Coaxial centering friction welding fixture for CVD hot plates

Abstract

The utility model relates to a coaxial centering friction welding fixture for CVD heating plate belongs to welding fixture technical field. The fixture includes: base, control panel, fixed clamping mechanism, installation slot, movable clamping mechanism, laser transmitter and laser receiver, control panel fixed mounting is at the front end of base, fixed clamping mechanism fixed mounting is above one end of base, the installation slot is set up along its length direction extension on the upper end surface of base, movable clamping mechanism sliding installation is in the inside of installation slot, laser transmitter fixed mounting is above fixed clamping mechanism, laser receiver fixed mounting is above movable clamping mechanism, and laser transmitter and laser receiver coaxial arrangement, through laser transmitter emits laser signal, and laser receiver receives laser signal, when laser receiver accurately received laser signal, shows that the coaxiality of two components to be welded meets the requirement, guarantees the coaxiality precision between components.

Description

Technical Field

[0001] This utility model relates to the field of welding fixture technology, and in particular to a coaxial centering friction welding fixture for CVD heating plates. Background Technology

[0002] The CVD heating plate is a key component of a CVD system, its core function being to provide a precise, uniform, and controllable high-temperature environment for the substrate. In the manufacturing process of CVD equipment, the structural integrity and performance stability of the heating plate directly affect the quality and efficiency of the CVD process. CVD heating plates are typically assembled from multiple metal components. To ensure the overall strength and sealing of the heating plate, friction welding is often used to connect these components. Existing CVD heating plate welding fixtures are mostly ordinary clamping structures, which can only achieve simple fixation of the components to be welded. They cannot guarantee the coaxiality accuracy between components. During the welding process, operators need to make multiple adjustments and measurements to correct the position of the components, which is not only cumbersome and time-consuming, but also susceptible to human error in terms of accuracy, making it difficult to meet the welding requirements of high-precision CVD heating plates. Summary of the Invention

[0003] Therefore, it is necessary to address the aforementioned technical issues by providing a solution that can quickly clamp and fix components of different specifications to be welded, and quickly and accurately adjust the coaxial alignment accuracy of two components to be welded, thereby meeting the welding requirements of high-precision CVD heating plates.

[0004] This utility model provides a coaxial alignment friction welding fixture for CVD heating plates, comprising: The system comprises a base, a control panel, a fixed clamping mechanism, a mounting slot, a movable clamping mechanism, a laser emitter, and a laser receiver. The control panel is fixedly mounted on the front end of the base. The fixed clamping mechanism is fixedly mounted above one end of the base. The mounting slot extends along the length of the upper surface of the base. The movable clamping mechanism is slidably mounted inside the mounting slot. The laser emitter is fixedly mounted above the fixed clamping mechanism. The laser receiver is fixedly mounted above the movable clamping mechanism, and the laser emitter and laser receiver are coaxially arranged. The laser emitter and laser receiver are electrically connected to the control panel.

[0005] In one embodiment, the fixing clamping mechanism includes a first column, a second column, a second electric telescopic cylinder, a first fixing plate, and a pressure connecting plate. The first column has a telescopic cavity inside. The second column is slidably installed inside the telescopic cavity. The second electric telescopic cylinder is fixedly installed inside the telescopic cavity, and its telescopic end is fixedly connected to the lower end of the second column. The first fixing plate is installed inside the second column. The pressure connecting plate is installed between the first fixing plate and the second column, and its two ends are fixedly connected to the second column and the first fixing plate, respectively. The second electric telescopic cylinder and the pressure connecting plate are electrically connected to the control panel.

[0006] In one embodiment, the movable clamping mechanism includes a movable bracket, a second fixed plate, a connecting shaft, and a servo motor. The second fixed plate is installed on the inner side of the movable bracket, the connecting shaft is fixedly installed on the back of the second fixed plate and is rotatably connected to the movable bracket, the servo motor is fixedly installed on the outer side of the movable bracket, and the output end of the servo motor is fixedly connected to one end of the connecting shaft. The servo motor is electrically connected to the control panel.

