Semiconductor flower basket quick cleaning and drying all-in-one machine

Abstract

This utility model relates to the field of semiconductor flower basket manufacturing technology, and discloses a rapid cleaning and drying integrated machine for semiconductor flower baskets. It includes an ultrasonic vibrator, an upper hydraulic unit located at the rear of the ultrasonic vibrator, and a cleaning and drying mechanism located at the top of the ultrasonic vibrator for rapid cleaning and drying of the semiconductor flower basket. An automatic picking mechanism is located at the bottom of the upper hydraulic unit for automated picking of the semiconductor flower basket. The cleaning and drying mechanism includes an upper cleaning frame, the bottom of which is fixedly connected to the top of the ultrasonic vibrator, and an upper support frame is fixedly connected to the top of the upper cleaning frame. In this utility model, an ultrasonic cleaner is located at the front of the device, capable of removing dust and impurities adhering to these difficult-to-clean areas. A hot air blower can immediately deliver hot air to the surface of the flower basket after cleaning to quickly remove residual cleaning solution.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor flower basket manufacturing technology, and in particular to a semiconductor flower basket rapid cleaning and drying integrated machine. Background Technology

[0002] Semiconductor basket cleaning machines are equipment used in the semiconductor manufacturing industry. They are designed to clean baskets used in the semiconductor production process. The core components consist of a cleaning chamber and a spray system. The machine is designed to adapt to the specific structure of semiconductor baskets, including the basket's frame size, grid spacing, and the specifications of the slots that hold semiconductor wafers. It can perform targeted treatment on the surface and internal areas of the basket through specific mechanical actions and cleaning media. It is a type of specialized equipment that ensures the cleanliness of baskets in the semiconductor manufacturing process.

[0003] In the semiconductor manufacturing process, semiconductor baskets are key tools for carrying and transporting semiconductor wafers. If contaminants adhere to their surfaces and crevices, it will directly affect the processing accuracy of the wafers and the quality of the final product, and may even lead to the scrapping of the wafers. Semiconductor basket cleaning machines remove contaminants from the baskets through physical spraying, ensuring that the baskets remain clean and meet semiconductor production standards during repeated use. The cleaned baskets can prevent secondary transfer of contaminants during wafer transport and processing, providing a stable carrying environment for the critical processes of semiconductor wafers.

[0004] Most semiconductor basket cleaning machine spray systems on the market currently use fixed-angle spraying, which cannot completely cover the complex structure of the basket, especially the gaps between the basket frame and the slots, and the narrow areas where the grid intersects. The cleaning medium has difficulty penetrating, causing dust and impurities to accumulate in these areas for a long time and cannot be completely removed. Existing equipment also lacks efficient air drying function, leaving cleaning fluid residue on the surface and in the gaps of the basket after cleaning. The equipment only relies on the blowing device to handle this, which not only consumes a lot of time, but also causes water stains on the surface of the basket due to the cleaning fluid residue, affecting the subsequent semiconductor wafer carrying and processing quality. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a semiconductor flower basket rapid cleaning and drying integrated machine, which aims to improve the problem of poor cleaning effect and inability to quickly complete the cleaning and drying process of the existing technology.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a semiconductor flower basket rapid cleaning and drying integrated machine, including an ultrasonic vibrator, an upper hydraulic device is provided on the rear side of the ultrasonic vibrator, a cleaning and drying mechanism is provided on the top of the ultrasonic vibrator, the cleaning and drying mechanism is used for rapid cleaning and drying of the semiconductor flower basket, and an automatic picking mechanism is provided at the bottom of the upper hydraulic device, the automatic picking mechanism is used for automatic picking of the semiconductor flower basket.

[0007] The cleaning and drying mechanism includes an upper cleaning frame, the bottom of which is fixedly connected to the top of an ultrasonic vibrator. An upper support frame is fixedly connected to the top of the upper cleaning frame, and a top connecting frame is fixedly connected to the top of the upper support frame. A front connecting column is fixedly connected to the left side of the top connecting frame, and a dryer is fixedly connected to the outer wall of the front connecting column. A heating component is provided on the right side of the dryer, and a rotating motor is fixedly connected inside the dryer. A control component is provided on the front side of the upper support frame.

