Substrate transport system equipped with a cooperative transfer structure

Abstract

The utility model provides a kind of substrate transmission system equipped with collaborative conveying structure, comprising: shell, with the chamber formed by wall body, channel is opened along wall body first direction, channel can be selectively closed to isolate chamber internal environment and chamber external environment;Supporting plate, configured to support substrate, supporting plate has distributed multiple discontinuous support point positions;Actuating mechanism, including bearing part, and for driving bearing part moves along first direction actuating part, bearing part has at least one bearing surface;Wherein, at least one bearing surface and multiple discontinuous support point positions in the projection of first direction are staggered to avoid setting, to allow bearing part to support substrate and make substrate and supporting plate separate under the driving of actuating part, substrate is removed from chamber by channel.The substrate can be transmitted to chamber outside by actuating mechanism in the utility model, so that mechanical arm or artificial pick and place substrate, without again stretching into chamber, avoid interference with shell and cause substrate surface scratch.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a substrate transmission system equipped with a cooperative transmission structure. Background Technology

[0002] In semiconductor manufacturing, the substrate serves as the core processing carrier, and its transport process demands extremely high precision, environmental cleanliness, and vacuum sealing. The transport system, as a crucial connection between substrate processing equipment (such as deposition, etching, and inspection equipment) and the vacuum chamber, must achieve stable substrate transport in a high-vacuum environment. Its core function is to ensure "contamination-free, damage-free, and high-precision" transport of the substrate between different process modules, making it a central hub for continuous and automated semiconductor manufacturing lines.

[0003] Existing transmission systems mainly consist of transmission tracks, sealed housings, and drive mechanisms. Their core function focuses on the horizontal transmission of substrates within the housing. However, the substrate handling process relies on external robotic arms or manual intervention: after the substrate has been processed and transported to the housing exit position, an external device must be inserted into the housing to grasp the substrate and then move it out to the next process. The robotic arm or manual handling during substrate handling is prone to interference with the housing, resulting in scratches on the substrate surface.

[0004] In view of this, it is necessary to propose a substrate transmission system equipped with a cooperative transmission structure to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a substrate transfer system equipped with a cooperative transfer structure to solve the technical problem that the substrate is easily scratched when the substrate is picked up and placed by a robotic arm or manually.

[0006] This utility model provides a substrate transmission system equipped with a cooperative transmission structure, including: The outer shell has a cavity formed by a wall, and a channel is provided along a first direction of the wall, the channel being selectively closed to isolate the internal environment of the cavity from the external environment of the cavity; A tray, configured to support a base plate, the tray having a plurality of distributed, non-continuous support points; An actuation mechanism includes a support portion and an actuation portion for driving the support portion to move along a first direction, the support portion having at least one support surface; In this configuration, at least one bearing surface and multiple discontinuous support points are arranged in an alternating, avoidance manner in the projection of the bearing surface in the first direction, so as to allow the bearing portion to support the substrate and, under the drive of the actuation portion, separate the substrate from the support plate and move the substrate out of the chamber through the channel.

[0007] In one possible embodiment, at least one bearing surface includes two oppositely arranged bearing surfaces, with a clearance space formed between the two bearing surfaces, and a plurality of non-continuous support points partially or completely located within the clearance space covered in a first direction. In one possible embodiment, a gap space is formed between multiple non-continuous support points, and at least one bearing surface is partially or completely located within the area covered by the gap space along a first direction.

[0008] In one possible embodiment, at least one bearing surface includes two oppositely disposed bearing surfaces, with a clearance space formed between the two bearing surfaces; A gap space is formed between multiple discontinuous support points; The avoidance space and the gap space are staggered in the first direction.

[0009] In one possible embodiment, a portion of the clearance space is located within the gap space, and / or a portion of the gap space is located within the clearance space.

[0010] In one possible embodiment, the actuation mechanism further includes a drive source that provides actuation force to the actuating part and is located within the range covered by the travel of the end of the actuating part away from the support part.

[0011] In one possible embodiment, the actuation mechanism further includes a guide structure that constrains the movement path of the actuation part, and is integrated with the drive source.

[0012] In one possible embodiment, the actuation mechanism further includes a fixing frame extending from the wall in a first direction to define the stroke of the actuating part.

[0013] In one possible embodiment, a protrusion is formed by extending from a portion of the bearing surface toward the substrate, and the protrusion forms a point contact with the substrate.

