Rotary lid opening device and semiconductor processing apparatus

Abstract

The application discloses a rotating lid opening device and a semiconductor processing equipment, and belongs to the technical field of semiconductor device manufacturing. The rotating lid opening device is used for opening and closing the lid of a chamber. The chamber comprises a chamber body and a lid arranged on the chamber body. The rotating lid opening device comprises a fixing assembly, a rotating assembly, a rotating shaft, a driving mechanism and at least one adapter. The fixing assembly is connected with the chamber body, the rotating assembly is connected with the lid, and the rotating assembly can drive the lid to open and close. The rotating shaft is connected with the fixing assembly and the rotating assembly. The rotating shaft is rotatably connected with the fixing assembly, and the rotating assembly is fixedly connected with the rotating shaft, so that the rotating assembly can rotate relative to the fixing assembly along the axis of the rotating shaft. The driving mechanism is provided with a driving shaft. The driving shaft and the rotating shaft are connected through the adapter. The application can separate the driving mechanism from the rotating shaft, improve the flexibility of the layout of equipment components, and improve the convenience of opening the chamber for maintenance.

Description

Technical Field

[0001] This application relates to the field of semiconductor device manufacturing technology, and in particular to a rotating cover opening device and semiconductor processing equipment. Background Technology

[0002] In semiconductor chip manufacturing processes, the top cover of the semiconductor transfer cavity needs to have an opening and closing function to allow for maintenance when the maintenance cycle is reached or an abnormality occurs. Existing capping devices generally consist of two sets of connecting arms connected to the cover and the cavity respectively, and a drive assembly integrated between these two sets of connecting arms. The power output shaft of this drive assembly is compatible with the rotation shaft of the two sets of connecting arms; that is, the drive assembly is located at the hinge position of the two sets of connecting arms. Although this increases the overall integration, since the cover rotates around the rotation shaft to open and close, the cover will obstruct the drive assembly after it is opened. This means that while balancing the convenience of maintenance operations inside the cavity after the cover is opened, the convenience of opening and closing the cover is inevitably sacrificed. Therefore, it is necessary to seek a new capping device to improve the rationality of the component layout and enhance the convenience of opening and closing operations. Utility Model Content

[0003] One embodiment of this application provides a rotating cover opening device to solve the technical problem of unreasonable positional layout of the components driving the top cover opening and closing; another objective of this application is to provide a semiconductor processing device.

[0004] To achieve the above objectives, according to a first aspect of this application, a rotary opening device is provided, the rotary opening device being used for opening and closing a chamber, the chamber including a chamber body and a cover disposed on the chamber body, the rotary opening device comprising: A fixing component is connected to the chamber body; A rotating assembly is connected to the cover. A rotating shaft connects the fixed component and the rotating component, wherein the rotating shaft is rotatably connected to the fixed component, and the rotating component is fixedly connected to the rotating shaft, so that the rotating component can rotate relative to the fixed component along the axis of the rotating shaft; A drive mechanism, including a drive shaft for outputting rotational power; At least one adapter is provided, through which the drive shaft and the rotating shaft are connected.

[0005] Optionally, the adapter is configured as a universal coupling, with the drive shaft and the rotating shaft coaxially arranged, or the drive shaft and the rotating shaft arranged at an obtuse angle.

[0006] Optionally, the chamber body includes a first peripheral sidewall and a second peripheral sidewall connected to each other, and the fixing assembly is connected to the first peripheral sidewall; The drive mechanism is connected to the second peripheral sidewall.

[0007] Optionally, the rotating cover opening device further includes a bearing disposed between the rotating shaft and the fixed assembly.

[0008] Optionally, the fixing component includes two connecting arms spaced apart, with one end of the two connecting arms away from the rotating component connected to the first peripheral sidewall, and a first mounting hole provided at the end of the two connecting arms near the rotating component, the bearing being placed in the first mounting hole.