[0008] As a further description of the above technical solution:

[0009] The automatic picking mechanism includes a lower connector, the top of which is fixedly connected to the bottom of the upper hydraulic unit. A height adjustment rod is fixedly connected to the bottom of the lower connector. A horizontal sliding member is slidably connected to the outer wall of the height adjustment rod. A lower sliding rod is slidably connected to the left side of the horizontal sliding member. A semiconductor flower basket placement assembly is provided at the bottom of the lower sliding rod. A horizontal displacement rod is slidably connected to the right side of the horizontal sliding member. A right support assembly is provided to the right side of the horizontal displacement rod.

[0010] As a further description of the above technical solution:

[0011] The heating component includes an inner heat-conducting plate, the left side of which is fixedly connected to the right side of the dryer, and multiple inner heating elements are fixedly connected to the inner wall of the inner heat-conducting plate.

[0012] As a further description of the above technical solution:

[0013] The control assembly includes a front connecting frame, the bottom of which is fixedly connected to the front side of the upper support frame, and a plurality of front control buttons are fixedly connected to the front side of the front connecting frame.

[0014] As a further description of the above technical solution:

[0015] The semiconductor flower basket placement assembly includes a bottom connector, the top of which is fixedly connected to the bottom of the lower sliding rod, and two placement rails are fixedly connected to the front side of the bottom connector.

[0016] As a further description of the above technical solution:

[0017] The right support assembly includes a right support frame, the left side of which is fixedly connected to the right side of the lateral displacement rod, and the right side of which is fixedly connected to a right fixing block.

[0018] As a further description of the above technical solution:

[0019] The bottom of the ultrasonic vibrator is provided with multiple lower connecting columns, and the bottom of each of the multiple lower connecting columns is fixedly connected with a bottom anti-slip frame.

[0020] As a further description of the above technical solution:

[0021] The ultrasonic vibrator has multiple side connecting columns on its right side, and a semiconductor flower basket holder is fixedly connected to the bottom of each of the multiple side connecting columns.

[0022] This utility model has the following beneficial effects:

[0023] 1. In this utility model, an ultrasonic cleaner is installed on the front side of the device. It can use the high-frequency vibration of ultrasonic waves to make the cleaning medium generate micro bubbles and violently break them, forming a local high-pressure impact that directly acts on the narrow area of ​​the semiconductor basket, peeling off the dust and impurities attached to these hard-to-clean areas. The hot air blower installed on the upper side of the ultrasonic cleaner can immediately deliver hot air at a stable temperature to the surface and crevices of the basket after cleaning, quickly removing residual cleaning liquid and avoiding water stains and secondary pollution caused by natural drying or simple blowing. This significantly shortens the drying time of the basket and ensures that the cleaned basket can be quickly put into the subsequent wafer carrying and transfer process, ensuring the high efficiency and continuity of the semiconductor production process.

[0024] 2. In this utility model, a horizontal adjustment frame and a height adjustment frame are provided on the rear side of the device. The horizontal adjustment frame can drive the flower basket to move smoothly in the horizontal direction, ensuring that each area of ​​the flower basket corresponds to the effective range of the ultrasonic cleaner and the hot air coverage area of ​​the hot air blower. The height adjustment frame can adjust the relative distance between the flower basket and the cleaning and drying components according to the actual height specifications of the flower basket, so that the ultrasonic vibration energy and hot air flow can be accurately applied to the surface and gaps of the flower basket. There is no need to manually adjust the position of the flower basket, avoiding positional deviations that may occur during manual operation, and reducing problems such as incomplete cleaning and uneven drying caused by improper positioning. Attached Figure Description

[0025] Figure 1 This is a perspective view of the integrated semiconductor flower basket rapid cleaning and drying machine proposed in this utility model.

[0026] Figure 2 This is a front view of the semiconductor flower basket rapid cleaning and drying integrated machine proposed in this utility model.

