A mold for a belt vacuum seal

Abstract

This utility model employs the following technical solution: a mold for a strip-shaped vacuum seal, comprising an upper mold, a lower mold, and a middle layer plate. The middle layer plate is embedded between the upper and lower molds, and its edge is used to wrap a woven fabric. The middle layer plate is provided with ejector pins for fixing the woven fabric. The inner walls of both the upper and lower molds are provided with ejector pin grooves that mate with the ejector pins. The middle layer plate is provided with inserts, and the inner walls of both the upper and lower molds are provided with insert grooves that match the inserts. The upper mold has a cavity for placing a metal part, thereby achieving the connection between the rubber and the metal part after vulcanization. This utility model can simultaneously achieve a precise combination of three materials: metal part, woven fabric, and rubber, meeting the special structural requirements of semiconductor equipment vacuum tubes with "woven fabric on the inner wall, rubber on the outer side, and metal part connection."

Description

Technical Field

[0001] This utility model relates to the field of pipeline molds, and in particular to a mold for a strip-shaped vacuum seal. Background Technology

[0002] In the field of semiconductor equipment, vacuum tubes, as key components, often require a rectangular tubular composite structure with an inner fabric layer, an outer rubber layer, and a metal component at the top. However, existing technologies lack specialized molds that can effectively combine the three different materials—metal, fabric, and rubber—into a mold that is difficult to produce efficiently and stably, failing to meet the manufacturing needs of related semiconductor equipment and hindering industry development. Therefore, there is an urgent need for a mold that can combine multiple materials to fill this market gap. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a mold for a strip-shaped vacuum seal, which can simultaneously achieve a precise combination of three materials: metal, fabric, and rubber, thus meeting the special structural requirements of semiconductor equipment vacuum tubes, which have "fabric on the inner wall, rubber on the outer side, and connected metal parts".

[0004] This utility model is achieved using the following technical solution: a mold for a strip-shaped vacuum seal, comprising an upper mold, a lower mold, and a middle layer plate. The middle layer plate is embedded between the upper mold and the lower mold, and the edge of the middle layer plate is used to wrap around the woven fabric. The middle layer plate is provided with ejector pins for fixing the woven fabric. The inner walls of both the upper and lower molds are provided with ejector pin grooves that mate with the ejector pins. The middle layer plate is provided with inserts. The inner walls of both the upper and lower molds are provided with insert grooves that match the inserts. The upper mold is provided with a cavity for placing a metal part to achieve the connection between the rubber and the metal part after vulcanization.

[0005] Preferably, the ejector pin is disposed vertically through the middle layer plate near the edge, and the ejector pin is used to insert the fabric surrounding the edge of the middle layer plate to achieve stable fixation of the fabric on the middle layer plate.

[0006] Preferably, the inserts are respectively set at the upper and lower ends of the middle layer plate, and the shape and size of the insert groove are adapted to the insert. After the mold is closed, the insert is embedded in the insert groove to achieve the initial positioning of the middle layer plate with the upper and lower molds.

[0007] Preferably, it also includes screws. The bottom of the mold lower part is provided with a hole for screw insertion, and the outer side of the insert is provided with a locking hole. The screw passes through the hole at the bottom of the mold lower part and is inserted into the locking hole to achieve a fixed connection between the mold lower part and the insert.

[0008] Preferably, it also includes a guide pin, which is fixedly disposed on the inner wall of the upper mold. The upper end of the insert is provided with a positioning hole. During the mold closing process, the guide pin is inserted into the positioning hole to realize the guiding and positioning of the upper mold and the insert.

[0009] Preferably, the cavity is located at the upper edge of the upper mold, and the shape and size of the cavity are adapted to the metal part to be placed, and when the metal part is placed in the cavity, the bottom of the metal part can mate with the rubber placed at the upper end of the middle layer plate.

[0010] Preferably, handles are fixedly connected to the outer sides of both the upper and lower molds, and the handles are used to facilitate the opening and closing of the mold.

