A polishing liquid recycling device

Abstract

The utility model relates to a kind of polishing liquid recycling device, including recycling cylinder;Still including the waste liquid inlet being arranged at the upper end of recycling cylinder, the outside of recycling cylinder is connected with discharge pipe, polishing liquid filter assembly is provided in the inside of recycling cylinder, the lower end of recycling cylinder is provided with drive module, the inside of recycling cylinder is rotatably connected with a group of annularly evenly distributed fixed blocks, two fixed blocks between adjacent are movably connected with the arc second filter screen, fixed block and second filter screen form outer filter cylinder;The novel switching the flow direction of guide plate by the forward and reverse rotation of rotating disc, realize the alternate use of pretreatment filter screen on both sides, cope with the decline of filter screen flow capacity under the condition of not stopping, ensure continuous operation, simultaneously, the filter structure of overall rotation forms self-cleaning effect on filter screen surface under the joint action of centrifugal force and shear force, slow down blockage, prolong service life, reduce maintenance frequency.

Description

Technical Field

[0001] This utility model relates to the field of polishing slurry recycling technology, specifically a polishing slurry recycling device. Background Technology

[0002] Polishing slurry recycling systems are used to collect, process, and purify polishing slurries that have been used, become contaminated, or experienced performance degradation during industrial production processes such as semiconductor wafer manufacturing, optical lens processing, and metal product polishing. The aim is to achieve the recycling of polishing slurries, rather than disposing of them as waste after a single use, thus saving costs: polishing slurries are typically expensive, and recycling can significantly reduce production costs and environmental pollution; discarded polishing slurries are hazardous waste containing abrasive particles, chemical additives, and potentially metal ions, and direct discharge would severely pollute the environment. Recycling systems greatly reduce the generation and disposal burden of waste liquid.

[0003] In common polishing slurry recycling devices, the filtration of polishing slurry is hampered by the presence of numerous micron or nano-sized abrasive particles, metal shavings, polishing byproducts, and organic additives. These impurities gradually accumulate on the filter screen's surface or within its pores, forming a filter cake or clogging the channels. As processing time increases, particle accumulation worsens, leading to a continuous reduction in the effective filtration area of ​​the filter screen and increased fluid resistance, thus decreasing its flow capacity. This decline in flow capacity not only affects the processing efficiency of the polishing slurry, reducing the throughput per unit time, but can also cause increased pressure in the device, increasing the pump load. In severe cases, it can even lead to filtration interruptions, requiring shutdown for cleaning or filter replacement, ultimately affecting the continuous operation and use of the entire recycling device. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a polishing slurry recycling device that allows for alternating flow paths by switching between forward and reverse rotation, enabling the use of filter screens alternately. This allows for temporary shutdowns to address blockages and ensures continuous operation. The centrifugal and shear forces generated by rotation automatically clean the filter screens, reducing blockages, extending their lifespan, and decreasing maintenance frequency. This solves the problem in common polishing slurry recycling devices where particulate impurities easily accumulate on the filter screen surface or in the pores, forming filter cakes or clogging channels. This results in a reduced effective filtration area, increased fluid resistance, decreased flow capacity, and reduced processing efficiency. In severe cases, it necessitates shutdown for cleaning or replacement, affecting continuous operation.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a polishing slurry recycling device, comprising a recycling cylinder; further comprising a waste liquid inlet disposed at the upper end of the recycling cylinder, a discharge pipe connected to the outer side of the recycling cylinder, a polishing slurry filter assembly disposed inside the recycling cylinder, and a drive module disposed at the lower end of the recycling cylinder; The inside of the recycling cylinder is connected to a set of fixed blocks that are evenly distributed in a ring. An arc-shaped secondary filter screen is movably connected between two adjacent fixed blocks. The fixed blocks and the secondary filter screen form an outer filter cylinder. Multiple secondary filter screens are spliced ​​together along the circumferential direction to form a ring-shaped filter structure. This ring-shaped filter structure can rotate around the central axis of the recycling cylinder under the drive of the drive module.

