistor string is connected to the second end of resistor R2 and the output terminal of the high-voltage multiplier circuit, and the second end of the parallel resistor string is connected to the fourth connection terminal of the last positive voltage multiplier unit in the positive voltage multiplier circuit.

9. The high-voltage multiplier circuit according to claim 8, characterized in that, The high voltage multiplier circuit also includes a sampling circuit. The sampling circuit is used to sample the output voltage Vout, generate a sampling voltage VSENSE, and transmit it to the host computer. The host computer adjusts the input voltages Vin1 and Vin2 according to the sampling voltage VSENSE. The sampling circuit includes resistors R3 and R4. The second end of resistor R4 is connected to the output end of the high voltage multiplier circuit. The first end of resistor R4 is connected to the second end of resistor R3 and the sampling output end. The sampling output end is connected to the host computer. The first end of resistor R3 is grounded.

10. The high-voltage multiplier circuit according to claim 9, characterized in that, The sampling circuit also includes TVS diodes TVS1 and TVS diodes TVS2. The negative terminal of TVS diode TVS1 is grounded, the positive terminal of TVS diode TVS1 is connected to the positive terminal of TVS diode TVS2, and the second terminal of TVS diode TVS2 is connected to the first terminal of resistor R4.

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