An ampoule exhaust end structure

Abstract

The application discloses an ampoule exhaust end structure, which comprises a support frame, a support part of which supports an ampoule body; and a flexible compensation pipe, which has axial, radial and angular compensation capabilities, and is provided with a first joint and a second joint in sealed communication with the pipe, the first joint is arranged on the support frame and is externally connected with a vacuum system, the second joint is located below the first joint and is in sealed connection with a transition quartz pipe on the ampoule. The axial, radial and angular compensation capabilities of the flexible compensation pipe can reduce the installation difficulty of the quartz ampoule and its internal filler when the total weight of the quartz ampoule and the internal filler is relatively large, and can avoid the breakage risk caused by the large included angle between the transition quartz pipe and the ampoule axis.

Description

Technical Field

[0001] This application relates to the field of ampoule venting technology, and in particular to an ampoule venting end structure. Background Technology

[0002] An ampoule is a type of fusible hard glass container, often used as a container for crystal growth. For example, in the preparation of zinc cadmium telluride (Cd), Te, and Zn or ZnTe are weighed and placed into a quartz ampoule. After that, gas venting and high-temperature tail-end closure of the quartz ampoule are required.

[0003] Currently, the high-temperature tail-end closure of quartz ampoules is generally achieved by connecting a transition quartz tube to the narrow end of the quartz ampoule. The transition quartz tube is connected to a vacuum pump via a vacuum connector. After the gas inside the quartz ampoule is discharged to the target value, the narrower part of the transition quartz tube is softened and narrowed at high temperature. Then, the ampoule can be removed as a whole, and a second narrowing is performed along the tail end of the ampoule (which is much thicker than the transition quartz tube) to finally achieve a seal. During the connection process between the transition quartz tube and the vacuum connector, the position of the vacuum connector is relatively fixed. The quartz ampoule is gradually raised until the transition quartz tube is inserted into the vacuum connector. Then, the quartz ampoule is supported and fixed, and a vacuum seal is installed between the transition quartz tube and the vacuum connector.

[0004] When the total weight of the quartz ampoule and its internal filler is small, inserting the transition quartz tube into the vacuum connector is relatively easy. However, as the size of the quartz ampoule increases and the weight of the internal filler increases (reaching 5 kg, 10 kg, or even more), the process of inserting the transition quartz tube into the vacuum connector becomes more difficult. Furthermore, the thinness and length of the transition quartz tube increase the risk of breakage. In addition, since the connection between the transition quartz tube and the quartz ampoule usually requires manual operation, there is a certain degree of installation error. This can easily lead to an angle between the axis of the transition quartz tube and the axis of the quartz ampoule. After the transition quartz tube is connected to the vacuum connector, there is a large torque at the end of the transition quartz tube. This risk of breakage is particularly high when the quartz ampoule is not stably supported, or when the ampoule is large and its internal filler is heavy.

[0005] Therefore, in response to the above problems, how to reduce the installation difficulty and the risk of breakage of the transition quartz tube is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0006] The purpose of this application is to provide an ampoule exhaust end structure that utilizes the axial, radial, and angular compensation capabilities of the flexible compensation tube to reduce the installation difficulty when the total weight of the quartz ampoule and its internal filler is large, and to avoid the risk of breakage caused by a large angle between the transition quartz tube and the ampoule axis.

[0007] To achieve the above objectives, this application provides an ampoule exhaust end structure, comprising:

[0008] A support frame, wherein the support frame is provided with a support portion for supporting the ampoule body;

[0009] The flexible compensation tube has at least axial, radial and angular compensation capabilities. The flexible compensation tube has a first connector and a second connector at both ends that are sealed and connected to it. The first connector is located on the support frame and is externally connected to a vacuum system. The second connector is located below the first connector and is sealed and connected to the transition quartz tube on the ampoule.

[0010] Optionally, the flexible compensation tube includes a corrugated pipe, with the first connector and the second connector connected to both ends of the corrugated pipe.

[0011] Optionally, the support frame includes a base, and the support portion includes:

[0012] A vertical rod is mounted on the base.

[0013] A bottom support is provided on the vertical rod and arranged in a horizontal direction, and the ampoule is placed on the bottom support;

[0014] A side support is provided on the vertical rod, and the side support can be opened and closed to clamp the body of the ampoule.