[0027] Figure 3This is a schematic diagram of the cleaning and drying mechanism in the integrated semiconductor flower basket rapid cleaning and drying machine proposed in this utility model.

[0028] Figure 4 This is a right view of the cleaning and drying mechanism in the integrated semiconductor flower basket rapid cleaning and drying machine proposed in this utility model.

[0029] Figure 5 This is a schematic diagram of the automatic picking mechanism in the integrated semiconductor flower basket quick cleaning and drying machine proposed in this utility model.

[0030] Legend:

[0031] 1. Ultrasonic vibrator; 2. Upper hydraulic unit; 3. Cleaning and drying mechanism; 31. Upper cleaning frame; 32. Upper support frame; 33. Top connecting frame; 34. Front connecting column; 35. Dryer; 36. Heating component; 361. Inner heat-conducting plate; 362. Inner heating element; 37. Rotating motor; 38. Control component; 381. Front connecting frame; 382. Front control button; 4. Automatic picking mechanism; 41. Lower connecting piece; 42. Height adjustment rod; 43. Lateral sliding piece; 44. Lower sliding rod; 45. Semiconductor flower basket placement component; 451. Bottom connecting piece; 452. Placement rail; 46. Lateral displacement rod; 47. Right support component; 471. Right support frame; 472. Right fixing block; 5. Lower connecting column; 6. Bottom anti-slip frame; 7. Side connecting column; 8. Semiconductor flower basket placement rack. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] Reference Figure 1 - Figure 4 An embodiment of this utility model is provided: a semiconductor flower basket quick cleaning and drying integrated machine, including an ultrasonic vibrator 1, an upper hydraulic device 2 is provided on the rear side of the ultrasonic vibrator 1, a cleaning and drying mechanism 3 is provided on the top of the ultrasonic vibrator 1, the cleaning and drying mechanism 3 is used for quick cleaning and drying of the semiconductor flower basket, and an automatic picking mechanism 4 is provided at the bottom of the upper hydraulic device 2, the automatic picking mechanism 4 is used for automatic picking of the semiconductor flower basket.

[0034] The cleaning and drying mechanism 3 includes an upper cleaning frame 31, the bottom of which is fixedly connected to the top of the ultrasonic vibrator 1. An upper support frame 32 is fixedly connected to the top of the upper cleaning frame 31. A top connecting frame 33 is fixedly connected to the top of the upper support frame 32. A front connecting column 34 is fixedly connected to the left side of the top connecting frame 33. A dryer 35 is fixedly connected to the outer wall of the front connecting column 34. A heating component 36 is provided on the right side of the dryer 35. A rotating motor 37 is fixedly connected inside the dryer 35.

[0035] Specifically, the cleaning and drying mechanism 3 is the core structure for realizing the rapid cleaning and drying function of the semiconductor flower basket. The upper cleaning frame 31 it includes provides the space required for cleaning the semiconductor flower basket. The vibration generated by the ultrasonic vibrator 1 when it is working can be transmitted to the upper cleaning frame 31 to assist the cleaning medium in the upper cleaning frame 31 to clean the semiconductor flower basket. The ultrasonic vibrator 1 converts electrical energy into high-frequency mechanical vibration and uses the ultrasonic waves to generate an oscillation effect in the medium to achieve its work.

[0036] The upper support frame 32, which is fixedly connected to the top of the upper cleaning frame 31, provides an installation support base for other components of the cleaning and drying mechanism 3, and ensures the positional stability of each component during operation through its own structural strength. The top connecting frame 33, which is fixedly connected to the top of the upper support frame 32, is mainly used to support and fix the front connecting column 34. Through a reasonable structural layout, the front connecting column 34 can be positioned to match the installation position of the dryer 35. At the same time, the connection relationship between the top connecting frame 33 and the upper support frame 32 ensures that the front connecting column 34 and subsequent components will not shift during operation.