[0007] In one embodiment, grippers are slidably mounted on both the first and second fixed disks, and three grippers are mounted thereon, which are equidistantly arranged on the first and second fixed disks. A third electric telescopic cylinder is fixedly mounted on the outside of the first and second fixed disks, and the telescopic end of the third electric telescopic cylinder is fixedly connected to the grippers. The third electric telescopic cylinder is electrically connected to the control panel.

[0008] In one embodiment, a first electric telescopic cylinder is fixedly installed on one side of the other end of the base, and the first electric telescopic cylinder is disposed inside the mounting groove. The telescopic end of the first electric telescopic cylinder is fixedly connected to the movable bracket. A displacement sensor is fixedly installed on one side of the movable bracket, and the displacement sensor is installed above the mounting groove. The first electric telescopic cylinder and the displacement sensor are electrically connected to the control panel.

[0009] In one embodiment, the lower end of the movable bracket is provided with an opening groove, and there are two opening grooves. A ball bearing slide rail is fixedly installed at the bottom of the mounting groove, and there are two ball bearing slide rails. The upper end of the ball bearing slide rail extends into the interior of the opening groove, and the ball bearing slide rail is slidably connected to the movable bracket. An anti-slip and shock-absorbing plate is fixedly installed below the base.

[0010] In one embodiment, the inner wall of the second column is provided with two connection holes, which are symmetrically arranged about the pressure connecting plate. A connecting rod is slidably installed inside the connection hole, and one end of the connecting rod is fixedly connected to the first fixing plate.

[0011] In one embodiment, the gripper is L-shaped, and an elastic buffer pad is fitted to the inner side of the gripper. A pressure sensor is installed between the elastic buffer pad and the gripper, and the pressure sensor is fixedly connected to the gripper. The pressure sensor is electrically connected to the control panel.

[0012] In use, the aforementioned friction welding fixture utilizes a laser emitter, a laser receiver, and a second electric telescopic cylinder. The laser emitter emits a laser signal, and the laser receiver receives and transmits this signal to the control panel. When the laser receiver accurately receives the laser signal, it indicates that the coaxiality of the two components to be welded meets the requirements. If the laser receiver fails to receive the signal accurately, the second electric telescopic cylinder is activated, causing the second column to rise or fall, changing the height of the clamping mechanism and indirectly adjusting the height difference between the laser emitter and receiver until the laser receiver can accurately receive the laser signal. This ensures that the two components to be welded are coaxially aligned, improving the welding accuracy. The fixture also incorporates a first fixed plate, a second fixed plate, grippers, a third electric telescopic cylinder, an elastic buffer pad, and a pressure sensor. The third electric telescopic cylinder applies a pushing or pulling force to the grippers. The clamping jaws apply pressure to the edges of the components to be welded, fixing the two components to be welded to the first and second fixed plates respectively. An elastic buffer pad prevents the clamping jaws from scratching the outer walls of the components and accommodates minor dimensional deviations. A pressure sensor measures the clamping force on the components to prevent excessive force and deformation. Three clamping jaws accommodate CVD heating plates of different sizes, improving clamping stability. Through the pressure connecting plate and displacement sensor, the pressure connecting plate measures the pressure between the first fixed plate and the second column, indirectly measuring the pressure between the two components. The displacement sensor measures the movement distance of the movable clamping mechanism. Combined with the pressure measured by the pressure connecting plate, the welding pressure of the two components can be precisely controlled, improving the welding effect. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a structural diagram showing the connection between the first and second columns of this utility model. Figure 3 This utility model Figure 1 A magnified view of a portion of area A; Figure 4 This is a diagram showing the connection relationship between the first fixing plate and the second column of this utility model; Figure 5 This is a diagram showing the connection relationship between the second fixed plate and the movable bracket of this utility model; Figure 6 This is a perspective view of the connection between the gripper and the first fixed plate of this utility model; Figure 7 This is a perspective view of the connection between the movable support and the base of this utility model; Figure 8 This is a perspective view of the connection between the elastic buffer pad and the gripper of this utility model.