[0006] Furthermore, the drive module includes a motor installed at the bottom of the recycling cylinder, the output axis of the motor extending upward and connected to a rotating disk, and a polishing liquid filter assembly disposed on the upper surface of the rotating disk.

[0007] Furthermore, the polishing fluid filtration assembly includes six guide plates distributed circumferentially. Each pair of guide plates arranged opposite each other forms a pair, for a total of three pairs. Each pair of guide plates is symmetrically arranged on both sides of the same radial plane and is inclined in different directions. Each guide plate is equipped with a pretreatment filter screen. The inclination direction of the guide plate is configured to guide the waste liquid mainly through the pretreatment filter screen on one side.

[0008] Furthermore, the two plates in each pair of guide plates are arranged in a mirror symmetry with respect to the periphery of the rotating disk and are tilted in opposite directions, so that the waste liquid flows along the surface of the guide plates and is concentrated through the corresponding pretreatment filter screen.

[0009] Furthermore, the upper surface of the rotating disk is provided with three mounting plates, each of which is located between two adjacent pairs of guide plates. The mounting plates and the three pairs of guide plates together enclose and form an inner filter cylinder.

[0010] Furthermore, each mounting plate has a connecting plate 1 at its outer end, and each pair of guide plates has a connecting plate 2 at its outer end. The three connecting plates 1 and the three connecting plates 2 extend alternately in the circumferential direction, and their far ends are all connected to the fixed block. Six fan-shaped areas distributed along the circumference are formed between adjacent connecting plates 1 and connecting plates 2. Each fan-shaped area corresponds to a pre-treatment filter screen, and this area is radially opposite to the outer secondary filter screen.

[0011] Furthermore, the arc curvature of the secondary filter screen matches the circumferential contour of the outer filter cylinder, and its inner surface is radially aligned with the adjacent pretreatment filter screen, so that the waste liquid passes through the pretreatment filter screen and the corresponding secondary filter screen in sequence on the flow path.

[0012] Compared with the prior art, the technical solution of this application has the following beneficial effects: 1. Through the coordinated action of three pairs of symmetrically inclined guide plates and the circumferentially alternating fan-shaped areas, combined with the forward and reverse rotation of the rotating disk, the waste liquid can be selectively guided to flow through the pretreatment filter screen on a designated side under different operating conditions. When the flow capacity of the filter screen on one side decreases due to particle accumulation, the liquid flow can be guided to the filter screen on the other side that remains unobstructed by switching the rotation direction. This allows for the alternating use of the filtration channels without stopping the machine, effectively extending the continuous operating time and improving the continuity and reliability of the device. 2. The entire annular filter structure can rotate as a whole under the drive of the motor. During the rotation, the liquid washes the surface of the filter screen under the combined action of centrifugal force and flow shear force, which helps to reduce the deposition and accumulation of particles on the filter screen surface, plays a certain self-cleaning role, extends the service life of the filter components, and reduces the cleaning and maintenance cycle. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a cross-sectional three-dimensional structural diagram of the present invention; Figure 3 This is a schematic diagram of the internal three-dimensional structure of the present invention; Figure 4 This is a three-dimensional structural diagram of the location of the motor in this utility model; Figure 5 This is a schematic diagram of the internal disassembled three-dimensional structure of this utility model.

[0014] In the diagram: 1. Recycling cylinder; 2. Waste liquid inlet; 3. Discharge pipe; 4. Motor; 5. Rotating disc; 6. Guide plate; 7. Pretreatment filter screen; 8. Mounting plate; 9. Connecting plate one; 10. Connecting plate two; 11. Fixing block; 12. Secondary filter screen. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] It should be noted that this device is suitable for the recycling and treatment of various types of polishing slurries, such as silica, alumina, or colloidal silica-based polishing slurries. It is especially suitable for high-cleanliness fields such as semiconductors, optical components, and precision metal processing. In terms of material selection, corrosion-resistant and wear-resistant materials are preferred for each component, such as polypropylene (PP), polyvinylidene fluoride (PVDF), or 316L stainless steel, to adapt to the long-term operation of polishing slurries with different chemical compositions and extend the service life of the equipment.

