A super-pure water circulating heating device

Abstract

The utility model provides a kind of ultrapure water circulating heating device, comprising: cleaning tank component, it includes cleaning tank body, first cleaning tank, circulating export pipe, first heating tank, second heating tank and circulating import pipe in the cleaning tank component, compared with prior art, the utility model has the beneficial effects as follows: by increasing cleaning tank component, using ultrapure water to clean bonding wire, temperature sensor is monitored to the temperature in first cleaning tank in real time, realizes the export ultrapure water in different position by four groups of circulating export pipe in use, and sequentially passes through first heating tank and second heating tank, and heating is independently controlled in stages, and the ultrapure water guided in different places is heated to the same temperature, so as to improve temperature control accuracy, by increasing cleaning tank component and filter core, filter core is installed to filter groove, sealing plate is driven by sealing cylinder to descend and sealing groove sealing interfit, so as to be able to assist ultrapure water filtration use.

Description

Technical Field

[0001] This utility model belongs to the field of bonding wire electroplating technology, and specifically relates to an ultrapure water circulating heating device. Background Technology

[0002] Bonding wires are core interconnect materials in semiconductor packaging, used to establish electrical connections between chip pads and lead frames / substrates. Their performance directly determines the chip's signal transmission efficiency, reliability, and lifespan. Bonding wire electroplating is a key technology that uses electrochemical methods to deposit one or more metal plating layers on the surface of the bonding wire substrate. This optimizes its oxidation resistance, bonding reliability, conductivity, and cost control, and is widely used in the manufacture of bonding wires for gold, copper, silver, and other substrates. Before and after electroplating, the bonding wires need to be cleaned to prevent impurities or electrolyte residues from affecting their final performance. Cleaning with ultrapure water is an essential step in this process, requiring heating to a specific temperature. As production progresses, the ultrapure water temperature tends to drop. Current technologies often use direct heating for this purpose, which cannot precisely control the temperature and may lead to overheating. Furthermore, some circulating heating structures suffer from temperature regulation deviations due to single-location water pumping and introduction.

[0003] In summary, we hope to propose a new structure to solve the aforementioned technical problems. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an ultrapure water circulation heating device to solve the problems mentioned in the background technology.

[0005] This utility model is achieved through the following technical solution: an ultrapure water circulation heating device, comprising: a cleaning tank assembly, wherein the cleaning tank assembly includes a cleaning tank body, a first cleaning tank, a circulation outlet pipe, a first heating tank, a second heating tank, and a circulation inlet pipe; The upper surface of the cleaning tank body has a first cleaning tank for cleaning the bonding wires on the left end. A set of circulation outlet pipes for exporting ultrapure water for heating is provided at the four corners of the inner side of the first cleaning tank. A circulation inlet pipe for importing heated ultrapure water is fixedly connected to the lower right end of the inner side of the first cleaning tank. A heating tank is provided on the upper surface of the cleaning tank body on the right side of the first cleaning tank. Four sets of circulating water pumps are fixedly connected to the upper inner side of the heating tank. An inlet pipe is fixedly connected below the circulating water pumps. A first heating box is fixedly connected below the inlet pipe. An inlet pipe is also fixedly connected below the first heating box. A second heating box is fixedly connected below the inlet pipe below the first heating box.

[0006] In a preferred embodiment, a distribution ring pipe is fixedly connected to the lower left of the circulation inlet pipe, and a set of water injection pipes are fixedly connected to the four corners above the distribution ring pipe. A set of inlet connecting pipes is also fixedly connected to the lower part of the second heating box. The heated ultrapure water is guided through the circulation inlet pipe and distributed to the four sets of water injection pipes through the distribution ring pipes. The heated water is injected into the first cleaning tank through the water injection pipes at the four corners.

[0007] In a preferred embodiment, each of the inlet pipe sections is fixedly equipped with a set of solenoid valves for controlling the on / off state of the pipeline, and a heating water collection tank is fixedly connected below the lowest inlet pipe. The heating water collection tank is interconnected with the four lowest inlet pipes.

[0008] In a preferred embodiment, the inner sides of both the first and second heating boxes are uniformly distributed with several sets of heating tubes for heating ultrapure water. Temperature sensors for detecting water temperature are installed at the outlet sections of both the first and second heating boxes. A set of temperature sensors is also fixedly installed at each of the four corners of the inner side of the first cleaning tank. The ultrapure water temperature is monitored by temperature sensors at different locations, and heating to a specified temperature is achieved through independent heating control of heating tubes at different locations.

