A treatment device for carbonyl fluoride gas

Abstract

The utility model relates to gas treatment technical field, and disclose a kind of for carbonyl fluoride gas processing device, including processing mechanism, and the processing mechanism top is provided with purification mechanism;The processing mechanism includes tower body, and the tower body top is fixedly connected with first booster pump and second booster pump, and the first booster pump top is fixedly connected with straw, and the first booster pump right side is fixedly connected with delivery pipe, and the tower body front end is fixedly connected with air inlet pipe, and the tower body inner top wall is fixedly connected with connecting plate, and the connecting plate bottom is equipped with multiple annular grooves, and multiple The annular groove is fixedly connected with annular water pipe in, and multiple The annular water pipe top is fixedly connected with first connecting pipe.This kind of for carbonyl fluoride gas processing device, realized the recycling of water, wastewater after gas washing is filtered again into circulation system, reduce the waste of water resources, reduce processing cost.

Description

Technical Field

[0001] This utility model relates to the field of gas treatment technology, specifically to a treatment device for carbonyl fluoride gas. Background Technology

[0002] Carbonyl fluoride (COF2) is a colorless, highly toxic gas with strong corrosive properties. It decomposes into hydrogen fluoride and carbon dioxide upon contact with water. It is mainly used in semiconductor cleaning and etching and fluorination reactions in organic synthesis. While carbonyl fluoride gas has certain applications in industrial production, it may also pose a threat to the environment and human health, thus requiring effective treatment.

[0003] Existing carbonyl fluoride gas treatment devices often suffer from serious water waste and high treatment costs during the process. Utility Model Content

[0004] The purpose of this invention is to provide a device for processing carbonyl fluoride gas, so as to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a device for treating carbonyl fluoride gas, comprising a treatment mechanism, wherein a purification mechanism is provided on the top of the treatment mechanism;

[0006] The processing mechanism includes a tower body. A first booster pump and a second booster pump are fixedly connected to the top of the tower body. A suction pipe is fixedly connected to the top of the first booster pump, and a delivery pipe is fixedly connected to the right side of the first booster pump. An air inlet pipe is fixedly connected to the front end of the tower body. A connecting plate is fixedly connected to the top wall of the tower body. Multiple annular grooves are formed at the bottom of the connecting plate. Annular water pipes are fixedly connected to the top of each of the multiple annular water pipes. A first connecting pipe is fixedly connected to the top of each of the multiple annular water pipes. An atomizing nozzle is fixedly connected to the bottom of each of the multiple annular water pipes. A support ring is fixedly connected to the inner wall of the tower body. A honeycomb ceramic filler layer is fixedly connected to the top of the support ring. A filter screen is fixedly connected to the inner wall of the bottom of the tower body. A support pipe is fixedly connected to the bottom of the tower body through a flange. A water storage frame is provided at the end of the support pipe away from the tower body. A second connecting pipe is fixedly connected to the right side of the water storage frame, and a third connecting pipe is fixedly connected to the rear of the water storage frame.

[0007] Preferably, all of the first connecting pipes are connected to the bottom of the delivery pipe, and a fourth connecting pipe is fixedly connected to the front end of the second booster pump. The end of the fourth connecting pipe away from the second booster pump is connected to the rear of the delivery pipe.

[0008] Furthermore, multiple first connecting pipes are connected to the bottom of the delivery pipe, so that the liquid such as the treatment liquid delivered from the delivery pipe can enter multiple annular water pipes through the multiple first connecting pipes respectively. The front end of the second booster pump is fixedly connected to a fourth connecting pipe, and the end of the fourth connecting pipe away from the second booster pump is connected to the rear of the delivery pipe. In this way, the second booster pump can deliver the liquid such as the treatment liquid to the delivery pipe through the fourth connecting pipe, thereby providing liquid to the annular water pipe.

[0009] Preferably, the second connecting pipe is fixedly connected to the end of the support pipe away from the tower body via a flange.

[0010] Furthermore, the second connecting pipe is fixedly connected to the end of the support pipe away from the tower body via a flange. This connection method ensures the sealing and stability between the second connecting pipe and the support pipe, allowing the liquid flowing out from the bottom of the tower body, such as treated wastewater, to smoothly pass through the support pipe and the second connecting pipe into the water storage frame.