[0014] In one possible embodiment, a drive mechanism is also included, configured to drive the pallet to linear displacement along a second direction.

[0015] In one possible embodiment, the wall has an openable and closable conveying port along the second direction.

[0016] In one possible embodiment, a gate valve is also included, which is configured to selectively open or close the delivery port.

[0017] The beneficial effects of the substrate transmission system equipped with a cooperative transmission structure provided by this utility model are as follows: 1. Driven by the actuation part of the actuation mechanism, the bearing part supports the substrate and separates the substrate from the tray, and moves the substrate out of the chamber through the channel. When the robotic arm or a person picks up or puts down the substrate, there is no need to extend into the chamber again, thus avoiding interference with the outer shell and / or the substrate and causing scratches on the substrate surface.

[0018] 2. At least one bearing surface and multiple discontinuous support points are arranged in an alternating avoidance manner in the projection of the first direction, so that the bearing part can avoid the support plate position to support the base plate and avoid contact interference. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the substrate transmission system equipped with a cooperative transmission structure according to the present invention.

[0020] Figure 2 This is a side view of the substrate transmission system equipped with a cooperative transmission structure according to the present invention.

[0021] Figure 3 This is a schematic diagram of the tray in the substrate transmission system equipped with a cooperative transmission structure according to this utility model.

[0022] Figure 4 This is a schematic diagram of the actuation mechanism in the substrate transmission system equipped with a cooperative transmission structure according to this utility model.

[0023] Figure 5 This is a schematic diagram of the carrier section in the substrate transmission system equipped with a cooperative transmission structure according to this utility model.

[0024] Figure 6 This is a schematic diagram of the support base in the substrate transmission system equipped with a cooperative transmission structure according to this utility model.

[0025] Figure 7 This is a schematic diagram of the carrier, actuator, and support in the substrate transmission system equipped with a cooperative transmission structure according to this utility model.

[0026] Figure 8 This is a schematic diagram of the drive mechanism driving the tray to transport the substrate in the substrate transport system equipped with a cooperative transport structure according to this utility model.

[0027] Explanation of reference numerals in the attached drawings: 110, outer shell; 111, chamber; 112, wall; 1121, channel; 1122, conveying port; 120, pallet; 121, support point; 122, clearance space; 130, actuation mechanism; 131, bearing part; 1311, bearing surface; 13111, protrusion; 1312, guide surface; 1313, positioning surface; 1314, fixed section; 1315, supporting section; 1316, clearance space; 132, actuation part; 133, drive source; 1331, moving end; 134, guide structure; 135, fixing frame; 13 6. Floating sealing assembly; 1361. Flexible telescopic body; 13611. Open end; 1362. Sealing plate; 137. Support seat; 1371. Branch; 1372. Main body; 138. Limiting structure; 1381. Limiting block; 139. Transmission plate; 140. Drive mechanism; 141. Drive component; 142. Constraint structure; 1421. Slide rail; 1422. Sliding seat; 143. Transmission structure; 1431. Lead screw; 1432. Displacement component; 150. Sealing plate; 151. Viewing port; 160. Adjusting component; 170. Finger; 200. Base plate. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] To address the problems existing in the prior art, embodiments of this utility model provide a substrate transmission system equipped with a cooperative transmission structure, see [link to relevant documentation]. Figures 1 to 3The substrate transfer system includes a housing 110, a tray 120, and an actuation mechanism 130. The housing 110 has a cavity 111 formed by a wall 112. The housing 110 has a channel 1121 opened along a first direction of the wall 112. The channel 1121 can be selectively closed to isolate the internal environment of the cavity 111 from the external environment of the cavity 111. The tray 120 is configured to support the substrate 200 and has a plurality of distributed, non-continuous support points 121. The actuation mechanism 130 includes a support portion 131 and an actuation portion 132 for driving the support portion 131 to move along the first direction. The support portion 131 has at least one support surface 1311. In this configuration, at least one bearing surface 1311 and a plurality of discontinuous support points 121 are arranged in an alternating, non-intersecting manner in the projection of the first direction. This allows the bearing portion 131 to support the substrate 200 and, driven by the actuating portion 132, to separate the substrate 200 from the support plate 120, thereby moving the substrate 200 out of the chamber 111 through the channel 1121. For example, the first direction is the vertical direction.

