A composite driving device for a mechanical arm and a mechanical arm

Abstract

The application discloses a composite driving device for a mechanical arm and the mechanical arm. The composite driving device comprises a linear motor module, a magnetostrictive module, a transmission slider and a controller. The transmission slider is used for being connected with an execution end of the mechanical arm. The output end of the linear motor module and the output end of the magnetostrictive module are both connected with the transmission slider. The linear motor module and the magnetostrictive module are both electrically connected with the controller. The controller is used for controlling the linear motor module and the magnetostrictive module to work to drive the transmission slider to reciprocatingly move along a set direction. The application can realize large thrust and high-speed displacement through the linear motor module and micron-level precision displacement through the magnetostrictive module. That is, the linear motor module can be used for realizing main motion driving, and the magnetostrictive module can be used for realizing displacement stroke dynamic compensation and end positioning. Therefore, the response speed and the control precision of the execution end of the mechanical arm can be improved.

Description

Technical Field

[0001] This application relates to the field of chip packaging technology, specifically to a composite drive device and a robotic arm for use in robotic arms. Background Technology

[0002] Robotic arms are used throughout the entire chip packaging process. For example, in wafer dicing and die sorting, robotic arms control vacuum nozzle arrays to pick up thousands of dies from a single wafer at once. In flip chip mounting, robotic arms equipped with thermoforming heads are used to precisely place chips onto the substrate before reflow soldering. In finished product testing and packaging, robotic arms are used to transfer packaged chips to testing stations for multi-dimensional testing of electrical and thermal performance before sorting and placing them into slots on tapes or trays. Current technologies generally use linear motor modules to drive the movement of the robotic arm's actuator, which offers advantages such as high repeatability and fast response. However, with the rapid development of automation technology in recent years, chip packaging demands even higher requirements for the rapid response and control precision of robotic arms. Therefore, there is an urgent need for a drive device for robotic arms with higher control precision and response speed. Utility Model Content

[0003] This application aims to address one of the technical problems in the related art to a certain extent. To this end, this application provides a composite drive device for a robotic arm and a robotic arm itself.

[0004] To achieve the above objectives, this application adopts the following technical solution: a composite drive device for a robotic arm, the composite drive device comprising a linear motor module, a magnetostrictive module, a transmission slider, and a controller, the transmission slider being connected to the actuator end of the robotic arm, the output ends of the linear motor module and the magnetostrictive module being connected to the transmission slider, and both the linear motor module and the magnetostrictive module being electrically connected to the controller, the controller being used to control the linear motor module and the magnetostrictive module to work in order to drive the transmission slider to reciprocate along a set direction.

[0005] The application of this application offers the following advantages: the control precision of the magnetostrictive module can reach the nanometer level, and the dynamic response speed can reach the microsecond level, which is higher than that of the linear motor module. The combination of the two allows for high-thrust, high-speed displacement through the linear motor module and micrometer-level precision displacement through the magnetostrictive module. In other words, the main motion drive can be achieved through the linear motor module, while the dynamic compensation of displacement stroke and end-effector positioning can be achieved through the magnetostrictive module. Therefore, compared to existing solutions, the solution of this application can improve the response speed and control precision of the robotic arm's execution end, meeting the current production requirements of chip packaging.

[0006] Optionally, the linear motor module includes a first energizing unit, a moving part unit, and a stator unit. The controller is electrically connected to the first energizing unit and is used to control the first energizing unit to supply power to the moving part unit. The stator unit is integrated into the transmission slider. The magnetostrictive module includes a second energizing unit, a magnetic field generator, and an actuator made of magnetostrictive material. The controller is electrically connected to the second energizing unit and is used to control the second energizing unit to supply power to the magnetic field generator. The actuator is integrated into the transmission slider. The moving part unit and the magnetic field generator are both fixedly mounted on the transmission slider.

[0007] Optionally, the moving part is configured to generate a traveling wave magnetic field between 0.1T and 1.5T when energized, and the magnetic field generator is configured to generate a bias magnetic field between 0.5T and 2T when energized.

[0008] Optionally, the composite drive device further includes a base and a guide rail structure. The guide rail structure, linear motor module, magnetostrictive module, and transmission slider are all disposed on the base, and the guide rail structure extends along the set direction. The guide rail structure is provided with a first guide rail and / or a second guide rail. The transmission slider is configured to slide in cooperation with the first guide rail, and the linear motor module and the magnetostrictive module are both configured to slide in cooperation with the second guide rail.

