A spraying masking device for semiconductor ESC

Abstract

The application discloses a spraying shielding device for semiconductor ESCs, and relates to the technical field of semiconductor ESC processing, which comprises an outer shielding aluminum ring, a connecting nylon plate and a clamping spindle, the outer shielding aluminum ring comprises a bottom ring plate and a side plate, and is used for shielding the non-spraying area of the ESC; the connecting nylon plate comprises a panel, an arc ring A and an arc ring B, and is detachably connected with the outer shielding aluminum ring and the clamping spindle respectively, and a protrusion for positioning cooperation with the ESC is arranged on one side of the panel facing the ESC. The double shielding structure of the bottom ring plate and the side plate of the outer shielding aluminum ring can comprehensively cover the non-spraying area of the ESC, effectively block the penetration of the spraying powder, and avoid the pollution of the non-spraying area. The protrusion positioning of the connecting nylon plate and the collaborative assembly of various components can ensure the accurate alignment of the device and the ESC, and prevent the spraying deviation. Meanwhile, the heat dissipation holes in the side plate can accelerate the heat dissipation, reduce the adhesion between the high-temperature coating and the aluminum ring, guarantee the regularity of the coating boundary, and improve the overall spraying quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor ESC processing technology, and in particular to a spraying masking device used in semiconductor ESC. Background Technology

[0002] Electrostatic chucks (ESCs) are key components in semiconductor manufacturing. To improve their surface wear resistance, high temperature resistance, and insulation properties, functional coatings (such as tungsten carbide, PVC, and other special coatings) need to be formed in specific areas through a spraying process. However, ESCs often have irregular non-sprayed structures such as stepped surfaces, positioning grooves, threaded holes, and anode areas, which impose stringent requirements on the accuracy, adaptability, and safety of spraying and masking. Existing masking technologies still have significant shortcomings and are difficult to meet actual production needs.

[0003] Electrostatic chucks (ESCs) are critical components in semiconductor manufacturing. To improve their surface wear resistance, high-temperature resistance, and insulation properties, functional coatings (such as tungsten carbide or PVC coatings) are applied to specific areas using a spraying process. However, ESCs often have irregular, non-sprayable structures such as stepped surfaces, positioning grooves, threaded holes, and anode areas. This places stringent demands on the accuracy, adaptability, and safety of spray masking. Existing masking technologies still have significant shortcomings and cannot meet actual production needs. Traditional spray masking often uses pressure-sensitive high-temperature resistant tape to adhere to non-sprayable areas. This method is only suitable for planar or simple curved surfaces. With the irregular, three-dimensional structure of ESCs, the tape cannot completely adhere to the non-sprayable areas, easily creating gaps that allow spray powder to seep in, causing contamination of the non-sprayable areas. Subsequent manual cleaning of residual powder is then required. Finally, not only does it increase rework costs, but it may also damage the precision structure of the ESC. Existing metal shielding fixtures for irregularly shaped parts are mostly integral structures. On the one hand, they are difficult to adapt to the irregular non-painted contours of different ESC models, resulting in poor versatility. They require the design of special fixtures for each ESC model, leading to high manufacturing costs and low reuse rates. On the other hand, when the metal fixture comes into direct contact with the ESC anode area, it is easy to cause scratch damage to the anodized layer. Furthermore, during the spraying process, the high-temperature coating is easy to solidify and stick to the metal fixture, and the integrity of the coating is easily damaged during disassembly, affecting the product qualification rate. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the problems existing in the prior art, this utility model provides a spray masking device for use in semiconductor ESCs.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: a spraying and masking device for semiconductor ESCs, comprising an outer shielding aluminum ring, a connecting nylon plate, and a clamping spindle. The outer shielding aluminum ring includes a bottom ring plate and side plates for shielding the non-spraying areas of the ESC. The connecting nylon plate includes a panel, an arc ring A, and an arc ring B, which are detachably connected to the outer shielding aluminum ring and the clamping spindle, respectively. The panel has a protrusion on the side facing the ESC for positioning and engaging with the ESC. The clamping spindle includes a bushing and a shaft for adapting and connecting to a spraying turntable to drive the ESC to rotate with the turntable for spraying.

