Multi-segmented robotic arm

Abstract

The utility model provides a kind of multi-section mechanical arm, comprising: at least one arm body, the arm body has a rotation axis, and is configured to be rotated along horizontal direction around the rotation axis, the arm body is segmented structure and includes at least two detachable segmented bodies, by adjusting the mass distribution of each segmented body, the centroid of the arm body is positioned close to the rotation axis.The utility model arm body uses modular segmented design, each module is independently detachable, by replacing different length segmented body, different wafer size or station layout requirement can be quickly adapted, without reprocessing overall arm, reduce material cost and production cycle;In addition, only the corresponding segmented body needs to be replaced when local damage, maintenance time is greatly shortened and spare part cost is reduced.By adjusting the mass distribution of each segmented body, the centroid of the arm body is close to the rotation axis, the torque load of driving system is reduced, and the operation stability and equipment life are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a multi-segment robotic arm. Background Technology

[0002] In the semiconductor manufacturing field, wafer transfer robots are core equipment in automated production, mainly used for high-precision handling and positioning of wafers. Their structural stability, motion efficiency, and ease of maintenance directly affect the yield and cost of chip manufacturing.

[0003] In the existing technology, the upper arm and lower arm of the wafer transfer robot are usually designed as a single piece, that is, the shoulder joint, the main body of the arm and the elbow joint are an integral structure that cannot be separated. The end effector is pivotally connected to the elbow joint of the lower arm through the wrist joint to complete the gripping and transfer of the wafer.

[0004] When production demands change (such as requiring a longer boom to accommodate larger loads), the entire boom needs to be redesigned and remanufactured. This not only consumes a large amount of raw materials but also results in long production cycles and high costs, making it unsuitable for the rapid iteration demands of flexible manufacturing. Furthermore, if a part of the boom is damaged due to collision or wear, the entire boom structure needs to be replaced, which will lead to extended equipment downtime and significantly increased maintenance costs.

[0005] In addition, in the one-piece molded boom structure, the overall center of gravity is far away from the shoulder joint, which causes the shoulder joint bearing to bear a large torque load for a long time, which can easily lead to mechanical fatigue, decreased positioning accuracy and shortened service life.

[0006] In view of this, it is necessary to propose a multi-segment robotic arm to solve the above problems. Utility Model Content

[0007] The purpose of this invention is to provide a multi-segment robotic arm to solve the problems in the prior art, such as the inability to flexibly adjust the structure of the robotic arm due to its one-piece molding structure, high maintenance costs, and excessive root load.

[0008] This utility model provides a multi-segment robotic arm, comprising: At least one arm body having a rotation axis and configured to rotate horizontally about the rotation axis, the arm body having a segmented structure and including at least two detachably connected segments, the center of mass of the arm body being positioned close to the rotation axis by adjusting the mass distribution of each of the segments.

[0009] In one possible embodiment, the rotation axis is located in a segment at one end of the arm body, and the segment where the rotation axis is located is defined as the power input segment. At least one of the other segments is defined as a weight reduction segment, and the overall wall thickness or the wall thickness of a portion of the weight reduction segment is less than the wall thickness of the power input segment.

[0010] In one possible embodiment, the weight-reducing segment is a segment at the other end of the arm body or any segment located between the two ends.

[0011] In one possible embodiment, when the wall thickness of a portion of the weight-reducing segment is less than the wall thickness of the power input segment, the weight-reducing segment includes a first connecting segment and a second connecting segment connected together. The first connection segment includes: The first body has a first chamber inside and a first opening on the side facing the power input segment body. The wall thickness of the first body is less than the wall thickness of the power input segment body. A connecting plate is provided at the first opening, and the weight-reducing segment is detachably connected to the segment adjacent to the first opening through the connecting plate.

[0012] In one possible embodiment, when the weight-reducing segment is a segment at the other end of the arm body, the second connecting segment has a different structure from the first connecting segment; When the weight-reducing segment is any segment located between the two ends, the second connecting segment may have the same or different shape as the first connecting segment.