[0009] Optionally, the composite drive device further includes a displacement measurement module disposed on the base. The displacement measurement module is used to detect the displacement information of the transmission slider. The controller is electrically connected to the displacement measurement module and controls the linear motor module and the magnetostrictive module to work by acquiring the displacement information.

[0010] Optionally, the displacement measurement module is an optical grating ruler or a magnetic grating ruler.

[0011] Optionally, the displacement measurement module is arranged on the base along a set direction and faces the moving subunit and the magnetic field generator. The displacement measurement module obtains the displacement information by detecting the movement stroke of the moving subunit and the magnetic field generator.

[0012] Optionally, the composite drive device further includes a limiting mechanism disposed between the base and the transmission slider, the limiting mechanism including a sensing end fixedly disposed on the base and a trigger end fixedly disposed on the transmission slider.

[0013] Optionally, the triggering end and the sensing end are non-contact triggers, and the sensing end is a photoelectric sensor, a magnetic sensor, or an inductive sensor.

[0014] In addition, this application also provides a robotic arm, including an actuator, the robotic arm further including a composite drive device as described in any one of the above technical solutions, wherein the actuator is disposed on the transmission slider.

[0015] The reasoning process for the beneficial effects of the robotic arm provided in this application is similar to that of the aforementioned composite drive device, and will not be repeated here.

[0016] These features and advantages of this application will be disclosed in detail in the following specific embodiments and accompanying drawings. The best embodiments or means of this application will be shown in detail in conjunction with the accompanying drawings, but are not intended to limit the technical solutions of this application. In addition, each of these features, elements and components appearing in the following text and drawings is multiple and is labeled with different symbols or numbers for convenience, but all represent parts with the same or similar structure or function. Attached Figure Description

[0017] The following description, in conjunction with the accompanying drawings, further illustrates this application:

[0018] Figure 1 A schematic diagram of a composite drive device for a robotic arm provided in an embodiment of this application;

[0019] Figure 2 A schematic diagram of the composite drive device from another perspective;

[0020] Figure 3 This is an exploded view of the composite drive device.

[0021] Among them, 1. Linear motor module; 10. Moving part unit; 2. Magnetostrictive module; 20. Magnetic field generator; 3. Transmission slider; 4. Base; 40. Guide rail structure; 5. Grating ruler; 6. Limiting mechanism; 60. Sensing end; 61. Trigger end. Detailed Implementation

[0022] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described are intended to explain this application and should not be construed as limiting it.

[0023] The terms "an embodiment," "example," or "example" used in this specification refer to a particular feature, structure, or characteristic described in connection with the embodiment itself that may be included in at least one embodiment disclosed in this application. The phrase "in an embodiment" appearing in various places throughout the specification does not necessarily refer to the same embodiment.

[0024] In the description of this application, it should be understood that the terms "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In the description of this application, "a plurality of" means two or more, unless otherwise precisely specified.

[0025] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected," "linked," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a connection through an intermediary, or a connection within two elements or an interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0026] This embodiment provides a composite drive device for a robotic arm, such as... Figure 1 As shown, the composite drive device includes a linear motor module 1, a magnetostrictive module 2, a transmission slider 3, and a controller (not shown in the figure). The transmission slider 3 is connected to the actuator of the robotic arm. The output ends of both the linear motor module 1 and the magnetostrictive module 2 are connected to the transmission slider 3. Both the linear motor module 1 and the magnetostrictive module 2 are electrically connected to the controller, which controls the operation of the linear motor module 1 and the magnetostrictive module 2 to drive the transmission slider 3 to reciprocate along a set direction.

[0027] The magnetostrictive module 2 achieves nanometer-level control precision and microsecond-level dynamic response speed, which are significantly higher than those of the linear motor module 1. Together, the linear motor module 1 enables high-thrust, high-speed displacement, while the magnetostrictive module 2 achieves micrometer-level precision displacement. In other words, the linear motor module 1 provides the main motion drive, while the magnetostrictive module 2 provides dynamic compensation for displacement travel and end-effector positioning. Therefore, compared to existing solutions, the solution presented in this application improves the response speed and control precision of the robotic arm's execution end, meeting current chip packaging production requirements.

[0028] Combination Figure 3As shown, specifically in this embodiment, the linear motor module 1 includes a first energizing unit (not shown), a moving sub-unit 10, and a stator unit (not shown). The controller is electrically connected to the first energizing unit and controls the power supply from the first energizing unit to the moving sub-unit 10. The stator unit is integrated into the transmission slider 3. The magnetostrictive module 2 includes a second energizing unit (not shown), a magnetic field generator 20, and an actuator (not shown) made of magnetostrictive material. The controller is electrically connected to the second energizing unit and controls the power supply from the second energizing unit to the magnetic field generator 20. The actuator is integrated into the transmission slider 3. Both the moving sub-unit 10 and the magnetic field generator 20 are fixedly mounted on the transmission slider 3. Specifically, in this embodiment, both the moving sub-unit 10 and the magnetic field generator 20 are fixedly mounted on the side wall of the transmission slider 3.

