Cleaning apparatus for test probes and chip testing machine

Abstract

The application relates to a cleaning device for testing probes and a chip testing machine, which comprises a basket frame and a mechanical arm. The basket frame is used for placing a storage cleaning sheet. The mechanical arm comprises a taking member and a driving mechanism. The taking member is used for carrying or clamping the cleaning sheet. The taking member is driven by the driving mechanism to move to the testing probe and reciprocate so that the cleaning sheet is in contact with the testing probe to remove dirt on the testing probe. The driving mechanism comprises a primary driving assembly and a secondary driving assembly. The secondary driving assembly is connected with the taking member. The primary driving assembly is used for driving the secondary driving assembly and the taking member to move a first displacement amount in the horizontal direction. The secondary driving assembly is used for driving the taking member to move a second displacement amount in the horizontal direction. The device is simple in structure, compact in space, low in cost, high in efficiency and suitable for low-frequency use requirements.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, specifically to a cleaning device for test probes and a chip testing machine. Background Technology

[0002] During chip testing, test probes need to be cleaned regularly to ensure the accuracy and reliability of chip testing. Cleaning the test probes is accomplished using cleaning wafers, and current technologies typically rely on manual labor or high-cost automated equipment to handle the loading and unloading of cleaning wafers and the cleaning of the probes.

[0003] However, existing automated loading and unloading equipment is complex in structure and expensive, and is not cost-effective, especially in low-frequency applications; while manual operation is inefficient and prone to human error. Utility Model Content

[0004] The first objective of this invention is to provide a cleaning device for test probes, thereby solving the technical problems of high cost and low efficiency in cleaning test probes in the prior art.

[0005] The second aspect of this utility model is to provide a chip testing machine having the above-mentioned cleaning equipment.

[0006] To achieve the above objectives, according to a first aspect of the present invention, a cleaning device for test probes is provided, comprising: Basket frame for storing cleaning tablets; The robotic arm includes a picking component and a driving mechanism. The picking component is used to carry or clamp the cleaning sheet. The picking component moves to the test probe under the drive of the driving mechanism and reciprocates, so that the cleaning sheet contacts the test probe to remove dirt from the test probe. The driving mechanism includes a primary driving component and a secondary driving component. The secondary driving component is connected to the material picking component. The primary driving component is used to drive the secondary driving component and the material picking component to move by a first displacement in the horizontal direction. The secondary driving component is used to drive the material picking component to move by a second displacement in the horizontal direction.

[0007] Optionally, the primary drive assembly includes a first support platform, a second support platform, and a first drive member, wherein the first drive member is mounted on the first support platform, and the secondary drive assembly is mounted on the second support platform; The first driving member is used to drive the second support platform to move horizontally relative to the first support platform, thereby driving the secondary driving assembly and the material picking member to move horizontally.

[0008] Optionally, the secondary drive assembly includes a support platform and a second drive component, the second drive component being mounted on the second support platform, and the material handling component being mounted on the support platform; The second driving member is used to drive the bearing platform to move horizontally relative to the second support platform, thereby driving the material picking member to move horizontally, thereby driving the first-stage driving assembly, the second-stage driving assembly and the material picking member to move vertically.

[0009] Optionally, the drive mechanism further includes: A rotating assembly is used to drive the primary drive assembly, the secondary drive assembly, and the material handling component to rotate along a vertical axis; A lifting assembly is used to drive the rotating assembly to move up and down in the vertical direction.

[0010] Optionally, the rotating component includes: Fixed base frame; A hollow rotating platform is mounted on the fixed base frame and is connected to the first support platform. The third driving component is mounted on the fixed base frame and connected to the hollow rotating platform. The third driving component cooperates with the hollow rotating platform to drive the first support platform to rotate.

[0011] Optionally, the lifting assembly includes: The lifting platform is used to support the fixed base frame; The fourth driving component is connected to the lifting platform and is used to drive the lifting platform to move vertically back and forth.

[0012] Optionally, the basket frame further includes: Frame; Multiple support plates are arranged vertically at intervals within the frame to support the cleaning sheet; Multiple detection sensors are installed on the side of the frame and arranged at vertical intervals along the frame. Each detection sensor corresponds to a carrier plate and is used to detect whether the cleaning sheet is on the carrier plate.

[0013] Optionally, the basket frame further includes: A positioning sensor is installed on the frame to position the material being picked up.