[0011] The mold of this utility model achieves the following beneficial effects through its layered structure design and the cooperation of ejector pins and cavities: (1) This utility model can simultaneously achieve precise combination of three materials: metal parts, fabric, and rubber, to meet the special structural requirements of the vacuum tube of semiconductor equipment: "fabric on the inner wall, rubber on the outer side and connected to metal parts".

[0012] (2) This utility model can use ejector pins to fix the fabric and position the metal parts of the cavity, and cooperate with the inserts and the upper and lower molds to lock and limit the relative position accuracy of each material during the mold closing and vulcanization process, so that the vacuum tube structure after molding is more accurate and the quality is more stable.

[0013] (3) This utility model simplifies the production process through the integrated design of the mold, eliminating the need for subsequent separate assembly of metal parts and rubber-woven fabric components, greatly improving production efficiency, and filling the gap in the market for this type of special mold. Attached Figure Description

[0014] Figure 1 This is a structural illustration of the present utility model; Figure 2 This is a cross-sectional view showing the relationship between the middle layer plate and the upper and lower molds of this utility model. Figure 3 This is a top-down view of the structure of the mold of this utility model; Figure 4 This is a top view of the middle layer structure of this utility model.

[0015] Explanation of key symbols: 1-Upper mold, 2-Lower mold, 3-Middle plate, 4-Ejector pin, 41-Ejector pin slot, 5-Insert, 51-Insert slot, 52-Locking hole, 53-Screw, 54-Positioning hole, 55-Guide pin, 6-Metal cavity, 7-Handle. Detailed Implementation

[0016] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0017] In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] Please combine Figure 1-4 The mold of this utility model is used for forming rectangular tubular vacuum tubes for semiconductor equipment. It needs to achieve a composite structure of "woven fabric on the inner wall, rubber on the outer side, and connecting metal parts". It includes an upper mold 1, a lower mold 2, and a middle plate 3, with the middle plate 3 embedded between the upper and lower molds.

[0021] The edge of the middle layer plate 3 is pre-wrapped with woven fabric. To fix the woven fabric, ejector pins 4 are fixedly installed at the top and bottom near the edge of the middle layer plate 3. When the woven fabric is wrapped around the edge of the middle layer, the ejector pins 4 are inserted into the woven fabric to achieve stable fixation. Ejector pin grooves 41 are provided on the inner walls of the upper mold 1 and the lower mold 2 of the mold to connect with the ejector pins 4, which facilitates smooth mold closing in the future.

[0022] The middle layer plate 3 is provided with inserts 5 on the upper and lower parts, which are used for connection or guidance between the upper mold 1 and the lower mold 2. The inner walls of the upper mold 1 and the lower mold 2 are provided with insert grooves 51 that match the inserts 5, so that the inserts 5 can be placed in the insert grooves 51 after the mold is closed to achieve initial positioning. The inserts 5 are connected to the bottom of the lower mold 2 by screws 53 and are connected to the locking holes 52 on the outside of the inserts 5 to complete the fixed connection between the lower mold 2 and the inserts 5. During the process of the upper mold 1 connecting to the lower mold 2, the inner wall of the upper mold 1 is also provided with guide pins 55 which are inserted into the guide holes 54 at the upper end of the inserts 5 to achieve guidance and positioning, and ensure the stability and positional accuracy of the middle layer plate 3 structure installation.

[0023] In addition, a cavity 6 is provided at the upper edge of the upper mold 1. The cavity 6 is used to place metal parts so that the metal parts can be connected to the rubber after the rubber is vulcanized.

[0024] Based on the above structural design, the specific steps for producing rectangular tubular composite structures in actual use are as follows: S1, Fabric fixing: Wrap the fabric around the edge of the middle layer plate 3, and use the pins 4 on the middle layer plate 3 to insert the fabric to achieve stable fixing of the fabric at the edge of the middle layer plate 3.

[0025] S2, Rubber Placement: Rubber is placed on the upper end of the middle layer plate 3, and rubber is also placed on the upper end of the lower mold 2. At this time, the rubber placed on the upper end of the middle layer plate 3 is in contact with the upper end of the fabric wrapped around the edge of the middle layer plate 3, and the rubber placed on the upper end of the lower mold 2 is in contact with the bottom of the fabric wrapped around the edge of the middle layer plate 3.