[0030] A substrate 200 is disposed within a chamber 111, and the substrate 200 is supported by a plurality of discontinuous support points 121. An actuation mechanism 130 is also disposed within the chamber 111, and the bearing portion 131 of the actuation mechanism 130 supports the substrate 200 by at least one bearing surface 1311. The at least one bearing surface 1311 and the plurality of discontinuous support points 121 are arranged in an alternating manner to avoid interference when alternately supporting the substrate 200, thus ensuring the reliability and stability of the alternating support of the substrate 200.

[0031] When the tray 120 supports the substrate 200 and the support portion 131 does not support the substrate 200, the support portion 131 can move along the first direction and approach the substrate 200 under the drive of the actuator 132. Under the support of the support portion 131, the substrate 200 is separated from the tray 120, realizing the transition from the tray 120 supporting the substrate 200 to the support portion 131 supporting the substrate 200. The support portion 131 continues to move towards the channel 1121, which can move the substrate 200 out of the chamber 111 from the channel 1121. Since the substrate 200 has been moved out of the chamber 111, the external robotic arm or manual handling of the substrate 200 does not need to extend into the outer shell 110, fundamentally eliminating the possibility of interference with the outer shell 110 and / or the substrate 200, significantly reducing the risk of scratches on the surface of the substrate 200, directly reducing the scrap of the substrate 200 due to physical damage, thereby improving the yield and quality stability of the substrate 200.

[0032] When the support portion 131 supports the substrate 200 and the tray 120 does not support the substrate 200, the support portion 131 can move along the first direction and approach the tray 120 under the drive of the actuator 132 until the substrate 200 is placed on the tray 120. The support portion 131 continues to move away from the channel 1121, which can separate the substrate 200 from the support portion 131, realizing the transformation from the support portion 131 supporting the substrate 200 to the tray 120 supporting the substrate 200.

[0033] The spatial distribution of the bearing surface 1311 and the support point 121 will be explained in detail below.

[0034] In the first embodiment, see Figure 1 , Figure 3 and Figure 4 At least one bearing surface 1311 includes two oppositely arranged bearing surfaces 1311, with a clearance space 1316 formed between the two bearing surfaces 1311, and a plurality of discontinuous support points 121 partially or completely located within the clearance space 1316 covered in the first direction. In this embodiment, a clearance space 1316 is defined between the two bearing surfaces 1311. Multiple non-continuous support points 121 can all be located within the clearance space 1316 covered in the first direction, that is, the tray 120 is located within the clearance space 1316 of the two bearing surfaces 1311, thus achieving spatial avoidance between the tray 120 and the bearing part 131. Alternatively, a portion of the multiple non-continuous support points 121 is located within the clearance space 1316 covered in the first direction, and another portion is located outside the clearance space 1316 covered in the first direction and is staggered with the bearing surfaces, that is, a portion of the tray 120 is located within the clearance space 1316 of the two bearing surfaces 1311 and another portion is located outside the clearance space 1316 of the two bearing surfaces 1311. This also achieves spatial avoidance between the tray 120 and the bearing part 131, preventing contact interference between the tray 120 and the bearing part 131 when alternately supporting the substrate 200.

[0035] In the second embodiment, a gap space 122 is formed between a plurality of discontinuous support points 121, and at least one bearing surface 1311 is partially or completely located within the area covered by the gap space 122 along the first direction. In this embodiment, a gap space 122 is defined between multiple non-continuous support points 121. At least one bearing surface 1311 can be located within the range covered by the gap space 122 along the first direction, that is, each bearing part 131 is located within the gap space 122, thereby achieving spatial avoidance between the tray 120 and the bearing part 131. Alternatively, at least one bearing surface 1311 may be located partly within the range covered by the gap space 122 along the first direction, and partly outside the range covered by the gap space 122 along the first direction, and staggered with the support points 121. That is, part of all bearing parts 131 is located within the gap space 122 and partly outside the gap space 122, which also achieves spatial avoidance between the tray 120 and the bearing part 131, avoiding contact interference between the tray 120 and the bearing part 131 when alternately supporting the substrate 200.