[0009] Optionally, the fixing assembly further includes a fixing plate that fits against the first peripheral sidewall, and the two connecting arms are connected to the side of the fixing plate opposite to the first peripheral sidewall.

[0010] Optionally, the rotating assembly includes two rotating arms spaced apart, with the ends of the two rotating arms away from the fixed assembly connected to the cover, and the ends of the two rotating arms close to the fixed assembly connected to the rotating shaft.

[0011] Optionally, each of the rotating arms is in contact with a portion of one of the connecting arms; One of the rotating arm and the connecting arm is provided with an insertion hole, and the other of the rotating arm and the connecting arm is provided with at least one limiting hole; The rotating lid opening device further includes: A pin, a portion of which passes through the insertion hole; An elastic element is housed within the insertion hole and sleeved on the outside of the pin. Specifically, when the rotating arm rotates relative to the connecting arm to a position where the limiting hole corresponds to the insertion hole, the elastic element drives one end of the pin to engage in the limiting hole corresponding to the insertion hole, thereby limiting the relative position of the rotating arm and the connecting arm.

[0012] Optionally, the pin includes a pin body and a stop block that abuts the pin body, a portion of the pin body passes through the insertion hole, and the stop block is disposed at one end of the pin body near the limiting hole; The elastic element is sleeved on the outside of the pin body, and the elastic element abuts against the inner wall of the stop block and the insertion hole respectively.

[0013] According to a second aspect of this application, a semiconductor processing apparatus is provided, comprising: A transfer chamber, the transfer chamber comprising a chamber body and a cover disposed on the chamber body; The rotating opening device as described in any of the above, wherein the rotating opening device is used for opening and closing between the cover and the chamber body.

[0014] Several embodiments of this application have one of the following beneficial effects: The rotating lid opening device of this application embodiment is used for opening and closing a chamber, the chamber including a chamber body and a lid covering the chamber body; the rotating lid opening device includes a fixing component, a rotating component, a rotating shaft, a drive mechanism, and at least one adapter; the fixing component is connected to the chamber body, the rotating component is connected to the lid, and the rotating component can drive the lid to perform opening and closing actions; the rotating shaft connects the fixing component and the rotating component respectively, the rotating shaft is rotatably connected to the fixing component, and the rotating component and the rotating shaft are fixedly connected, so that the rotating component can rotate relative to the fixing component along the axis of the rotating shaft; the drive mechanism serves as a power output unit. The component is used to drive the rotating shaft to rotate. The drive mechanism is equipped with a drive shaft for transmitting rotational power. The drive shaft and the rotating shaft are connected by an adapter to achieve stable power transmission. This application uses an adapter to connect the drive shaft and the rotating shaft, thereby decoupling the positions of the drive mechanism and the rotating shaft. This layout improves the flexibility of the position layout of the components of the cover opening device. In the actual equipment layout environment, the rotating shaft can be set in a suitable position for opening the cover, while the drive mechanism can be arranged in a suitable operating position. This makes the position layout of the components of the cover opening device more reasonable and facilitates the opening and closing operation of the cover and the maintenance operation of the chamber.

[0015] The technical effects of the semiconductor processing apparatus of this application will not be elaborated further. Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0018] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the rotating lid opening device provided in the exemplary embodiments of this disclosure from one angle. Figure 2This is a schematic diagram of the overall structure of one embodiment of the rotating lid opening device provided in the exemplary embodiments of this disclosure from another angle. Figure 3 This is an overall structural schematic diagram of an alternative embodiment of the rotating lid opening device provided in the exemplary embodiments of this disclosure, taken from one angle. Figure 4 This is a schematic diagram of the overall structure of another embodiment of the rotating lid opening device provided in the exemplary embodiments of this disclosure from another angle. Figure 5 This is a schematic diagram of the state when the rotating lid opening device provided in another embodiment of the exemplary embodiments of this disclosure is opened; Figure 6 This is a schematic diagram of the pin position provided in an exemplary embodiment of this disclosure.