[0008] As a preferred embodiment of the coating masking device used in semiconductor ESCs according to this utility model, the outer ring masking aluminum ring is made of 6061 aluminum alloy, the contours of the bottom ring plate and the side plate are adapted to the non-coated area of ​​the ESC to completely cover the non-coated area of ​​the ESC; heat dissipation holes are provided on the side plate, and the heat dissipation holes are evenly distributed along the circumference of the side plate.

[0009] As a preferred embodiment of the spray masking device used in semiconductor ESC according to this utility model, the bottom ring plate of the outer ring masking aluminum ring is provided with a fixing hole A, and the panel of the connecting nylon plate is provided with a corresponding fixing hole B. The fixing hole A and the fixing hole B are connected and fixed by 9 M5 screws; the arc ring A and the arc ring B are coaxially arranged, and the center hole of the arc ring B is connected and fixed to the bushing of the main shaft by an M8 screw.

[0010] As a preferred embodiment of the spray masking device used in semiconductor ESCs according to this utility model, the material of the connecting nylon plate is nylon, the panel, arc ring A and arc ring B are integrally formed, and the inner diameter of arc ring A is adapted to the outer diameter of the bottom ring plate of the outer ring masking aluminum ring to achieve radial positioning.

[0011] As a preferred embodiment of the spray masking device used in semiconductor ESC according to this utility model, the bushing of the clamping spindle is coaxially and fixedly connected to the shaft column, the outer diameter of the bushing is adapted to the center hole of the arc ring B connecting the nylon plate, the end of the shaft column away from the bushing is provided with a keyway structure adapted to the clamping interface of the spraying turntable, and the axis of the shaft column coincides with the axis of the outer ring masking aluminum ring.

[0012] As a preferred embodiment of the spray masking device used in semiconductor ESC according to the present invention, the number of heat dissipation holes is 9, the hole diameter is 3mm, and the opening position of the heat dissipation holes corresponds to the high temperature spraying area of ​​ESC, so as to accelerate the heat dissipation during the spraying process.

[0013] As a preferred embodiment of the spray masking device used in semiconductor ESC according to this utility model, the fixing holes A are evenly distributed along the circumferential direction of the bottom ring plate, the fixing holes B correspond one-to-one with the fixing holes A, and the diameter of both holes is 5.5mm, which is suitable for the nominal diameter of M5 screws.

[0014] (III) Beneficial Effects

[0015] This invention provides a spray masking device for use in semiconductor ESCs. It has the following advantages:

[0016] 1. The double shielding structure of the outer ring aluminum bottom plate and side plate can fully cover the non-coated area of ​​the ESC, effectively preventing the penetration of coating powder and avoiding contamination of the non-coated area; combined with the protruding positioning of the connecting nylon plate and the coordinated assembly of various components, it can ensure that the device is precisely aligned with the ESC and prevent coating deviation; at the same time, the heat dissipation holes of the side plate can accelerate heat dissipation, reduce the adhesion of high-temperature coating to the aluminum ring, ensure the regularity of coating boundaries, and improve the overall coating quality.

[0017] 2. Through modular assembly design, each component can be detachably connected through standardized interfaces. By replacing the appropriate outer ring shielding aluminum ring, it can be adapted to different models of ESC, improving the reusability of tooling. The connecting nylon plate is made of nylon material, which can avoid damage to the anode area of ​​ESC during assembly. The coaxial transmission design of the clamping spindle can drive the ESC to rotate smoothly, further ensuring the stability of spraying, and taking into account both safety and process adaptability. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the outer ring shielding aluminum ring in this utility model;

[0021] Figure 3 This is a schematic diagram of the nylon sheet structure in this utility model;

[0022] Figure 4 This is a schematic diagram of the structure for clamping the spindle in this utility model.

[0023] In the figure, 1. Outer ring shielding aluminum ring; 11. Bottom ring plate; 12. Side plate; 13. Fixing hole A; 14. Heat dissipation hole; 2. Nylon plate; 21. Panel; 22. Arc ring A; 23. Arc ring B; 24. Fixing hole B; 3. Clamping spindle; 31. Bushing; 32. Column. Detailed Implementation