[0015] Optionally, the bottom bracket is movably mounted on the vertical rod in the height direction to adjust the height of the bottom bracket, and the bottom bracket is rotatably mounted relative to the vertical rod to adjust the angle between the bottom bracket and the horizontal plane.

[0016] Optionally, the side bracket is movably mounted on the vertical rod in the height direction, and the clamping ends of the side bracket are either far apart or close together in the horizontal direction.

[0017] Optionally, the clamping end has a clamping portion adapted to the outer contour of the ampoule.

[0018] Optionally, the second connector is provided with a vertical second through hole, which seals and connects the transition quartz tube and the flexible compensation tube.

[0019] Optionally, the first connector is provided with a first through hole, which is a sealed connection between the vacuum system and the flexible compensation tube.

[0020] Optionally, the vertical rod is provided with a horizontally extending support rod, the first joint is provided on the support rod, and the support rod is rotatably connected to the vertical rod; or, the first joint is rotatably connected to the support rod so that the first joint rotates around a preset horizontal rotation axis.

[0021] Optionally, the vertical rod is provided with a limiting ring sleeved on the outer periphery of the flexible compensation tube, and the limiting ring is spaced apart from the flexible compensation tube.

[0022] The beneficial effects of this application are as follows: The axial compensation capability of the flexible compensation tube allows the second connector to move axially. When the total weight of the ampoule and its internal filler is large, the second connector can be pulled to align with the transition quartz tube, reducing the installation difficulty of inserting the transition quartz tube into the second connector. The radial compensation capability of the flexible compensation tube prevents the second connector from misaligning with the transition quartz tube in the radial direction, preventing the transition quartz tube from breaking due to radial torque. The angular compensation capability of the flexible compensation tube allows the axis of the second connector to be aligned with the axis of the transition quartz tube. Even if there is an angle between the ampoule and the transition quartz tube, the second connector can still be coaxially aligned with the transition quartz tube, avoiding torque at the end of the transition quartz tube and reducing the risk of breakage. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0024] Figure 1 This is an isometric view of the ampoule exhaust end structure provided in an embodiment of this application;

[0025] Figure 2 This is an isometric view of the ampoule exhaust end structure provided in the embodiment of this application;

[0026] Figure 3 This is a front view of the ampoule exhaust end structure provided in an embodiment of this application;

[0027] Figure 4 This is a schematic diagram of the connection structure between the first connector and the support rod provided in an embodiment of this application.

[0028] In the diagram: 1-Support frame; 2-Ampoule; 3-Transition quartz tube; 4-Flexible compensation tube; 5-First connector; 6-Second connector; 7-Limiting ring; 8-Support rod;

[0029] 11-Base; 12-Bottom support; 13-Vertical rod; 14-Side support; 141-First slide rod; 142-Second slide rod; 143-Clamping end;

[0030] 51 - First through hole. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] It should be noted that in this embodiment, the orientation or positional relationship indicated by terms such as "upper," "lower," "front," and "rear" is based on the orientation or positional relationship shown in the accompanying drawings. It is used only for the convenience of describing this application and for simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application. Furthermore, "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] To enable those skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0034] like Figures 1 to 4 As shown, this embodiment provides an ampoule venting end structure, which includes a support frame 1 and a flexible compensation tube 4. The support frame 1 serves as the main load-bearing component, and a support portion for supporting the ampoule 2 is provided on the support frame 1. The specific form of the support frame 1 and the support portion is not limited here, as long as it ensures that the ampoule 2 can be stably placed on the support frame 1, and that the narrow end of the ampoule 2 faces upward. Furthermore, a transition quartz tube 3 can be connected to the narrow end of the ampoule 2.

[0035] The flexible compensation tube 4 is located on the upper side of the ampoule 2. The flexible compensation tube 4 has at least axial, radial and angular compensation capabilities. Axial compensation capability means that the flexible compensation tube 4 has a certain ability to deform and expand in the axial direction; radial compensation capability means that the flexible compensation tube 4 has the ability to deform and deflect in the direction perpendicular to the axial direction; angular compensation capability means that the two ends of the flexible compensation tube 4 can be deflected relative to each other, so that the included angle formed by the axes of the two ends changes.

[0036] It should be noted that the compensation capacity of the flexible compensation pipe 4 can be the capacity formed by the characteristics of the pipe itself, or it can be the capacity formed by devices such as rotary compensators and spherical compensators installed on the pipe. As long as the axial, radial and angular compensation capacity can be achieved, they all fall within the protection scope of this application.