[0019] Explanation of reference numerals in the attached figures: 110-Fixing component; 111-Connecting arm; 112-First mounting hole; 113-Fixing plate; 120-Rotating component; 121-Rotating arm; 130-Rotating shaft; 140-Drive mechanism; 141-Drive shaft; 150-Adapter; 170-Insertion hole; 180-Limiting hole; 190-Pin; 191-Pin body; 192-Stop; 193-Elastic element; 200 - Chamber; 210 - Chamber body; 211 - First circumferential sidewall; 212 - Second circumferential sidewall; 220 - Cover. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0021] In the description of this application, it should be understood that the terms "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, although the terms "first," "second," etc., may be used herein to describe various components, these components should not be limited by these terms. These terms are used to distinguish one component from another. Therefore, the first component discussed below may be referred to as the second component without departing from the teachings of this application. As used herein, the term "and / or" includes any and all combinations of any one or more of the associated listed items.

[0022] In the description of this application, "multiple" means two or more, and "at least one" means one, two, or more, unless otherwise explicitly specified. In the description of this application, "perpendicular" means completely perpendicular to 90° or nearly completely perpendicular, for example, an angle of 80° to 100° is considered perpendicular. Similarly, "parallel" means completely parallel or nearly completely parallel, for example, a perfectly parallel angle of 10° is considered parallel.

[0023] In semiconductor chip manufacturing processes, the top cover of the semiconductor transfer cavity needs to have an opening and closing function so that the transfer cavity can be opened for maintenance when the maintenance cycle is reached or when an abnormality occurs.

[0024] Currently, lid opening devices generally consist of two sets of connecting arms connected to the lid and the cavity respectively, and a drive assembly integrated between the two sets of connecting arms. The power output shaft of the drive assembly is compatible with the rotation shaft of the two sets of connecting arms; that is, the drive assembly is located at the hinge position of the two sets of connecting arms. Although the overall integration is higher, since the lid rotates around the rotation shaft to open and close, the lid will obstruct the drive assembly after it is opened. This means that while balancing the convenience of maintenance operations inside the cavity after the lid is opened, the convenience of opening and closing the lid is inevitably sacrificed.

[0025] In other words, the layout of the components used to drive the opening and closing of the top cover is unreasonable and fails to take into account the actual operational needs of the drive mechanism. This results in limited operating space available to the drive mechanism, which not only increases the difficulty of operation for operators but also affects the efficiency of equipment maintenance and daily operation to some extent.

[0026] A first aspect of this application provides a rotary lid opening device; see [link to relevant documentation]. Figure 1 , Figure 2 and Figure 5 The rotating lid-opening device is used for opening and closing the chamber 200, which includes a chamber body 210 and a lid 220 covering the chamber body 210. Specifically, the rotating lid-opening device includes a fixing component 110, a rotating component 120, a rotating shaft 130, a drive mechanism 140, and at least one adapter 150. The fixing component 110 serves as the basic fixing structure of the rotating lid-opening device and is connected to the chamber body 210. The rotating component 120 is connected to the lid 220 and can drive the lid 220 to open and close. The rotating shaft 130 connects the fixing component 110 and the rotating component 120 respectively. The rotating shaft 130 is rotatably connected to the fixing component 110, and the rotating component 120 is fixedly connected to the rotating shaft 130, so that the rotating component 120 can rotate relative to the fixing component 110 along the axis of the rotating shaft 130. The drive mechanism 140 serves as a power output component to drive the rotating shaft 130 to rotate. The drive mechanism 140 is provided with a drive shaft 141 for transmitting rotational power, and the drive shaft 141 extends toward the rotating shaft 130. The two are connected by a connector 150 to achieve stable power transmission.