[0011] Preferably, a medicine inlet pipe is fixedly connected to the top of the water storage frame, and a sealing cap is snapped onto the top of the medicine inlet pipe.

[0012] Furthermore, a chemical inlet pipe is fixedly connected to the top of the water storage frame, and a sealing cap is snapped onto the top of the inlet pipe. The function of the inlet pipe is to facilitate the addition of chemicals, such as those used for wastewater treatment, into the water storage frame, while the sealing cap is used to seal the inlet pipe when no chemicals are needed, preventing external impurities from entering the water storage frame and ensuring the purity and treatment effect of the liquid inside the frame.

[0013] Preferably, the end of the third connecting pipe away from the water storage frame is fixedly connected to the top of the second booster pump.

[0014] Furthermore, the end of the third connecting pipe furthest from the water storage frame is fixedly connected to the top of the second booster pump. In this way, the liquid in the water storage frame, such as treated wastewater or treated and recycled liquid, can be drawn by the second booster pump through the third connecting pipe to realize the recycling or further treatment of the liquid.

[0015] Preferably, the purification mechanism includes an exhaust pipe, and a tank is fixedly connected to the top of the exhaust pipe by screws. An activated carbon filter element is installed inside the tank.

[0016] Preferably, the exhaust pipe is fixedly connected to the top of the tower body, and multiple exhaust holes are provided on the surface of the tank body.

[0017] Furthermore, the exhaust pipe is fixedly connected to the top of the tower, allowing the gas treated by the processing mechanism to smoothly enter the exhaust pipe. Multiple exhaust holes are provided on the surface of the tank, which are used to discharge the gas purified by the activated carbon filter into the external environment.

[0018] Compared with the prior art, the beneficial effects achieved by this utility model are:

[0019] First, in this invention, the sealing cap of the inlet pipe at the top of the water storage frame is opened, and an appropriate amount of neutralizing agent is added into the water storage frame. The specific agent is selected according to the properties of the carbonyl fluoride gas. For example, an alkaline agent is used to neutralize acidic gas. Then, the sealing cap is closed tightly, and the carbonyl fluoride gas to be treated is introduced into the tower body through the air inlet pipe. The first booster pump is started. The first booster pump draws water from an external water source through a suction pipe, which can be connected to relevant pipelines. The water is transported through the delivery pipe to multiple first connecting pipes, and then enters each annular water pipe. Finally, it is sprayed out in the form of a mist from the atomizing nozzle. The mist water comes into full contact with the carbonyl fluoride gas entering the tower, performing preliminary washing and cooling of the gas. Simultaneously, some harmful substances in the gas dissolve in the water. After atomization and spraying, the gas continues to rise, passing through a honeycomb ceramic packing layer. This layer, with its large specific surface area, further adsorbs and intercepts particulate matter and some harmful substances in the gas, achieving deep purification. The wastewater after gas washing is filtered through a filter screen to remove larger impurities and then flows into a water storage frame through a support pipe. The second booster pump is then activated, drawing some water from behind the delivery pipe through a fourth connecting pipe. Simultaneously, the wastewater in the storage frame enters the circulation system between the storage frame and the second booster pump through the second connecting pipe, then returns to the second booster pump through a third connecting pipe, and finally enters the delivery pipe together with the water delivered by the first booster pump. This process conserves water resources and achieves water recycling. The wastewater after gas washing is filtered and then re-enters the circulation system, reducing water waste and lowering treatment costs.

[0020] Secondly, the residual gas in this invention enters the tank of the purification mechanism through the exhaust pipe. The activated carbon filter element inside the tank has a strong adsorption capacity, which can adsorb residual odors, harmful gas molecules, etc. in the gas, further purifying the gas. The purified gas is discharged into the atmosphere through multiple exhaust holes on the surface of the tank, which makes up for the problem of incomplete purification that may exist in the purification process of the treatment mechanism and improves the purification quality of the entire gas treatment device. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a three-dimensional structural diagram of the present invention;

[0023] Figure 3 This utility model Figure 2 Schematic diagram of the enlarged structure of A in the middle;

[0024] Figure 4 This is a cross-sectional structural diagram of the present invention.