[0037] The front connecting column 34, which is fixedly connected to the left side of the top connecting frame 33, provides an installation carrier for the dryer 35 on its outer wall. Through the fixed connection with the dryer 35, the dryer 35 can be stably positioned in the preset position for drying the semiconductor flower basket. The structural design of the front connecting column 34 must meet the load-bearing requirements of the dryer 35 during operation, while avoiding obstruction of the drying function of the dryer 35. A heating component 36 is provided on the right side of the dryer 35. The heat generated by the heating component 36 during operation can be transferred to the interior of the dryer 35 to provide the heat source required for drying, ensuring that the dryer 35 can output an airflow with a certain temperature to quickly remove moisture from the surface of the cleaned semiconductor flower basket. The positional relationship between the heating component 36 and the dryer 35 must ensure the efficiency of heat transfer and avoid excessive heat loss that would affect the drying effect.

[0038] A rotary motor 37 is fixedly connected inside the dryer 35. When the rotary motor 37 is working, it can drive the fan blades and other components inside the dryer 35 to rotate, so that the dryer 35 can generate airflow for drying. The fixed connection between the rotary motor 37 and the dryer 35 must ensure the stability of the motor when it is working, and at the same time ensure that the power of the motor can be effectively transmitted to the relevant components to achieve continuous airflow output. A control component 38 is set on the front side of the upper support frame 32. The control component 38 can establish a signal connection with other components in the cleaning and drying mechanism 3. By receiving the working status signals of each component, it can adjust the working parameters of the dryer 35, heating component 36, rotary motor 37 and other components to ensure that each component works together in accordance with the preset cleaning and drying process. The positional relationship between the control component 38 and the upper support frame 32 must be convenient for the operator to operate, and at the same time avoid the influence of water vapor during the cleaning process.

[0039] Reference Figure 1 - Figure 5 The automatic picking mechanism 4 includes a lower connector 41. The top of the lower connector 41 is fixedly connected to the bottom of the upper hydraulic unit 2. A height adjustment rod 42 is fixedly connected to the bottom of the lower connector 41. A horizontal sliding member 43 is slidably connected to the outer wall of the height adjustment rod 42. A lower sliding rod 44 is slidably connected to the left side of the horizontal sliding member 43. A semiconductor flower basket placement component 45 is provided at the bottom of the lower sliding rod 44. A horizontal displacement rod 46 is slidably connected to the right side of the horizontal sliding member 43. A right support component 47 is provided on the right side of the horizontal displacement rod 46.

[0040] Specifically, the automatic picking mechanism 4 is the core structure for realizing the automated picking function of semiconductor flower baskets. Its lower connecting part 41 is a key carrier for connecting the upper hydraulic unit 2 and other components of the automatic picking mechanism 4. The power generated by the upper hydraulic unit 2 during operation can be transmitted to the subsequent components through the lower connecting part 41, providing a power basis for the action of the automatic picking mechanism 4. At the same time, the lower connecting part 41, through its fixed connection with the upper hydraulic unit 2, ensures that the relative position of the automatic picking mechanism 4 and the upper hydraulic unit 2 is stable during operation.

[0041] The height adjustment rod 42, which is fixedly connected to the bottom of the lower connector 41, is mainly used to adjust the position of the automatic picking mechanism 4 in the height direction to adapt to the picking needs of semiconductor flower baskets at different heights. After receiving the power transmitted from the lower connector 41, the height adjustment rod 42 can drive the components connected to its outer wall to move up and down, ensuring that the automatic picking mechanism 4 can reach the preset picking height. The horizontal sliding member 43, which is slidably connected to the outer wall of the height adjustment rod 42, can slide up and down along the outer wall of the height adjustment rod 42. At the same time, the horizontal sliding member 43 itself has the ability to move laterally, which can drive the components connected to it to move in the horizontal direction. Through the sliding cooperation between the horizontal sliding member 43 and the height adjustment rod 42, the automatic picking mechanism 4 achieves linkage adjustment in the height and horizontal directions, providing position adjustment guarantee for accurate picking of semiconductor flower baskets.