[0015] Explanation of reference numerals in the attached drawings: 1. Base; 2. Control panel; 3. Anti-slip and shock-absorbing plate; 4. Fixed clamping mechanism; 41. First column; 42. Second column; 43. Telescopic cavity; 44. Second electric telescopic cylinder; 45. First fixed plate; 46. Pressure connecting plate; 47. Connecting hole; 48. Connecting rod; 5. Mounting slot; 6. Movable clamping mechanism; 61. Movable bracket; 62. Second fixed plate; 63. Connecting shaft; 64. Servo motor; 65. Opening slot; 7. First electric telescopic cylinder; 8. Laser emitter; 9. Laser receiver; 10. Displacement sensor; 11. Gripper; 12. Third electric telescopic cylinder; 13. Elastic buffer pad; 14. Ball bearing slide rail; 15. Pressure sensor. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0017] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this specification are for illustrative purposes only and do not represent the only possible implementation.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0019] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0020] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this specification belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0021] The following is combined with Figures 1-8 This invention describes a coaxial alignment friction welding fixture for CVD heating plates.

[0022] like Figures 1-8As shown, in one embodiment, a coaxial alignment friction welding fixture for a CVD heating plate includes: a base 1, a control panel 2, a fixed clamping mechanism 4, a mounting groove 5, and a movable clamping mechanism 6. The control panel 2 is fixedly mounted on the front end of the base 1, the fixed clamping mechanism 4 is fixedly mounted above one end of the base 1, the mounting groove 5 extends along its length on the upper end surface of the base 1, and the movable clamping mechanism 6 is slidably mounted inside the mounting groove 5. It also includes a laser emitter 8 and a laser receiver 9. The laser emitter 8 is fixedly mounted above the fixed clamping mechanism 4, and the laser receiver 9 is fixedly mounted on the movable clamping mechanism 6. Above the clamping mechanism 6, and with the laser emitter 8 and laser receiver 9 coaxially arranged, the laser emitter 8 and laser receiver 9 are electrically connected to the control panel 2. The fixed clamping mechanism 4 includes a first column 41, a second column 42, a second electric telescopic cylinder 44, a first fixing plate 45, and a pressure connecting plate 46. The first column 41 has a telescopic cavity 43 inside, the second column 42 is slidably installed inside the telescopic cavity 43, the second electric telescopic cylinder 44 is fixedly installed inside the telescopic cavity 43, and the telescopic end of the second electric telescopic cylinder 44 is fixedly connected to the lower end of the second column 42. The first fixing plate 45 is installed on... Inside the second column 42, a pressure connecting plate 46 is installed between the first fixed plate 45 and the second column 42, and both ends of the pressure connecting plate 46 are fixedly connected to the second column 42 and the first fixed plate 45 respectively. The second electric telescopic cylinder 44 and the pressure connecting plate 46 are electrically connected to the control panel 2. The movable clamping mechanism 6 includes a movable bracket 61, a second fixed plate 62, a connecting shaft 63, and a servo motor 64. The second fixed plate 62 is installed inside the movable bracket 61, and the connecting shaft 63 is fixedly installed on the back of the second fixed plate 62, and the connecting shaft 63 is rotatably connected to the movable bracket 61. The servo motor 64... 4 is fixedly installed on the outside of the movable bracket 61, and the output end of the servo motor 64 is fixedly connected to one end of the connecting shaft 63. The servo motor 64 is electrically connected to the control panel 2. Grippers 11 are slidably installed on the first fixed plate 45 and the second fixed plate 62. There are three grippers 11 installed, and the three grippers 11 are equidistantly arranged on the first fixed plate 45 and the second fixed plate 62. A third electric telescopic cylinder 12 is fixedly installed on the outside of the first fixed plate 45 and the second fixed plate 62, and the telescopic end of the third electric telescopic cylinder 12 is fixedly connected to the grippers 11. The third electric telescopic cylinder 12 is electrically connected to the control panel 2.

