Convenient loading and unloading structure of quartz tube

Abstract

The utility model discloses a quartz tube convenient mounting and dismounting structure, including tubular furnace equipment, mounting and dismounting platform, gas inflation axle and connecting flange, the tubular furnace society includes frame, fixed plate, hearth and quartz tube, the mounting and dismounting platform includes X axle positioning subassembly, Y axle positioning subassembly, Z axle positioning subassembly, counterweight and control cabinet, realizes the movement control of three -dimensional direction, the gas inflation axle includes spindle, gasbag, inlet valve, outlet valve, positioning flange, laser fixing base and laser positioner, realizes the gas inflation axle and quartz tube close contact and the separation through the inlet valve, outlet valve adjustment air in the gasbag of gasbag, and positioning flange is fixed in connecting flange and with spindle coaxial, the laser positioner is fixed in positioning flange through laser fixing base, and the cross laser line that it sends out coincides with spindle axis line. Have the automation positioning and coordinate memory function, improve positioning accuracy significantly, reduce the risk of breakage, prolong the life, improve production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment, and in particular to a convenient loading and unloading structure for quartz tubes. Background Technology

[0002] The semiconductor and photovoltaic industries involve numerous high-temperature processes that require tubular equipment, including diffusion furnaces, oxidation furnaces, annealing furnaces, PECVD, and LPCVD equipment. In recent years, with breakthroughs in the photoelectric conversion efficiency of crystalline silicon solar cells, equipment has continuously evolved to meet production capacity demands. Tube furnace diameters have increased, lengths have lengthened, and the number of furnace tubes has also increased, posing a significant challenge to the installation of quartz tubes.

[0003] In existing technologies, the traditional method for installing quartz tubes involves placing a wear-resistant material inside the furnace chamber, then placing the quartz tube directly on the material and pushing it to the designated position. This method has significant drawbacks: First, it requires extremely high assembly precision during loading and unloading, as even slight bumps can cause the quartz tube to break. Second, manual installation makes it difficult to ensure the quartz tube is level, which can easily lead to sealing issues with the front and rear flanges, and in severe cases, even tube bursting during vacuuming. Third, there is a lack of positioning references during tube disassembly and maintenance, making the operation cumbersome and inefficient. In addition, traditional loading and unloading tools have poor applicability and are difficult to adapt to different types of tube furnaces.

[0004] Therefore, there is an urgent need for a quartz tube loading and unloading structure that can solve the above problems, so as to improve loading and unloading safety, positioning accuracy and operational efficiency, and enhance the versatility of the equipment. Utility Model Content

[0005] This invention provides a convenient loading and unloading structure for quartz tubes, solving the problems of easy breakage, low positioning accuracy leading to shortened service life, inconvenient disassembly and maintenance, and poor applicability of quartz tubes in the prior art.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a convenient loading and unloading structure for quartz tubes, including a tube furnace equipment, a loading and unloading platform, an air expansion shaft, and a connecting flange;

[0007] The tubular furnace equipment includes a frame, a fixing plate, a furnace chamber, and a quartz tube. The frame is provided with a positioning origin. The furnace chamber is mounted on the frame along the Z-axis. The fixing plate fixes the frame on the left and right sides in the X-axis direction. The quartz tube is placed inside the furnace chamber.

[0008] The loading and unloading platform includes an X-axis positioning assembly, a Y-axis positioning assembly, a Z-axis positioning assembly, a counterweight, and a control console. The X-axis positioning assembly is used to dock with the tubular furnace equipment and is equipped with a drive motor to achieve movement in the X-axis direction. The Y-axis positioning assembly is mounted on the X-axis positioning assembly and is equipped with a drive motor to drive the Z-axis positioning assembly to achieve movement in the Y-axis direction. The Z-axis positioning assembly fixes the air expansion shaft through a connecting flange and is equipped with a drive motor to drive the air expansion shaft to achieve movement in the Z-axis direction.