[0042] The lower sliding rod 44, which is slidably connected to the left side of the horizontal sliding member 43, can slide along the left side of the horizontal sliding member 43, further refining the horizontal position adjustment range of the automatic picking mechanism 4. The sliding action of the lower sliding rod 44 can be coordinated with the movement of the horizontal sliding member 43, so that the component connected to its bottom can be more accurately aligned with the semiconductor flower basket, ensuring the accuracy of the picking action. The semiconductor flower basket placement component 45 set at the bottom of the lower sliding rod 44 is the component that directly contacts the semiconductor flower basket and realizes the picking. After the semiconductor flower basket placement component 45 reaches the position of the semiconductor flower basket through the position adjustment of the lower sliding rod 44, it can firmly clamp or support the semiconductor flower basket to complete the picking operation. The structural design of the semiconductor flower basket placement component 45 must be adapted to the shape of the semiconductor flower basket to ensure that the semiconductor flower basket will not fall off or be damaged during the picking process.

[0043] The lateral displacement rod 46, which is slidably connected to the right side of the lateral sliding member 43, can slide along the right side of the lateral sliding member 43. It works in conjunction with the lower sliding rod 44 on the left side to expand the adjustment range of the automatic picking mechanism 4 in the horizontal direction. The sliding action of the lateral displacement rod 46 can be adjusted individually or in conjunction with the position requirements of the semiconductor basket to ensure that the automatic picking mechanism 4 can cover a wider picking area. The right support component 47 set on the right side of the lateral displacement rod 46 is mainly used to provide support and stability for the lateral displacement rod 46, preventing the lateral displacement rod 46 from tilting or shaking due to uneven force during sliding. The right support component 47, in conjunction with the lateral displacement rod 46, ensures the positional stability of the lateral displacement rod 46 during operation, thereby ensuring the smoothness of the overall operation of the automatic picking mechanism 4.

[0044] Reference Figure 1 - Figure 2The heating assembly 36 includes an inner heat-conducting plate 361, the left side of which is fixedly connected to the right side of the dryer 35. Multiple inner heating elements 362 are fixedly connected to the inner wall of the inner heat-conducting plate 361. The control assembly 38 includes a front connecting frame 381, the bottom of which is fixedly connected to the front side of the upper support frame 32. Multiple front control buttons 382 are fixedly connected to the front side of the front connecting frame 381. The semiconductor flower basket placement assembly 45 includes a bottom connector 451, the top of which is fixedly connected to the bottom of the lower sliding rod 44. Two placement rails 452 are fixedly connected to the front side of the connector 451. The right support assembly 47 includes a right support frame 471. The left side of the right support frame 471 is fixedly connected to the right side of the transverse displacement rod 46. A right fixing block 472 is fixedly connected to the right side of the right support frame 471. Multiple lower connecting columns 5 are provided at the bottom of the ultrasonic vibrator 1. A bottom anti-slip frame 6 is fixedly connected to the bottom of each of the multiple lower connecting columns 5. Multiple side connecting columns 7 are provided on the right side of the ultrasonic vibrator 1. A semiconductor flower basket placement rack 8 is fixedly connected to the bottom of each of the multiple side connecting columns 7.

[0045] Specifically, the heating component 36, as the core structure providing the heat source for the dryer 35, includes an inner heat-conducting plate 361 that efficiently transfers heat to the interior of the dryer 35. The connection between the inner heat-conducting plate 361 and the dryer 35 ensures that heat can be stably delivered to the dryer 35, meeting the dryer 35's heat source requirements. Multiple inner heating elements 362, fixedly connected to the inner wall of the inner heat-conducting plate 361, generate heat during operation. The generated heat is directly transferred to the inner heat-conducting plate 361, and the heat source is continuously supplied to the dryer 35 through the conduction effect of the inner heat-conducting plate 361. The arrangement of multiple inner heating elements 362 ensures the stability of heat output and avoids the failure of a single heating element causing the heating component 36 to malfunction, thereby ensuring that the drying function of the dryer 35 is not affected.

