A polishing liquid anti-splashing device of a polishing machine
Patent Information
- Application Number
- CN202522188406.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-16
- Publication Date
- 2026-09-18
- Estimated Expiration
- 2035-10-16
AI Technical Summary
在双面研磨机研磨作业完成后,上磨盘因结构特性(如表面平整度偏差、吸附力残留)易粘结研磨液,后续作业中(如上磨盘升降、工件取放时)会产生滴落的研磨液,在导体、光学行业的研磨作业多在万级或千级无尘车间进行,上磨盘滴落的研磨液若形成雾状飞雾(如滴落时受气流影响),会污染车间空气,导致空间内湿度增加,飞雾中的磨料颗粒还会附着在车间设备、墙壁表面,影响车间内其他设备的工作状态与使用寿命,增加了洁净车间的清洁频率,维护成本大幅上升
本实用新型通过双面研磨机上磨盘底部开设若干个小于研磨间隙的微凹坑,基于毛细效应以及其表面的疏水涂层,来减少上磨盘对研磨液的沾结,再配合气缸推动的对向环形刮板,进一步刮除上磨盘研磨表面残留的研磨液,从源头避免研磨液滴落飞溅产生飞雾,污染车间空气和降低洁净度等级,同时下磨盘的集液槽与倾斜的导流地槽可以实现研磨液的回收与循环利用,从降低研磨机在精密研磨场景下的维护成本。
Smart Images

Figure CN224765103U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of grinding machine technology, and more specifically, it relates to a grinding fluid anti-splash device for a grinding machine. Background Technology
[0002] A grinding mill is a device that uses mechanical force (such as impact force, friction force, extrusion force, etc.) to refine, homogenize, or modify the surface of solid materials. It is widely used in many fields such as industrial production, scientific research, food processing, and pharmaceutical preparation. Its core objective is to process materials into finished products that meet specific particle size, purity, or morphology requirements.
[0003] In industrial production, double-sided grinding machines are widely used in the processing of workpieces made of metal, ceramics, stone and other materials because they can achieve efficient grinding and polishing of workpiece surfaces. During the grinding process, in order to reduce the temperature of the grinding area, reduce workpiece scratches and improve grinding efficiency, grinding fluid needs to be continuously delivered to the contact area between the grinding disc and the workpiece. After the grinding operation of the double-sided grinding machine is completed, the upper grinding disc is prone to sticking with grinding fluid due to its structural characteristics (such as surface flatness deviation and residual adsorption force). During subsequent operations (such as lifting and lowering the upper grinding disc and picking up and placing workpieces), grinding fluid will drip. In the conductor and optics industries, grinding operations are mostly carried out in Class 10,000 or Class 1,000 cleanrooms. If the grinding fluid dripping from the upper grinding disc forms a mist (if affected by airflow when dripping), it will pollute the air in the workshop, leading to an increase in humidity. The abrasive particles in the mist will also adhere to the surface of workshop equipment and walls, affecting the working condition and service life of other equipment in the workshop, increasing the cleaning frequency of the cleanroom, and significantly increasing maintenance costs. Utility Model Content
[0004] To achieve the above objectives, the present invention provides the following technical solution: A device for preventing splashing of grinding fluid in a grinding mill includes a grinding mill body, wherein a grinding component is disposed inside the grinding mill body, and scraping components are disposed on both sides of the grinding component; The grinding assembly includes an upper grinding disc and a lower grinding disc. The bottom surface of the upper grinding disc has several micro-pits smaller than the grinding gap. These micro-pits, based on capillary effect, confine the grinding fluid within the micro-pits. The grinding surface of the upper grinding disc (201) is covered with a hydrophobic coating. The scraping assembly includes two opposing annular scrapers. Each of the two annular scrapers has a cylinder at its end furthest from the grinding assembly. The bottoms of the cylinders at both ends are fixed to the sides of the grinding assembly by bolts. Furthermore, a liquid collection tank is provided on the periphery of the lower grinding disc, and an inclined U-shaped bottom groove is provided at the bottom of the liquid collection tank to allow the grinding liquid to flow to the return hose.
[0005] Furthermore, a sun gear is provided at the top center of the lower grinding disc, and several planet gears are arranged around the sun gear. An internal gear ring is provided at the top of the outer edge of the lower grinding disc, forming a planetary gear assembly.
[0006] Furthermore, a coupling is provided at the bottom of the sun gear, and the other end of the coupling is fixedly connected to the second motor. The planetary gear has a circular slot inside for restricting the movement of the workpiece.
[0007] Furthermore, a first motor is provided at the connection between the grinding machine body and the grinding assembly. The output end of the first motor is connected to the top of the upper grinding disc, and hydraulic cylinders for raising and lowering the upper grinding disc are provided on both sides of the first motor.