[0036] In the third embodiment, at least one bearing surface 1311 includes two opposing bearing surfaces 1311, with a clearance space 1316 formed between the two bearing surfaces 1311, and a gap space 122 formed between a plurality of discontinuous support points 121. The clearance space 1316 and the gap space 122 are staggered in a first direction. The clearance space 1316 between the two bearing surfaces 1311 and the gap space 122 between the plurality of discontinuous support points 121 are staggered in the first direction, that is, each bearing part 131 and each support point 121 are spatially staggered and avoid each other, so as to prevent contact interference between the tray 120 and the bearing part 131 when alternately supporting the substrate 200.

[0037] In some embodiments, a portion of the clearance space 1316 is located within the gap space 122, and / or a portion of the gap space 122 is located within the clearance space 1316. In other words, the clearance space 1316 between the two bearing surfaces 1311 partially overlaps with the gap space 122 between the plurality of discontinuous support points 121, and the bearing portions 131 and the support points 121 are spatially staggered to avoid each other, thereby achieving the spatial avoidance arrangement of the tray 120 and the bearing portions 131, and preventing contact interference between the tray 120 and the bearing portions 131 when alternately supporting the substrate 200.

[0038] The specific settings of the floating sealing assembly 136 are explained in detail below.

[0039] In one embodiment, see Figure 2 , Figure 4 and Figure 7The actuation mechanism 130 further includes a floating sealing assembly 136 that is sealed to the wall 112 and covers a preset travel path of the end of the actuating part 132 away from the support part 131. The floating sealing assembly 136 is configured to adaptively deform with the movement of the actuating part 132 to dynamically maintain the environmental state within the chamber 111. To prevent the movement of the actuating part 132 from affecting the environmental state within the chamber 111, the floating sealing assembly 136 covers the preset travel path of the end of the actuating part 132 away from the support part 131 and adaptively deforms with the movement of the actuating part 132, ensuring dynamic sealing of the environment within the chamber 111 without affecting the movement of the actuating part 132.

[0040] In one specific embodiment, see Figure 2 , Figure 4 and Figure 7 The floating sealing assembly 136 includes a flexible telescopic body 1361 with an internal expandable sealing space. The flexible telescopic body 1361 has flexible and expandable deformable characteristics, so that it has an internal expandable sealing space to cover the preset travel path of the end of the actuator 132 away from the support part 131, and adaptively deforms with the movement of the actuator 132 to dynamically maintain the environmental state inside the chamber 111.

[0041] In some embodiments, see Figure 1 and Figure 4 The flexible telescopic body 1361 has at least one open end 13611, which allows the sealed space to communicate with the environment inside the chamber 111. It can cover the preset travel path of the end of the actuator 132 away from the bearing part 131, and can also dynamically seal the environment inside the chamber 111.

[0042] The following is a detailed explanation of the specific configuration of the relevant components at the drive source 133 and the actuator 132.

[0043] In one embodiment, see Figure 2 , Figure 4 and Figure 7 The actuation mechanism 130 further includes a drive source 133, which provides actuating force to the actuating part 132 and is located within the range covered by the travel of the end of the actuating part 132 away from the support part 131. For example, the drive source 133 is a driving device that can provide driving force, such as a cylinder or a hydraulic cylinder. Preferably, the drive source 133 is a rodless cylinder.

[0044] In one specific embodiment, see Figure 1 , Figure 2 and Figure 4The actuation mechanism 130 also includes a support 137 that moves synchronously with the actuation unit 132. The support 137 has at least one branch 1371 and is connected to the end of the floating sealing assembly 136 away from the wall 112. Since the floating sealing assembly 136 is connected to the support 137, when the actuation unit 132 moves synchronously with the support 137, the floating sealing assembly 136 also adaptively deforms to dynamically maintain the environmental state within the chamber 111.

[0045] Further, see Figure 1 , Figure 2 and Figure 4 The moving end 1331 of the drive source 133 is connected to the support base 137 via a transmission plate 139. The transmission plate 139 is L-shaped. The moving end 1331 and the support base 137 form a power transmission chain through the rigidly connected transmission plate 139. The upward displacement of the moving end 1331 is directly transmitted to the support base 137 through the transmission plate 139, that is, the moving end 1331 can drive the support base 137 to move synchronously.

[0046] Specifically, see Figure 4 , Figure 6 and Figure 7 The support base 137 also includes a main body 1372 integrally formed with the branch portion 1371. The main body 1372 is connected to the moving end 1331 of the drive source 133, and the branch portion 1371 extends outward from the side of the main body 1372. For example, the branch portions 1371 are a pair, and the pair of branch portions 1371 are symmetrically arranged on opposite sides of the main body 1372.

