Device for repairing a base platform

Abstract

The application relates to a device for repairing a base platform. The device for repairing the base platform comprises a support structure, a positioning pin, a screw rod elevator, a drill bit clamp and a power transmission mechanism. The support structure comprises a base and a support frame fixed to the base, and the base is used for being mounted on the base platform. The positioning pin is fixed to the base, and the position of the positioning pin along the base corresponds to a positioning hole for being penetrated in the positioning hole. The screw rod elevator is arranged on the support frame, and the screw rod elevator comprises a power receiving end and a screw rod. The position of the screw rod relative to the positioning pin is the same as the position of the corresponding positioning hole relative to a support hole. The screw rod can be controlled to rotate and lift by the power receiving end. The drill bit clamp is fixed to the screw rod. The power transmission mechanism comprises a power input end and a power output end. The power output end is in transmission connection with the power receiving end. The device for repairing the base platform can better repair the support hole of the base platform.

Description

Technical Field

[0001] This application relates to the field of semiconductor process equipment repair technology, and in particular to an apparatus for repairing a substrate platform. Background Technology

[0002] Chemical vapor deposition (CVD) equipment is a commonly used semiconductor process equipment, and the substrate platform is an important component of the CVD equipment. The substrate platform has multiple holes, within which a support mechanism consisting of support balls and ejector pins is installed. The top surface of the ejector pins is slightly higher than the top surface of the substrate platform. Multiple ejector pins support the wafer on the substrate platform, maintaining a micro-contact between the back side of the wafer and the top surface of the substrate platform, rather than a completely tight fit. This helps prevent deformation or breakage of the wafer due to excessive stress during movement on the substrate platform.

[0003] The equipment requires regular maintenance. During maintenance, the height of the support mechanism needs to be calibrated, and the support mechanism should be maintained or replaced when necessary to maintain a consistent height, thereby ensuring the uniformity of the film thickness generated by CVD. If the height deviation of the support mechanism is too large, the quality of the film will be severely affected.

[0004] During CVD processing, a gap inevitably exists between the wafer and the substrate platform, causing material to deposit in the voids. Over time, the void openings shrink, potentially obscuring the support structure. This makes removal difficult, and forcibly removing it may damage the ejector pins and support balls.

[0005] To avoid problems caused by hole shrinkage, regular maintenance requires hole enlargement. This ensures the hole size is adequate for the support mechanism while preventing it from becoming too small. Currently, maintenance workers manually enlarge the holes using files and other tools, which is time-consuming, labor-intensive, and prone to damaging the base platform. Furthermore, the base platform is made of expensive ceramic, and any damage necessitates replacement, resulting in significant financial losses. Utility Model Content

[0006] Therefore, it is necessary to provide an apparatus for repairing the base platform to address at least one of the above-mentioned problems.

[0007] This application provides an apparatus for repairing a base platform. The working surface of the base platform has multiple support holes, and the outer periphery of the base platform has positioning holes. The apparatus for repairing the base platform includes: a support structure, including a base and a support frame fixed to the base, the base being used to mount on the base platform; a positioning pin, fixed to the base, with the positioning pin positioned along the base corresponding to a positioning hole to pass through the positioning hole; a screw jack, disposed on the support frame, the screw jack including a power receiving end and a screw, the position of the screw relative to the positioning pin being the same as the position of the corresponding positioning hole relative to the support hole, the screw being able to rotate and rise under the control of the power receiving end; a drill bit chuck, fixed to the screw; and a power transmission mechanism, the power transmission mechanism including a power input end and a power output end, the power output end being drively connected to the power receiving end.

[0008] By using a base and positioning pins, the entire device can be stably and accurately placed on the base platform, thereby ensuring the lead screw is precisely aligned with the support hole. During use, the power transmission mechanism transmits power to the lead screw lifting mechanism, driving the lead screw and drill bit chuck to rotate relative to the support hole. The drill bit chuck holds the drill bit, allowing for precise and stable enlarging of the support hole using a suitable drill bit. The device for repairing a base platform provided in this application can effectively repair the support hole of the base platform.

[0009] In some embodiments, the screw jack includes a double-tooth screw jack, which includes a power receiving end, a screw, a housing, and a rotating sleeve. The screw is threadedly connected to the housing, and the rotating sleeve is sleeved on the screw. The rotating sleeve is rotatably connected to the housing and is limited along the lifting direction of the screw. The rotating sleeve cooperates with the screw, and the rotating sleeve and the power receiving end form a worm gear mechanism.

[0010] With this configuration, the screw jack can achieve precision transmission, which is beneficial for the drill bit to accurately enlarge the hole and ensure the quality of the enlargement.