[0008] Furthermore, a liquid storage tank is provided on the upper surface of the upper grinding disc, and a plurality of liquid inlet holes are provided at the bottom of the liquid storage tank. The plurality of liquid inlet holes penetrate the interior of the upper grinding disc, so that the grinding liquid is evenly distributed on the upper surface of the lower grinding disc.
[0009] In summary, this utility model has the following beneficial effects: This invention utilizes a double-sided grinding machine to create several micro-pits smaller than the grinding gap at the bottom of the upper grinding disc. Based on capillary effect and a hydrophobic coating on its surface, this reduces the adhesion of grinding fluid to the upper grinding disc. In conjunction with a cylinder-driven opposing annular scraper, the residual grinding fluid on the grinding surface of the upper grinding disc is further scraped off, preventing the grinding fluid from dripping and splashing, thus avoiding the generation of mist that pollutes the workshop air and reduces the cleanliness level. At the same time, the liquid collection tank of the lower grinding disc and the inclined guide trough can realize the recycling and reuse of the grinding fluid, thereby reducing the maintenance cost of the grinding machine in precision grinding scenarios. Attached Figure Description
[0010] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0011] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the upper grinding disc in the grinding assembly of this utility model; Figure 3 This is a schematic diagram of the structure of the lower grinding disc in the grinding assembly of this utility model; Figure 4 This is a schematic diagram of the liquid collection tank in this utility model; Figure 5 This is a schematic diagram of the scraping component in this utility model.
[0012] In the picture: 1. Grinding machine body; 101. First motor; 102. Hydraulic cylinder; 2. Grinding assembly; 201. Upper grinding disc; 202. Lower grinding disc; 203. Micro-pits; 204. Liquid collection tank; 205. Sun gear; 206. Planetary gears; 207. Internal gear ring; 208. Second motor; 209. Inclined guide channel; 210. Return hose; 211. Liquid storage tank; 3. Scraping assembly; 301. Annular scraper; 302. Cylinder. Detailed Implementation
[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0014] Example: The following is in conjunction with the appendix Figure 1-5 The present invention will be described in further detail below.
[0015] Please see Figure 1-5 This utility model provides a technical solution: a grinding fluid anti-splash device for a grinding machine, such as... Figure 1-2 As shown, the grinding machine body 1 includes a grinding component 2 inside the grinding machine body 1, and scraping components 3 are provided on both sides of the grinding component 2; like Figure 2 As shown, a first motor 101 is provided at the connection between the grinding machine body 1 and the grinding component 2. The output end of the first motor 101 is connected to the top of the upper grinding disc 201, and hydraulic cylinders 102 for raising and lowering the upper grinding disc 201 are provided on both sides of the first motor 101.
[0016] like Figure 2-4As shown, the grinding assembly 2 includes an upper grinding disc 201 and a lower grinding disc 202. The bottom surface of the upper grinding disc 201 has several hemispherical micro-pits 203, much smaller than the grinding gap (during double-sided grinding, a "grinding gap" exists between the workpiece and the upper grinding disc, determined by the grinding pressure, abrasive particle diameter, and grinding fluid thickness, typically 5-20 μm; for example, the gap is approximately 8-12 μm during semiconductor silicon wafer grinding). This avoids affecting the workpiece's grinding accuracy. These pits are processed using laser engraving and are arranged in a ring array, with their centers coinciding with the upper grinding disc 201. The micro-pits 203, based on capillary effect, confine the grinding fluid within them, reducing the amount of grinding fluid dripping during the raising and lowering of the upper grinding disc 201. Furthermore, the grinding surface of the upper grinding disc 201 is covered with a hydrophobic polytetrafluoroethylene (PTFE) coating, which requires curing after coating. This effectively reduces the adhesion of the grinding fluid to the surface of the micro-pits 203. A liquid collection tank 204 is provided on the periphery of the lower grinding disc 202, and an inclined guide bottom groove 209 is provided at the bottom of the liquid collection tank 204 to allow the grinding liquid to flow to the return hose 210.
[0017] A sun gear 205 is located at the top center of the lower grinding disc 202, and several planet gears 206 are arranged around the sun gear 205. An internal gear ring 207 is located at the top of the outer edge of the lower grinding disc 202, forming a planetary gear assembly.