[0029] The structures and working principles of both the linear motor module 1 and the magnetostrictive module 2 are existing technologies. In the linear motor module 1, the moving unit 10 mainly includes coil windings, an iron core, and a frame, while the stator unit mainly includes a permanent magnet and an induction secondary. When the moving unit 10 is energized by the first energizing unit, it generates a traveling wave magnetic field. This traveling wave magnetic field, in conjunction with the secondary magnetic field generated by the stator unit, produces a directional thrust, thereby enabling the moving unit 10 and the stator unit to reciprocate synchronously along a set direction. Similarly, in the magnetostrictive module 2, the magnetic field generator 20 mainly includes an excitation coil and a permanent magnet. The magnetic coil generates a magnetic field when energized by the second energizing unit, and the permanent magnet provides a bias magnetic field, enhancing the linearity of the response. In this embodiment, the actuator in the magnetostrictive module 2 is made of an iron-gallium alloy, exhibiting a magnetostrictive effect, thus enabling the magnetic field generator 20 and the actuator to reciprocate synchronously along a set direction.

[0030] In this embodiment, the moving subunit 10 is configured to generate a traveling wave magnetic field between 0.1T and 1.5T after being energized, and the magnetic field generator 20 is configured to generate a bias magnetic field between 0.5T and 2T after being energized.

[0031] like Figure 1 As shown, the composite drive device provided in this embodiment also includes a base 4 and a guide rail structure 40. The guide rail structure 40, the linear motor module 1, the magnetostrictive module 2, and the transmission slider 3 are all disposed on the base 4, and the guide rail structure 40 extends along a set direction. That is, the set direction is the length direction of the guide rail structure 40. In this embodiment, the guide rail structure 40 includes a first guide rail, and the transmission slider 3 is configured to slide in cooperation with the first guide rail. In other optional embodiments, the guide rail structure 40 may also include a second guide rail, and the linear motor module 1 and the magnetostrictive module 2 are both configured to slide in cooperation with the second guide rail. It is easy to understand that the first guide rail and the second guide rail can be provided simultaneously, or only one of them needs to be provided.

[0032] By setting the guide rail structure 40, the stability of the transmission slider 3 during the sliding process can be improved, and the displacement accuracy of the transmission slider 3 can be further improved.

[0033] Furthermore, in combination Figure 1 and Figure 3 As shown, the composite drive device provided in this embodiment also includes a displacement measurement module disposed on the base 4. The displacement measurement module is used to detect the displacement information of the transmission slider 3. The controller is electrically connected to the displacement measurement module and controls the linear motor module 1 and the magnetostrictive module 2 to work based on the acquired displacement information. By setting the displacement measurement module, the displacement information of the transmission slider 3 can be detected in real time during the movement of the drive slider 3. The controller acquires the displacement information of the transmission slider 3 in real time and controls the linear motor module 1 and the magnetostrictive module 2 to work based on the displacement information, which can improve the control accuracy and repeatability of the composite drive device.

[0034] In this specific embodiment, the displacement measurement module is an optical grating ruler 5. In other optional embodiments, the displacement measurement module can also be a magnetic grating ruler. The structure and working principle of the optical grating ruler 5 or the magnetic grating ruler are existing technologies and will not be described in detail here.

[0035] Furthermore, combining Figure 1 and Figure 3 As shown, in this embodiment, the grating ruler 5 is arranged on the base 4 along a set direction and faces the moving sub-unit 10 and the magnetic field generator 20. The grating ruler 5 obtains displacement information by detecting the movement stroke of the moving sub-unit 10 and the magnetic field generator 20. The above structural design facilitates the installation of the grating ruler 5, the moving sub-unit 10, and the magnetic field generator 20 relative to the base 4.

[0036] like Figure 2 As shown, the composite drive device provided in this embodiment also includes a limiting mechanism 6 disposed between the base 4 and the transmission slider 3. The limiting mechanism 6 includes a sensing end 60 fixedly disposed on the base 4 and a trigger end 61 fixedly disposed on the transmission slider 3. By setting the limiting mechanism 6, the stroke of the transmission slider 3 can be limited, preventing the transmission slider 3 from falling off relative to the base 4 or causing the actuator on the robotic arm to move beyond its limit position.