[0011] In some embodiments, there are multiple screw jacks, each corresponding to a support hole; and at least one power transmission mechanism is provided, which is connected to at least two screw jacks.

[0012] This setup allows for simultaneous control of different screw jacks, reducing maintenance time.

[0013] In some embodiments, a transition screw jack is included among the plurality of screw jacks, the transition screw jack including a transition end, and another screw jack is driven to the power transmission mechanism via the transition screw jack.

[0014] This configuration is advantageous for the transmission layout, allowing even screw jacks located far from the power transmission mechanism to be synchronously controlled.

[0015] In some embodiments, the six support holes of the base platform are arranged in an equilateral triangle, with three support holes located at the vertices of the equilateral triangle and the other three support holes located on the sides of the equilateral triangle. The device includes a screw jack at at least one corresponding vertex and at least one corresponding side of the equilateral triangle; a power transmission mechanism is driven to the screw jack at the corresponding vertex and the screw jack at the corresponding side.

[0016] With this setup, the power transmission mechanism can control both the screw jack at the corresponding vertex and the screw jack at the corresponding edge.

[0017] In some embodiments, the power transmission mechanism includes a cross bevel gear steering box, which includes a power input end and four power output ends; the four power output ends are respectively connected to a screw jack at a corresponding vertex and three screw jacks at corresponding sides; the screw jacks at the corresponding sides include a transition screw jack, which is connected to two other screw jacks located at corresponding vertices.

[0018] This configuration results in a compact and flat overall layout, with a relatively balanced force transmission method; it allows one power transmission mechanism to simultaneously drive six screw jacks.

[0019] In some embodiments, the transition screw jack is a T-type transition screw jack. The power receiving end of the T-type transition screw jack is driven and connected to the cross bevel gear steering box. The T-type transition screw jack includes two transition ends, which are respectively driven and connected to two screw jacks on both sides.

[0020] With this configuration, the screw jack can move synchronously, achieving synchronous hole enlargement for specially distributed support holes with a relatively simple structure.

[0021] In some embodiments, the support frame includes a triangular support plate for mounting the screw jacks; the cross bevel gear steering box is located at the intersection of the lines connecting the corresponding four screw jacks.

[0022] With this setup, the support frame can support each screw jack; and the power transmission mechanism can directly drive a large number of screw jacks.

[0023] In some embodiments, the apparatus for repairing the base platform also includes multiple drive rods, with the screw jack connected via the drive rods, and the multiple drive rods arranged coplanarly.

[0024] This design makes the device relatively flat and easy to operate.

[0025] In some embodiments, the apparatus for repairing the base platform also includes a hand-cranked turntable and a reducer, the hand-cranked turntable being connected to the power input end via the reducer.

[0026] This setup allows for flexible manual control and makes rotation easier. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of a device for repairing a base platform according to one or more embodiments;

[0028] Figure 2 A schematic bottom view of an apparatus for repairing a base platform according to one or more embodiments;

[0029] Figure 3 A schematic top view of the base platform;

[0030] Figure 4 A schematic cross-sectional view of the base platform;

[0031] Figure 5 This is a schematic diagram of the screw jack in an apparatus for repairing a base platform according to one or more embodiments;

[0032] Figure 6 This is a schematic structural diagram of a drill bit clamp in an apparatus for repairing a base platform according to one or more embodiments;

[0033] Figure 7 This is a schematic diagram of the power transmission mechanism in an apparatus for repairing a base platform according to one or more embodiments.

[0034] Explanation of reference numerals in the attached drawings: 1000, Device for repairing the base platform; 1, Support structure; 101, Base; 102, Support frame; 110, Positioning pin; 2, Screw jack; 201, Power receiving end; 202, Screw; 203, Housing; 204, Sliding sleeve; 205, Adapter end; 210, First jack; 220, Second jack; 230, Third jack; 240, Fourth jack; 250, Fifth jack; 260, Sixth jack; 3, Drill bit chuck; 4, Power transmission mechanism; 401, Power input end; 402, Power output end; 5, Hand-cranked turntable; 6, Reducer; 7, Transmission rod; 8, Coupling;

[0035] 2000, base platform; 2001, working surface; 2002, support hole; 2003, positioning hole; 2100, support ball; 2200, ejector pin. Detailed Implementation

[0036] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0037] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0038] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0039] Furthermore, the terms "first," "second," and "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. For example, a first elevator may also be referred to as a second elevator, and a second elevator may also be referred to as a first elevator. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0040] In this application, unless otherwise expressly specified and limited, the terms "connected," "linked," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; a flexible connection or a rigid connection along at least one direction; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium, or a direct connection with an intermediate medium present; and they can also refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. The terms "installed," "set," "fixed," etc., can be broadly understood as connection. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0041] refer to Figure 1 , Figure 1 An apparatus for repairing a base platform according to an embodiment of this application is shown. In an exemplary embodiment, the apparatus 1000 for repairing a base platform includes a support structure 1, a screw jack 2, a drill bit chuck 3, and a power transmission mechanism 4.