[0046] The control component 38 serves as a structure for regulating the working status of various components of the cleaning and drying mechanism 3. Its front connecting frame 381 provides mounting support for the front control buttons 382. The fixed connection between the front connecting frame 381 and the upper support frame 32 ensures that the control component 38 is stably positioned for easy operation by the operator, while also preventing the front control buttons 382 from shifting during operation. Multiple front control buttons 382, ​​fixedly connected to the front of the front connecting frame 381, can receive operator commands, convert them into control signals, and transmit them to the relevant components of the cleaning and drying mechanism 3. This allows for the adjustment of the working status of components such as the dryer 35, heating component 36, and rotating motor 37. Each front control button 382 corresponds to a different control function, ensuring that the working parameters of each component can be adjusted independently or collaboratively, guaranteeing the orderly progress of the cleaning and drying process.

[0047] The semiconductor flower basket placement assembly 45, as the structure that directly supports the semiconductor flower basket, includes a bottom connector 451 that serves as the carrier connecting the lower sliding rod 44 and the placement rail 452. The fixed connection between the bottom connector 451 and the lower sliding rod 44 allows the placement rail 452 to adjust its position as the lower sliding rod 44 moves, ensuring that the placement rail 452 can accurately reach the retrieval or placement position of the semiconductor flower basket. The two placement rails 452 fixedly connected to the front of the bottom connector 451 can support and limit the semiconductor flower basket, preventing it from tilting or falling off during movement. The spacing between the two placement rails 452 is adapted to the size of the semiconductor flower basket, ensuring that the semiconductor flower basket can be stably placed on the placement rails 452 to complete the retrieval or storage operation.

[0048] The right support assembly 47 serves as a structure to ensure the stable operation of the lateral displacement rod 46. Its right support frame 471 supports the lateral displacement rod 46. The fixed connection between the right support frame 471 and the lateral displacement rod 46 limits the swaying of the lateral displacement rod 46, ensuring its stability during sliding. The right fixing block 472, fixedly connected to the right side of the right support frame 471, enhances the stability of the right support frame 471, preventing it from shifting due to force. The right fixing block 472, through its connection with the right support frame 471, provides additional fixed support, thereby ensuring the working stability of the lateral displacement rod 46 and ensuring the smooth operation of the entire automatic picking mechanism 4.

[0049] Multiple lower connecting columns 5 are provided at the bottom of the ultrasonic vibrator 1 to support the ultrasonic vibrator 1 at a preset height, preventing the ultrasonic vibrator 1 from directly contacting the ground and reducing the impact of the ground environment on the operation of the ultrasonic vibrator 1. The multiple lower connecting columns 5 are evenly distributed at the bottom of the ultrasonic vibrator 1 to ensure that the ultrasonic vibrator 1 is subjected to balanced force and to prevent the ultrasonic vibrator 1 from tilting during operation due to unstable support. The bottom anti-slip brackets 6 are fixedly connected to the bottom of the multiple lower connecting columns 5, which can increase the friction between the lower connecting columns 5 and the ground and prevent the lower connecting columns 5 from sliding during the operation of the ultrasonic vibrator 1. The bottom anti-slip brackets 6, through their connection with the lower connecting columns 5, provide a stable support base for the ultrasonic vibrator 1, ensuring that the ultrasonic vibrator 1 can stably generate vibration to assist in the cleaning operation.

[0050] Working principle: The lower connecting part 41 of the automatic picking mechanism 4 receives power from the upper hydraulic unit 2, which drives the height adjustment rod 42 to adjust the height. The horizontal sliding part 43 slides along the height adjustment rod 42, and works with the lower sliding rod 44 and the horizontal displacement rod 46 to adjust the horizontal position, so that the semiconductor flower basket placement component 45 accurately picks up the semiconductor flower basket and sends it to the cleaning and drying mechanism 3. The ultrasonic vibrator 1 drives the upper cleaning frame 31 to vibrate to achieve cleaning. The heating component 36 provides power, the rotating motor 37 drives the dryer 35 to air dry, and the control component 38 regulates the coordinated operation of each component, realizing automated operation without manual intervention, greatly reducing manpower input, and integrating the cleaning and drying processes, shortening the semiconductor flower basket processing cycle and improving the overall processing efficiency.