[0047] In one specific embodiment, see Figure 4 and Figure 6 The end of the flexible telescopic body 1361 away from the wall 112 is open or closed.

[0048] In one embodiment, see Figure 2 , Figure 4 and Figure 7 There is at least one support portion 131 located in the chamber 111. The support portion 131 and the actuating portion 132 are provided in a one-to-one correspondence. One end of the actuating portion 132 is located in the chamber 111 and connected to the support portion 131. The actuating portion 132 passes through the outer shell 110. The flexible telescopic body 1361 covers the part of the actuating portion 132 located outside the chamber 111. An open end 13611 of the flexible telescopic body 1361 is provided corresponding to the through-hole of the actuating portion 132 to seal the through-hole of the actuating portion 132.

[0049] In one example, when there is only one open end 13611, the end of the flexible telescopic body 1361 away from the wall 112 is closed. Since the end of the flexible telescopic body 1361 away from the wall 112 is connected to the support 137 and the part of the actuator 132 located outside the chamber 111 is located inside the flexible telescopic body 1361, the drive source 133 drives the support 137 to move, causing the flexible telescopic body 1361 connected to the support 137 to deform, thereby causing the actuator 132 located inside the flexible telescopic body 1361 to move.

[0050] In another example, see Figure 2 , Figure 4 and Figure 7 When there are two open ends 13611, the end of the flexible telescopic body 1361 away from the wall 112 is open. The end of the actuator 132 away from the bearing part 131 is connected to the support 137. The drive source 133 drives the support 137 to move, which in turn drives the actuator 132 to move. The flexible telescopic body 1361 then adapts to the deformation.

[0051] Specifically, see Figure 2 and Figure 4 The open end 13611 of the flexible telescopic body 1361 is assembled and fixed by a sealing plate 1362, for example, the sealing plate 1362 is a flange plate. When there is one open end 13611, the sealing plate 1362 of the floating sealing assembly 136 is provided on the wall 112; when there are two open ends 13611, one of the sealing plates 1362 of the floating sealing assembly 136 is provided on the wall 112, and the other sealing plate 1362 is provided on the support 137.

[0052] Taking the use of a rodless cylinder as an example, the process of the actuation mechanism 130 driving the board 200 to move out of the chamber will be explained in detail.

[0053] Combination Figures 1 to 4When the system receives a command to remove the substrate 200, the air source supplies compressed gas at a preset pressure to the rodless cylinder of the actuation mechanism 130. The rodless cylinder serves as a vertical lifting power source. The moving end 1331 of the rodless cylinder moves linearly along the first direction under the action of the air pressure difference. The moving end 1331 forms a power transmission chain with the support base 137 through a rigidly connected transmission plate 139. The upward displacement of the moving end 1331 is directly transmitted to the support base 137 through the transmission plate 139, driving the support base 137 to rise synchronously along the first direction, causing the actuation part 132 to rise, and subsequently causing the bearing part 131 to rise. The carrier 131 is initially located below the support plate 120. During its ascent, the bearing surface 1311 of the carrier 131 passes through the gap space 122 or outside the gap space 122 and within the projection range of the substrate 200 in the first direction until it contacts the bottom surface of the substrate 200. The carrier 131 continues to rise, supporting the substrate 200 through the bearing surface 1311 and lifting the substrate 200 from the height of the support plate 120, so that the substrate 200 is completely separated from the support plate 120. The carrier 131 continues to rise, moving the substrate 200 out of the chamber 111 through the channel 1121. During the movement of the actuator 132, the floating sealing assembly 136 adaptively deforms and dynamically seals to dynamically maintain the environmental state inside the chamber 111.

[0054] The specific settings of the mounting bracket 135 will be explained in detail below.

[0055] In one embodiment, see Figure 2 and Figure 4 The actuation mechanism 130 also includes a fixing frame 135, which extends from the wall 112 along a first direction to define the stroke of the actuating part 132. In other words, the fixed frame 135 defines the preset stroke of the actuating part 132 in the height space of the first direction.

[0056] Further, see Figure 2 The fixed frame 135 is located outside the wall 112, the drive source 133 is located on the side of the fixed frame 135 and within the height space of the fixed frame 135 in the first direction, and the moving end 1331 of the drive source 133 is connected to the support base 137.