[0042] Combination Figure 2 As shown, the support structure 1 may include a body and a positioning pin 110 integrally formed with the body. In some other embodiments, the device 1000 for repairing the base platform may include the positioning pin 110, which may be detachably connected to the support structure 1.

[0043] For ease of description, a spatial rectangular coordinate system XYZ is established, where the Z-axis can be vertical and the XY plane can be horizontal.

[0044] refer to Figure 3 and Figure 4 The device 1000 for repairing the base platform can be used to repair the base platform 2000. The working surface 2001 of the base platform 2000 has multiple support holes 2002. For example, six support holes 2002 of the base platform 2000 are arranged in an equilateral triangle, with three support holes 2002 located at the vertices of the equilateral triangle and the other three support holes 2002 located at the midpoints of the sides of the equilateral triangle. Positioning holes 2003 are provided on the outer periphery of the working surface 2001 of the base platform 2000. The positioning holes 2003 extend along the Z-axis and can open from the side.

[0045] The support hole 2002 contains a support ball 2100 and an ejector pin 2200. When the material deposited in the support hole 2002 is not too much, both the ejector pin 2200 and the support ball 2100 can be removed. At this time, the support hole 2002 needs to be enlarged for repair.

[0046] refer to Figure 1The support structure 1 includes a base 101 and a support frame 102 fixed to the base 101. The base 101 is used for mounting on the base platform 2000. The base 101 may include a double-layered annular structure, with several columns supporting the two annular layers. The base 101 is lightweight and has sufficient structural strength. The support frame 102 may be an integral part of the base 101 or fixed to the upper annular structure to maintain a certain distance from the working surface 2001.

[0047] The positioning pin 110 is fixed to the base 101, and the position of the positioning pin 110 along the base 101 corresponds to the positioning hole 2003 so as to pass through the positioning hole 2003. Through the positioning pin 110, the device 1000 for repairing the base platform basically ensures the designed position and can be stably and accurately placed on the base platform 2000.

[0048] The screw jack 2 is mounted on the support frame 102. (Combined) Figure 5 As shown, the screw jack 2 includes a power receiving end 201 and a screw 202. The screw 202 can rotate and rise under the control of the power receiving end 201. Since the position of the screw 202 relative to the positioning pin 110 is the same as the position of the corresponding positioning hole 2003 relative to the support hole 2002, the screw 202 can be positioned at a predetermined position on the support hole 2002, for example, to achieve coaxial rotation and rising.

[0049] refer to Figure 6 The drill bit chuck 3 is fixed to the lead screw 202, specifically, it can be fixed to the bottom end of the lead screw 202. The drill bit chuck 3 is used to detachably hold and fix the drill bit. The fixed drill bit can be coaxial with the lead screw 202, and thus can rotate and rise as the lead screw 202 rotates and rises. For example, the drill bit chuck 3 can hold and fix a rotary file, which can also be regarded as a drill bit.

[0050] The power transmission mechanism 4 includes a power input end 401 and a power output end 402, with the power output end 402 directly or indirectly connected to the power receiving end 201. In use, the power transmitted by the power transmission mechanism 4 to the lead screw lifting mechanism 2 drives the lead screw 202 and the drill bit chuck 3 to rotate relative to the support hole 2002. The drill bit held by the drill bit chuck 3 precisely and stably enlarges the support hole 2002, reducing damage caused by manual hole repair. The device 1000 for repairing a base platform provided in this application can effectively repair the support hole 2002 of the base platform 2000.

[0051] The screw jack 2 may include a double-tooth screw jack. Specifically, it may be a double-tooth screw jack. Screw jacks are typically used for lifting and supporting desktops, etc. In this application, by fixing a drill bit clamp 3, it is cleverly used for enlarging holes on the base platform 2000.

[0052] refer to Figure 5 For example, the screw jack 2 includes a power receiving end 201, a lead screw 202, a housing 203, and a rotating sleeve 204. The lead screw 202 is threadedly connected to the housing 203, and the rotating sleeve 204 is sleeved on the lead screw 202. The rotating sleeve 204 is rotatably connected to the housing 203 and is limited along the lifting direction of the lead screw 202. The rotating sleeve 204 cooperates with the lead screw 202, for example, forming a ball bearing sleeve. The rotating sleeve 204 and the power receiving end 201 form a worm gear mechanism. The power receiving end 201 may include a worm, and its shaft may be parallel to the XY plane. The rotating sleeve 204 may include a worm wheel, and its shaft may be parallel to the Z-axis direction. The screw jack 2 can achieve precision transmission, which is beneficial for the drill bit to accurately enlarge the hole and ensure the quality of the enlargement.