[0027] It should be noted that in existing systems, the drive mechanism 140 is typically directly mounted on the rotating shaft 130 to directly drive the rotating shaft 130 to rotate, thereby rotating the cover 220. This layout results in the drive mechanism 140 occupying excessive space in the direction of both the chamber 200 and the rotating cover opening device, leaving the surrounding space of the chamber 200 unused. In this embodiment, however, a drive shaft 141 is additionally provided on the drive mechanism 140, and the drive shaft 141 is connected to the rotating shaft 130 via an adapter 150. This decouples the drive mechanism 140 from the rotating shaft 130, allowing the drive mechanism 140 to be placed in other locations around the chamber 200, utilizing the surrounding space and improving the operability of the drive mechanism, ensuring the overall space utilization and ease of operation of the device. Furthermore, the drive mechanism 140 is configured as a handwheel and a drive gear set; these structures are relatively mature, therefore this embodiment does not intend to further limit the drive mechanism 140, nor will it be described in detail.

[0028] It should be noted that chamber 200 is any cavity in a semiconductor processing device that needs to have an opening function, such as a transfer chamber or a reaction chamber.

[0029] In some embodiments, please refer to Figure 1 and Figure 2 The adapter 150 is configured as a universal coupling, and the drive shaft 141 is coaxial with the rotating shaft 130.

[0030] Specifically, the universal coupling can be considered equivalent to a conventional coupling at this point, serving only to stably transmit the rotational power output from the drive shaft 141 to the rotating shaft 130, and providing assembly dimensional redundancy for the docking operation of the rotating shaft 130 and the drive shaft 141. This coaxial layout allows the drive mechanism 140 to be arranged away from the rotating shaft 130 along its axial direction, reserving ample operating space for the drive mechanism 140 and facilitating maintenance and debugging operations by operators.

[0031] In some embodiments, please refer to Figure 3 and Figure 4 Alternatively, the drive shaft 141 and the rotating shaft 130 can be set at an obtuse angle. This bent layout can further optimize the spatial structure and make use of the space around the chamber 200.

[0032] Specifically, the chamber body 210 includes a first peripheral sidewall 211 and a second peripheral sidewall 212 connected to each other. The fixing assembly 110 is connected to the first peripheral sidewall 211, serving as the basic support for the rotating opening device; the drive mechanism 140 is connected to the second peripheral sidewall 212. Specifically, the first peripheral sidewall 211 and the second peripheral sidewall 212 are two of the multiple sidewalls that enclose the chamber body 210, not the first peripheral sidewall 211 and the second peripheral sidewall 212 alone forming the chamber body 210. The first peripheral sidewall 211 and the second peripheral sidewall 212 can be connected vertically (e.g., adjacent sidewalls when the chamber 200 is rectangular) or at a certain angle (e.g., an inclined transition sidewall of a non-rectangular chamber, which can be a triangular chamber, rhomboid chamber, pentagonal chamber, hexagonal chamber, etc.) depending on the overall structural shape of the chamber body 210.

[0033] It should be noted that the fixing component 110 is connected to the first peripheral sidewall 211, and the drive mechanism 140 is connected to the second peripheral sidewall 212. That is, the fixing component 110 and the drive mechanism 140 are mounted on different sidewalls of the chamber body 210. Connecting the drive shaft 141 and the rotating shaft 130 via a universal coupling allows for sufficient angular or length adjustment margins between the drive shaft 141 and the rotating shaft 130, flexibly adapting to the design requirements of the power transmission path and ensuring stable transmission of rotational power from the drive mechanism 140 to the rotating shaft 130. Simultaneously, this layout fully utilizes the unused space on different sidewalls of the chamber body 210, avoiding structural congestion caused by integrating too many components on a single sidewall, further optimizing the overall space utilization of the equipment.

[0034] In some examples, to improve the installation stability of the drive mechanism 140, it can be supported by additional mounting brackets (not shown in the figure). These mounting brackets are typically located below the drive mechanism 140, and their connection method can be flexibly selected according to actual needs: they can be fixedly connected to the second peripheral sidewall 212, further enhancing the installation stability of the drive mechanism 140 by utilizing the rigidity of the chamber body 210, preventing displacement due to vibration during operation; or they can serve as an independent load-bearing structure, solely supporting the weight of the drive mechanism 140 (such as fixing brackets to the ground or equipment platform around the chamber 200).