[0017] Please see Figure 1 The polishing slurry recycling device in this embodiment includes a recycling cylinder 1; it also includes a waste liquid inlet 2 disposed at the upper end of the recycling cylinder 1, a discharge pipe 3 connected to the outer side of the recycling cylinder 1, a polishing slurry filter assembly disposed inside the recycling cylinder 1, and a drive module disposed at the lower end of the recycling cylinder 1.

[0018] In this embodiment, the flow path of the guide plate 6 can be switched by rotating the forward and reverse disk 5, so that the pre-treatment filter screens 7 on both sides can be used interchangeably. This can prevent the filter screen flow capacity from decreasing without stopping the machine, ensuring continuous operation. At the same time, the overall rotating filter structure produces a self-cleaning effect on the filter screen surface under the action of centrifugal force and shear force, which can reduce clogging, extend service life, and reduce maintenance frequency.

[0019] Please see Figures 2-5 In this embodiment, in order to enable the rotating disk 5 to switch the filtration path by rotating in both directions, so that if one side is blocked, the other side can be switched to work without stopping the machine, a set of fixed blocks 11 evenly distributed in a ring are rotatably connected inside the recycling cylinder 1 in this embodiment. An arc-shaped secondary filter screen 12 is movably connected between two adjacent fixed blocks 11. The fixed blocks 11 and the secondary filter screen 12 form an outer filter cylinder. Multiple secondary filter screens 12 are spliced ​​together along the circumferential direction to form a ring-shaped filtration structure. This ring-shaped filtration structure can rotate around the central axis of the recycling cylinder 1 under the drive of the drive module.

[0020] In this embodiment, the recovery cylinder 1 is used to accommodate the filter structure and receive the waste liquid entering from above. The discharge pipe 3 connected to its side is used to remove the separated impurities. The fixing blocks 11 are arranged in a ring inside the recovery cylinder 1 to support and fix the secondary filter screen 12. The secondary filter screen 12 has an arc-shaped structure, and multiple pieces are spliced ​​together to form a rotatable outer filter cylinder to achieve secondary filtration of the waste liquid. The drive module is located below the recovery cylinder 1. By driving the internal rotating disk 5 to rotate, the outer filter cylinder rotates around the central axis, thereby realizing the switching of the filtration path and the self-cleaning effect of the filter screen surface, ensuring the continuous and stable operation of the device.

[0021] It should be noted that the polishing fluid filtration assembly includes six circumferentially distributed guide plates 6. Each pair of guide plates 6 is arranged opposite each other to form a pair, for a total of three pairs. Each pair of guide plates 6 is symmetrically arranged on both sides of the same radial plane and is inclined in different directions. Each guide plate 6 is equipped with a pretreatment filter screen 7. The inclination direction of the guide plate 6 is configured to guide the waste liquid mainly through the pretreatment filter screen 7 on one side. The two plates in each pair of guide plates 6 are arranged in a mirror image symmetrically with respect to the periphery of the rotating disk 5 and are inclined in opposite directions, so that the waste liquid flows along the surface of the guide plate 6 and is concentrated through the corresponding pretreatment filter screen 7. The guide plate 6 is used to guide the flow of the incoming waste liquid. Its inclined surface makes the liquid flow in a specific direction, realizing the selection of the filtration path. The pretreatment filter screen 7 is used to intercept larger particulate impurities in the waste liquid, complete the preliminary filtration, and ensure the subsequent filtration. The rotating disk 5 is used to support the guide plates 6 and the pretreatment filter screen 7. By rotating, it drives the entire polishing fluid filtration assembly to rotate, realizing the switching of filtration channels.