[0053] refer to Figure 1 There are multiple screw jacks 2, and each screw jack 2 can correspond one-to-one with a support hole 2002. The entire hole-reaming task can be completed in one installation. In some embodiments, for example, if there are two screw jacks 2, they can be installed by rotating three times, and the hole reaming can be performed in three separate operations. This method of power transmission mechanism 4 is relatively simple, or suitable for situations such as insufficient spare drill bits, and can flexibly meet the hole-reaming requirements.

[0054] The number of power transmission mechanisms 4 is at least one, and the power transmission mechanism 4 is drivenly connected to at least two screw jacks 2. It can synchronously control different screw jacks 2, reducing maintenance time.

[0055] A specific device 1000 for repairing the substrate platform can be designed for a specific substrate platform 2000. For example... Figure 1 As shown, a screw jack 2 with at least one corresponding vertex and at least one corresponding side is designed along an equilateral triangle layout. A power transmission mechanism 4 is connected to both the screw jack 2 at the corresponding vertex and the screw jack 2 at the corresponding side. Using the power transmission mechanism 4, both the screw jack 2 at the corresponding vertex and the screw jack 2 at the corresponding side can be controlled, enabling the aforementioned indexing operation.

[0056] Specifically, the multiple screw jacks 2 are designated as a first screw jack 210, a second screw jack 220, a third screw jack 230, a fourth screw jack 240, a fifth screw jack 250, and a sixth screw jack 260. Among the multiple screw jacks 2 is a transition screw jack; for example, the fourth screw jack 240 is a transition screw jack. The transition screw jack includes a transition end 205, which can transmit power from the power receiving end 201. The two are connected by a transmission mechanism, for example, a bevel gear set. Another screw jack 2, such as the fifth screw jack 250 and / or the sixth screw jack 260, is connected to the power transmission mechanism 4 via the transition screw jack. The inclusion of the transition screw jack facilitates the transmission layout, allowing screw jacks 2 located far from the power transmission mechanism 4 to be synchronously controlled.

[0057] The transition screw jack is a T-type transition screw jack. The power receiving end 201 of the T-type transition screw jack is connected to the power transmission mechanism 4. The T-type transition screw jack includes two transition ends 205. The two transition ends 205 and the power receiving end 201 can form a T-shaped structure. The transition can be achieved by a bevel gear set, which then drives the two screw jacks 2 on both sides respectively. The screw jacks 2 can move synchronously.

[0058] Combination Figure 7 As shown, the power transmission mechanism 4 includes a cross bevel gear steering box, which includes a power input end 401 and four power output ends 402. The power input end 401 can be connected to a horizontal bevel gear, and each power output end 402 can be connected to a vertical bevel gear and mesh with the horizontal bevel gear. The four power output ends 402 can be vertically arranged along the X-axis and Y-axis directions, respectively driving and connecting to a corresponding apex screw jack 2 (i.e., the first jack 210) and three corresponding sides screw jacks 2 (i.e., the second jack 220, the third jack 230, and the fourth jack 240). Simultaneously, the fourth jack 240 is also connected to two other screw jacks 2 located at corresponding apexes (i.e., the fifth jack 250 and the sixth jack 260). All six screw jacks 2 are driven and connected to the power transmission mechanism 4. The device 1000 for repairing the base platform has a compact and flat overall layout, and the force transmission method is relatively balanced; it can synchronously drive six screw jacks with one power transmission mechanism 4.

[0059] The device 1000 for repairing the base platform also includes multiple transmission rods 7, through which the screw jack 2 is connected, and the screw jack 2 and the power transmission mechanism 4 are also connected through the transmission rods 7.

[0060] The device 1000 for repairing the base platform also includes a coupling 8, through which the power output end 402, the power receiving end 201, and the adapter end 205 can all be connected to the transmission rod 7.

[0061] refer to Figure 1 The screw jack 2, power transmission mechanism 4, and transmission rod 7 can form a soil-type layout. Multiple transmission rods 7 can be arranged coplanarly. The device 1000 used to repair the base platform is relatively flat, not too high, and easy to operate. It achieves synchronous hole enlargement of specially distributed support holes 2002 with a relatively simple structure.

