A kind of glue coating developing machine nozzle angle fine adjustment device

Abstract

The utility model discloses a kind of glue spreading developing machine nozzle angle fine adjustment device, to provide a kind of glue spreading developing machine nozzle angle fine adjustment device of easy fine adjustment, its technical solution main point is, including nozzle body, the nozzle body is equipped with the flow channel for conveying glue spreading or developing solution, and nozzle body side is equipped with liquid inlet;Angle adjusting assembly is also equipped on the nozzle body, and the angle adjusting assembly includes the fixed seat at the top of nozzle body, adjusting rod is equipped on the fixed seat and is passed through fixed seat to the inside of nozzle body, the adjusting rod is connected with fixed seat screw thread, the nozzle body is also equipped with the elastic member connected with the bottom of adjusting rod in, nozzle body side away from fixed end is also equipped with spout, the spout is also equipped with moving block connected with elastic member on, nozzle body is connected with the nozzle on moving block and is equipped with spout head.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a nozzle angle fine-tuning device for a coating and developing machine. Background Technology

[0002] In semiconductor wafer manufacturing, the photoresist coating and developing machine is one of the key pieces of equipment. It sprays photoresist or developer onto the wafer surface through nozzles to form a uniform film or to achieve the developing process. The spray angle of the nozzle directly affects the uniformity of the coating or developing. If the angle deviation is too large, it can easily lead to localized areas of the film being too thick or too thin, or incomplete developing, affecting the quality of subsequent photolithography processes.

[0003] Currently, Chinese patent CN218742934U discloses a glue applicator fine-tuning device, which includes a glue applicator body, the glue applicator body is fixedly installed on a glue applicator base, an adjustment seat is fixedly installed on the top of the glue applicator base, the adjustment seat is constrained and installed on a mounting base, a glue line thickness fine-tuning mechanism is installed between the adjustment seat and the mounting base, and a glue line width fine-tuning mechanism is installed between the glue applicator base and the mounting base.

[0004] Although this type of coating head fine-tuning device allows for multi-directional fine-tuning of the coating head's posture, preventing the scraper lip from contacting the diffusion layer material or causing glue buildup, thus improving the coating quality of the coating head itself, the nozzles of coating and developing machines mostly adopt a fixed installation structure, or only use simple clips and bolts for coarse adjustment. It is difficult to accurately control the amount of angle change during the adjustment process, and the angle is prone to deviation due to factors such as equipment vibration after adjustment. Some devices with fine-tuning functions have complex structures, requiring the nozzle to be disassembled for adjustment, which is cumbersome and affects production efficiency, and cannot meet the needs of high-precision coating and developing processes. Summary of the Invention

[0005] One objective of this invention is to provide a nozzle angle fine-tuning device for a coating and developing machine, which has the advantages of solving the problems of low nozzle angle adjustment accuracy and cumbersome operation in the prior art.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: A nozzle angle fine-tuning device for a coating and developing machine includes a nozzle body with a flow channel for conveying coating or developing liquid and an inlet on one side of the nozzle body. The nozzle body also includes an angle adjustment assembly, which includes a fixed base at the top of the nozzle body. An adjusting rod is threaded through the fixed base and into the nozzle body. An elastic element connected to the bottom of the adjusting rod is also provided inside the nozzle body. A nozzle orifice is provided on the side of the nozzle body away from the fixed end, and a movable block connected to the elastic element is provided on the nozzle orifice. A nozzle head connected to the nozzle body is provided on the movable block.

[0007] Further details: Fixing bolts are also provided on both sides of the fixing base.

[0008] Further feature: The adjusting rod is also equipped with an adjusting knob.

[0009] Further configuration: The movable block is also provided with buffer blocks on both sides that are connected to the nozzle body.

[0010] Further features: The fixed base is provided with a raised edge around the adjusting rod, and the edge is also provided with a rotation scale.

[0011] Further feature: The adjustment knob is also equipped with a rotating pointer.

[0012] In summary, this utility model has the following beneficial effects: Through the linkage structure of "adjusting rod-elastic element-moving block" and components such as scale pointer and buffer block, it can achieve high-precision angle fine adjustment by means of thread adjustment and scale indication, accurately improve the problem of uneven film, and can be installed conveniently by turning the knob without disassembly and by fixing bolts, which greatly improves the operating efficiency; the buffer block reduces damage and extends the life of components, and the integration of components does not affect the original function of the nozzle, adapts to multiple liquids and equipment, has low modification cost, and fully meets the needs of semiconductor process. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings.

[0014] Figure 1 This is a schematic diagram of the nozzle angle fine-tuning device of the coating and developing machine.