[0022] Please see Figures 2-5 In this embodiment, to enable the entire filter screen to rotate and splash water while rotating, thus washing away some of the dirt on the surface, preventing clogging and extending its lifespan, each mounting plate 8 in this embodiment has a connecting plate 9 at its outer end, and each pair of guide plates 6 has a connecting plate 10 at its outer end. The three connecting plates 9 and 10 extend alternately in the circumferential direction, and their distal ends are all connected to the fixing block 11. Six fan-shaped areas are formed between adjacent connecting plates 9 and 10, each corresponding to a pre-treatment filter screen 7. This area is radially opposite to the outer secondary filter screen 12. The arc curvature of the secondary filter screen 12 matches the circumferential contour of the outer filter cylinder, and its inner surface is radially aligned with the adjacent pre-treatment filter screen 7, so that the waste liquid passes through the pre-treatment filter screen 7 and the corresponding secondary filter screen 12 in sequence in the flow path.

[0023] In this embodiment, the mounting plate 8 is used to support the connecting plate 9, transmit the rotational power of the rotating disk 5, and maintain the stability of the inner filtration structure. The connecting plate 9 and the connecting plate 10 are used to connect the inner mounting plate 8 with the outer fixing block 11 to form the skeleton of the fan-shaped area and transmit the rotational motion. The fixing block 11 is used to fix the two ends of the secondary filter screen 12, support the overall structure of the outer filter cylinder, and withstand the centrifugal force during rotation. The secondary filter screen 12 is used to intercept fine particles in the waste liquid to achieve secondary fine filtration. Its surface is washed by the liquid flow during rotation. The pretreatment filter screen 7 is used to intercept larger particulate impurities in the waste liquid to complete the preliminary filtration and prevent clogging of the subsequent filter layer. The guide plate 6 is used to guide the flow of waste liquid so that it is concentrated through the designated pretreatment filter screen 7 to achieve the selection of the filtration path. The rotating disk 5 is used to drive the entire polishing liquid filtration assembly to rotate, so that the filter screen generates centrifugal force and shear force during operation.

[0024] It should be noted that the drive module includes a motor 4 installed at the bottom of the recycling cylinder 1. The output axis of the motor 4 extends upward and is connected to a rotating disk 5. The polishing liquid filter assembly is set on the upper surface of the rotating disk 5. The upper surface of the rotating disk 5 is provided with three mounting plates 8. Each mounting plate 8 is located between two adjacent pairs of guide plates 6. The mounting plates 8 and the three pairs of guide plates 6 together enclose and form an inner filter cylinder.

[0025] The working principle of the above embodiments is as follows: During use, waste liquid flows in from the waste liquid inlet 2 at the top of the recovery cylinder 1, first contacting the rotating polishing liquid filter assembly. The inclined surface of the guide plate 6 guides the liquid flow, causing the waste liquid to concentrate and pass through the pretreatment filter screen 7 on one side, completing the initial filtration and intercepting large particles of impurities. The rotating disk 5 can rotate forward and backward under the drive of the motor 4. When the flow capacity of the pretreatment filter screen 7 on one side decreases, the rotation direction is switched so that the waste liquid passes through the pretreatment filter screen 7 on the other side, realizing the alternating use of the filtration channels. The liquid that has passed through the initial filtration enters the fan-shaped area, and under the action of centrifugal force, it passes through the pretreatment filter screen 7 on the inner side and continues to flow to the corresponding secondary filter screen 12 in the radial direction for secondary fine filtration to remove fine particles. The purified liquid is discharged from the top of the recovery cylinder 1, while the impurities are thrown to the outside during the rotation and discharged through the discharge pipe 3. The entire annular filtration structure continues to rotate. The liquid flushing and centrifugal action make the filter screen surface self-cleaning, reduce clogging, and ensure the continuous and stable operation of the device.

