Piezoelectric ultrasonic motor rotary table

Abstract

The utility model relates to micro - nanometer precision drive and positioning technical field discloses a kind of piezoelectric ultrasonic motor rotary table, it includes rotary table and piezoelectric ultrasonic motor. Rotary table includes shaft, bearing and table top from inside to outside in turn. Piezoelectric ultrasonic motor includes ultrasonic piezoelectric ceramic and with the side connection of ultrasonic piezoelectric ceramic friction terminal, and with the side connection of ultrasonic piezoelectric ceramic deviating friction terminal pre-tight spring. Table top is set in the upper portion of bearing. The lower portion of bearing and friction terminal abut. Friction terminal is driven bearing rotation using ultrasonic resonance principle under the drive of ultrasonic piezoelectric ceramic. The utility model uses piezoelectric stepping direct drive motor driven by ultrasonic piezoelectric ceramic, can produce 360 degree bidirectional rotation movement, with ultra-high rotation resolution, and volume is very small, compact structure, very suitable for integration. While the influence of external electromagnetic interference and noise is less, speed is fast, uniform and stable, and cost-effective.

Description

Technical Field

[0001] This utility model belongs to the field of micro-nano precision drive and positioning technology, specifically, it relates to a piezoelectric ultrasonic motor rotary table. Background Technology

[0002] With the development of science and technology, the demand for micro / nano-level actuation and positioning technology in cutting-edge technology fields both domestically and internationally is becoming increasingly urgent. Piezoelectric actuation technology, as one of the important technologies in the field of micro / nano-level actuation and positioning, has demonstrated significant scientific importance and broad application prospects in fields such as microfabrication technology, materials science, semiconductor processing, and bioengineering due to its characteristics of small size, high positioning accuracy, large stroke, and absence of electromagnetic interference.

[0003] Piezoelectric rotary stages are precision driving and positioning platforms that utilize piezoelectric actuation technology to generate micro / nanoscale motion resolution. They can be applied in fields such as ultra-precision machining, large-scale integrated circuit manufacturing, and scanning probe microscopy. Existing piezoelectric rotary stages suffer from problems such as complex structure, low resolution, slow rotation speed, and small rotation angle range.

[0004] Based on the above, the current problem to be solved is to provide a piezoelectric ultrasonic motor rotary table with a compact structure, high resolution, fast rotation speed, and 360-degree bidirectional rotation capability. Utility Model Content

[0005] The purpose of this invention is to provide a piezoelectric ultrasonic motor rotary table, which aims to solve the problems of complex structure, low resolution, slow rotation speed and small rotation angle range of existing piezoelectric ultrasonic motor rotary tables.

[0006] This invention is implemented as follows: a piezoelectric ultrasonic motor rotary table, comprising:

[0007] A rotary table, from the inside out, consists of a rotating shaft, bearings, and a table surface;

[0008] A piezoelectric ultrasonic motor includes an ultrasonic piezoelectric ceramic and a friction terminal connected to one side of the ultrasonic piezoelectric ceramic, and a preload spring connected to the side of the ultrasonic piezoelectric ceramic opposite to the friction terminal.

[0009] The platform is fitted onto the upper part of the bearing, and the lower part of the bearing abuts against the friction terminal. The ultrasonic piezoelectric ceramic uses the principle of ultrasonic resonance to make the friction terminal move, and the friction terminal drives the bearing to rotate.

[0010] Furthermore, it also includes a platform, which includes a base and a top cover, with the rotating platform disposed on the base and the piezoelectric ultrasonic motor disposed between the base and the top cover.

[0011] Furthermore, the rotating shaft is connected to the base, and both ends of the ultrasonic piezoelectric ceramic are connected to the sidewalls of the base.

[0012] Furthermore, the side of the preload spring away from the ultrasonic piezoelectric ceramic abuts against the side wall of the base.

[0013] Furthermore, the preload spring comprises stacked multi-layered spring sheets.

[0014] Furthermore, the side wall of the base is provided with a groove for accommodating the preload spring.

[0015] Furthermore, the ultrasonic piezoelectric ceramic is configured as a rectangular structure and polarized along the thickness direction. The ultrasonic piezoelectric ceramic has an electrode layer on both end faces in the thickness direction. The electrode layer is divided into at least two equally spaced electrode regions. A friction terminal is located at the center of the long end face of the two electrode regions. Under the action of a preset voltage, the two electrode regions cause the friction terminal to drive the bearing to rotate clockwise or counterclockwise.