[0013] In one possible embodiment, when the overall wall thickness of the weight-reducing segment is less than the wall thickness of the power input segment, and the weight-reducing segment is any segment located between the two ends, the weight-reducing segment includes: The central body has a central chamber inside and central openings on opposite sides along the extension direction of the arm body. The wall thickness of the central body is less than the wall thickness of the power input segment. Two end plates are respectively provided at the two central openings, and the weight-reducing segment is detachably connected to the segment adjacent to the central opening through the end plates.

[0014] In one possible embodiment, when the overall wall thickness of the weight-reducing segment is less than the wall thickness of the power input segment, and the weight-reducing segment is a segment at the other end of the arm, the weight-reducing segment includes: The end body has an internal end chamber and an end opening on the side facing the power input segment. The wall thickness of the end body is less than the wall thickness of the power input segment. An end plate is provided at the end opening, and the weight-reducing segment is detachably connected to the segment adjacent to the end opening through the end plate.

[0015] In one possible embodiment, when the wall thickness of a portion of the weight-reducing segment is less than the wall thickness of the power input segment, the wall thickness of the weight-reducing segment near the rotation axis is less than the wall thickness of the weight-reducing segment away from the rotation axis.

[0016] In one possible embodiment, the weight-reducing segment body includes multiple sub-segments, with adjacent sub-segments joined by regular or irregular surfaces.

[0017] In one possible embodiment, the two adjacent segments are joined by regular or irregular surfaces.

[0018] The beneficial effects of the multi-segment robotic arm provided by this utility model are as follows: 1. The arm adopts a modular segmented design, with each module being independently detachable. By replacing segments of different lengths, it can quickly adapt to different wafer sizes or workstation layout requirements without reprocessing the entire arm, reducing material costs and production cycles. In addition, when a part is damaged, only the corresponding segment needs to be replaced, significantly shortening maintenance time and reducing spare parts costs.

[0019] 2. By adjusting the mass distribution of each segment, for example, by adopting a thin-walled and lightweight design for individual segments, and by bringing the center of mass of the arm closer to the axis of rotation, the torque load on the drive system is reduced, thereby improving operational stability and equipment lifespan. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the multi-segment robotic arm of this utility model.

[0021] Figure 2 This is an exploded view of the multi-segment robotic arm of this utility model when the arm body is divided into two segments.

[0022] Figure 3 This is a schematic diagram of one of the arms of the multi-segment robotic arm of this utility model.

[0023] Figure 4 This is a schematic diagram of the weight-reducing segment located in the middle position of the multi-segment robotic arm of this utility model.

[0024] Figure 5 This is a schematic diagram of the weight-reducing segment located at the end of the multi-segment robotic arm of this utility model.

[0025] Figure 6 This is an exploded view of another arm of the multi-segment robotic arm of this utility model.

[0026] Figure 7 This is a schematic diagram of another arm of the multi-segment robotic arm of this utility model.

[0027] Figure 8 This is a schematic diagram of the arm body in a sub-segment embodiment of the multi-segment robotic arm of this utility model.

[0028] Figure 9 This is a schematic diagram of the arm body in another sub-segment embodiment of the multi-segment robotic arm of this utility model.

[0029] Figure 10 This is a schematic diagram of the segmented assembly of the multi-segment robotic arm of this utility model in one embodiment.

[0030] Figure 11 This is a schematic diagram of the segmented assembly of the multi-segment robotic arm of this utility model in another embodiment.

[0031] Figure 12 This is a schematic diagram showing that the two joint surfaces of the two segments of the multi-segment robotic arm of this utility model are trapezoidal in shape.

[0032] Figure 13 This is a schematic diagram showing that one of the joint surfaces of the segmented sections of the multi-segment robotic arm of this utility model is trapezoidal.