[0026] It should be explained that the device can integrate level, pressure and turbidity sensors, and work with a PLC controller to automatically switch the rotation direction, start and stop the cleaning program and set up fault alarms, thereby improving the level of intelligence and ease of operation. The rotating structure uses centrifugal force to assist filtration, reducing the need for additional pressurization and lowering energy consumption.

[0027] It should be noted that the number or number of filter units can be adjusted according to the processing capacity requirements, making it suitable for production lines of different sizes.

[0028] The control method of this utility model is through a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art. The power supply is also common knowledge in the field. Since this utility model is mainly used to protect mechanical devices, the control method and circuit connection will not be explained in detail.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A polishing liquid recycling device comprising a recycling cylinder (1), characterized in that: It also includes a waste liquid inlet (2) set at the upper end of the recycling cylinder (1), a discharge pipe (3) connected to the outer side of the recycling cylinder (1), a polishing liquid filter assembly set inside the recycling cylinder (1), and a drive module set at the lower end of the recycling cylinder (1). The inside of the recycling cylinder (1) is connected to a set of fixed blocks (11) that are evenly distributed in a ring. An arc-shaped secondary filter screen (12) is movably connected between two adjacent fixed blocks (11). The fixed blocks (11) and the secondary filter screen (12) form an outer filter cylinder. Multiple secondary filter screens (12) are spliced ​​together along the circumferential direction to form a ring filter structure. This ring filter structure can rotate around the central axis of the recycling cylinder (1) under the drive of the drive module.

2. The polishing solution recycling apparatus according to claim 1, characterized by: The drive module includes a motor (4) installed at the bottom of the recycling cylinder (1), the output shaft of the motor (4) extends upward and is connected to a rotating disk (5), and the polishing liquid filter assembly is disposed on the upper surface of the rotating disk (5).

3. The polishing solution recycling apparatus according to claim 2, characterized by: The polishing fluid filtration assembly includes six guide plates (6) distributed circumferentially along the rotating disk (5). Each pair of guide plates (6) arranged opposite each other constitutes a pair, forming a total of three pairs. Each pair of guide plates (6) is symmetrically arranged on both sides of the same radial plane and is inclined in different directions. Each guide plate (6) is equipped with a pretreatment filter screen (7). The inclination direction of the guide plate (6) is configured to guide the waste liquid mainly through the pretreatment filter screen (7) on one side.

4. The polishing solution recycling apparatus according to claim 3, characterized by: The two plates in each pair of guide plates (6) are arranged in a mirror symmetry with respect to the periphery of the rotating disk (5) and are tilted in opposite directions, so that the waste liquid flows along the surface of the guide plate (6) and is concentrated through the corresponding pretreatment filter screen (7).

5. The polishing solution recycling apparatus according to claim 4, characterized by: The upper surface of the rotating disk (5) is provided with three mounting plates (8), each mounting plate (8) is located between two adjacent pairs of guide plates (6), and the mounting plates (8) and the three pairs of guide plates (6) together form an inner filter cylinder.

6. The polishing solution recycling apparatus according to claim 5, wherein: Each mounting plate (8) has a connecting plate 1 (9) at its outer end, and each pair of guide plates (6) has a connecting plate 2 (10) at its outer end. The three connecting plates 1 (9) and the three connecting plates 2 (10) extend alternately in the circumferential direction, and their far ends are all connected to the fixed block (11). Six fan-shaped areas distributed along the circumference are formed between adjacent connecting plates 1 (9) and connecting plates 2 (10). Each fan-shaped area corresponds to a pre-treatment filter (7), and the area is radially opposite to the outer secondary filter (12).

7. The polishing solution recycling apparatus according to claim 6, characterized by: The arc curvature of the secondary filter screen (12) matches the circumferential profile of the outer filter cylinder, and its inner side is radially aligned with the adjacent pretreatment filter screen (7), so that the waste liquid passes through the pretreatment filter screen (7) and the corresponding secondary filter screen (12) in sequence on the flow path.

Images