[0051] In the automatic picking mechanism 4, the right support frame 471 of the right support component 47 supports the lateral displacement rod 46, and the right fixing block 472 enhances the stability of the right support frame 471 and prevents the lateral displacement rod 46 from shaking when sliding. The two placement rails 452 of the semiconductor flower basket placement component 45 limit the semiconductor flower basket and prevent it from falling off during movement. In the cleaning and drying mechanism 3, the upper support frame 32, the top connecting frame 33, and the front connecting column 34 cooperate with each other to firmly support the dryer 35 and other components, and prevent the components from shifting during operation. This ensures that the semiconductor flower basket can be stably placed and processed in all stages of picking, cleaning, and drying, reducing the risk of damage caused by component shaking or flower basket falling off, and ensuring the processing quality of the semiconductor flower basket.

[0052] When the ultrasonic vibrator 1 is working, the vibration generated is transmitted to the internal cleaning medium through the upper cleaning frame 31, causing the cleaning medium to vibrate at high frequency. The vibration energy acts on the stains on the surface and crevices of the semiconductor basket, peeling off the stains. The upper cleaning frame 31 provides a closed and suitable cleaning space for the semiconductor basket, avoiding energy loss due to splashing of the cleaning medium. At the same time, the control component 38 can adjust the vibration parameters of the ultrasonic vibrator 1 through the front control button 382 to adapt to the cleaning needs of semiconductor baskets with different levels of stains. This achieves efficient removal of stains on the surface and crevices of the semiconductor basket, avoids cleaning dead corners that exist in manual cleaning, improves cleaning uniformity and thoroughness, and meets the strict requirements of the semiconductor industry for basket cleanliness.

[0053] After cleaning, the control component 38 sends a signal to the heating component 36 and the rotating motor 37. The heating element 362 inside the heating component 36 generates heat, which is transferred to the dryer 35 through the inner heat conduction plate 361. The rotating motor 37 drives the internal components of the dryer 35 to rotate and generate airflow. The airflow carries heat to form hot air that acts on the surface of the semiconductor flower basket. The dryer 35 is fixed in the appropriate position by the front connecting column 34, the top connecting frame 33, and the upper support frame 32 to ensure that the hot air can fully cover the semiconductor flower basket. At the same time, the control component 38 can adjust the heat generation of the heating component 36 and the speed of the rotating motor 37 to control the hot air temperature and wind speed, thereby achieving rapid evaporation of moisture on the surface of the semiconductor flower basket, shortening the drying time, avoiding rust or contamination of the flower basket due to moisture residue, and ensuring the subsequent performance of the semiconductor flower basket.

[0054] Multiple lower connecting columns 5 at the bottom of the ultrasonic vibrator 1 evenly support the main body of the equipment, preventing the equipment from directly contacting the ground and being affected by the environment. The bottom anti-slip frame 6 increases the friction between the lower connecting columns 5 and the ground, preventing the equipment from sliding during operation. The side connecting column 7 on the right side of the ultrasonic vibrator 1 supports the semiconductor flower basket placement rack 8, ensuring that the flower baskets to be cleaned or already cleaned are stored stably. All components form a stable whole through reasonable connection methods, avoiding the impact of a single component failure on the overall operation. This ensures that the equipment maintains structural stability during long-term use, reduces the number of downtimes caused by structural loosening, lowers maintenance costs, and extends the service life of the equipment.

[0055] The control component 38 is fixed to the front side of the upper support frame 32 via the front connecting frame 381, making it convenient for the operator to operate the front control button 382. The front control button 382 can send control signals to the automatic picking mechanism 4, the ultrasonic vibrator 1, the dryer 35, the heating component 36, and the rotating motor 37 respectively, coordinating the picking and conveying rhythm of the automatic picking mechanism 4, the cleaning time and intensity of the ultrasonic vibrator 1, and the drying parameters of the dryer 35 and the heating component 36. This ensures that the picking, cleaning, and drying processes are connected in an orderly manner, avoiding the efficiency reduction caused by waiting between processes, and realizing the continuous and controllable operation process. The operator can adjust the parameters of each process through the control component 38 according to actual needs, improving the applicability and flexibility of the equipment.