[0009] In a preferred embodiment, both the first heating box and the second heating box have a set of collecting tanks at their lower ends for collecting and guiding ultrapure water. The cross-section of the collecting tank is a trapezoidal structure that is wider at the top and narrower at the bottom.

[0010] In a preferred embodiment, a set of collecting channels is also provided at the lower end of the heating water collecting tank, and the lower end of the heating water collecting tank is also connected to the circulating water inlet pipe.

[0011] In a preferred embodiment, a filter box is fixedly connected above the cleaning tank body between the first cleaning tank and the heating tank. A set of connecting pipes is fixedly connected to both the left and right sides of the filter box. The connecting pipe on the left side is fixedly connected to the circulation outlet pipe by a flange.

[0012] In a preferred embodiment, a filter groove is provided on the upper surface of the filter box corresponding to each of the four sets of circulation outlet pipes. A filter element for multi-stage filtration of ultrapure water is installed inside the filter groove. A sealing groove is also provided on the upper surface of the filter box around the filter groove. A bracket is fixedly connected to the top of the filter box, and four sets of sealing cylinders are fixedly connected to the bottom of the bracket. A connecting seat is fixedly connected to the bottom of the sealing cylinder, and four sets of sealing plates are fixedly connected to the bottom of the connecting seat. The sealing plates and the sealing groove are mutually sealed and fitted together. The filter element is installed in the filter groove, and the sealing cylinder drives the sealing plate to move down and seal with the sealing groove, thereby assisting in the use of ultrapure water filtration.

[0013] After adopting the above technical solution, the beneficial effects of this utility model are: By adding a cleaning tank assembly, ultrapure water is used to clean the bonded wires. A temperature sensor monitors the temperature in the first cleaning tank in real time. During use, ultrapure water is discharged from different locations through four sets of circulating outlet pipes. The water is then passed through the first heating box and the second heating box for independent heating in stages, heating the ultrapure water delivered from different locations to the same temperature, thereby improving the accuracy of temperature control.

[0014] By adding a cleaning tank assembly and filter element, the filter element is installed in the filter tank. The sealing plate is moved down by the sealing cylinder and sealed and fitted into the sealing tank, thereby assisting in the use of ultrapure water filtration. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of an ultrapure water circulating heating device according to the present invention.

[0017] Figure 2 This is a schematic diagram of the left side of the cleaning tank assembly in an ultrapure water circulating heating device according to this utility model.

[0018] Figure 3 This is a schematic diagram of the right side of the cleaning tank assembly in an ultrapure water circulating heating device according to this utility model.

[0019] Figure 4 This is a partial cross-sectional schematic diagram of the cleaning tank assembly in an ultrapure water circulating heating device according to this utility model.

[0020] In the diagram, 100-cleaning box assembly, 101-cleaning box body, 102-first cleaning tank, 103-circulation outlet pipe, 104-flange, 105-filter box, 106-filter tank, 107-sealing groove, 108-support, 109-sealing cylinder, 110-sealing plate, 111-connecting pipe, 112-circulating water pump, 113-first heating box, 114-heating pipe, 115-inlet connecting pipe, 116-solenoid valve, 117-heated water collection box, 118-circulation inlet pipe, 119-distribution ring pipe, 120-water injection pipe, 121-second heating box; 200-Filter Cartridge. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1-4 As the first embodiment of this utility model: An ultrapure water circulation heating device includes: a cleaning tank assembly 100, which includes a cleaning tank body 101, a first cleaning tank 102, a circulation outlet pipe 103, a first heating box 113, a second heating box 121, and a circulation inlet pipe 118. A first cleaning tank 102 for cleaning bonding wires is provided on the left end of the upper surface of the cleaning tank body 101. A set of circulation outlet pipes 103 for exporting ultrapure water for heating is provided at the four corners of the inner side of the first cleaning tank 102. A circulation inlet pipe 118 for importing heated ultrapure water is fixedly connected to the lower right end of the inner side of the first cleaning tank 102. A heating tank is provided on the upper surface of the cleaning tank body 101 on the right side of the first cleaning tank 102. Four sets of circulating water pumps 112 are fixedly connected to the upper inner side of the heating tank. An inlet pipe 115 is fixedly connected below the circulating water pumps 112. A first heating box 113 is fixedly connected below the inlet pipe. An inlet pipe 115 is also fixedly connected below the first heating box 113. A second heating box 121 is fixedly connected below the inlet pipe 115 below the first heating box 113.