[0057] Specifically, the fixing bracket 135 is in the shape of a vertical line, an inverted L, etc.

[0058] The moving end 1331 of the driving source 133 drives the support base 137 to move along the first direction, which in turn drives the actuator 132 to move along the first direction. The flexible telescopic body 1361 then adapts to the deformation. Under the actuation action of the actuator 132, the bearing part 131 supports the substrate 200 and moves along the first direction, so that the substrate 200 can be moved out of the chamber 111 from the channel 1121.

[0059] The specific configuration of the guide structure 134 will be explained in detail below.

[0060] In one embodiment, see Figure 2 and Figure 4 The actuation mechanism 130 also includes a guide structure 134 that constrains the movement path of the actuation unit 132. The guide structure 134 and the drive source 133 are integrated.

[0061] Furthermore, the guide structure 134 includes a guide rail arranged along the first direction, and the moving end 1331 of the drive source 133 is slidably mounted on the guide rail to constrain the moving path of the moving end 1331, thereby constraining the moving path of the actuation part 132 connected to the moving end 1331 through the support base 137, so as to ensure the accuracy and stability of the displacement of the transmission board 200 of the bearing part 131.

[0062] The specific settings of the limiting structure 138 will be explained in detail below.

[0063] In one embodiment, see Figure 2 The actuation mechanism 130 also includes a limiting structure 138 that limits the range of the moving path of the moving end 1331 of the drive source 133. The limiting structure 138 and the drive source 133 are integrated.

[0064] Further, see Figure 2 The limiting structure 138 includes limiting blocks 1381 located at both ends of the moving path of the moving end 1331 of the driving source 133. For example, two limiting blocks 1381 are respectively located at both ends of the guide rail.

[0065] The specific structure of the bearing part 131 will be explained in detail below.

[0066] In one embodiment, see Figure 5 A protrusion 13111 is formed by extending a portion of the bearing surface 1311 towards the substrate 200, and a point contact is formed between the protrusion 13111 and the substrate 200. By forming a point contact between the point-shaped protrusion 13111 and the substrate 200, the contact area with the substrate 200 can be greatly reduced, thereby reducing the risk of friction and contamination on the surface of the substrate 200.

[0067] Further, see Figure 5 The support portion 131 has a guide surface 1312 extending from the edge of the support surface 1311. The slope of the guide surface 1312 gradually decreases from the outer periphery of the support portion 131 towards the center. The guide surface 1312 is arc-shaped along its extending direction to adapt to the substrate 200. The guide surface 1312 has a guiding effect on the substrate 200, and the substrate 200 can be guided to the support surface 1311 along the guide surface 1312.

[0068] Furthermore, see Figure 5 The support portion 131 has a positioning surface 1313 connected between the support surface 1311 and the guide surface 1312. The positioning surface 1313 is arc-shaped along its extension direction to adapt to the substrate 200. The positioning surface 1313 is vertical along the first direction. The positioning surface 1313 defines the edge position of the substrate 200.

[0069] In one specific embodiment, see Figure 4 The supporting part 131 includes a fixed section 1314 and at least one supporting section 1315 connected to the fixed section 1314. Preferably, the fixed section 1314 and the supporting section 1315 are integrally formed. The fixed section 1314 is connected to the actuating part 132. The bearing surface 1311, the guide surface 1312, and the positioning surface 1313 are located on the supporting section 1315.

[0070] The specific structure of the drive mechanism 140 will be explained in detail below.

[0071] In one embodiment, see Figure 1 and Figure 8 The substrate 200 transmission system also includes a drive mechanism 140 configured to drive the tray 120 to linearly displace along a second direction. For example, the second direction is horizontal. The drive mechanism 140 may employ a lead screw 1431 transmission structure 143 and guide rail slider assembly, belt drive mechanism, linear motor drive module, etc.

[0072] The substrate 200 has a common moving position point on its moving path in the second direction and on its moving path in the first direction, and the support plate 120 and the bearing portion 131 can support the substrate 200 at interchangeable moving position points.

[0073] When the support portion 131 does not support the substrate 200 and the tray 120 supports the substrate 200, the tray 120 supports the substrate 200 and moves along the second direction, moving the substrate 200 to a common moving position point. Under the drive of the drive source 133, the support portion 131 moves along the first direction, driving the support portion 131 to move towards the substrate 200 and support the substrate 200. The drive continues to make the substrate 200 move along the first direction and separate from the tray 120, so that the substrate 200 can be moved out of the chamber 111 from the channel 1121.