[0035] In some embodiments, the rotating cover opening device further includes a bearing (not shown), which is disposed between the rotating shaft 130 and the fixed component 110. Specifically, the bearing achieves a rotational connection between the rotating shaft 130 and the fixed component 110 through its own rolling mechanical properties.

[0036] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 The fixing component 110 includes two connecting arms 111 spaced apart. The ends of the two connecting arms 111 away from the rotating component 120 are connected to the first peripheral sidewall 211. The ends of the two connecting arms 111 near the rotating component 120 are provided with a first mounting hole 112, and a bearing is placed in the first mounting hole 112.

[0037] It should be noted that the two spaced connecting arms 111 are both connected to the first peripheral sidewall 211, forming a two-point stable support, further enhancing the overall installation stability of the device. The rotating shaft 130 needs to pass through the first mounting holes 112 of the two connecting arms 111 (the two points of the rotating shaft 130 respectively cooperate with the bearings in the two first mounting holes 112). The two spaced bearings can radially position the rotating shaft 130 from different positions, effectively limiting the shaking or deviation of the rotating shaft 130 during rotation, ensuring that the rotating shaft 130 always rotates along a fixed axis, thereby enabling the rotating component 120 (and the cover 220) connected to it to open and close. At the same time, the cooperation of the two bearings can further disperse the force transmitted by the rotating shaft 130, reduce the wear of individual bearings, and extend the service life of the components.

[0038] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4The fixing assembly 110 also includes a fixing plate 113, which is fitted against the first peripheral sidewall 211. Two connecting arms 111 are connected to the side of the fixing plate 113 opposite to the first peripheral sidewall 211. Specifically, the fixing plate 113 is fixedly connected to the first peripheral sidewall 211. The fixing plate 113 increases the contact area between the fixing assembly 110 and the chamber body 210 to distribute the force and further enhance the installation firmness of the fixing assembly 110.

[0039] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 The rotating assembly 120 includes two rotating arms 121 spaced apart. The ends of the two rotating arms 121 furthest from the fixed assembly 110 are connected to the cover 220, and the ends of the two rotating arms 121 closest to the fixed assembly 110 are connected to the rotating shaft 130. Specifically, the two ends of the rotating arms 121 furthest from the fixed assembly 110 are connected to the cover 220, and this two-point connection improves the stability of the connection between the rotating assembly 120 and the cover 220. This prevents the cover 220 from tilting or wobbling due to uneven force during opening and closing, and also evenly distributes the rotational force transmitted by the rotating shaft 130 onto the cover 220, ensuring that the cover 220 always moves along a preset trajectory.

[0040] It should be noted that each of the two rotating arms 121 has a hole at one end near the fixed assembly 110, through which the rotating shaft 130 can pass to connect with the rotating arms 121. Simultaneously, a key connection is used between the rotating shaft 130 and the hole on the rotating arm 121, enabling rigid transmission without relative slippage. On one hand, this completely converts the power transmitted by the drive mechanism 140 through the adapter 150 and the rotating shaft 130 into the rotational motion of the rotating arm 121; on the other hand, it prevents slippage between the rotating shaft 130 and the rotating arm 121 due to vibration or load changes, further ensuring the smoothness and reliability of the opening and closing action of the cover 220.

[0041] In some embodiments, please refer to Figure 1 and Figure 6 Each rotating arm 121 of the rotating assembly 120 is in partial contact with a connecting arm 111 of the fixed assembly 110, forming a mating relationship of one rotating arm 121 corresponding to one connecting arm 111.