[0033] Explanation of reference numerals in the attached drawings: 100, boom body; 110, segment body; 111, power input segment body; 1111, input segment body; 11111, base; 11112, input segment chamber; 11113, input segment opening; 11114, top plate; 1112, input segment plate; 112, weight reduction segment body; 1121, sub-segment; 1122, first connecting segment; 11221, first body; 11222, connecting plate; 1123, second connecting segment; 11231, second body; 11232, second cavity Chamber; 11233, Second plate; 1124, Middle body; 1125, End plate; 1126, End body; 11261, End seat; 11262, End opening; 11263, Cover plate; 1127, End plate; 113, Joint surface; 1131, Perforation; 1132, Insert block; 1133, Slot; 1134, Fixing hole; 200, Actuating assembly; 210, First end effector; 220, Second end effector; A, Shoulder rotation axis; B, Elbow rotation axis; C, Wrist rotation axis. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0035] To address the problems existing in the prior art, embodiments of this utility model provide a multi-segment robotic arm, see [link to relevant documentation]. Figure 1 The multi-segment robotic arm includes at least one arm body 100, which has a rotation axis around which the arm body 100 rotates. One arm body 100 corresponds to one rotation axis. The arm body 100 is configured to rotate horizontally about the rotation axis. The arm body 100 has a segmented structure and includes at least two detachably connected segment bodies 110. By adjusting the mass distribution of each segment body 110, the center of mass of the arm body 100 is positioned close to the rotation axis.

[0036] The arm 100 adopts a modular, segmented design. By replacing segments 110 of different lengths, the structural dimensions of the arm 100 can be adjusted to accommodate different wafer sizes or workstation layouts. This eliminates the need for a complete redesign and reprocessing of the arm, improving structural flexibility, reducing material costs and production cycles, and adapting to the rapid iteration demands of flexible manufacturing. If a portion of the arm 100 is damaged, only the damaged segment 110 needs to be replaced, significantly reducing maintenance time and spare parts costs. By adjusting the mass distribution of each segment 110, the center of gravity of the arm 100 is brought closer to the axis of rotation, preventing mechanical fatigue caused by excessive torque load on the drive system, improving operational stability and positioning accuracy, and extending equipment lifespan.

[0037] In one embodiment, see Figure 1 The segment 110, whose rotation axis is located at one end of the arm body 100, is designated as the power input segment 111. At least one of the other segments 110 is designated as a weight reduction segment 112. The overall wall thickness or partial wall thickness of the weight reduction segment 112 is less than the wall thickness of the power input segment 111. By reducing the overall wall thickness or partial wall thickness of the weight reduction segment 112, the mass distribution of each segment 110 is adjusted, so that the center of mass of the arm body 100 is positioned close to the rotation axis.

[0038] In some embodiments, the weight-reducing segment 112 is a segment 110 at the other end of the arm 100 (e.g., Figure 2 (as shown) or any segment 110 located between the two ends (as shown) Figure 3 (As shown).

[0039] The following is a detailed explanation of the structural design for the wall thickness reduction in the weight-reducing segment 112.

[0040] In one embodiment, see Figure 2 When the wall thickness of a portion of the weight-reducing segment 112 is less than the wall thickness of the power input segment 111, the weight-reducing segment 112 includes a first connecting segment 1122 and a second connecting segment 1123 connected together. The first connecting segment 1122 includes a first body 11221 and a connecting plate 11222. The first body 11221 has a first chamber for accommodating the drive component and a first opening on the side facing the power input segment 111. The wall thickness of the first body 11221 is less than the wall thickness of the power input segment 111. The connecting plate 11222 is disposed at the first opening, and the weight-reducing segment 112 is detachably connected to the segment 110 adjacent to the first opening via the connecting plate 11222. For example, the connecting plate 11222 is a connecting flange.

[0041] Further, see Figure 2 The first body 11221 is a rectangular frame structure with four walls connected end to end. The wall thickness of the first body 11221 ranges from 2.5mm to 3mm. The first body 11221 adopts a thin-walled and lightweight design, so that the overall center of mass of the arm 100 is close to the axis of rotation.