[0023] A distribution ring pipe 119 is fixedly connected to the lower left of the circulation inlet pipe 118. A set of water injection pipes 120 are fixedly connected to the four corners above the distribution ring pipe 119. A set of inlet connecting pipes 115 is also fixedly connected to the lower part of the second heating box 121. The heated ultrapure water is guided through the circulation inlet pipe 118 and distributed to the four sets of water injection pipes 120 through the distribution ring pipe 119. The heated water is injected into the first cleaning tank 102 through the water injection pipes 120 at the four corners.

[0024] Each set of inlet pipes 115 is fixedly installed with a set of solenoid valves 116 for controlling the opening and closing of the pipeline. A heating water collection tank 117 is fixedly connected below the bottom inlet pipe 115. The heating water collection tank 117 is interconnected with the four sets of bottom inlet pipes 115.

[0025] Both the first heating chamber 113 and the second heating chamber 121 have several sets of heating tubes 114 for heating ultrapure water evenly distributed on their inner sides. Temperature sensors for detecting water temperature are installed at the outlet sections of both the first heating chamber 113 and the second heating chamber 121. A set of temperature sensors is also fixedly installed at each of the four corners of the inner side of the first cleaning tank 102. The temperature of ultrapure water is monitored by temperature sensors set at different locations, and heating to the specified temperature is achieved through independent heating control of heating tubes 114 at different locations.

[0026] Both the first heating box 113 and the second heating box 121 have a set of collecting tanks at their lower ends for collecting and guiding ultrapure water. The cross-section of the collecting tanks is a trapezoidal structure that is wider at the top and narrower at the bottom.

[0027] A set of collection channels is also provided at the lower end of the heating water collection tank 117, and the lower end of the heating water collection tank 117 is also connected to the circulating water inlet pipe 118.

[0028] Specifically, multiple temperature sensors installed in the first cleaning tank 102 monitor the temperature of the ultrapure water. If the temperature is lower than the set range, the ultrapure water is discharged through the circulation outlet pipe 103 and first introduced into the first heating tank 113 by the circulating water pump 112. The temperature is monitored in real time by the temperature sensors, and then the heating tubes 114 at different positions are controlled independently for heating. Then, the ultrapure water is introduced into the second heating tank 121 by the control of the solenoid valve 116, so that the ultrapure water is heated to the same specified temperature. Next, the heated ultrapure water is collected into the heating water collection tank 117 and introduced into the distribution ring pipe 119 through the circulation outlet pipe 118. Finally, the heated ultrapure water is injected into the first cleaning tank 102 through four sets of water injection pipes 120 set at the four corners. This prevents the delay in temperature diffusion from affecting the uniformity of water temperature, thereby improving the accuracy of temperature control.

[0029] Please see Figures 1-4 As a second embodiment of this utility model: A filter box 105 is fixedly connected above the cleaning tank body 101 between the first cleaning tank 102 and the heating tank. A set of connecting pipes 111 are fixedly connected to both the left and right sides of the filter box 105. The left connecting pipe 111 is fixedly connected to the circulation outlet pipe 103 through a flange 104.

[0030] The upper surface of the filter box 105 is provided with a filter tank 106 corresponding to the four sets of circulation outlet pipes 103. The filter tank 106 is equipped with a filter element 200 for multi-stage filtration of ultrapure water. The upper surface of the filter box 105 is also provided with a sealing groove 107 around the filter tank 106. A bracket 108 is fixedly connected above the filter box 105. Four sets of sealing cylinders 109 are fixedly connected below the bracket 108. A connecting seat is fixedly connected below the sealing cylinder 109. Four sets of sealing plates 110 are fixedly connected below the connecting seat. The sealing plates 110 and the sealing groove 107 are mutually sealed and fitted. The filter element 200 is installed in the filter tank 106. The sealing plates 110 are moved down by the sealing cylinder 109 and sealed and fitted with the sealing groove 107.