[0023] In this embodiment, the coaxial alignment friction welding fixture for CVD heating plates, during CVD heating plate welding, places two CVD heating plate components to be welded inside the first fixed plate 45 and the second fixed plate 62, respectively. The third electric telescopic cylinder 12 is driven to apply a pushing force to the gripper 11, causing the gripper 11 to contact the edge of the component to be welded, thus fixing the two components to the first fixed plate 45 and the second fixed plate 62. The laser emitter 8 and laser receiver 9 are then activated. The laser emitter 8 emits a laser signal, and the laser receiver 9 receives the laser signal and transmits it to the control panel 2. If the laser receiver 9 accurately receives the laser signal, it indicates that the coaxiality of the two components to be welded meets the requirements. If the laser receiver 9 cannot accurately receive the laser signal, the second electric telescopic cylinder 44 is driven to raise and lower the second column 42, changing the height of the fixed clamping mechanism 4 until the laser receiver 9 can accurately receive the laser signal. After the coaxial alignment is completed, the welding ends of the two components to be welded are brought into contact with each other. The first electric telescopic cylinder 7 is driven to start the servo motor 64 to drive the connecting shaft 63 to rotate. As the connecting shaft 63 rotates, it drives the second fixed plate 62 to rotate, performing friction welding on the two components to be welded.

[0024] In this embodiment, a first electric telescopic cylinder 7 is fixedly installed on one side of the other end of the base 1, and the first electric telescopic cylinder 7 is located inside the mounting groove 5. The telescopic end of the first electric telescopic cylinder 7 is fixedly connected to the movable bracket 61. A displacement sensor 10 is fixedly installed on one side of the movable bracket 61, and the displacement sensor 10 is installed above the mounting groove 5. The first electric telescopic cylinder 7 and the displacement sensor 10 are electrically connected to the control panel 2. An opening groove 65 is provided at the lower end of the movable bracket 61. There are two opening grooves 65. A ball bearing slide rail 14 is fixedly installed at the bottom of the mounting groove 5. There are two ball bearing slide rails 14. The upper end of the ball bearing slide rail 14 extends into the interior of the opening groove 65, and the ball bearing slide rail 14 is slidably connected to the movable bracket 61. An anti-slip shock-absorbing plate 3 is fixedly installed below the base 1. The first electric telescopic cylinder 7 applies a pushing and pulling force to the movable clamping mechanism 6, causing the movable clamping mechanism 6 to move horizontally along the mounting groove 5, bringing the welding ends of the two fixed components to be welded into contact with each other. The displacement sensor 10 measures the moving distance of the movable clamping mechanism 6. The ball slide rail 14, in conjunction with the opening groove 65, can guide and limit the movement of the movable clamping mechanism 6, ensuring that the movable clamping mechanism 6 moves smoothly. The anti-slip damping plate 3 can eliminate the vibration force generated during the operation of the welding fixture, improving the overall stability of the welding fixture.

[0025] In this embodiment, the inner wall of the second column 42 is provided with two connection holes 47, which are arranged symmetrically about the pressure connecting plate 46. A connecting rod 48 is slidably installed inside the connection hole 47, and one end of the connecting rod 48 is fixedly connected to the first fixing plate 45.

[0026] In this embodiment, the grippers 11 are L-shaped, and an elastic buffer pad 13 is fitted onto the inner side of the grippers 11. The elastic buffer pad 13 is made of high-temperature resistant rubber material and has a thickness of 2-5mm. A pressure sensor 15 is installed between the elastic buffer pad 13 and the grippers 11, and the pressure sensor 15 is fixedly connected to the grippers 11 and electrically connected to the control panel 2. Using three grippers 11 can accommodate CVD heating plates of different sizes for welding. The elastic buffer pad 13 prevents the grippers 11 from scratching the outer wall of the component to be welded, and can also accommodate minor dimensional deviations in the outer wall of the component. The pressure sensor 15 measures the clamping force on the component to be welded, preventing excessive force and deformation, and improving clamping stability.

[0027] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0028] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the appended claims.

Claims

1. A coaxial centering friction welding fixture for a CVD hot plate, characterized by include: The system comprises a base (1), a control panel (2), a fixed clamping mechanism (4), a mounting slot (5), a movable clamping mechanism (6), a laser emitter (8), and a laser receiver (9). The control panel (2) is fixedly installed at the front end of the base (1). The fixed clamping mechanism (4) is fixedly installed above one end of the base (1). The mounting slot (5) extends along the length of the upper surface of the base (1). The movable clamping mechanism (6) is slidably installed inside the mounting slot (5). The laser emitter (8) is fixedly installed above the fixed clamping mechanism (4). The laser receiver (9) is fixedly installed above the movable clamping mechanism (6). The laser emitter (8) and the laser receiver (9) are coaxially arranged. The laser emitter (8) and the laser receiver (9) are electrically connected to the control panel (2).

