A wafer basket facilitating double-side cleaning of a wafer

Abstract

The utility model discloses a flower basket convenient to wafer double -sided cleaning, including flower basket main part, the top detachable connection of flower basket main part has flower basket handle, the rotation of being provided with two liquid -draining plate in flower basket main part, the surface of liquid -draining plate and the bottom of flower basket main part all are equipped with a plurality of round through -hole, two liquid -draining plate are connected through hinged joint, the limit slot of being equipped with is all opened in two liquid -draining plate, and the four corners of two limit slots all are equipped with chamfered groove. The utility model provides a flower basket convenient to wafer double -sided cleaning through setting up two separate liquid -draining plate, is applicable to the rectangular wafer of needing double -sided cleaning, after washing in one side, through the hinged joint drive two liquid -draining plate overlap, then overturn liquid -draining plate, and wafer is transferred to the liquid -draining plate of another side, completes to wafer's turning over, and the convenient operation does not need the aid of auxiliary tool when turning over, avoids the risk such as the smash wafer, and knocks the angle, and the simple structure is convenient for production, and the practicality is strong.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a flower basket that facilitates double-sided cleaning of wafers. Background Technology

[0002] The chip is one of the most important raw materials for LEDs. It is the light-emitting component and the core of the LED; the quality of the chip directly determines the performance of the LED. The chip is composed of group III and V composite semiconductor materials. During LED packaging, the incoming chips are neatly arranged on the chip film.

[0003] In semiconductor manufacturing processes, the surface of wafers is usually cleaned. Some wafers require double-sided wiping and cleaning. Most of the baskets currently used only meet the requirements of single-sided cleaning. To clean both sides, after the front side is cleaned, the wafer needs to be flipped over and placed stably before wiping and cleaning. This operation poses risks such as wafer cracking and corner damage for precision and expensive cadmium zinc telluride wafers. Utility Model Content

[0004] The purpose of this invention is to provide a flower basket that facilitates double-sided cleaning of wafers, thereby addressing the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: it includes a flower basket body, and a flower basket handle is detachably connected to the top of the flower basket body; The flower basket body has two drain plates that are rotatably installed inside. The surface of the drain plates and the bottom of the flower basket body are provided with multiple circular through holes. The two drain plates are connected by a hinge. Both drainage plates have limiting grooves, and the four corners of both limiting grooves have chamfered grooves.

[0006] As a further description of the above technical solution: The height of the inner wall of the limiting groove is 0.5-0.7μm.

[0007] As a further description of the above technical solution: Both of the two limiting grooves have chamfered grooves on opposite sides.

[0008] As a further description of the above technical solution: Each of the two drain plates has a hand handle on its opposite side.

[0009] As a further description of the above technical solution: The circular through holes are evenly distributed on the drain plate and the main body of the flower basket, and the diameter of the circular through holes is 2-4mm.

[0010] As a further description of the above technical solution: The drain plate is tilted at an angle of 5°-8°.

[0011] As a further description of the above technical solution: The main body of the flower basket and the handle of the flower basket are made of polytetrafluoroethylene.

[0012] In the above technical solution, the flower basket provided by this utility model for facilitating double-sided cleaning of wafers has the following beneficial effects: This invention features two separate drain plates, suitable for rectangular wafers requiring double-sided cleaning. After cleaning one side, the two drain plates are overlapped via a hinge, and then flipped to transfer the wafer to the drain plate on the other side, thus completing the wafer flipping process. This facilitates operation, eliminates the need for auxiliary tools during flipping, and avoids risks such as chipping or breaking the wafer. The structure is simple, easy to manufacture, and highly practical.

[0013] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0014] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0016] Figure 1 A three-dimensional structural schematic diagram provided for an embodiment of this utility model; Figure 2 This is a schematic diagram of the structure during wafer face-changing provided in an embodiment of the present invention; Figure 3 This is a top view structural diagram provided for an embodiment of the present utility model; Figure 4 This is a front view structural diagram provided for an embodiment of the present utility model.