[0031] Based on the first embodiment described above, the four filter elements 200 are further installed into the four filter tanks 106 respectively. Then, the sealing cylinder 109 drives the sealing plate 110 to move down through the connecting seat, so that the sealing plate 110 and the sealing groove 107 are sealed and fitted together, and the sealing and abutting installation of the filter elements 200 is completed, so as to assist in the filtration of the circulating ultrapure water.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An ultrapure water circulation heating device, comprising: The cleaning tank assembly (100) is characterized in that: the cleaning tank assembly (100) includes a cleaning tank body (101), a first cleaning tank (102), a circulation outlet pipe (103), a first heating box (113), a second heating box (121) and a circulation inlet pipe (118). The upper surface of the cleaning tank body (101) has a first cleaning tank (102) for cleaning bonding wires at the left end. A set of circulation outlet pipes (103) for heating ultrapure water is provided at the four corners of the inner side of the first cleaning tank (102). A circulation inlet pipe (118) for introducing heated ultrapure water is fixedly connected to the lower right end of the inner side of the first cleaning tank (102). A heating tank is provided on the upper surface of the cleaning tank body (101) on the right side of the first cleaning tank (102). Four sets of circulating water pumps (112) are fixedly connected to the upper inner side of the heating tank. An inlet pipe (115) is fixedly connected below the circulating water pumps (112). A first heating box (113) is fixedly connected below the inlet pipe. A set of inlet pipes (115) is also fixedly connected below the first heating box (113). A set of second heating boxes (121) is fixedly connected below the inlet pipes (115) below the first heating box (113).

2. The ultra-pure water circulating heating device according to claim 1, wherein: A distribution ring pipe (119) is fixedly connected to the lower left of the circulation inlet pipe (118). A set of water injection pipes (120) is fixedly connected to the four corners above the distribution ring pipe (119). A set of inlet connecting pipes (115) is also fixedly connected to the lower part of the second heating box (121).

3. The recirculating ultrapure water heating apparatus of claim 2, wherein: Each of the inlet pipes (115) is fixedly equipped with a set of solenoid valves (116) for controlling the opening and closing of the pipeline. A heating water collection tank (117) is fixedly connected below the bottom inlet pipe (115). The heating water collection tank (117) is interconnected with the four bottom inlet pipes (115).

4. The recirculating ultrapure water heating apparatus of claim 1, wherein: The first heating box (113) and the second heating box (121) have several sets of heating tubes (114) for heating ultrapure water in a uniform structure on the inner side. The outlet sections of the first heating box (113) and the second heating box (121) are equipped with temperature sensors for detecting water temperature. A set of temperature sensors is also fixedly installed at the four corners of the inner side of the first cleaning tank (102).

5. The recirculating ultrapure water heating apparatus of claim 3, wherein: Both the first heating box (113) and the second heating box (121) have a set of collection tanks at the bottom for collecting and guiding ultrapure water. The cross-section of the collection tank is a trapezoidal structure that is wider at the top and narrower at the bottom.

6. The recirculating ultrapure water heating apparatus of claim 5, wherein: The lower end of the heating water collection tank (117) is also provided with a collection trough, and the lower end of the heating water collection tank (117) is also connected to the circulation inlet pipe (118).

7. The recirculating ultrapure water heating apparatus of claim 1, wherein: A filter box (105) is fixedly connected above the cleaning tank body (101) between the first cleaning tank (102) and the heating tank. A set of connecting pipes (111) is fixedly connected on both the left and right sides of the filter box (105). The connecting pipe (111) on the left side is fixedly connected to the circulation outlet pipe (103) through a flange (104).

8. The recirculating ultrapure water heating apparatus of claim 7, wherein: The filter box (105) has a filter tank (106) on the upper surface corresponding to the four sets of circulation outlet pipes (103). The filter tank (106) is equipped with a filter element (200) for multi-stage filtration of ultrapure water. The filter box (105) also has a sealing groove (107) on the upper surface of the filter tank (105) around the filter tank (106). A bracket (108) is fixedly connected above the filter box (105), and four sets of sealing cylinders (109) are fixedly connected below the bracket (108). A connecting seat is fixedly connected below the sealing cylinder (109), and four sets of sealing plates (110) are fixedly connected below the connecting seat. The sealing plates (110) and the sealing groove (107) are mutually sealed and fitted together.

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