[0009] The air expansion shaft includes a main shaft, an air bladder, an inlet valve, an outlet valve, a positioning flange, a laser mounting base, and a laser positioner. The air bladder is an inflatable chamber formed by a stretchable rubber attached to the outer ring of the main shaft. The air inside the air bladder is adjusted by the inlet and outlet valves on the air bladder to achieve tight contact and separation between the air expansion shaft and the quartz tube. The positioning flange is fixed to the connecting flange and precisely fits with the main shaft so that the two are coaxial. The laser positioner is fixed to the positioning flange through the laser mounting base. The crosshair laser line emitted by the laser positioner coincides with the axis of the main shaft and passes through the hollow main shaft to irradiate the tube furnace equipment.

[0010] Furthermore, the positioning origin of the frame corresponds to the positioning origin of the loading and unloading platform.

[0011] Furthermore, the counterweight block is positioned relative to the Y-axis positioning component at the other end of the loading and unloading platform to maintain the stability of the loading and unloading platform during movement.

[0012] Furthermore, the console controls the movement of the X-axis, Y-axis, and Z-axis positioning components, and has origin positioning and coordinate memory functions.

[0013] As can be seen from the above description of the structure of this utility model, compared with the prior art, this utility model has the following advantages:

[0014] 1. The combination of laser positioning and three-axis fine adjustment significantly improves positioning accuracy, reduces the risk of quartz tube impact and bursting, extends its service life, and the structure is adaptable to tube furnaces of different diameters, lengths and quantities, making it widely applicable and saving on the cost of using quartz tubes.

[0015] 2. The control console has a coordinate recording function, enabling quick disassembly and reinstallation of quartz tubes, greatly saving maintenance time. Automated operation reduces manual intervention, lowers labor intensity, and improves production efficiency. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0017] Figure 1 This is a schematic diagram of the overall axonometric structure of this utility model;

[0018] Figure 2 This is a front view structural diagram of the present utility model;

[0019] Figure 3 This is a schematic diagram of the loading and unloading platform and air shaft structure of this utility model;

[0020] Figure 4 for Figure 2 A magnified view of a portion at point A. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0022] Example

[0023] refer to Figure 1-4 A convenient loading and unloading structure for quartz tubes includes a tubular furnace device 1, a loading and unloading platform 2, an air expansion shaft 3, and a connecting flange 4;

[0024] The tubular furnace equipment 1 includes a frame 11, a fixing plate 12, a furnace chamber 13, and a quartz tube 14. The frame 11 is provided with a positioning origin. The furnace chamber 13 is mounted on the frame 11 along the Z-axis direction. The fixing plate 12 fixes the frame 11 on the left and right sides in the X-axis direction. The quartz tube 14 is placed inside the furnace chamber 13.

[0025] The loading and unloading platform 2 includes an X-axis positioning component 21, a Y-axis positioning component 22, a Z-axis positioning component 23, a counterweight 24, and a control console 25. The X-axis positioning component 21 is used to dock with the tubular furnace equipment 1 and is equipped with a drive motor to achieve movement in the X-axis direction. The Y-axis positioning component 22 is mounted on the X-axis positioning component 21 and is equipped with a drive motor to drive the Z-axis positioning component 23 to achieve movement in the Y-axis direction. The Z-axis positioning component 23 is fixed to the air expansion shaft 3 through the connecting flange 4 and is equipped with a drive motor to drive the air expansion shaft 3 to achieve movement in the Z-axis direction.

[0026] The air expansion shaft 3 includes a main shaft 31, an air bladder 32, an air inlet valve 33, an air outlet valve 34, a positioning flange 35, a laser mounting base 36, and a laser positioner 37. The air bladder 32 is an inflatable chamber formed by a stretchable rubber attached to the outer ring of the main shaft 31. The air inside the air bladder is adjusted by the air inlet valve 33 and the air outlet valve 34, which are set on the air bladder, to achieve tight contact and separation between the air expansion shaft 3 and the quartz tube 14. The positioning flange 35 is fixed to the connecting flange 4 and is precisely fitted with the main shaft 31 so that the two are coaxial. The laser positioner 37 is fixed to the positioning flange 35 through the laser mounting base 36. The cross laser line emitted by the laser positioner coincides with the axis of the main shaft 31 and passes through the hollow main shaft 31 to irradiate the tube furnace equipment 1.