[0014] Optionally, the material-receiving component is provided with a plurality of suction cups, which are connected to an external air extraction device, and the plurality of suction cups cooperate to pick up and fix the cleaning sheet.

[0015] According to a second aspect of the present invention, a chip testing machine is provided, including the cleaning device.

[0016] The beneficial effects of this invention are as follows: By constructing a two-stage progressive structure with a primary drive component and a secondary drive component, the horizontal movement of the cleaning plate driven by the material handling component can be effectively controlled. This ensures accurate contact between the cleaning plate and the test probe, and effectively scrapes away dirt from the test probe. This achieves efficient and stable loading and unloading of the cleaning plate and the cleaning process. The equipment has a simple structure, compact space, low cost, and high efficiency, making it suitable for low-frequency use. Furthermore, the design of the primary and secondary drive components can meet different stroke requirements, offering a wide stroke range and strong applicability.

[0017] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0018] Figure 1 This is a schematic structural diagram of a cleaning device for test probes according to an embodiment of the present invention; Figure 2 This is a schematic structural diagram of a primary drive assembly and a secondary drive assembly for a cleaning device for a test probe, according to an embodiment of the present invention. Figure 3 This is a schematic structural diagram of a rotating assembly and a lifting assembly for a cleaning device for a test probe, according to an embodiment of the present invention. Figure 4 This is a schematic structural diagram of a basket frame for a cleaning device for testing probes, according to an embodiment of the present invention. In the diagram: 1. Basket frame; 11. Frame body; 12. Support plate; 121. Clearance groove; 13. Detection sensor; 14. Support frame; 15. Positioning sensor; 151. Projector; 152. Receiver; 2. Robotic arm; 21. Material handling component; 211. Suction cup; 22. Drive mechanism; 221. First-stage drive assembly; 2211. First support platform; 2212. Second support platform; 2213. First drive component; 22 14. First slide rail; 222. Secondary drive assembly; 2221. Support platform; 2222. Second drive component; 2223. Second slide rail; 2224. Transmission pulley; 2225. Synchronous belt; 223. Rotating assembly; 2231. Fixed base frame; 2232. Hollow rotating platform; 2233. Third drive component; 224. Lifting assembly; 2241. Lifting platform; 2242. Fourth drive component; 3. Cleaning plate. Detailed Implementation

[0019] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0020] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0022] Please see Figure 1 and Figure 2 A preferred embodiment of this application shows a cleaning device for test probes, comprising a basket frame 1 and a robotic arm 2. The basket frame 1 is used to hold and store cleaning sheets 3. The robotic arm 2 includes a picking component 21 and a drive mechanism 22. The picking component 21 is used to carry or clamp the cleaning sheet 3. Driven by the drive mechanism 22, the picking component 21 moves to the test probe and reciprocates, so that the cleaning sheet 3 contacts the test probe to remove dirt from the test probe. The drive mechanism 22 includes a primary drive assembly 221 and a secondary drive assembly 222. The secondary drive assembly 222 is connected to the picking component 21. The primary drive assembly 221 drives the secondary drive assembly 222 and the picking component 21 to move by a first displacement in the horizontal direction, and the secondary drive assembly 222 drives the picking component 21 to move by a second displacement in the horizontal direction. Here, the cleaning sheet 3 can be a wafer.

[0023] According to the embodiment of this utility model, a two-stage progressive structure is formed by the primary drive component 221 and the secondary drive component 222. This effectively controls the horizontal movement of the cleaning plate 3 driven by the picking component 21, ensuring accurate contact between the cleaning plate 3 and the test probe, and scraping away dirt from the test probe. This achieves efficient and stable loading and unloading of the cleaning plate 3 and the cleaning process. The equipment has a simple structure, compact space, low cost, and high efficiency, making it suitable for low-frequency use. Furthermore, the design of the primary drive component 221 and the secondary drive component 222 can meet different stroke requirements, offering a wide stroke range and strong applicability.

[0024] The following detailed description uses specific examples: In some embodiments, see Figure 2 and Figure 3 The primary drive assembly 221 includes a first support platform 2211, a second support platform 2212, and a first drive member 2213. The first drive member 2213 is mounted on the first support platform 2211, and the secondary drive assembly 222 is mounted on the second support platform 2212. The first drive member 2213 drives the second support platform 2212 to move horizontally relative to the first support platform 2211, thereby driving the secondary drive assembly 222 and the material handling component 21 to move horizontally. Here, the first drive member 2213 is a drive cylinder, which is located beside the first support platform 2211, and its movable end is connected to the second support platform 2212. Here, the stroke of the primary drive assembly 221 is fixed.