[0042] It should be noted that the specific connection method of the first connecting segment 1122 and the second connecting segment 1123 is not specifically limited here. It can be welding connection, integral molding, connection by fasteners, snap-fit ​​connection, etc.

[0043] In one specific embodiment, when the weight-reducing segment 112 is a segment 110 at the other end of the arm 100, the second connecting segment 1123 has a different structure from the first connecting segment 1122.

[0044] See Figure 2 Taking two segmented bodies 110 as an example, the second connecting segment 1123 includes a second body 11231 and a second plate 11233. The second body 11231 has a second chamber 11232 formed inside to accommodate a transmission assembly. The second chamber 11232 is stepped, designed according to the structure of the transmission assembly. The top of the second body 11231 has a second opening, and the second plate 11233 is fastened to the second opening. The second body 11231 has a third opening on the side near the first body 11221, and the first body 11221 has another first opening on the side near the second body 11231. The end face of this other first opening is fixedly connected to the end of the third opening, so that the second chamber 11232 and the first chamber communicate.

[0045] In another specific embodiment, see Figure 3 , Figure 6 and Figure 7 When the weight-reducing segment 112 is any segment 110 located between the two ends, the second connecting segment 1123 may have the same or different shape as the first connecting segment 1122.

[0046] The structural design of the overall wall thickness reduction of the weight-reducing segment 112 is explained in detail below.

[0047] In one embodiment, see Figure 3 and Figure 6 When the overall wall thickness of the weight-reducing segment 112 is less than the wall thickness of the power input segment 111, and the weight-reducing segment 112 is any segment 110 located between the two ends, the weight-reducing segment 112 includes a central body 1124 and two end plates 1125. The central body 1124 forms a central chamber and has central openings on opposite sides along the extension direction of the arm 100. The wall thickness of the central body 1124 is less than the wall thickness of the power input segment 111. The two end plates 1125 are respectively located at the two central openings. The weight-reducing segment 112 is detachably connected to the segment 110 adjacent to the central opening via the end plates 1125. For example, the end plates 1125 are connecting flanges.

[0048] Further, see Figure 3 and Figure 4 The central body 1124 is a rectangular frame structure with four walls connected end to end. The wall thickness of the central body 1124 ranges from 2.5mm to 3mm. The central body 1124 adopts a thin-walled and lightweight design, which makes the overall center of gravity of the arm 100 close to the axis of rotation.

[0049] In one embodiment, see Figure 3 and Figure 4 When the overall wall thickness of the weight-reducing segment 112 is less than the wall thickness of the power input segment 111, and the weight-reducing segment 112 is a segment 110 at the other end of the arm 100, the weight-reducing segment 112 includes an end body 1126 and an end plate 1127. The end body 1126 has an end chamber inside and an end opening on the side facing the power input segment 111. The wall thickness of the end body 1126 is less than the wall thickness of the power input segment 111. The end plate 1127 is located at the end opening, and the weight-reducing segment 112 is detachably connected to the segment 110 adjacent to the end opening via the end plate 1127.

[0050] Further, see Figure 3 and Figure 4The end body 1126 includes an end seat 11261 and a cover plate 11263. The end seat 11261 has an end chamber and an end opening. The top of the end seat 11261 has an end opening 11262. The cover plate 11263 is fastened to the end opening 11262.

[0051] In some embodiments, see Figure 8 and Figure 9 The weight-reducing segment 112 includes multiple sub-segments 1121, and adjacent sub-segments 1121 are joined by regular or irregular surfaces.

[0052] See Figure 8 Sub-sub-unit 1121 consists of two rectangular parts.

[0053] See Figure 9 Sub-component 1121 consists of two parts and is triangular in shape.

[0054] The structural design of the power input segment 111 will be explained in detail below.