[0017] Explanation of reference numerals in the attached figures: 1. Flower basket body; 2. Flower basket handle; 3. Draining board; 4. Hand handle; 5. Limiting groove; 6. Chamfer groove; 7. Edge chamfer groove; 8. Hinge; 9. Circular through hole. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0019] Please see Figures 1-4 This embodiment provides a flower basket for easy double-sided cleaning of wafers, including a flower basket body 1, a flower basket handle 2 detachably connected to the top of the flower basket body 1, the flower basket body 1 and the flower basket handle 2 can be threaded together, and one side of the flower basket handle 2 is an inverted frustum shape. The basket handle 2 allows operators to manually clean the wafers by holding the handle 2. Two draining plates 3 are rotatably mounted inside the basket body 1. Multiple circular through holes 9 are provided on the surface of the draining plates 3 and the bottom of the basket body 1. These holes allow the cleaning solution to flow smoothly out of the draining plates 3 when the basket body 1 is removed after cleaning. The two draining plates 3 are connected by a hinge 8. Each draining plate 3 has a limiting groove 5, and chamfered grooves 6 are provided at the four corners of each limiting groove 5. These chamfered grooves 6 protect the wafer edges. The use of two separate draining plates 3 is suitable for cleaning rectangular wafers that require double-sided cleaning. After cleaning one side, the two draining plates 3 are overlapped via the hinge 8, and then the draining plates 3 are flipped to transfer the wafer to the other draining plate 3, completing the wafer flipping process. This facilitates operation, eliminates the need for auxiliary tools during flipping, and avoids risks such as wafer breakage and corner damage. The structure is simple, easy to manufacture, and highly practical.

[0020] In a further embodiment of this utility model, the height of the inner wall of the limiting groove 5 is 0.5-0.7μm.

[0021] Furthermore, chamfered grooves 7 are provided on the opposite sides of the two limiting grooves 5 to facilitate the handling of rectangular wafers.

[0022] In a further embodiment of this utility model, each of the two draining plates 3 is provided with a hand-held lever 4 on one side facing away from each other. After the front of the rectangular wafer is cleaned, since the draining plate 3 and the rectangular wafer are still in the cleaning solution, the hand-held lever 4 is needed to lift the draining plate 3. The other draining plate 3 is also lifted at the same time. After the wafer is safely flipped from one draining plate 3 to the other draining plate 3, the back of the wafer can be cleaned more conveniently, reducing the risk of breaking the wafer or chipping its corners due to directly flipping the wafer.

[0023] In the embodiments provided by this utility model, circular through holes 9 are evenly distributed on the drain plate 3 and the main body of the flower basket 1, and the diameter of the circular through holes 9 is 2-4mm.

[0024] Specifically, the drain plate 3 is provided with an inclined angle, which is 5°-8°.

[0025] In a further embodiment of this invention, the main body 1 of the flower basket and the handle 2 of the flower basket are made of polytetrafluoroethylene (PTFE). PTFE has excellent chemical stability, good acid and alkali resistance, and good aging resistance.

[0026] When cleaning the wafer, first place the main body 1 of the basket into the cleaning solution and place the drain plate 3 horizontally. Then, use tweezers and a spatula to transfer the wafer to be cleaned into the limiting groove 5 of one side of the drain plate 3, and then wipe and clean the surface until the front side is cleaned. Next, lift the drain plate 3 holding the wafer about 30°, then lift the other drain plate 3 about 150°, and finally close the two drain plates 3, rotate the drain plates 3 to the other side, wait for the wafer to be completely flipped, wipe and clean the back side, and after cleaning is completed, use tweezers and a spatula to remove the wafer along the chamfered groove 7.

[0027] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A flower basket for easy double-sided cleaning of wafers, comprising a flower basket body (1), characterized in that: The top of the main body (1) of the flower basket is detachably connected to a flower basket handle (2). The main body (1) of the flower basket has two drain plates (3) rotatably arranged inside. The surface of the drain plates (3) and the bottom of the main body (1) of the flower basket have multiple circular through holes (9). The two drain plates (3) are connected by a hinge (8). Both drainage plates (3) have limiting grooves (5), and the four corners of both limiting grooves (5) have chamfered grooves (6).

2. The flower basket for facilitating double-sided cleaning of wafers according to claim 1, characterized in that, The inner wall height of the limiting groove (5) is 0.5-0.7μm.

3. The flower basket for facilitating double-sided cleaning of wafers according to claim 1, characterized in that, Both of the two limiting grooves (5) have chamfered grooves (7) on opposite sides.

4. The flower basket for facilitating double-sided cleaning of wafers according to claim 1, characterized in that, Each of the two draining plates (3) is provided with a hand handle (4) on the opposite side.

5. A flower basket for facilitating double-sided cleaning of wafers according to claim 1, characterized in that, The circular through holes (9) are evenly distributed on the drain plate (3) and the main body of the flower basket (1), and the diameter of the circular through holes (9) is 2-4 mm.

6. A flower basket for facilitating double-sided cleaning of wafers according to claim 1, characterized in that, The drain plate (3) is provided with an inclination angle of 5°-8°.

7. A flower basket for facilitating double-sided cleaning of wafers according to claim 1, characterized in that, The main body (1) and the handle (2) of the flower basket are made of polytetrafluoroethylene.

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