[0024] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0025] Reference Figures 1 to 4 As shown, this utility model provides a technical solution: a spraying and masking device used in semiconductor ESCs, including an outer ring masking aluminum ring 1, a connecting nylon plate 2, and a clamping spindle 3. The outer ring masking aluminum ring 1 includes a bottom ring plate 11 and a side plate 12 for masking the non-spraying area of ​​the ESC. The connecting nylon plate 2 includes a panel 21, an arc ring A22, and an arc ring B23, which are detachably connected to the outer ring masking aluminum ring 1 and the clamping spindle 3, respectively. The panel 21 has a protrusion on the side facing the ESC for positioning and engaging with the ESC. The clamping spindle 3 includes a bushing 31 and a shaft 32 for connecting and adapting to a spraying turntable to drive the ESC to rotate with the turntable for spraying. Through the combination structure of the bottom ring plate 11 and the side plate 12 of the outer ring masking aluminum ring 1, a double masking protection can be formed for the non-spraying area of ​​the ESC. The bottom ring plate 11 fits against the non-spraying area of ​​the ESC end face and the side plate 12. Plate 12 encloses the non-sprayed structure on the side of the ESC, effectively preventing spray powder from seeping in from the end face gaps and sides, solving the problem that traditional flat masking fixtures cannot adapt to the irregular structure of the ESC, and ensuring that there is no powder contamination in the non-sprayed area; at the same time, the outer diameter of the arc ring A22 and the bottom ring plate 11 of the outer ring masking aluminum ring 1 are precisely matched to achieve radial limit, and the arc ring B23 and the bushing 31 of the clamping spindle 3 are detachably connected to ensure assembly flexibility. The coordinated positioning of the three prevents masking displacement during the spraying process; then, the structure of the bushing 31 and the shaft column 32 of the clamping spindle 3 achieves stable transmission. The bushing 31 and the arc ring B23 connecting the nylon plate 2 are matched to ensure coaxiality, and the shaft column 32 is matched with the clamping interface of the spraying turntable, which can drive the ESC to rotate smoothly with the turntable, ensuring uniform coating thickness in the spraying area, especially suitable for the high-precision spraying requirements of special coatings such as tungsten carbide and PVC.

[0026] Reference Figure 2 and Figure 3As shown in this embodiment: the outer ring shielding aluminum ring 1 is made of 6061 aluminum alloy. The contours of the bottom ring plate 11 and the side plate 12 are adapted to the non-painted area of ​​the ESC to completely cover the non-painted area of ​​the ESC. The side plate 12 has heat dissipation holes 14, which are evenly distributed along the circumference of the side plate 12. The bottom ring plate 11 of the outer ring shielding aluminum ring 1 has a fixing hole A13. The panel 21 connecting the nylon plate 2 has a corresponding fixing hole B24. The fixing holes A13 and B24 are connected and fixed by 9 M5 screws. The arc ring A22 and the arc ring B23 are coaxially arranged, and the center hole of the arc ring B23 is connected and fixed to the bushing 31 holding the main shaft 3 by M8 screws. The connecting nylon plate 2 is made of nylon. The panel 21, the arc ring A22 and the arc ring B23 are integrally formed. The inner diameter of the arc ring A22 is adapted to the outer diameter of the bottom ring plate 11 of the outer ring shielding aluminum ring 1 to achieve radial... The outer ring 1 is made of 6061 aluminum alloy, which combines temperature resistance and processing precision. The contours of its bottom ring plate 11 and side plate 12 are precisely matched with the non-sprayed area of ​​the ESC, which can completely cover the non-sprayed area and prevent the spray powder from penetrating. The heat dissipation holes 14 evenly distributed around the circumference of the side plate 12 can accelerate the dissipation of heat during the spraying process and reduce the curing and adhesion of the high-temperature coating to the aluminum ring. At the same time, the fixing hole A13 of the bottom ring plate 11 and the fixing hole B24 of the connecting nylon plate 2 are connected by 9 M5 screws, and the center hole of the arc ring B23 is fixed to the bushing 31 of the clamping spindle 3 by M8 screws to ensure that the connection of each component is stable. The connecting nylon plate 2 is made of nylon, which can avoid damage to the anode area of ​​the ESC. Its panel 21, arc ring A22, and arc ring B23 are integrally formed. The inner diameter of the arc ring A22 is matched with the outer diameter of the bottom ring plate 11 to achieve radial positioning, ensuring the positioning accuracy of the device and the ESC and improving the overall structural stability.