[0074] When the tray 120 does not support the substrate 200 and the support portion 131 supports the substrate 200, the support portion 131 supports the substrate 200 and moves along the first direction under the drive of the drive source 133, so that the substrate 200 moves to a common moving position point, and then the tray 120 supports the substrate 200. The tray 120 can be displaced before or after the support portion 131 supports the substrate 200 and moves to the common moving position point to reach the common moving position point.

[0075] In one embodiment, see Figure 1 and Figure 8 The drive mechanism 140 includes a drive member 141 configured to drive the tray 120 to move along a second direction. Specifically, the drive member 141 is a motor or the like. Driven by the drive member 141, the tray 120 can move along the second direction, thereby driving the substrate 200 on it to move along the second direction. Specifically, the drive member 141 is configured to drive the finger 170 to move along the second direction, and the tray 120 is disposed at the end of the finger 170.

[0076] In one specific embodiment, see Figure 8 The drive mechanism 140 also includes a constraint structure 142 that constrains the movement path of the support plate 120 along the second direction. The constraint structure 142 constrains and guides the movement path of the support plate 120, ensuring the accuracy and stability of the linear displacement of the substrate 200 supported by the support plate 120 along the second direction.

[0077] Further, see Figure 8 The constraint structure 142 includes at least one slide rail 1421 disposed in the chamber 111 along the second direction, and a sliding seat 1422 slidably disposed on the at least one slide rail 1421 and connected to the drive member 141. Under the drive of the drive member 141, the sliding seat 1422 moves along the extension direction of the slide rail 1421, i.e., the second direction, thereby driving the support plate 120 to move along the second direction.

[0078] Furthermore, see Figure 8 The driving member 141 is connected to the sliding seat 1422 via a transmission structure 143. The transmission structure 143 includes a lead screw 1431 located at the rotating end of the driving member 141 along the second direction, and a displacement member 1432 threadedly engaged with the lead screw 1431. For example, the displacement member 1432 is a nut. When the driving member 141 drives the lead screw 1431 to rotate around its own axis, the displacement member 1432 reciprocates linearly under the action of threaded engagement with the lead screw 1431, and drives the sliding seat 1422 to move synchronously. The sliding seat 1422 drives the support plate 120 to move along the second direction.

[0079] Specifically, see Figure 8 The slide rails 1421 are a pair, and the lead screw 1431 is located between the pair of slide rails 1421. The rotating end of the drive component 141 is rigidly connected to the lead screw 1431 coaxially via a coupling. Both ends of the lead screw 1431 are respectively mounted in the chamber 111 via bearings, which are angular contact ball bearings.

[0080] In one specific embodiment, see Figure 1 and Figure 8The wall 112 has an openable and closable conveying port 1122 along the second direction. Under the drive of the drive mechanism 140, the support plate 120 supports the base plate 200 and moves linearly along the second direction, and can extend from inside the chamber 111 to outside the chamber 111 through the conveying port 1122; or, it can retract from outside the chamber 111 to inside the chamber 111 through the conveying port 1122. Furthermore, the substrate 200 transmission system also includes a gate valve configured to selectively open or close the transmission port 1122.

[0081] Specifically, the substrate 200 transmission system is located inside the cavity of the transfer module. The transmission port 1122 is sealed to the cavity of the transfer module through the gate valve. By controlling the gate valve, the transmission port 1122 can be selectively opened or closed to selectively connect or isolate the internal environment of the cavity 111 from the internal environment of the cavity of the transfer module.

[0082] The specific configuration of the outer casing 110 will be explained in detail below.

[0083] In one specific embodiment, see Figure 1 and Figure 2 The substrate 200 transmission system also includes a sealing plate 150, which is rotatably disposed at the channel 1121 of the housing 110 via at least one hinge. The channel 1121 is opened or closed by opening or closing the sealing plate 150.

[0084] Further, see Figure 1 and Figure 2 The substrate 200 transmission system also includes at least one adjusting member 160 configured to control the opening and closing of the sealing plate 150. The adjusting member 160 is telescopically adjustable, with one end hinged to the sealing plate 150 and the other end hinged to the housing 110. By adjusting the length of the adjusting member 160, the sealing plate 150 can be pushed away from the channel 1121 to open or pulled towards the channel 1121 to close. For example, the adjusting member 160 may be a hydraulic rod or the like.