[0026] S3, Metal part placement: Place a metal part in the cavity 6 at the bottom of the upper mold 1, with the bottom of the metal part abutting against the rubber placed on the upper end of the middle plate 3.

[0027] S4, Mold Closure and Vulcanization: The upper mold 1, middle layer plate 3, and lower mold 2 are closed together, followed by rubber vulcanization. During vulcanization, the rubber at the upper and lower ends of the middle layer plate 3 is tightly bonded to the upper and lower ends of the woven fabric, and the metal parts in the cavity 6 of the upper mold 1 are effectively connected to the rubber, finally forming a semiconductor equipment vacuum tube that meets the requirements (the inner wall is woven fabric, the outer side is rubber and connected with metal parts).

[0028] Through the above mold structure and molding process, the integrated molding of metal parts, fabric and rubber is achieved, which meets the special production requirements of vacuum tubes for semiconductor equipment.

[0029] The above embodiments are preferred embodiments of the present utility model, but the embodiments of the present utility model are not limited to the above embodiments. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of the present utility model shall be considered equivalent substitutions and shall be included within the protection scope of the present utility model.

[0030] In the description of this utility model, it should be understood that the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

Claims

1. A mold for a strip-shaped vacuum seal, comprising an upper mold (1), a lower mold (2), and a middle layer plate (3), wherein the middle layer plate (3) is embedded between the upper mold (1) and the lower mold (2), and the edge of the middle layer plate (3) is used to surround and wrap a woven fabric, characterized in that: The middle layer plate (3) is provided with ejector pins (4) for fixing the fabric. The inner walls of the upper mold (1) and the lower mold (2) are provided with ejector pin grooves (41) that connect with the ejector pins (4). The middle layer plate (3) is provided with inserts (5). The inner walls of the upper mold (1) and the lower mold (2) are provided with insert grooves (51) that match the inserts (5). The upper mold (1) is provided with a cavity (6) for placing metal parts to achieve the connection between the rubber and the metal parts after vulcanization.

2. The mold for a strip-shaped vacuum seal according to claim 1, characterized in that, The pin (4) is disposed vertically through the middle layer plate (3) near the edge. The pin (4) is used to insert the fabric surrounding the edge of the middle layer plate (3) to achieve stable fixation of the fabric on the middle layer plate (3).

3. The mold for a strip-shaped vacuum seal according to claim 2, characterized in that, The inserts (5) are respectively set at the upper and lower ends of the middle layer plate (3). The shape and size of the insert groove (51) are adapted to the inserts (5). After the mold is closed, the inserts (5) are embedded in the insert groove (51) to achieve the initial positioning of the middle layer plate (3) with the upper mold (1) and the lower mold (2).

4. The mold for a strip-shaped vacuum seal according to claim 3, characterized in that, It also includes screws (53), the bottom of the mold lower part (2) is provided with a hole for screws (53) to be inserted, and the outer side of the insert (5) is provided with a locking hole (52). The screws (53) pass through the hole at the bottom of the mold lower part (2) and are inserted into the locking hole (52) to realize the fixed connection between the mold lower part (2) and the insert (5).

5. The mold for a strip-shaped vacuum seal according to claim 4, characterized in that, It also includes a guide pin (55), which is fixedly set on the inner wall of the upper mold (1). The upper end of the insert (5) is provided with a positioning hole (54). During the mold closing process, the guide pin (55) is inserted into the positioning hole (54) to realize the guiding positioning of the upper mold (1) and the insert (5).

6. The mold for a strip-shaped vacuum seal according to claim 5, characterized in that, The cavity (6) is located at the upper edge of the mold upper part (1). The shape and size of the cavity (6) are adapted to the metal part to be placed. When the metal part is placed in the cavity (6), the bottom of the metal part can connect with the rubber placed on the upper end of the middle layer plate (3).

7. The mold for a strip-shaped vacuum seal according to claim 6, characterized in that, Both the upper mold (1) and the lower mold (2) are fixedly connected to handles (7), which are used to facilitate the opening and closing of the mold.

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