[0055] In one specific embodiment, see Figure 2 and Figure 3 The power input segment 111 includes an input segment body 1111 and an input segment plate 1112. The input segment body 1111 has an input segment chamber 11112 inside for accommodating the drive component and has an input segment opening on the side facing other segments. The input segment plate 1112 is located at the input segment opening. The power input segment 111 is detachably connected to the adjacent segment 110 through the input segment plate 1112.

[0056] Further, see Figure 3 The input section body 1111 includes a base 11111 and a top plate 11114. The base 11111 has an input section chamber 11112 and an input section opening. The top of the base 11111 has an input section opening 11113. The top plate 11114 is fastened to the input section opening 11113 and abuts against the edge of the input section opening 11113 to isolate the input section chamber 11112 from the outside world and prevent external pollutants from entering the input section chamber 11112.

[0057] In some embodiments, see Figure 10 and Figure 11 The two adjacent segments 110 are joined by regular or irregular surfaces.

[0058] In some embodiments, see Figure 12 and Figure 13 At least one joint surface 113 of at least one segment 110 is trapezoidal in shape.

[0059] In one embodiment, see Figures 2 to 6 The joint surface 113 of each segment 110 is provided with a through hole 1131 for the transmission belt to pass through. According to the installation path of the transmission belt of the arm 100, the joint surface 113 of each segment 110 is provided with a through hole 1131 to ensure that after each segment 110 is assembled, the transmission belt of the arm 100 can pass through each segment 110 for winding.

[0060] Further, see Figure 2 and Figure 3 Each segment 110 has a pair of perforations 1131 on its mating surface 113, with the pair of perforations 1131 located near both sides of the arm 100 in the width direction. Specifically, the perforations 1131 are strip-shaped holes.

[0061] In one embodiment, the mating surface 113 of the segment 110 is provided with a connector, and the connectors of two adjacent mating surfaces 113 are connected to limit the relative displacement of the two segment 110 in the vertical and horizontal directions.

[0062] Further, see Figures 2 to 6 In the two adjacent mating surfaces 113, one of the plugs is a plug block 1132, and the other plug is a slot 1133 that is adapted to the plug block 1132. The slot 1133 may or may not penetrate the corresponding mating surface 113.

[0063] Furthermore, see Figures 2 to 6 The connector is located at the center of the mating surface 113. The shape and size of the connector are not limited here and can be flexibly set according to actual process requirements. For example, the connector is rectangular.

[0064] In one embodiment, two adjacent segments 110 are fixedly connected by fasteners.

[0065] Further, see Figures 2 to 6 The mating surface 113 of the segment 110 is provided with fixing holes 1134. A fastener passes through the fixing holes 1134 of the two segment 110s to achieve a fixed connection between them. The fasteners are bolts, screws, etc. There are several fixing holes 1134, spaced apart around the connector.

[0066] In one embodiment, see Figure 1 The multi-segment robotic arm also includes an execution component 200 rotatably disposed at the end of at least one arm body 100 in the extension direction. The execution component 200 includes a first end effector 210 and a second end effector 220. The first end effector 210 and the second end effector 220 can rotate relative to each other about the wrist joint axis. The coordinated rotation of at least one arm body 100 and the execution component 200 realizes the radial extension or retraction action.

[0067] See Figure 1 In the case where there are two arm bodies 100, when the arm body 100 is the upper arm, the shoulder joint is located in the segment 110 at one end of the upper arm, i.e., the power input segment 111, and the shoulder joint defines a shoulder rotation axis A, around which the upper arm rotates; the elbow joint is located in the segment 110 at the other end of the upper arm, and the elbow joint defines an elbow rotation axis B. When the arm body 100 is the forearm, the segment 110 at one end of the forearm, i.e., the power input segment 111, is pivotally connected to the segment 110 at the other end of the upper arm, and the forearm rotates around the elbow rotation axis B; the wrist joint is located in the segment 110 at the other end of the forearm, and the wrist joint defines a wrist rotation axis C, around which the actuator 200 rotates.