2. The coaxial centering friction welded fixture for a CVD heater plate of claim 1, wherein: The fixed clamping mechanism (4) includes a first column (41), a second column (42), a second electric telescopic cylinder (44), a first fixed plate (45), and a pressure connecting plate (46). The first column (41) has a telescopic cavity (43) inside. The second column (42) is slidably installed inside the telescopic cavity (43). The second electric telescopic cylinder (44) is fixedly installed inside the telescopic cavity (43), and the telescopic end of the second electric telescopic cylinder (44) is fixedly connected to the lower end of the second column (42). The first fixed plate (45) is installed on the inner side of the second column (42). The pressure connecting plate (46) is installed between the first fixed plate (45) and the second column (42), and the two ends of the pressure connecting plate (46) are fixedly connected to the second column (42) and the first fixed plate (45) respectively. The second electric telescopic cylinder (44) and the pressure connecting plate (46) are electrically connected to the control panel (2).

3. The coaxial centering friction welded fixture for a CVD heater plate of claim 2, wherein: The movable clamping mechanism (6) includes a movable bracket (61), a second fixed plate (62), a connecting shaft (63), and a servo motor (64). The second fixed plate (62) is installed on the inner side of the movable bracket (61). The connecting shaft (63) is fixedly installed on the back of the second fixed plate (62) and is rotatably connected to the movable bracket (61). The servo motor (64) is fixedly installed on the outer side of the movable bracket (61) and the output end of the servo motor (64) is fixedly connected to one end of the connecting shaft (63). The servo motor (64) is electrically connected to the control panel (2).

4. The coaxial centering friction weld fixture for a CVD hot plate of claim 3, wherein: A gripper (11) is slidably mounted on the first fixed plate (45) and the second fixed plate (62). There are three grippers (11), and the three grippers (11) are equidistantly arranged on the first fixed plate (45) and the second fixed plate (62). A third electric telescopic cylinder (12) is fixedly mounted on the outside of the first fixed plate (45) and the second fixed plate (62), and the telescopic end of the third electric telescopic cylinder (12) is fixedly connected to the gripper (11). The third electric telescopic cylinder (12) is electrically connected to the control panel (2).

5. The coaxial centering friction welded fixture for CVD hot plates of claim 3, wherein: A first electric telescopic cylinder (7) is fixedly installed on one side of the other end of the base (1), and the first electric telescopic cylinder (7) is set inside the mounting groove (5). The telescopic end of the first electric telescopic cylinder (7) is fixedly connected to the movable bracket (61). A displacement sensor (10) is fixedly installed on one side of the movable bracket (61), and the displacement sensor (10) is installed above the mounting groove (5). The first electric telescopic cylinder (7) and the displacement sensor (10) are electrically connected to the control panel (2).

6. The coaxial centering friction weld fixture for a CVD hot plate of claim 5, wherein: The lower end of the movable bracket (61) is provided with an opening groove (65), and there are two opening grooves (65). The bottom of the mounting groove (5) is fixedly installed with a ball slide rail (14), and there are two ball slide rails (14). The upper end of the ball slide rail (14) extends into the interior of the opening groove (65), and the ball slide rail (14) is slidably connected to the movable bracket (61). The lower part of the base (1) is fixedly installed with an anti-slip shock-absorbing plate (3).

7. The coaxial centering friction welded fixture for CVD hot plates of claim 2, wherein: The inner wall of the second column (42) is provided with a connection hole (47). There are two connection holes (47), and the two connection holes (47) are symmetrically arranged about the pressure connecting plate (46). A connecting rod (48) is slidably installed inside the connection hole (47), and one end of the connecting rod (48) is fixedly connected to the first fixed plate (45).

8. The coaxial centering friction welded fixture for CVD hot plates of claim 4, wherein: The gripper (11) is L-shaped. An elastic buffer pad (13) is fitted to the inner side of the gripper (11). A pressure sensor (15) is installed between the elastic buffer pad (13) and the gripper (11). The pressure sensor (15) is fixedly connected to the gripper (11). The pressure sensor (15) is electrically connected to the control panel (2).

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