[0025] In some embodiments, see Figure 3 The primary drive assembly 221 also includes a first slide rail 2214, which is disposed on the first support platform 2211. The end of the first slide rail 2214 faces the basket frame 1, and the second support platform 2212 is slidably disposed on the first slide rail 2214.

[0026] In some embodiments, see Figure 2 The secondary drive assembly 222 includes a support platform 2221 and a second drive member 2222. The second drive member 2222 is mounted on a second support platform 2212, and the material picker 21 is mounted on the support platform 2221. The second drive member 2222 is used to drive the support platform 2221 to move horizontally relative to the second support platform 2212, thereby driving the material picker 21 to move horizontally.

[0027] In some embodiments, see Figure 2The second driving component 2222 is a stepper motor, which is mounted on the second support platform 2212, and a drive pulley is fitted onto the movable end of the stepper motor. The secondary driving assembly 222 also includes a second slide rail 2223, a transmission pulley 2224, and a synchronous belt 2225. The second slide rail 2223 is mounted on the second support platform 2212, with its end facing the basket frame 1. The support platform 2221 is slidably mounted on the second slide rail 2223. The transmission pulley 2224 is rotatably mounted on the second support platform 2212. The synchronous belt 2225 is fitted between the drive pulley and the transmission pulley 2224, and is connected to the support platform 2221. Here, the stroke of the secondary driving assembly 222 is automatically adjustable.

[0028] In some embodiments, see Figure 4 The basket frame 1 also includes a frame body 11, a support plate 12, and a detection sensor 13. Multiple support plates 12 are arranged vertically at intervals within the frame body 11 to support the cleaning sheet 3.

[0029] Multiple detection sensors 13 are installed on the side of the frame 11 and arranged at vertical intervals along the frame 11. Each detection sensor 13 corresponds to a carrier plate 12 and is used to detect whether there is a cleaning sheet 3 on the carrier plate 12.

[0030] In some embodiments, see Figure 4 A support frame 14 is provided on the side of the frame 11, and a detection window is opened between the support frame 14 and the side wall of the frame 11. Several detection sensors 13 are vertically spaced on the support frame 14, and the support plate 12 has a clearance groove 121 facing the detection sensors 13. Here, the detection sensor 13 is a laser sensor. When there is a cleaning sheet 3 on the support plate 12, the cleaning sheet 3 will cover the clearance groove 121, and the laser emitted by the laser sensor will shine on the cleaning sheet 3 instead of passing through the clearance groove 121, thereby detecting the cleaning sheet 3.

[0031] In some embodiments, see Figure 3 The material-collecting component 21 is equipped with several suction cups 211, which are connected to an external air extraction device. The suction cups 211 work together to pick up and fix the cleaning sheet 3. In some preferred embodiments, the material-collecting component 21 has a U-shaped structure, with several suction cups 211 distributed on both sides of the material-collecting component 21.

[0032] In some embodiments, see Figure 4The basket frame 1 also includes a positioning sensor 15, which is mounted on the frame 11 and used to position the material-receiving component 21. In some preferred embodiments, the positioning sensor 15 includes a projector 151 disposed on the top of the frame 11 and a receiver 152 disposed on the material-receiving component 21. The projector 151 and the receiver 152 cooperate to position the depth of the material-receiving component 21 extending into the frame 11, ensuring that the suction cup 211 can stably pick up and fix the cleaning sheet 3 while preventing the material-receiving component 21 from colliding with the frame 11 and causing damage. In other preferred embodiments, the positioning sensor 15 may also be a slotted photoelectric sensor disposed on the side of the frame 11 and a shielding plate disposed on the side of the material-receiving component 21 and cooperating with the slotted photoelectric sensor.

[0033] In some embodiments, see Figure 2 The drive mechanism 22 also includes a rotating component 223 and a lifting component 224. The rotating component 223 drives the primary drive component 221, the secondary drive component 222, and the picking component 21 to rotate along the vertical axis. The lifting component 224 drives the rotating component 223 to move vertically, thereby causing the primary drive component 221, the secondary drive component 222, and the picking component to move vertically along 21. The rotating component 223 allows the picking component 21 to adapt to the horizontal working angle when loading and unloading the cleaning sheet 3, and the lifting component 224 allows the picking component 21 to extend above the support plate 11 at different heights to pick up and fix the cleaning sheet 3 to adapt to different working heights when loading and unloading the cleaning sheet 3.