[0015] In the diagram, 1. Nozzle body; 2. Liquid inlet; 3. Angle adjustment assembly; 31. Fixing base; 32. Adjusting rod; 33. Elastic element; 34. Nozzle; 35. Moving block; 36. Nozzle head; 4. Fixing bolt; 5. Adjusting knob; 6. Buffer block; 7. Edge; 8. Rotation scale; 9. Rotation pointer. Detailed Implementation

[0016] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0017] The technical solution adopted in this utility model is: a nozzle angle fine-tuning device for a coating and developing machine, such as... Figure 1As shown, the nozzle body 1 includes a flow channel for conveying adhesive or developing solution, and an inlet 2 on one side of the nozzle body 1. The nozzle body 1 also includes an angle adjustment assembly 3, which includes a fixed seat 31 located at the top of the nozzle body 1, and fixed bolts 4 on both sides of the fixed seat 31. The fixed seat 31 has an adjustment rod 32 that penetrates the fixed seat 31 into the interior of the nozzle body 1. The adjustment rod 32 has an adjustment knob 5 and a rotation pointer 9. The adjustment rod 32 is threadedly connected to the fixed seat 31. The fixed seat 31 has a raised edge 7 around the adjustment rod 32, and a rotation scale 8 on the edge 7. The nozzle body 1 also has an elastic element 33 connected to the bottom of the adjustment rod 32. The nozzle body 1 has a nozzle 34 on the side away from the fixed end. The nozzle 34 has a moving block 35 connected to the elastic element 33. The moving block 35 has a nozzle head 36 connected to the nozzle body 1. The moving block 35 has buffer blocks 6 connected to the nozzle body 1 on both sides. Its main working principle is as follows: First, the angle adjustment component 3 is installed on the top of the nozzle body 1 by fixing bolts 4 on both sides of the fixed seat 31. When adjusting, the operator turns the adjustment knob 5 on the adjustment rod 32. Because the adjustment rod 32 is threadedly connected to the fixed seat 31, it will drive the adjustment rod 32 to move up and down to change the pressure on the elastic element 33 below. The elastic element 33 extends and retracts, thereby pushing the moving blocks 35 with buffer blocks 6 on both sides, driving the connected nozzle 36 to adjust the angle. At the same time, the adjustment amount is controlled by rotating the scale 8 along the edge 7 of the fixed seat 31 and rotating the pointer 9 of the adjustment knob 5. After adjustment, the angle is kept stable by the threaded locking of the adjustment rod 32, the pre-tightening of the elastic element 33 and the rigid connection of the fixed seat 31. The whole process does not affect the normal function of the nozzle body 1 to deliver the liquid to the nozzle 34 through the liquid inlet 2.

[0018] The above are merely preferred embodiments of this utility model and are not intended to limit the utility model in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model shall fall within the scope of the utility model's technical solution.

Claims

1. A glue applicator and developer nozzle angle fine adjustment device characterized by: The nozzle body (1) includes a flow channel for conveying adhesive or developing solution, and an inlet (2) is provided on one side of the nozzle body (1). An angle adjustment assembly (3) is also provided on the nozzle body (1). The angle adjustment assembly (3) includes a fixed seat (31) located at the top of the nozzle body (1). An adjustment rod (32) is provided on the fixed seat (31) and extends through the fixed seat (31) to the inside of the nozzle body (1). The adjustment rod (32) is threadedly connected to the fixed seat (31). An elastic element (33) connected to the bottom of the adjustment rod (32) is also provided inside the nozzle body (1). A nozzle (34) is provided on the side of the nozzle body (1) away from the fixed end. A moving block (35) connected to the elastic element (33) is also provided on the nozzle (34). A nozzle head (36) connected to the nozzle body (1) is provided on the moving block (35).

2. The glue applicator and developer nozzle angle fine adjustment device of claim 1, wherein: The fixing seat (31) is also provided with fixing bolts (4) on both sides.

3. The glue applicator and developer nozzle angle fine adjustment device of claim 2, wherein: The adjusting rod (32) is also provided with an adjusting knob (5).

4. The glue applicator and developer nozzle angle fine adjustment device of claim 3, wherein: The movable block (35) is also provided with buffer blocks (6) on both sides that are connected to the nozzle body (1).

5. The glue applicator and developer nozzle angle fine adjustment device of claim 4, wherein: The fixed base (31) is provided with a raised edge (7) around the adjusting rod (32), and the edge (7) is also provided with a rotation scale (8).

6. The glue applicator and developer nozzle angle fine adjustment device of claim 5, wherein: The adjustment knob (5) is also equipped with a rotating pointer (9).

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