[0025] The components include: 1. Processing mechanism; 101. Tower body; 102. First booster pump; 103. Second booster pump; 104. Suction pipe; 105. Delivery pipe; 106. Air inlet pipe; 107. Connecting plate; 108. Annular water pipe; 109. First connecting pipe; 110. Atomizing nozzle; 111. Support ring; 112. Honeycomb ceramic packing layer; 113. Filter screen; 114. Support pipe; 115. Water storage frame; 116. Second connecting pipe; 117. Third connecting pipe; 2. Purification mechanism; 201. Exhaust pipe; 202. Tank body; 203. Activated carbon filter element. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] This utility model provides the following technical solution:

[0028] Example 1

[0029] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 A device for treating carbonyl fluoride gas includes a treatment mechanism 1, and a purification mechanism 2 is provided on the top of the treatment mechanism 1.

[0030] Processing mechanism 1 includes a tower body 101. A first booster pump 102 and a second booster pump 103 are fixedly connected to the top of the tower body 101. A suction pipe 104 is fixedly connected to the top of the first booster pump 102. A delivery pipe 105 is fixedly connected to the right side of the first booster pump 102. An air inlet pipe 106 is fixedly connected to the front end of the tower body 101. A connecting plate 107 is fixedly connected to the inner top wall of the tower body 101. Multiple annular grooves are formed at the bottom of the connecting plate 107. Annular water pipes 108 are fixedly connected to each of the multiple annular grooves. A first connecting pipe is fixedly connected to the top of each of the multiple annular water pipes 108. Pipe 109 and multiple annular water pipes 108 are all fixedly connected to atomizing nozzles 110 at their bottoms. A support ring 111 is fixedly connected to the inner wall of the tower body 101. A honeycomb ceramic packing layer 112 is fixedly connected to the top of the support ring 111. A filter screen 113 is fixedly connected to the inner wall of the bottom of the tower body 101. A support pipe 114 is fixedly connected to the bottom of the tower body 101 through a flange. A water storage frame 115 is provided at the end of the support pipe 114 away from the tower body 101. A second connecting pipe 116 is fixedly connected to the right side of the water storage frame 115. A third connecting pipe 117 is fixedly connected to the rear of the water storage frame 115.

[0031] Specifically, multiple first connecting pipes 109 are connected to the bottom of the delivery pipe 105, and a fourth connecting pipe is fixedly connected to the front end of the second booster pump 103. The end of the fourth connecting pipe away from the second booster pump 103 is connected to the rear of the delivery pipe 105.

[0032] Specifically, the second connecting pipe 116 is fixedly connected to the end of the support pipe 114 away from the tower body 101 via a flange.

[0033] Specifically, a medicine inlet pipe is fixedly connected to the top of the water storage frame 115, and a sealing cap is snapped onto the top of the medicine inlet pipe.

[0034] Specifically, the end of the third connecting pipe 117 away from the water storage frame 115 is fixedly connected to the top of the second booster pump 103.

[0035] Using the above technical solution, open the sealing cap of the inlet pipe at the top of the water storage frame 115, add an appropriate amount of neutralizing agent into the water storage frame 115. The specific agent is selected according to the properties of the carbonyl fluoride gas. For example, an alkaline agent is used to neutralize acidic gas. Then, close the sealing cap tightly. The internal wiring connections of the first booster pump 102 and the second booster pump 103 are existing technologies and will not be described in detail here. Introduce the carbonyl fluoride gas to be treated into the tower body 101 through the air inlet pipe 106, start the first booster pump 102, and the first booster pump 102 can draw water from an external water source through the suction pipe 104 and related pipelines. The water is transported through the delivery pipe 105 to multiple first connecting pipes 109, then enters each annular water pipe 108, and finally sprayed out in a mist form from the atomizing nozzle 110. The mist water comes into full contact with the carbonyl fluoride gas entering the tower 101, performing preliminary washing and cooling of the gas. Simultaneously, some harmful substances in the gas dissolve in the water. After atomization and spraying, the gas continues to rise, passing through the honeycomb ceramic packing layer 112. The honeycomb ceramic packing layer 112 has a large specific surface area, which can further adsorb and intercept particulate matter and some harmful substances in the gas, achieving deep purification. The wastewater after gas washing is filtered through the filter screen 113 to remove larger impurities and then flows into the water storage frame 115 through the support pipe 114, initiating the second pressurization. Pump 103, the second booster pump 103, draws part of the water flow from behind the delivery pipe 105 through the fourth connecting pipe. At the same time, the wastewater in the water storage frame 115 enters the circulation system between the water storage frame 115 and the second booster pump 103 through the second connecting pipe 116, and then enters the second booster pump 103 through the third connecting pipe 117. Finally, it enters the delivery pipe 105 together with the water flow delivered by the first booster pump 102. This saves water resources and realizes the recycling of water. The wastewater after gas washing is filtered and then re-enters the circulation system, reducing the waste of water resources and lowering the treatment cost.