[0056] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A semiconductor flower basket rapid cleaning and drying integrated machine, including an ultrasonic vibrator (1), characterized in that: An upper hydraulic device (2) is provided on the rear side of the ultrasonic vibrator (1), and a cleaning and drying mechanism (3) is provided on the top of the ultrasonic vibrator (1). The cleaning and drying mechanism (3) is used for the rapid cleaning and drying of the semiconductor flower basket. An automatic picking mechanism (4) is provided at the bottom of the upper hydraulic device (2). The automatic picking mechanism (4) is used for the automatic picking of the semiconductor flower basket. The cleaning and drying mechanism (3) includes an upper cleaning frame (31), the bottom of which is fixedly connected to the top of the ultrasonic vibrator (1), an upper support frame (32) is fixedly connected to the top of the upper cleaning frame (31), a top connecting frame (33) is fixedly connected to the top of the upper support frame (32), a front connecting column (34) is fixedly connected to the left side of the top connecting frame (33), a dryer (35) is fixedly connected to the outer wall of the front connecting column (34), a heating component (36) is provided on the right side of the dryer (35), a rotating motor (37) is fixedly connected inside the dryer (35), and a control component (38) is provided on the front side of the upper support frame (32).

2. The semiconductor flower basket rapid cleaning and drying integrated machine according to claim 1, characterized in that: The automatic picking mechanism (4) includes a lower connector (41), the top of which is fixedly connected to the bottom of the upper hydraulic unit (2), and a height adjustment rod (42) is fixedly connected to the bottom of the lower connector (41). A horizontal sliding member (43) is slidably connected to the outer wall of the height adjustment rod (42). A lower sliding rod (44) is slidably connected to the left side of the horizontal sliding member (43). A semiconductor flower basket placement assembly (45) is provided at the bottom of the lower sliding rod (44). A horizontal displacement rod (46) is slidably connected to the right side of the horizontal sliding member (43). A right support assembly (47) is provided on the right side of the horizontal displacement rod (46).

3. The semiconductor flower basket rapid cleaning and drying integrated machine according to claim 1, characterized in that: The heating component (36) includes an inner heat-conducting plate (361), the left side of which is fixedly connected to the right side of the dryer (35), and a plurality of inner heating elements (362) are fixedly connected to the inner wall of the inner heat-conducting plate (361).

4. The integrated machine for rapid cleaning and drying of semiconductor flower baskets according to claim 1, characterized in that: The control component (38) includes a front connecting frame (381), the bottom of which is fixedly connected to the front side of the upper support frame (32), and a plurality of front control buttons (382) are fixedly connected to the front side of the front connecting frame (381).

5. The semiconductor flower basket rapid cleaning and drying integrated machine according to claim 2, characterized in that: The semiconductor flower basket placement assembly (45) includes a bottom connector (451), the top of which is fixedly connected to the bottom of the lower sliding rod (44), and two placement rails (452) are fixedly connected to the front side of the bottom connector (451).

6. The semiconductor flower basket rapid cleaning and drying integrated machine according to claim 2, characterized in that: The right support assembly (47) includes a right support frame (471), the left side of which is fixedly connected to the right side of the transverse displacement rod (46), and the right side of which is fixedly connected to a right fixing block (472).

7. The integrated machine for rapid cleaning and drying of semiconductor flower baskets according to claim 1, characterized in that: The bottom of the ultrasonic vibrator (1) is provided with multiple lower connecting columns (5), and the bottom of each of the multiple lower connecting columns (5) is fixedly connected with a bottom anti-slip frame (6).

8. The integrated machine for rapid cleaning and drying of semiconductor flower baskets according to claim 1, characterized in that: Multiple side connecting columns (7) are provided on the right side of the ultrasonic vibrator (1), and semiconductor flower basket placement racks (8) are fixedly connected to the bottom of each of the multiple side connecting columns (7).

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