[0018] The bottom of the sun gear 205 is connected to the output end of the second motor 208. The planetary gear 206 has a circular slot inside to limit the movement of the workpiece. The inner wall of the slot is covered with a polyurethane buffer pad to prevent the workpiece from being rigidly collided with the planetary gear 206 and causing scratches. At the same time, two exhaust holes are opened at the bottom of the slot to prevent air from being trapped during grinding and affecting the positioning of the workpiece. A circular liquid storage tank 211 is provided on the upper surface of the upper grinding disc 201. Several liquid inlet holes are provided along the annular array at the bottom of the liquid storage tank 211. The liquid inlet holes penetrate the interior of the upper grinding disc 201, so that the grinding liquid is evenly distributed on the upper surface of the lower grinding disc 202. A liquid level sensor is installed on the top of the liquid storage tank 211. When the liquid level of the grinding liquid is lower than 1 / 3 of the tank depth, an alarm is triggered and the grinding operation is suspended to avoid dry grinding. At the same time, a solenoid valve is installed on the liquid inlet pipe of the liquid storage tank 211 to control the excessive amount of grinding liquid and prevent splashing. like Figure 5 As shown, the scraping assembly 3 includes two opposing annular scrapers 301. Each of the two annular scrapers 301 is equipped with a cylinder 302 at the end away from the grinding assembly 2. The cylinder 302 is equipped with a magnetic switch and a throttle valve to detect the position of the scraper and adjust the extension / retraction of the piston rod to prevent the scraper from hitting the grinding disc 201 quickly. The bottom of the cylinders 302 at both ends is fixed to both sides of the grinding assembly 2 by bolts. Working principle: The first motor 101 and the second motor 208 are started by the control. The lower grinding disc 202 drives the workpiece to rotate and revolve through the planetary gear assembly. The hydraulic cylinder 102 lowers the upper grinding disc 201 to the grinding position. The grinding machine body 1 starts to continuously deliver grinding fluid. The grinding fluid is evenly covered on the contact surface between the lower grinding disc 202 and the workpiece through the fluid inlet. At the same time, the micro-pits 203 absorb part of the grinding fluid through capillary effect, reducing the amount of adhesion on the upper grinding disc 201. After grinding is completed, the control system triggers the cylinder 302 to push the annular scraper 301 to the working position. It rises with the upper grinding disc 201 to the scraping area and then stops. The control system controls one side cylinder (302) to move, driving the corresponding annular scraper (301) to move radially to contact the bottom surface of the upper grinding disc (201), scraping off the residual grinding liquid on that side and then resetting. Subsequently, the other side cylinder (302) drives the annular scraper (301) on its opposite side to perform the same action. The grinding liquid in the collection tank 204 flows into the return hose 210 through the inclined guide bottom groove 209 and is reinjected into the storage tank 211 to achieve recycling.
[0019] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example that is included in at least one embodiment or example of the present invention.
[0020] In this specification, the illustrative expressions of the terms used do not necessarily refer to the same embodiments or examples.
[0021] Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0022] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.
Claims
1. A device for preventing splashing of grinding fluid in a grinding mill, characterized in that, include: The grinding machine body (1) is provided with a grinding component (2), and scraping components (3) are provided on both sides of the grinding component (2). The grinding assembly (2) includes an upper grinding disc (201) and a lower grinding disc (202). The bottom surface of the upper grinding disc (201) is provided with a number of micro-pits (203) smaller than the grinding gap. The micro-pits (203) cause the grinding fluid to be confined within the micro-pits (203), and the grinding surface of the upper grinding disc (201) is covered with a hydrophobic coating. The scraping assembly (3) includes two opposing annular scrapers (301). Each of the two annular scrapers (301) is provided with a cylinder (302) at the end away from the grinding assembly (2). The bottom of the cylinders (302) at both ends is fixed to both sides of the grinding assembly (2) by bolts.
2. The anti-splash device for grinding fluid in a grinding mill according to claim 1, characterized in that, The lower grinding disc (202) is provided with a liquid collection tank (204) on its periphery, and the bottom of the liquid collection tank (204) is provided with an inclined guide bottom groove (209) that allows the grinding liquid to flow to the return hose (210).
3. The anti-splash device for grinding fluid in a grinding mill according to claim 2, characterized in that, The lower grinding disc (202) has a sun gear (205) at its top center, and the sun gear (205) has a plurality of planet gears (206) arranged around its circumference. The lower grinding disc (202) has an internal gear ring (207) at its outer edge top.
4. The anti-splash device for grinding fluid in a grinding mill according to claim 3, characterized in that, The bottom of the sun gear (205) is provided with a second motor (208), and the planetary gear (206) has a circular slot inside for restricting the movement of the workpiece.
5. The anti-splash device for grinding fluid in a grinding mill according to claim 1, characterized in that, A first motor (101) is provided at the connection between the grinding machine body (1) and the grinding component (2). The output end of the first motor (101) is connected to the top of the upper grinding disc (201), and hydraulic cylinders (102) for lifting the upper grinding disc (201) are provided on both sides of the first motor (101).
6. The anti-splash device for grinding fluid in a grinding mill according to claim 5, characterized in that, The upper surface of the upper grinding disc (201) is provided with a liquid storage tank (211), and the bottom of the liquid storage tank (211) is provided with a number of liquid infusion holes. The number of liquid infusion holes penetrate the interior of the upper grinding disc (201), so that the grinding liquid is evenly distributed on the upper surface of the lower grinding disc (202).