[0016] The beneficial effects of the piezoelectric ultrasonic motor rotary table provided by this utility model are as follows:

[0017] This invention employs a piezoelectric stepper motor driven by ultrasonic piezoelectric ceramics and designs the mechanical structure to convert the linear micro-displacement generated by the piezoelectric ceramics into macroscopic angular rotational motion on a mechanical plane. This invention utilizes the principle of ultrasonic resonance, applying a driving voltage that is consistent with or close to the natural mechanical frequency of the ultrasonic piezoelectric ceramics. Under electrical signal excitation, the ultrasonic piezoelectric ceramics resonate, causing the friction terminals attached to the front end to generate periodic diagonal motion, which, under the action of friction, drives the bearing to rotate. By energizing the two electrode regions respectively, the two electrode regions generate diagonal motions in two directions, thereby controlling the forward and reverse rotation of the rotary table.

[0018] The preload spring is composed of multiple layers of V-shaped spring sheets. This design increases the preload force, reduces the stress on the spring sheets, and makes the entire structure effective and stable in operation. Simultaneously, applying preload force to the ultrasonic piezoelectric ceramic ensures that the piezoelectric ultrasonic motor remains self-locking when not in operation or when power is off, thus avoiding energy consumption, heat generation, and maintaining mechanical stability of position.

[0019] This invention employs piezoelectric resonant ultrasonic excitation to generate 360-degree bidirectional rotational motion with ultra-high rotational resolution. It is self-locking upon power failure and is extremely compact, making it highly suitable for integration. Furthermore, it is less affected by external electromagnetic interference and noise, exhibits high rotational speed, small step size, uniform and stable motion, and offers excellent cost-effectiveness. Attached Figure Description

[0020] Figure 1A three-dimensional structural diagram of the piezoelectric ultrasonic motor rotary table provided by this utility model;

[0021] Figure 2 Exploded view of the piezoelectric ultrasonic motor rotary table provided by this utility model;

[0022] Figure 3 A top view of a portion of the structure of the piezoelectric ultrasonic motor rotary table provided by this utility model;

[0023] Figure 4 A three-dimensional structural diagram of the piezoelectric ultrasonic motor and bearing assembly provided by this utility model;

[0024] Figure 5 A three-dimensional structural diagram of the base provided by this utility model;

[0025] In the figure: 1-rotating stage; 11-rotating shaft; 12-bearing; 13-table surface; 2-piezoelectric ultrasonic motor; 21-ultrasonic piezoelectric ceramic; 211-electrode layer; 2111-electrode area; 22-friction terminal; 23-preload spring; 3-stage body; 31-base; 311-groove; 32-top cover. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0027] The implementation of this utility model will be described in detail below with reference to specific embodiments.

[0028] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this utility model. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0029] Reference Figure 1-5 The image shown is a preferred embodiment of the present invention.

[0030] The piezoelectric ultrasonic motor rotary table includes a rotary table 1 and a piezoelectric ultrasonic motor 2 for driving the rotary table 1 to rotate, as shown in the figure. Figure 1-2The rotary table 1 includes a rotating shaft 11, a bearing 12, and a table surface 13, which are sequentially arranged from the inside out. The bearing 12 is fitted around the outer periphery of the rotating shaft 11, and the table surface 13 is fitted on top of the bearing 12. The bearing 12 can drive the table surface 13 to rotate around the rotating shaft 11. The rotary table 1 has a simple and reasonable structure, high efficiency and smooth rotation, and low friction.

[0031] The piezoelectric ultrasonic motor 2 includes an ultrasonic piezoelectric ceramic 21, a friction terminal 22, and a preload spring 23, as shown in the figure. Figure 3 The friction terminal 22 is connected to one side of the ultrasonic piezoelectric ceramic 21. The side of the friction terminal 22 facing away from the ultrasonic piezoelectric ceramic 21 abuts against the lower part of the bearing 12. Under the action of the ultrasonic piezoelectric ceramic 21, the friction terminal 22 drives the bearing 12 to rotate using the principles of ultrasonic resonance and friction coupling. The bearing 12 drives the platform 13 to rotate. The piezoelectric ultrasonic motor 2 uses piezoelectric resonant ultrasonic excitation, which can generate 360-degree bidirectional rotational motion, and has the characteristics of ultra-high rotational resolution, fast speed, uniform and stable operation, and self-locking after power failure.

[0032] The ultrasonic piezoelectric ceramic 21, on the side facing away from the friction terminal 22, is connected to the preload spring 23. The preload spring 23 applies a preload force between the bearing 12 and the friction terminal 22, thereby ensuring stable contact between the friction terminal 22 and the bearing 12. The preload spring 23 can consist of a single layer of spring sheets or multiple layers of spring sheets stacked together. Preferably, the preload spring 23 is composed of multiple layers of V-shaped spring sheets stacked together. This arrangement increases the preload force, reduces the stress on the spring sheets, and makes the entire structure effective and stable in operation. Simultaneously, applying a preload force to the ultrasonic piezoelectric ceramic 21 ensures that the piezoelectric ultrasonic motor 2 remains self-locking when not in operation or when power is off, thus avoiding energy consumption, heat generation, and maintaining the mechanical stability of its position.