[0037] A first connector 5 and a second connector 6 are respectively provided at both ends of the flexible compensation tube 4 and are sealed and connected to it. Since the flexible compensation tube 4 has axial, radial and angular compensation capabilities, the first connector 5 and the second connector 6 will move relative to each other in the axial, radial and angular directions. The first connector 5 is set on the support and is externally connected to a vacuum system. The second connector 6 is located below the first connector 5 and is used to seal and connect with the transition quartz tube 3 on the ampoule 2.

[0038] When the total weight of ampoule 2 and its internal filler is large, it is not easy to lift ampoule 2 upwards to connect the transition quartz tube 3 with the second connector 6. In this case, the second connector 6 can be pulled downwards (lifted and then pulled down) to actively connect the second connector 6 with the transition quartz tube 3, reducing the difficulty of installation. When the transition quartz tube 3 and the thin end of ampoule 2 are coaxial, that is, there is no included angle between the thin end of transition quartz tube 3 and ampoule 2 (the included angle is zero), but due to the possible deviation in the placement position of ampoule 2, the transition quartz tube 3 and the second connector 6 may not be coaxial in the axial direction. In this case, the second connector 6 can be pushed to move radially, so that the second connector 6 and the transition quartz tube 3 can be connected coaxially, avoiding the large torque generated by the second structure and the transition quartz tube 3 due to axial misalignment, which could cause the transition quartz tube 3 to break.

[0039] When there is an angle between the transition quartz tube 3 and the narrow end of ampoule 2, please refer to... Figure 3 At this time, there is an angle between the axis of the transition quartz tube 3 and the axis of the second connector 6. The second connector 6 can be rotated by a certain angle so that the axis of the second connector 6 is coaxial with the axis of the transition quartz tube 3, thereby avoiding the generation of a large torque at the end of the transition quartz tube 3 and preventing the transition quartz tube from breaking.

[0040] In summary, this application utilizes the axial compensation capability of the flexible compensation tube 4 to allow the second connector 6 to move axially. When the total weight of the ampoule 2 and its internal filler is large, the second connector 6 can be pulled to align with the transition quartz tube 3, reducing the installation difficulty of inserting the transition quartz tube 3 into the second connector 6. The radial compensation capability of the flexible compensation tube 4 prevents the second connector 6 from radially offset from the transition quartz tube 3, preventing the transition quartz tube 3 from breaking due to radial torque. The angular compensation capability of the flexible compensation tube 4 allows the axis of the second connector 6 to be aligned with the axis of the transition quartz tube 3. Even if there is an angle between the ampoule 2 and the transition quartz tube 3, the second connector 6 can still be coaxially aligned with the transition quartz tube 3, avoiding torque at the end of the transition quartz tube 3 and reducing the risk of breakage.

[0041] In some embodiments, the flexible compensation tube 4 can be a corrugated tube or a tube with a corrugated tube, such as a high-pressure explosion-proof tube. The two ends of the corrugated tube are respectively connected to the first connector 5 and the second connector 6. The corrugated tube itself has axial, radial and angular compensation capabilities. The second connector 6 is not constrained in other directions except the circumferential direction, thereby allowing for more flexible adjustment of the position of the second connector 6 relative to the transition quartz tube 3.

[0042] It should be noted that when selecting a corrugated pipe, it is important to avoid pipes that are too soft or too hard. If the pipe is too soft, it will shrink during the vacuuming process, creating tension on the transition quartz tube 3. If it is too hard, there will be resistance during the installation of the second connector 6. The actual softness or hardness of the corrugated pipe can be selected based on the specific application conditions; no further restrictions are imposed here. Once a suitable corrugated pipe is selected, it will exert only a very small force on the transition quartz tube 3 after vacuuming, without affecting its use.

[0043] Please refer to Figure 1 and Figure 2 The support frame 1 includes a base 11, and the support portion includes a vertical rod 13, a bottom bracket 12, and a side bracket 14 disposed on the base 11. The vertical rod 13 is fixedly disposed on the base 11 and is arranged vertically. The bottom bracket 12 is disposed at a certain height of the vertical rod 13 and extends horizontally, thereby providing a stable placement platform for the ampoule 2. In some embodiments, the support surface of the bottom bracket 12 should be a horizontal plane to ensure the stability and levelness of the ampoule 2.