[0068] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0069] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0070] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0071] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as defined in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A multi-segment robotic arm, characterized in that, include: At least one arm body (100) has a rotation axis and is configured to rotate horizontally about the rotation axis. The arm body (100) is a segmented structure and includes at least two detachably connected segments (110). By adjusting the mass distribution of each of the segments (110), the center of mass of the arm body (100) is positioned close to the rotation axis.

2. The multi-segment robotic arm according to claim 1, characterized in that, The rotation axis is located at one end of the segment (110) of the arm body (100). The segment (110) where the rotation axis is located is defined as the power input segment (111). At least one of the other segments (110) is defined as the weight reduction segment (112). The overall wall thickness or the wall thickness of a part of the weight reduction segment (112) is less than the wall thickness of the power input segment (111).

3. The multi-segment robotic arm according to claim 2, characterized in that, The weight-reducing segment (112) is a segment (110) at the other end of the arm (100) or any segment (110) located between the two ends.

4. The multi-segment robotic arm according to claim 3, characterized in that, When the wall thickness of a portion of the weight-reducing segment (112) is less than the wall thickness of the power input segment (111), the weight-reducing segment (112) includes a first connecting segment (1122) and a second connecting segment (1123) connected together. The first connection segment (1122) includes: The first body (11221) has a first chamber inside and a first opening on the side facing the power input segment (111). The wall thickness of the first body (11221) is less than the wall thickness of the power input segment (111). A connecting plate (11222) is provided at the first opening, and the weight-reducing segment (112) is detachably connected to the segment (110) adjacent to the first opening through the connecting plate (11222).

5. The multi-segment robotic arm according to claim 4, characterized in that, When the weight-reducing segment (112) is a segment (110) at the other end of the arm body (100), the second connecting segment (1123) has a different structure from the first connecting segment (1122); When the weight-reducing segment (112) is any segment (110) located between the two ends, the second connecting segment (1123) has the same or different shape as the first connecting segment (1122).

6. The multi-segment robotic arm according to claim 3, characterized in that, When the overall wall thickness of the weight-reducing segment (112) is less than the wall thickness of the power input segment (111), and the weight-reducing segment (112) is any segment (110) located between the two ends, the weight-reducing segment (112) includes: The central body (1124) has a central cavity inside and central openings on opposite sides along the extension direction of the arm (100). The wall thickness of the central body (1124) is less than the wall thickness of the power input segment (111). Two end plates (1125) are respectively provided at the two central openings, and the weight-reducing segment (112) is detachably connected to the segment (110) adjacent to the central opening through the end plates (1125).

7. The multi-segment robotic arm according to claim 3, characterized in that, When the overall wall thickness of the weight-reducing segment (112) is less than the wall thickness of the power input segment (111), and the weight-reducing segment (112) is a segment (110) at the other end of the arm (100), the weight-reducing segment (112) comprises: The end body (1126) has an end chamber inside and an end opening on the side facing the power input segment (111). The wall thickness of the end body (1126) is less than the wall thickness of the power input segment (111). An end plate (1127) is provided at the end opening, and the weight-reducing segment (112) is detachably connected to the segment (110) adjacent to the end opening through the end plate (1127).

8. The multi-segment robotic arm according to claim 2, characterized in that, When the wall thickness of a portion of the weight-reducing segment (112) is less than the wall thickness of the power input segment (111), the wall thickness of the weight-reducing segment (112) near the axis of rotation is less than the wall thickness of the weight-reducing segment (112) away from the axis of rotation.

9. The multi-segment robotic arm according to any one of claims 2-8, characterized in that, The weight-reducing segment body (112) includes multiple sub-segments (1121), and adjacent sub-segments (1121) are joined by regular or irregular surfaces.

10. The multi-segment robotic arm according to any one of claims 1-8, characterized in that, The two adjacent segments (110) are joined by regular or irregular surfaces.

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