[0034] In some embodiments, see Figure 3 The rotating assembly 223 includes a fixed base frame 2231, a hollow rotating platform 2232, and a third driving component 2233. The hollow rotating platform 2232 is mounted on the fixed base frame 2231 and connected to the first support platform 2211. The third driving component 2233 is mounted on the fixed base frame 2231 and connected to the hollow rotating platform 2232. The third driving component 2233 cooperates with the hollow rotating platform 2232 to drive the first support platform 2211 to rotate. Here, the third driving component 2233 is a servo motor.

[0035] In some embodiments, see Figure 3 The lifting assembly 224 includes a lifting platform 2241 and a fourth drive member 2242. The lifting platform 2241 is used to support the fixed base frame 2231. The fourth drive member 2242 is connected to the lifting platform 2241 and is used to drive the lifting platform 2241 to move vertically reciprocally. Here, the fourth drive member 2242 is a linear module, which is prior art and will not be described in detail here.

[0036] The present invention also provides a chip testing machine, including a cleaning device. Details of the cleaning device will not be provided here.

[0037] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0038] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A cleaning device for test probes, characterized in that, include: Basket frame for storing cleaning tablets; The robotic arm includes a picking component and a driving mechanism. The picking component is used to carry or clamp the cleaning sheet. The picking component moves to the test probe under the drive of the driving mechanism and reciprocates, so that the cleaning sheet contacts the test probe to remove dirt from the test probe. The driving mechanism includes a primary driving component and a secondary driving component. The secondary driving component is connected to the material picking component. The primary driving component is used to drive the secondary driving component and the material picking component to move by a first displacement in the horizontal direction. The secondary driving component is used to drive the material picking component to move by a second displacement in the horizontal direction.

2. The cleaning equipment according to claim 1, characterized in that, The primary drive assembly includes a first support platform, a second support platform, and a first drive component. The first drive component is mounted on the first support platform, and the secondary drive assembly is mounted on the second support platform. The first driving member is used to drive the second support platform to move horizontally relative to the first support platform, thereby driving the secondary driving assembly and the material picking member to move horizontally.

3. The cleaning equipment according to claim 2, characterized in that, The secondary drive assembly includes a support platform and a second drive component, the second drive component is mounted on the second support platform, and the material handling component is mounted on the support platform. The second driving member is used to drive the bearing platform to move horizontally relative to the second support platform, thereby causing the material picking member to move horizontally.

4. The cleaning equipment according to claim 2, characterized in that, The drive mechanism also includes: A rotating assembly is used to drive the primary drive assembly, the secondary drive assembly, and the material handling component to rotate along a vertical axis; The lifting assembly is used to drive the rotating assembly to move up and down in the vertical direction, thereby driving the primary drive assembly, the secondary drive assembly and the material picking component to move vertically.

5. The cleaning equipment according to claim 4, characterized in that, The rotating component includes: Fixed base frame; A hollow rotating platform is mounted on the fixed base frame and is connected to the first support platform. The third driving component is mounted on the fixed base frame and connected to the hollow rotating platform. The third driving component cooperates with the hollow rotating platform to drive the first support platform to rotate.

6. The cleaning equipment according to claim 5, characterized in that, The lifting assembly includes: The lifting platform is used to support the fixed base frame; The fourth driving component is connected to the lifting platform and is used to drive the lifting platform to move vertically back and forth.

7. The cleaning equipment according to any one of claims 1-6, characterized in that, The basket frame also includes: Frame; Multiple support plates are arranged vertically at intervals within the frame to support the cleaning sheet; Multiple detection sensors are installed on the side of the frame and arranged at vertical intervals along the frame. Each detection sensor corresponds to a carrier plate and is used to detect whether the cleaning sheet is on the carrier plate.

8. The cleaning equipment according to claim 7, characterized in that, The basket frame also includes: A positioning sensor is installed on the frame to position the material being picked up.

9. The cleaning equipment according to claim 1, characterized in that, The material handling component is equipped with several suction cups, which are connected to an external air extraction device. The suction cups work together to pick up and fix the cleaning sheet.

10. A chip testing machine, characterized in that, Includes the cleaning equipment as described in any one of claims 1-9.

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