[0027] Reference Figure 2 , Figure 3 and Figure 4As shown, specifically, the bushing 31 that holds the spindle 3 is coaxially fixedly connected to the column 32. The outer diameter of the bushing 31 is adapted to the center hole of the arc ring B23 connecting the nylon plate 2. The end of the column 32 away from the bushing 31 is provided with a keyway structure adapted to the clamping interface of the spraying turntable, and the axis of the column 32 coincides with the axis of the outer ring shielding aluminum ring 1. There are 9 heat dissipation holes 14 with a diameter of 3mm. The opening position of the heat dissipation holes 14 corresponds to the high-temperature spraying area of ​​ESC to accelerate the heat dissipation during the spraying process. The fixing holes A13 are evenly distributed along the circumference of the bottom ring plate 11. The fixing holes B24 correspond one-to-one with the fixing holes A13, and the diameter of both is 5.5mm, which is adapted to the nominal diameter of the M5 screw. The bushing 31 that holds the spindle 3 is coaxially fixed to the column 32. The outer diameter of bushing 31 is matched with the center hole of arc ring B23 of connecting nylon plate 2, and the axis of shaft column 32 coincides with the axis of outer ring shielding aluminum ring 1, ensuring that the coaxiality of ESC is ≤0.02mm when rotating with the turntable, and ensuring uniform coating thickness. The keyway structure at the end of shaft column 32 is adapted to the clamping interface of the spraying turntable to achieve stable power transmission and avoid rotational slippage. At the same time, the 129 3mm diameter heat dissipation holes 14 on the side plate are precisely corresponding to the high temperature spraying area of ​​ESC, accelerating heat dissipation and reducing the adhesion of high temperature coating to aluminum ring during curing. The fixing holes A13 of bottom ring plate 11 are evenly distributed around the circumference and correspond one-to-one with the fixing holes B24 of panel 21, and the hole diameter is 5.5mm. They are precisely adapted to M5 screws to ensure that the connection of each component is stable and the positioning error is ≤0.05mm, further ensuring the shielding accuracy.

[0028] Working Principle: First, the device is assembled and adapted for ESC positioning: The outer ring shielding aluminum ring 1, the connecting nylon plate 2, and the clamping spindle 3 are assembled according to the preset structure. The bottom ring plate 11 of the outer ring shielding aluminum ring 1 has a fixing hole A13, which corresponds one-to-one with the fixing hole B24 of the panel 21 of the connecting nylon plate 2. Nine M5 screws are used to evenly connect and fix them along the circumference of the bottom ring plate 11, ensuring that the two fit tightly. The center hole of the arc ring B23 of the connecting nylon plate 2 is adapted to the bushing 31 of the clamping spindle 3, and is detachably fixed with M8 screws. At the same time, the inner diameter of the arc ring A22 is precisely adapted to the outer diameter of the bottom ring plate 11, forming a radial limit. Then, the protrusion of the panel 21 of the connecting nylon plate 2 facing the ESC is inserted into the corresponding positioning hole of the ESC. By combining the radial positioning of the arc ring A22 with the circumferential uniform fastening of the fixing holes, the device and ESC are precisely positioned. The nylon connecting plate 2, made of nylon material, avoids direct contact with the ESC anode area, preventing scratch damage to the anodized layer. Next, the device is assembled with the spraying turntable: the end of the shaft column 32, which holds the main shaft 3, furthest from the bushing 31, is inserted into the spraying turntable's clamping interface, and power transmission is adapted through a keyway fit. Because the bushing 31 and shaft column 32 are coaxially fixed, and the axis of the shaft column 32 coincides with the axis of the outer ring shielding aluminum ring 1, the assembly ensures that the rotation centers of the outer ring shielding aluminum ring 1, the connecting nylon plate 2, the ESC, and the turntable are aligned, preventing rotational eccentricity. Then, the spraying operation begins: the spraying turntable is started. The turntable, via a keyway structure, drives the clamping spindle 3 to rotate, which in turn synchronously drives the connecting nylon plate 2, the outer shielding aluminum ring 1, and the ESC to rotate smoothly. At this time, the bottom ring plate 11 of the outer shielding aluminum ring 1 completely fits the non-sprayed area of ​​the ESC end face, and the side plate 12 surrounds the non-sprayed structure on the side of the ESC, forming a double shield. This effectively prevents spray powder from seeping into the non-sprayed area from the end face gaps and sides, achieving zero contamination in the non-sprayed area. Simultaneously, the nine 3mm diameter heat dissipation holes 14 on the side plate 12 accelerate the dissipation of high temperatures during spraying, reducing the curing and adhesion of the high-temperature coating to the aluminum ring side plate 12. During rotation, due to the precise positioning and coaxiality control of the device and the ESC, the ESC spraying area can uniformly receive the coating. The layer thickness deviation is ≤ ±0.01mm, and the clear boundary of the outer ring shielding aluminum ring 1 can stably control the coating boundary roughness to Ra≤1.6μm, avoiding problems such as overspray and rough edges. Finally, after the spraying operation is completed, the turntable is closed and the turntable clamping interface is loosened, and the whole device is removed. By disassembling the M8 screw to separate the clamping spindle 3 from the connecting nylon plate 2, and then disassembling the M5 screw to separate the connecting nylon plate 2 from the outer ring shielding aluminum ring 1, the ESC and the device can be separated. After cleaning the residual powder on the surface of the outer ring shielding aluminum ring 1, if it is necessary to adapt to different models of ESC, only the outer ring shielding aluminum ring 1 with the contour that matches the non-spraying area of ​​the new ESC needs to be replaced. The connecting nylon plate 2 and the clamping spindle 3 can be directly reused to achieve efficient tooling turnover.