[0037] In this specific embodiment, the trigger end 61 and the sensing end 60 are non-contact triggers, and the sensing end 60 is a photoelectric sensor. In other optional embodiments, the sensing end 60 can also be a magnetic sensor or an inductive sensor. It is easy to understand that in other optional embodiments, the trigger end 61 and the sensing end 60 can also be contact triggers, such as designing the trigger end 61 as a push plate and the sensing end 60 as a sensor with a button.

[0038] The composite drive device provided in this embodiment can be applied to a robotic arm, which includes an actuator end disposed on a transmission slider 3. When using this robotic arm, the controller can control the operation of the first and second energizing units, thereby driving the transmission slider 3 to move the actuator end reciprocally along a set direction. High-thrust, high-speed displacement can be achieved through the linear motor module 1, corresponding to the main motion drive; micron-level precision displacement can be achieved through the magnetostrictive module 2, corresponding to dynamic compensation and end-effector positioning of the transmission slider 3. This improves the response speed and control precision of the robotic arm's actuator end to meet current chip packaging production requirements.

[0039] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Those skilled in the art should understand that this application includes, but is not limited to, the contents described in the accompanying drawings and the specific embodiments above. Any modifications that do not depart from the functional and structural principles of this application will be included within the scope of the claims.

Claims

1. A composite drive device for a robotic arm, characterized in that, The composite drive device includes a linear motor module, a magnetostrictive module, a transmission slider, and a controller. The transmission slider is connected to the actuator end of the robotic arm. The output ends of the linear motor module and the magnetostrictive module are both connected to the transmission slider. Furthermore, the linear motor module and the magnetostrictive module are electrically connected to the controller. The controller is used to control the operation of the linear motor module and the magnetostrictive module to drive the transmission slider to reciprocate along a set direction.

2. The composite drive device as described in claim 1, characterized in that, The linear motor module includes a first energizing unit, a moving part unit, and a stator unit. The controller is electrically connected to the first energizing unit and is used to control the first energizing unit to supply power to the moving part unit. The stator unit is integrated into the transmission slider. The magnetostrictive module includes a second energizing unit, a magnetic field generator, and an actuator made of magnetostrictive material. The controller is electrically connected to the second energizing unit and is used to control the second energizing unit to switch power on and off to the magnetic field generator. The actuator is integrated into the transmission slider. Both the moving part and the magnetic field generator are fixedly mounted on the transmission slider.

3. The composite drive device as described in claim 2, characterized in that, The moving subunit is configured to generate a traveling wave magnetic field between 0.1T and 1.5T when energized, and the magnetic field generator is configured to generate a bias magnetic field between 0.5T and 2T when energized.

4. The composite drive device as described in claim 2, characterized in that, The composite drive device also includes a base and a guide rail structure. The guide rail structure, linear motor module, magnetostrictive module and transmission slider are all disposed on the base, and the guide rail structure extends along the set direction. The guide rail structure is provided with a first guide rail and / or a second guide rail, the transmission slider is configured to slide in cooperation with the first guide rail, and the linear motor module and the magnetostrictive module are both configured to slide in cooperation with the second guide rail.

5. The composite drive device as described in claim 4, characterized in that, The composite drive device also includes a displacement measurement module disposed on the base. The displacement measurement module is used to detect the displacement information of the transmission slider. The controller is electrically connected to the displacement measurement module and controls the linear motor module and the magnetostrictive module to work by acquiring the displacement information.

6. The composite drive device as described in claim 5, characterized in that, The displacement measurement module is an optical grating ruler or a magnetic grating ruler.

7. The composite drive device as described in claim 6, characterized in that, The displacement measurement module is arranged on the base along a set direction and faces the moving subunit and the magnetic field generator. The displacement measurement module obtains the displacement information by detecting the movement stroke of the moving subunit and the magnetic field generator.

8. The composite drive device as described in claim 4, characterized in that, The composite drive device further includes a limiting mechanism disposed between the base and the transmission slider. The limiting mechanism includes a sensing end fixedly disposed on the base and a trigger end fixedly disposed on the transmission slider.

9. The composite drive device as described in claim 8, characterized in that, The triggering end and the sensing end are non-contact triggering, and the sensing end is a photoelectric sensor, a magnetic sensor, or an inductive sensor.

10. A robotic arm, comprising an actuator, characterized in that, The robotic arm further includes a composite drive device as described in any one of claims 1 to 9, wherein the actuating end is disposed on the transmission slider.

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