[0044] The side support 14 is also set on the vertical rod 13, but the height of the side support 14 should be higher than that of the bottom support 12. The side support 14 can be opened and closed to clamp the outer periphery of the ampoule 2, thereby preventing the ampoule 2 from tilting or skewing, and ensuring the overall stability and safety of the ampoule 2.

[0045] Furthermore, the bottom support 12 is movably mounted on the vertical rod 13 in the height direction, facilitating the adjustment of the height of the ampoule 2 and the transition quartz tube 3, thereby making it easier for the transition quartz tube 3 to mate with the second connector 6. For example, the bottom support 12 can be mounted on the vertical rod 13 via a fixing ring and screws. The fixing ring is sleeved on the outer circumference of the vertical rod 13. When the screws are loosened, the bottom support 12 can move in the height direction. When the screws are tightened, the bottom support 12 is fixed on the vertical rod 13, providing a stable support platform for the ampoule 2.

[0046] Furthermore, since there is a certain angle between the thin end of the ampoule 2 and the transition quartz tube 3, the transition quartz tube 3 can be made more vertical by adjusting the support surface of the bottom bracket 12. This also ensures that the transition quartz tube 3 is coaxial with the second connector 6, and the transition quartz tube 3 will not be subjected to additional radial torque. Specifically, the bottom bracket 12 can be rotated relative to the vertical rod 13, thereby adjusting the angle between the support surface of the bottom bracket 12 and the horizontal plane, so that the ampoule 2 is placed slightly tilted. The support surface of the bottom bracket 12 can be rotatably connected to the aforementioned fixing ring via a rotating shaft, and a locking device is provided on the support surface or fixing ring of the bottom bracket 12. After the support surface of the bottom bracket 12 rotates a certain angle, it is locked to the fixing ring by the locking device, thereby ensuring the stability of the support surface.

[0047] The side support 14 is also movably mounted on the vertical rod 13 in the height direction. The clamping ends 143 of the side support 14 can move away from or closer to each other in the horizontal direction, thereby achieving the release or clamping of the ampoule 2. Further, the side support 14 includes a first slide rod 141 mounted on the vertical rod 13 and a second slide rod 142 mounted on the first slide rod 141. The connection method between the first slide rod 141 and the vertical rod 13 can refer to the connection method between the bottom support 12 and the vertical rod 13 described above, and will not be repeated here. The first slide rod 141 is provided with guide components such as slide grooves and slide rails arranged horizontally. The second slide rod 142 is slidably mounted on the first slide rod 141 through these guide components. Similarly, the second slide rod 142 can also be provided with guide components such as slide grooves and slide rails. The clamping end 143 is movably mounted on the second slide rod 142 through these guide components.

[0048] When the second slide rod 142 slides on the first slide rod 141, the clamping end 143 can gradually reach or gradually move away from the outer periphery of the ampoule 2, facilitating the loading and unloading of the ampoule 2. When the clamping end 143 slides on the second slide rod 142, the two clamping ends 143 can move closer or further apart, achieving clamping or releasing of the ampoule 2. To ensure the clamping effect of the clamping end 143 on the ampoule 2, a clamping part adapted to the outer contour of the ampoule 2 can be provided on the clamping surface of the clamping end 143. The clamping part can be arc-shaped and made of a material with a high coefficient of friction to improve the clamping effect. In addition, anti-slip textures can be added to the clamping part to further improve the friction between the clamping part and the ampoule 2.

[0049] A vertical second through hole is provided on the second connector 6, which seals and connects the transition quartz tube 3 and the flexible compensation tube 4; a first through hole 51 is provided on the first connector 5, which seals and connects the vacuum system and the flexible compensation tube 4, thereby ensuring that the inside of the ampoule 2 can be connected to the vacuum system and realize the vacuuming of the ampoule 2.

[0050] Please refer to Figure 2A horizontally extending support rod 8 is provided on the vertical rod 13, and the first connector 5 is disposed on the support rod 8. In some embodiments, the first connector 5, the support rod 8, and the vertical rod 13 can be fixedly connected to ensure the overall stability of the flexible compensation tube 4 and improve the connection effect between the flexible compensation tube 4 and the transition quartz tube 3. However, considering that the tension generated by the corrugated tube during the vacuuming process will provide a certain degree of rotation angle to the quartz transition tube, in order to make the flexible compensation tube 4 more adaptable to the rotation angle of the transition quartz tube 3, the first connector 5 can be rotatably disposed. For example, the first connector 5 can be fixed on the support rod 8, and the support rod 8 can be rotatably connected to the vertical rod 13; or the support rod 8 can be fixed on the vertical rod 13, and the first connector 5 can be fixedly connected to the support rod 8, so that the first connector 5 can rotate around a preset horizontal rotation axis. Please refer to Figure 4 The preset horizontal rotation axis can be the support rod 8 itself.