[0042] To limit the position during rotation, one of the rotating arm 121 and the connecting arm 111 has an insertion hole 170, and the other of the rotating arm 121 and the connecting arm 111 has at least one limiting hole 180. Specifically, if the rotating arm 121 has an insertion hole 170, the connecting arm 111 has at least one limiting hole 180; or if the rotating arm 121 has at least one limiting hole 180, the connecting arm 111 has an insertion hole 170. This flexible hole layout can be adjusted according to the actual needs such as the overall space of the device and the required opening and closing angle of the cover 220, adapting to different installation scenarios.

[0043] Meanwhile, the rotating opening device also includes a pin 190 and an elastic element 193. Part of the pin 190 passes through the insertion hole 170 to ensure that the pin 190 can move along the axial direction of the insertion hole 170. The elastic element 193 is housed in the insertion hole 170 and sleeved on the outside of the pin 190 so that the force of the elastic element 193 can act on the pin 190.

[0044] When the rotating arm 121 drives the cover 220 to rotate, the rotating arm 121 and the connecting arm 111 will move relative to each other. When the rotation reaches a position where a certain limiting hole 180 corresponds to an insertion hole 170, the elastic element 193, which was originally in a compressed state, will release its elastic force, driving the pin 190 to move along the axis of the insertion hole 170 towards the limiting hole 180, and finally causing one end of the pin 190 to be engaged in the corresponding limiting hole 180. Through this process, the relative position of the rotating arm 121 and the connecting arm 111 is limited, and the cover 220 can also be stably kept at the current opening angle, avoiding accidental rotation of the cover 220 due to its own weight or external vibration (such as keeping it in a half-open state during maintenance), and also allowing the operator to operate without continuously supporting the cover 220, improving operational safety and convenience.

[0045] It should be noted that a portion of the pin 190 extends into the insertion hole 170, so that the movement of the pin 190 can be manually adjusted to release the pin 190 from the positional limitation between the rotating arm 121 and the connecting arm 111, thereby allowing for readjustment of the opening and closing between the cover 220 and the chamber body 210.

[0046] In some examples, multiple limiting holes 180 are provided. When each limiting hole 180 corresponds to the insertion hole 170, the pin 190 limits the opening and closing angle between the cover 220 and the chamber body 210 to different angles. Thus, the opening and closing angle between the cover 220 and the chamber body 210 can be adjusted according to operational requirements.

[0047] In some embodiments, please refer to Figure 6The pin 190 includes a pin body 191 and a stop 192 that abuts against the pin body 191. A portion of the pin body 191 passes through the insertion hole 170, providing stable guidance for the movement of the pin 190. The stop 192 is located at the end of the pin body 191 near the limiting hole 180. An elastic element 193 is sleeved on the outside of the pin body 191, and the elastic element 193 abuts against the stop 192 and the inner wall of the insertion hole 170. This ensures that the elastic element 193 is always in a stable compression space. When the rotating arm 121 and the connecting arm 111 rotate relative to each other and the limiting hole 180 and the insertion hole 170 do not correspond, the stop block 192 is squeezed and compresses the elastic element 193, allowing the elastic element 193 to store potential energy. When the limiting hole 180 and the insertion hole 170 correspond, the elastic element 193 releases its elastic force, which pushes the pin 191 through the stop block 192, causing the pin 191 to engage in the limiting hole 180, thereby limiting the position of the rotating arm 121 and the connecting arm 111.

[0048] A second aspect of this application provides a semiconductor processing apparatus, which includes a transfer chamber and a rotary opening device as described above. The rotary opening device enables the opening and closing of the cover 220 of the transfer chamber and the chamber body 210 of the transfer chamber. The semiconductor processing apparatus of this application includes the aforementioned rotary opening device; therefore, the semiconductor processing apparatus can possess all the technical features and beneficial effects of the aforementioned rotary opening device, which will not be elaborated further here.