[0085] Furthermore, see Figure 1 The sealing plate 150 is provided with a transparent viewing port 151. The position of the viewing port 151 is perpendicular to the parking position of the substrate 200 when it is retracted into the cavity 111. It can be a common moving position point in the above embodiments, which facilitates real-time monitoring of the status of the substrate 200.

[0086] In one embodiment, the chamber 111 is configured to accommodate at least one receiving space for storing or transporting the substrate 200. Each receiving space is independent of the others, and each receiving space is provided with at least one tray 120 and an actuation mechanism 130. By dividing the space into multiple independent receiving spaces, multiple substrates 200 can be transported synchronously or alternately to improve the transport efficiency of the substrates 200.

[0087] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0088] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0089] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0090] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A substrate transport system equipped with a cooperative transfer structure, characterized by, include: The outer shell (110) has a cavity (111) formed by a wall (112) and a channel (1121) is provided along a first direction of the wall (112). The channel (1121) can be selectively closed to isolate the internal environment of the cavity (111) from the external environment of the cavity (111). A tray (120) is configured to support a base plate (200), the tray (120) having a plurality of distributed, non-continuous support points (121). The actuation mechanism (130) includes a support portion (131) and an actuation portion (132) for driving the support portion (131) to move in a first direction, wherein the support portion (131) has at least one support surface (1131). In this arrangement, at least one bearing surface (1131) and a plurality of discontinuous support points (121) are staggered and avoid each other in the projection of the first direction, so as to allow the bearing part (131) to support the substrate (200) and, driven by the actuating part (132), to separate the substrate (200) from the support plate (120) and move the substrate (200) out of the chamber (111) through the channel (1121).

2. The substrate transport system equipped with a coordinated transfer structure according to claim 1, characterized in that, At least one bearing surface (1131) includes two oppositely arranged bearing surfaces (1131), forming a clearance space (1316) between the two bearing surfaces (1131), and a plurality of non-continuous support points (121) are partially or completely located within the clearance space (1316) within the range covered by the first direction.

3. The substrate transport system equipped with a coordinated transfer structure according to claim 1, characterized in that, A gap space (122) is formed between multiple discontinuous support points (121), and at least one bearing surface (1131) is partially or completely located within the area covered by the gap space (122) along a first direction.

4. The substrate transport system equipped with a coordinated transfer structure according to claim 1, characterized by, At least one bearing surface (1131) includes two oppositely arranged bearing surfaces (1131), with a clearance space (1316) formed between the two bearing surfaces (1131). A gap space (122) is formed between multiple discontinuous support points (121). The avoidance space (1316) and the gap space (122) are staggered in the first direction.

5. The substrate transport system equipped with a coordinated transfer structure according to claim 4, characterized in that, A portion of the clearance space (1316) is located within the gap space (122), and / or a portion of the gap space (122) is located within the clearance space (1316).

6. The equipped co-delivery architecture substrate transport system of claim 1, wherein, The actuation mechanism (130) further includes a drive source (133) that provides actuation force to the actuation part (132) and is located within the range covered by the travel of the end of the actuation part (132) away from the support part (131).

7. The substrate transport system equipped with a coordinated transfer structure according to claim 6, characterized in that, The actuation mechanism (130) further includes a guide structure (134) that constrains the movement path of the actuation part (132), and is integrated with the drive source (133).

8. The equipped co-delivery architecture substrate transport system of claim 1, wherein, The actuation mechanism (130) further includes a fixing frame (135) which extends from the wall (112) in a first direction to limit the stroke of the actuation part (132).

9. The cooperatively transferring substrate transport system of claim 1, wherein, A protrusion (13111) is formed by extending from a portion of the bearing surface (1131) toward the substrate (200), and the protrusion (13111) forms a point contact with the substrate (200).

10. The cooperatively transferring substrate transport system of claim 1, wherein, It also includes a drive mechanism (140) configured to drive the pallet (120) to linearly displace in a second direction.

11. The substrate transport system equipped with a coordinated transfer structure according to claim 1 or 10, characterized in that, The wall (112) has an openable and closable conveyor (1122) along the second direction.

12. The cooperatively transferring substrate transport system of claim 11, wherein, It also includes a gate valve configured to selectively open or close the transfer port (1122).

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