[0062] Corresponding to this layout, the support frame 102 includes a triangular support plate for mounting the screw jacks 2, and may also include a crossbeam plate arranged along the X-axis direction corresponding to the second screw jack 220, the third screw jack 230, and the power transmission mechanism 4. The cross bevel gear steering box, i.e., the power transmission mechanism 4, is located at the intersection of the lines connecting the four corresponding screw jacks 2. The support frame 102 can support each screw jack 2 and directly drive the four screw jacks 2 using the power transmission mechanism 4.

[0063] The power input terminal 401 can be driven, for example, by an electric motor.

[0064] For example, the device 1000 for repairing the base platform also includes a hand crank turntable 5 and a reducer 6. The hand crank turntable 5 is connected to the power input end 401 via the reducer 6, which allows for flexible manual control. The operator can easily rotate the hand crank turntable 5 to achieve synchronous movement of the six screw jacks 2.

[0065] The technical features of the above-disclosed embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0066] The embodiments disclosed above merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of patent protection of this application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of patent protection claimed by this application. Therefore, the scope of patent protection of this application should be determined by the appended claims.

Claims

1. An apparatus for repairing a base platform, a working surface of the base platform being provided with a plurality of support holes, and an outer periphery of the base platform being provided with a positioning hole, characterized in that, The apparatus for repairing the base platform includes: A support structure includes a base and a support frame fixed to the base, the base being used for mounting on the base platform; A positioning pin is fixed to the base, and the position of the positioning pin along the base corresponds to the positioning hole so as to pass through the positioning hole; A screw jack is installed on the support frame. The screw jack includes a power receiving end and a screw. The position of the screw relative to the positioning pin is the same as the position of the corresponding positioning hole relative to the support hole. The screw can be rotated and raised under the control of the power receiving end. Drill bit clamp, fixed to the lead screw; and A power transmission mechanism, comprising a power input end and a power output end, wherein the power output end is drively connected to the power receiving end.

2. The apparatus for repairing a base platform of claim 1, wherein, The screw jack includes a double-tooth screw jack, which includes a power receiving end, a screw, a housing, and a rotating sleeve. The screw is threaded to the housing, and the rotating sleeve is sleeved on the screw. The rotating sleeve is rotatably connected to the housing and is limited along the lifting direction of the screw. The rotating sleeve cooperates with the screw, and the rotating sleeve and the power receiving end form a worm gear mechanism.

3. The apparatus for repairing a base platform of claim 1, wherein, There are multiple screw jacks, and each screw jack corresponds to a support hole. The number of power transmission mechanisms is at least one, and the power transmission mechanism is drively connected to at least two of the screw jacks.

4. The apparatus for repairing a base platform of claim 3, wherein, The plurality of screw jacks includes a transition screw jack, which has a transition end, and another screw jack is connected to the power transmission mechanism via the transition screw jack.

5. The apparatus for repairing a base platform according to claim 1, wherein the six support holes of the base platform are arranged in an equilateral triangle, three of the support holes are located at the vertices of the equilateral triangle, and the other three support holes are located on the sides of the equilateral triangle; characterized in that The device includes at least one screw jack corresponding to the vertex and at least one screw jack corresponding to the side, arranged along the equilateral triangle. The power transmission mechanism is connected to the screw jack corresponding to the vertex, and the power transmission mechanism is connected to the screw jack corresponding to the side.

6. The apparatus for repairing a base platform of claim 5, wherein, The power transmission mechanism includes a cross bevel gear steering box, which includes the power input end and four power output ends. The four power output terminals are respectively connected to a screw jack corresponding to the vertex and three screw jacks corresponding to the sides; The screw jack corresponding to the edge includes a transition screw jack, which is drive-connected to two other screw jacks located at the corresponding vertices.

7. The apparatus for repairing a base platform of claim 6, wherein, The adapter screw jack is a T-type adapter screw jack. The power receiving end of the T-type adapter screw jack is connected to the cross bevel gear steering box. The T-type adapter screw jack includes two adapter ends, which are respectively connected to two screw jacks on both sides.

8. The apparatus for repairing a base platform of claim 6, wherein, The support frame includes a triangular support plate for mounting the screw jack; The cross bevel gear steering box is located at the intersection of the lines connecting the four corresponding screw jacks.

9. The apparatus for repairing a base platform of claim 8, wherein, It also includes multiple transmission rods, through which the screw jack is connected and the multiple transmission rods are arranged in a coplanar manner.

10. The apparatus for repairing a base platform according to any one of claims 1 to 9, wherein, It also includes a hand-cranked turntable and a reducer, wherein the hand-cranked turntable is connected to the power input end via the reducer.

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