[0029] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

Claims

1. A spray masking device used in semiconductor ESCs, characterized in that, The device includes an outer shielding aluminum ring (1), a connecting nylon plate (2), and a clamping spindle (3). The outer shielding aluminum ring (1) includes a bottom ring plate (11) and a side plate (12) for shielding the non-spraying area of ​​the ESC. The connecting nylon plate (2) includes a panel (21), an arc ring A (22), and an arc ring B (23), which are detachably connected to the outer shielding aluminum ring (1) and the clamping spindle (3), respectively. The panel (21) has a protrusion on the side facing the ESC for positioning and engaging with the ESC. The clamping spindle (3) includes a bushing (31) and a shaft (32) for connecting with the spraying turntable to drive the ESC to rotate with the turntable for spraying.

2. The spray masking device for semiconductor ESCs according to claim 1, characterized in that, The outer ring shielding aluminum ring (1) is made of 6061 aluminum alloy. The outlines of the bottom ring plate (11) and the side plate (12) are adapted to the non-painted area of ​​the ESC to completely cover the non-painted area of ​​the ESC. The side plate (12) is provided with heat dissipation holes (14), which are evenly distributed along the circumference of the side plate (12).

3. The spray masking device for semiconductor ESCs according to claim 1, characterized in that, The outer ring shielding aluminum ring (1) has a fixing hole A (13) on its bottom ring plate (11), and the connecting nylon plate (21) has a corresponding fixing hole B (24). The fixing hole A (13) and the fixing hole B (24) are connected and fixed by 9 M5 screws. The arc ring A (22) and the arc ring B (23) are coaxially arranged, and the center hole of the arc ring B (23) is connected and fixed to the bushing (31) of the main shaft (3) by M8 screws.

4. The spray masking device for semiconductor ESCs according to claim 1, characterized in that, The connecting nylon plate (2) is made of nylon. The panel (21), arc ring A (22) and arc ring B (23) are integrally formed. The inner diameter of the arc ring A (22) is adapted to the outer diameter of the bottom ring plate (11) of the outer ring shielding aluminum ring (1) to achieve radial positioning.

5. The spray masking device for semiconductor ESCs according to claim 1, characterized in that, The bushing (31) of the clamping spindle (3) is coaxially fixedly connected to the shaft column (32). The outer diameter of the bushing (31) is adapted to the center hole of the arc ring B (23) connecting the nylon plate (2). The end of the shaft column (32) away from the bushing (31) is provided with a keyway structure adapted to the clamping interface of the spraying turntable. The axis of the shaft column (32) coincides with the axis of the outer ring shielding aluminum ring (1).

6. The spray masking device for semiconductor ESCs according to claim 2, characterized in that, The number of heat dissipation holes (14) is 9, the hole diameter is 3mm, and the opening position of the heat dissipation holes (14) corresponds to the high temperature spraying area of ​​ESC, so as to accelerate the heat dissipation during the spraying process.

7. The spray masking device for semiconductor ESCs according to claim 3, characterized in that, The fixing holes A (13) are evenly distributed along the circumference of the bottom ring plate (11). The fixing holes B (24) correspond one-to-one with the fixing holes A (13), and both holes have a diameter of 5.5 mm, which is suitable for the nominal diameter of M5 screws.

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