[0051] The rotatable connection between the support rod 8 and the vertical rod 13 or the rotatable connection between the first joint 5 and the support rod 8 can be achieved through bearings, shoulder bolts or linkage mechanisms, etc. For details, please refer to the rotatable connection methods in the prior art, which will not be elaborated here.

[0052] A limiting ring 7 is also provided on the vertical rod 13 and sleeved on the outer periphery of the flexible compensation tube 4. The limiting ring 7 is spaced apart from the flexible compensation tube 4 and does not affect the normal compensation function of the flexible compensation tube 4. Considering the compensation function of the flexible compensation tube 4, there may be swinging or swaying during use. For example, when the transition quartz tube 3 is disconnected from the first connector 5 during axial compensation, the flexible compensation tube 4 will have an axial reset movement, accompanied by circumferential swaying. This may cause the end of the flexible compensation tube 4 with the second connector 6 to swing or shake significantly. Therefore, this application uses the limiting ring 7 to limit the displacement of the flexible compensation tube 4 and improve safety.

[0053] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0054] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. An ampoule exhaust end structure, characterized in that, include: A support frame (1) is provided on the support frame (1) to support the body of the ampoule (2); The flexible compensation tube (4) has at least axial, radial and angular compensation capabilities. The flexible compensation tube (4) has a first connector (5) and a second connector (6) at both ends that are sealed and connected to it. The first connector (5) is located on the support frame (1) and is connected to a vacuum system. The second connector (6) is located below the first connector (5) and is sealed and connected to the transition quartz tube (3) on the ampoule (2).

2. The ampoule exhaust end structure according to claim 1, characterized in that, The flexible compensation pipe (4) includes a corrugated pipe, and the two ends of the corrugated pipe are connected to the first connector (5) and the second connector (6).

3. The ampoule exhaust end structure according to claim 1, characterized in that, The support frame (1) includes a base (11), and the support portion includes: A vertical rod (13) is provided on the base (11); A bottom support (12) is provided on the vertical rod (13) and arranged in the horizontal direction, and the ampoule (2) is placed on the bottom support (12); A side bracket (14) is provided on the vertical rod (13), and the side bracket (14) can be opened and closed to hold the body of the ampoule (2).

4. The ampoule venting end structure according to claim 3, characterized in that, The bottom bracket (12) is movably mounted on the vertical rod (13) in the height direction to adjust the height of the bottom bracket (12), and the bottom bracket (12) is rotatably mounted relative to the vertical rod (13) to adjust the angle between the bottom bracket (12) and the horizontal plane.

5. The ampoule exhaust end structure according to claim 3, characterized in that, The side bracket (14) is movably mounted on the vertical rod (13) in the height direction, and the clamping ends (143) of the side bracket (14) are either far apart or close together in the horizontal direction.

6. The ampoule venting end structure according to claim 5, characterized in that, The clamping end (143) has a clamping portion that is adapted to the outer contour of the ampoule (2).

7. The ampoule venting end structure according to claim 1, characterized in that, The second connector (6) is provided with a vertical second through hole, which is sealed and connected to the transition quartz tube (3) and the flexible compensation tube (4).

8. The ampoule exhaust end structure according to claim 1, characterized in that, The first connector (5) is provided with a first through hole (51), which seals and connects the vacuum system and the flexible compensation tube (4).

9. The ampoule venting end structure according to claim 3, characterized in that, The vertical rod (13) is provided with a horizontally extending support rod (8), the first joint (5) is provided on the support rod (8), and the support rod (8) is rotatably connected to the vertical rod (13), or the first joint (5) is rotatably connected to the support rod (8) so that the first joint (5) rotates around a preset horizontal rotation axis.

10. The ampoule exhaust end structure according to claim 3, characterized in that, The vertical rod (13) is provided with a limiting ring (7) sleeved on the outer periphery of the flexible compensation tube (4), and the limiting ring (7) is spaced apart from the flexible compensation tube (4).

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