[0027] The positioning origin of the frame 11 corresponds to the positioning origin of the loading and unloading platform 2.

[0028] The counterweight 24 is positioned relative to the Y-axis positioning component 22 at the other end of the loading and unloading platform 2 to maintain the stability of the loading and unloading platform 2 during movement.

[0029] The control console 25 controls the movement of the X-axis, Y-axis, and Z-axis positioning components, and has origin positioning and coordinate memory functions.

[0030] Installation process: First, the air expansion shaft 3 of the loading / unloading platform 2 is hoisted through the first quartz tube 14. The air inlet valve 33 of the air expansion shaft 3 is opened, causing the airbag 32 to inflate and expand, making tight contact with the inner wall of the first quartz tube 14, thus fixing the first quartz tube 14. The laser positioner 37 is activated through the control console 25. At the same time, the control console 25 is operated to return the X-axis positioning assembly 21, Y-axis positioning assembly 22, and Z-axis positioning assembly 23 on the loading / unloading platform 2 to their origin, and to align the crosshair of the laser positioner 37 with the main equipment. The origin of the main body 1 is set to coincide; the coordinates of the origin of the main body 1 relative to the three coordinates of the first furnace chamber 13 are calculated, the three coordinates of the first furnace chamber 13 are input into the control console 25 and started, so that the Y-axis positioning component 22 and Z-axis positioning component 23 on the loading and unloading platform 2 move to the right entrance of the first furnace chamber 13; by observing whether the cross laser line of the laser positioner 37 coincides with the coordinates of the left exit of the first furnace chamber 13, after checking that there is no error, the X-axis positioning component 21 is slowly started, so that the first quartz tube 14 on the air expansion shaft 3 is aligned with the coordinates of the first furnace chamber 13. Slowly enter from the right entrance of the first furnace chamber 13, observing in real time whether the crosshair laser lines overlap and whether the outer wall of the first quartz tube 14 rubs against the inside of the first furnace chamber 13. If any deviation occurs, stop the loading and unloading platform 2, and restart it after ensuring that the X-axis positioning component 21, Y-axis positioning component 22, and Z-axis positioning component 23 are correct. Move the first quartz tube 14 on the air expansion shaft 3 to the designated position on the main body 1 of the equipment and keep it concentric with the first furnace chamber 13. The three-coordinate position is automatically saved to the control console 25, and the left and right sides of the first quartz tube 14 are fixed by the fixing plate 12; the air outlet valve 34 is opened to expel the air inside the air bag 32, so that the air expansion shaft 3 is separated from the first quartz tube 14. The X-axis positioning component 21 of the loading and unloading platform 2 is started again, so that the air expansion shaft 3 is withdrawn from the first furnace chamber 13 and the loading and unloading platform 2 returns to the original position. The operation is repeated to complete the installation of all quartz tubes, and the final three-coordinate position of all quartz tubes 14 is saved to the control console 25 for later use.

[0031] Disassembly process: Locate and activate the final coordinates of the first quartz tube 14 on the control panel 25, allowing the Y-axis positioning assembly 22 and Z-axis positioning assembly 23 on the loading / unloading platform 2 to move to the right entrance of the first furnace chamber 13; observe whether the crosshair of the laser positioner 37 coincides with the coordinates of the left exit of the first furnace chamber 13, open the exhaust valve 34 to put the air expansion shaft 3 in a retracted state, and activate the X-axis positioning assembly 21, so that the air expansion shaft 3 slowly enters from the right entrance of the first furnace chamber 13, reaching the final coordinate position of the first quartz tube 14, and the air inlet valve of the air expansion shaft 3... 33 is opened, causing the airbag 32 to inflate and expand, making tight contact with the inner wall of the first quartz tube 14, thereby fixing the first quartz tube 14. The fixing plates 12 on the left and right sides of the first quartz tube 14 are removed. The X-axis positioning component is activated, allowing the loading and unloading platform 2 to move slowly, so that the first quartz tube 14 begins to detach from the first furnace chamber 13. During this process, the cross laser lines are observed in real time to see if they overlap and whether the outer wall of the first quartz tube 14 rubs against the inside of the first furnace chamber 13. Finally, the first quartz tube 14 is moved to the maintenance area for cleaning and maintenance. The disassembly is completed by repeating the operation.