[0049] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0050] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0051] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A rotating lid opening device, characterized in that, The rotating opening device is used for opening and closing the cover (220) of the chamber (200). The chamber (200) includes a chamber body (210) and the cover (220) covering the chamber body (210). The rotating opening device includes: A fixing component (110) is connected to the chamber body (210); A rotating assembly (120) is connected to the cover (220); A rotating shaft (130) is connected to the fixed assembly (110) and the rotating assembly (120) respectively. The rotating shaft (130) is rotatably connected to the fixed assembly (110), and the rotating assembly (120) is fixedly connected to the rotating shaft (130) so that the rotating assembly (120) can rotate relative to the fixed assembly (110) along the axis of the rotating shaft (130). The drive mechanism (140) includes a drive shaft (141) for rotational power output; At least one adapter (150) is provided, through which the drive shaft (141) is connected to the rotating shaft (130).

2. The rotating lid opening device according to claim 1, characterized in that, The adapter (150) is configured as a universal coupling, and the drive shaft (141) is coaxial with the rotating shaft (130), or the drive shaft (141) and the rotating shaft (130) are set at an obtuse angle.

3. The rotating lid opening device according to claim 2, characterized in that, The chamber body (210) includes a first peripheral sidewall (211) and a second peripheral sidewall (212) connected to each other, and the fixing assembly (110) is connected to the first peripheral sidewall (211); The drive mechanism (140) is connected to the second peripheral sidewall (212).

4. The rotating lid opening device according to claim 3, characterized in that, The rotating cover opening device also includes a bearing, which is disposed between the rotating shaft (130) and the fixing component (110).

5. The rotating lid opening device according to claim 4, characterized in that, The fixing component (110) includes two connecting arms (111) spaced apart. The ends of the two connecting arms (111) away from the rotating component (120) are connected to the first peripheral sidewall (211). The ends of the two connecting arms (111) near the rotating component (120) are provided with a first mounting hole (112), and the bearing is placed in the first mounting hole (112).

6. The rotating lid opening device according to claim 5, characterized in that, The fixing assembly (110) further includes a fixing plate (113) which is attached to the first peripheral sidewall (211), and the two connecting arms (111) are connected to the side of the fixing plate (113) away from the first peripheral sidewall (211).

7. The rotating lid opening device according to claim 5, characterized in that, The rotating assembly (120) includes two rotating arms (121) spaced apart. The ends of the two rotating arms (121) away from the fixing assembly (110) are connected to the cover (220), and the ends of the two rotating arms (121) close to the fixing assembly (110) are connected to the rotating shaft (130).

8. The rotating lid opening device according to claim 7, characterized in that, Each of the rotating arms (121) is in partial contact with one of the connecting arms (111); One of the rotating arm (121) and the connecting arm (111) is provided with an insertion hole (170), and the other of the rotating arm (121) and the connecting arm (111) is provided with at least one limiting hole (180). The rotating lid opening device further includes: A pin (190) is inserted into the insertion hole (170). An elastic element (193) is housed in the insertion hole (170) and sleeved on the outside of the pin (190); When the rotating arm (121) rotates relative to the connecting arm (111) to a position where the limiting hole (180) corresponds to the insertion hole (170), the elastic element (193) drives one end of the pin (190) to engage in the limiting hole (180) corresponding to the insertion hole (170), thereby limiting the relative position of the rotating arm (121) and the connecting arm (111).

9. The rotating lid opening device according to claim 8, characterized in that, The pin (190) includes a pin body (191) and a stop (192) that engages with the pin body (191). A portion of the pin body (191) passes through the insertion hole (170), and the stop (192) is located at one end of the pin body (191) near the limiting hole (180). The elastic element (193) is sleeved on the outside of the pin (191), and the elastic element (193) abuts against the inner wall of the stop (192) and the insertion hole (170).

10. A semiconductor processing apparatus, characterized in that, include: The transit chamber includes a chamber body (210) and a cover (220) covering the chamber body (210); The rotating opening device according to any one of claims 1 to 9, wherein the rotating opening device is used for opening and closing between the cover (220) and the chamber body (210).

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