[0036] Example 2

[0037] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 Furthermore, based on Embodiment 1, the purification mechanism 2 includes an exhaust pipe 201, the top of which is fixedly connected to a tank 202 by screws, and an activated carbon filter element 203 is provided inside the tank 202.

[0038] Specifically, the exhaust pipe 201 is fixedly connected to the top of the tower body 101, and multiple exhaust holes are opened on the surface of the tank body 202.

[0039] Through the above technical solution, the residual gas enters the tank 202 of the purification mechanism 2 through the exhaust pipe 201. The activated carbon filter element 203 inside the tank 202 has a strong adsorption capacity, which can adsorb residual odors, harmful gas molecules, etc. in the gas, further purifying the gas. The purified gas is discharged into the atmosphere through multiple exhaust holes on the surface of the tank 202, which makes up for the problem of incomplete purification that may exist in the purification process of the treatment mechanism 1, and improves the purification quality of the entire gas treatment device.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made to these embodiments without departing from the principles and spirit, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A treatment device for carbonyl fluoride gas, comprising a treatment mechanism (1), characterized in that: The processing mechanism (1) is equipped with a purification mechanism (2) at its top; The processing mechanism (1) includes a tower body (101). A first booster pump (102) and a second booster pump (103) are fixedly connected to the top of the tower body (101). A suction pipe (104) is fixedly connected to the top of the first booster pump (102). A delivery pipe (105) is fixedly connected to the right side of the first booster pump (102). An air inlet pipe (106) is fixedly connected to the front end of the tower body (101). A connecting plate (107) is fixedly connected to the inner top wall of the tower body (101). The bottom of the connecting plate (107) has multiple annular grooves. Annular water pipes (108) are fixedly connected to each of the multiple annular grooves. A first connecting pipe is fixedly connected to the top of each of the multiple annular water pipes (108). (109) Atomizing nozzles (110) are fixedly connected to the bottom of each of the multiple annular water pipes (108). A support ring (111) is fixedly connected to the inner wall of the tower body (101). A honeycomb ceramic packing layer (112) is fixedly connected to the top of the support ring (111). A filter screen (113) is fixedly connected to the inner wall of the bottom of the tower body (101). A support pipe (114) is fixedly connected to the bottom of the tower body (101) through a flange. A water storage frame (115) is provided at the end of the support pipe (114) away from the tower body (101). A second connecting pipe (116) is fixedly connected to the right side of the water storage frame (115). A third connecting pipe (117) is fixedly connected to the rear of the water storage frame (115).

2. A device for treating carbonyl fluoride gas according to claim 1, characterized in that: Multiple first connecting pipes (109) are connected to the bottom of the delivery pipe (105), and a fourth connecting pipe is fixedly connected to the front end of the second booster pump (103). The end of the fourth connecting pipe away from the second booster pump (103) is connected to the rear of the delivery pipe (105).

3. A device for treating carbonyl fluoride gas according to claim 1, characterized in that: The second connecting pipe (116) is fixedly connected to the end of the support pipe (114) away from the tower body (101) via a flange.

4. A device for treating carbonyl fluoride gas according to claim 1, characterized in that: The top of the water storage frame (115) is fixedly connected to a medicine inlet pipe, and the top of the medicine inlet pipe is fitted with a sealing cap.

5. A device for treating carbonyl fluoride gas according to claim 1, characterized in that: The end of the third connecting pipe (117) away from the water storage frame (115) is fixedly connected to the top of the second booster pump (103).

6. A device for treating carbonyl fluoride gas according to claim 1, characterized in that: The purification mechanism (2) includes an exhaust pipe (201), and a tank (202) is fixedly connected to the top of the exhaust pipe (201) by screws. An activated carbon filter element (203) is installed inside the tank (202).

7. A device for treating carbonyl fluoride gas according to claim 6, characterized in that: The exhaust pipe (201) is fixedly connected to the top of the tower body (101), and multiple exhaust holes are provided on the surface of the tank body (202).

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