[0032] This invention combines laser positioning with three-axis micro-adjustment, significantly improving positioning accuracy, reducing the risk of quartz tube impacts and bursts, and extending its service life. Its structure is adaptable to tube furnaces of different diameters, lengths, and quantities, offering wide applicability and saving on quartz tube usage costs. The control console has a coordinate recording function, enabling rapid disassembly and reinstallation of quartz tubes, greatly saving maintenance time. Automated operation reduces manual intervention, lowers labor intensity, and improves production efficiency.

[0033] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A convenient loading and unloading structure for a quartz tube, characterized in that: Includes tubular furnace equipment (1), loading and unloading platform (2), air expansion shaft (3) and connecting flange (4); The tubular furnace equipment (1) includes a frame (11), a fixing plate (12), a furnace chamber (13), and a quartz tube (14). The frame (11) is provided with a positioning origin. The furnace chamber (13) is mounted on the frame (11) along the Z-axis direction. The fixing plate (12) fixes the frame (11) on the left and right sides in the X-axis direction. The quartz tube (14) is placed inside the furnace chamber (13). The loading and unloading platform (2) includes an X-axis positioning component (21), a Y-axis positioning component (22), a Z-axis positioning component (23), a counterweight (24), and a control console (25). The X-axis positioning component (21) is used to dock with the tubular furnace equipment (1) and is equipped with a drive motor to achieve movement in the X-axis direction. The Y-axis positioning component (22) is located on the X-axis positioning component (21) and is equipped with a drive motor to drive the Z-axis positioning component (23) to achieve movement in the Y-axis direction. The Z-axis positioning component (23) is fixed to the air expansion shaft (3) through a connecting flange (4) and is equipped with a drive motor to drive the air expansion shaft (3) to achieve movement in the Z-axis direction. The air expansion shaft (3) includes a main shaft (31), an air bladder (32), an air inlet valve (33), an air outlet valve (34), a positioning flange (35), a laser mounting base (36), and a laser positioner (37). The air bladder (32) is an inflatable chamber formed by a stretchable rubber attached to the outer ring of the main shaft (31). The air inside the air bladder is adjusted by the air inlet valve (33) and the air outlet valve (34) on the air bladder to achieve close contact and separation between the air expansion shaft (3) and the quartz tube (14). The positioning flange (35) is fixed to the connecting flange (4) and is precisely matched with the main shaft (31) so that the two are coaxial. The laser positioner (37) is fixed to the positioning flange (35) through the laser mounting base (36). The cross laser line emitted by the laser positioner coincides with the axis of the main shaft (31) and passes through the hollow main shaft (31) to irradiate the tube furnace equipment (1).

2. The quartz tube convenient loading and unloading structure according to claim 1, characterized in that: The positioning origin of the frame (11) corresponds to the positioning origin of the loading and unloading platform (2).

3. The structure for easy loading and unloading of a quartz tube according to claim 1, wherein: The counterweight (24) is positioned relative to the Y-axis positioning component (22) at the other end of the loading and unloading platform (2) to maintain the stability of the loading and unloading platform (2) during movement.

4. The structure for easy loading and unloading of a quartz tube according to claim 1, wherein: The control console (25) controls the movement of the X-axis, Y-axis and Z-axis positioning components, and has origin positioning function and coordinate memory function.

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