[0033] The piezoelectric ultrasonic motor rotary table also includes a stage body 3. Stage body 3 includes a base 31 and a top cover 32. Figure 5 A rotating stage 1 is mounted on a base 31. A piezoelectric ultrasonic motor 2 is positioned between the base 31 and the upper cover 32. A rotating shaft 11 is fixed to the base 31, preferably integrally formed with the base 31. The base 31 includes three sequentially connected side walls: a left side wall, a rear side wall, and a right side wall. The two ends of the long shaft of the ultrasonic piezoelectric ceramic 21 are connected to the left and right side walls of the base 31. The side of the preload spring 23 away from the ultrasonic piezoelectric ceramic 21 abuts against the rear side wall of the base 31. The rear side wall of the base 31 has a groove 311 for accommodating the preload spring 23. The groove 311 ensures stable installation of the preload spring 23.

[0034] The ultrasonic piezoelectric ceramic 21 is designed as a rectangular structure and polarized along the thickness direction, as shown in the reference. Figure 4The ultrasonic piezoelectric ceramic 21 has electrode layers 211 on its two end faces in the thickness direction. Each electrode layer 211 is divided into at least two equally spaced electrode regions 2111. A friction terminal 22 is located at the center of the long end face of each of the two electrode regions 2111. Under a preset voltage, the friction terminal 22 drives the bearing 12 to rotate clockwise or counterclockwise. The bearing 12 then drives the platform 13 to rotate clockwise or counterclockwise as well. This invention achieves 360-degree bidirectional rotational motion through selective excitation of the two electrode regions 2111, featuring high rotational resolution, fast rotational speed, and uniform and stable rotation. Furthermore, it is very compact and small in size, making it highly suitable for integration.

[0035] This invention is not intended to limit the scope of this invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention shall be included within the protection scope of this invention.

Claims

1. A piezoelectric ultrasonic motor rotary table, characterized in that, include: The rotary table (1) consists of a rotating shaft (11), a bearing (12) and a table surface (13) from the inside out. The piezoelectric ultrasonic motor (2) includes an ultrasonic piezoelectric ceramic (21) and a friction terminal (22) connected to one side of the ultrasonic piezoelectric ceramic (21), and a preload spring (23) connected to the side of the ultrasonic piezoelectric ceramic (21) opposite to the friction terminal (22). The platform (13) is fitted on the upper part of the bearing (12), and the lower part of the bearing (12) abuts against the friction terminal (22). The ultrasonic piezoelectric ceramic (21) uses the ultrasonic resonance principle to make the friction terminal (22) move, and the friction terminal (22) drives the bearing (12) to rotate.

2. The piezoelectric ultrasonic motor rotary table according to claim 1, characterized in that, It also includes a platform (3), which includes a base (31) and a top cover (32). The rotating stage (1) is located on the base (31), and the piezoelectric ultrasonic motor (2) is located between the base (31) and the top cover (32).

3. The piezoelectric ultrasonic motor rotary table according to claim 2, characterized in that, The rotating shaft (11) is connected to the base (31), and the two ends of the ultrasonic piezoelectric ceramic (21) are connected to the left and right side walls of the base (31).

4. The piezoelectric ultrasonic motor rotary table according to claim 3, characterized in that, The preload spring (23) abuts against the rear sidewall of the base (31) on the side away from the ultrasonic piezoelectric ceramic (21).

5. The piezoelectric ultrasonic motor rotary table according to claim 4, characterized in that, The rear side wall of the base (31) is provided with a groove (311) for accommodating the preload spring (23).

6. The piezoelectric ultrasonic motor rotary table according to claim 1, characterized in that, The preload spring (23) comprises multiple layers of stacked spring sheets.

7. The piezoelectric ultrasonic motor rotary table according to claim 1, characterized in that, The ultrasonic piezoelectric ceramic (21) is designed as a rectangular structure and polarized along the thickness direction. The ultrasonic piezoelectric ceramic (21) has an electrode layer (211) on both end faces in the thickness direction. The electrode layer (211) is divided into at least two electrode regions (2111) on an even basis. The friction terminal (22) is located at the center of the long end face of the two electrode regions (2111). The two electrode regions (2111) resonate under the excitation of the electrical signal and generate diagonal motion in two directions, so that the friction terminal (22) drives the bearing (12) to rotate clockwise or counterclockwise.

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