A multifunctional support
Patent Information
- Application Number
- CN202521818878.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-26
- Publication Date
- 2026-09-18
- Estimated Expiration
- 2035-08-26
AI Technical Summary
[0003]安装晶圆时，将行星锅放置在桌面进行装配，安装行星锅时可以采用正装行星锅（行星锅开口朝上）和背装行星锅（行星锅开口朝下）两种方式；现有的支架仅支持正装行星锅，背装行星锅时只能将其开口向下直接放在桌面上；且行星锅的底部与桌面直接接触，行星锅旋转时可能会与桌面剐蹭，产生微小的金属碎屑和粉尘颗粒（Particle）,一旦附着在晶圆表面或进入晶圆槽间隙，在后续蒸镀过程中可能导致薄膜缺陷、局部镀膜不良等问题，给产品品质带来潜在隐患
1）多功能支架上的旋转托盘同时形成有用于固定顶支撑件的第一凹槽和用于固定侧支撑件的第二凹槽；分别支持正装行星锅（行星锅开口朝上）和背装行星锅（行星锅开口朝下）两种承载方式，两种承载方式无需更换支架主体，仅通过更换顶支撑件与侧支撑件即可完成切换，操作人员可根据晶圆蒸镀的工艺要求（如镀膜方向、晶圆装卸便利性）自主选择。
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Figure CN224768859U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a multifunctional support. Background Technology
[0002] Electron beam evaporation is a commonly used thin film preparation technique in semiconductor manufacturing. Existing evaporation equipment typically uses planetary cookers to mount wafers. A planetary cooker has multiple wafer slots evenly distributed on its surface. Wafers are sequentially mounted into the wafer slots on the planetary cooker and placed inside the evaporation equipment. The coating material evaporates and moves to the wafer surface in a vacuum environment to form a thin film.
[0003] When mounting wafers, planetary cookers are placed on a table for assembly. There are two installation methods: upright (cooker opening facing upwards) and back-mounted (cooker opening facing downwards). Existing supports only upright-mounted cookers; back-mounted cookers must be placed directly on the table with their opening facing downwards. Furthermore, the bottom of the cooker is in direct contact with the table, and its rotation may cause it to scrape against the table, generating tiny metal shavings and dust particles. If these particles adhere to the wafer surface or enter the wafer trench gaps, they can lead to thin film defects and poor localized coating during subsequent vapor deposition, posing a potential threat to product quality. Utility Model Content
[0004] To overcome the above shortcomings, this utility model provides a multifunctional support that supports both upright and back-mounted planetary cookers, allowing the planetary cookers to rotate independently without direct contact with the tabletop, thus facilitating wafer installation.
[0005] The technical solution provided by this utility model is as follows: A multifunctional support for supporting the planetary pot of a vapor deposition equipment, comprising: Mounting base, wherein a hollow shaft perpendicular to its surface is provided on the mounting base; A rotating tray is disposed at the top of the hollow shaft and is rotatably connected to the hollow shaft; The locking assembly includes a limiting groove disposed on the side of the rotating tray and a limiting pin disposed on the upper surface of the mounting base. The limiting pin is adapted to the position of the limiting groove, and the height of the limiting pin is flush with the height of the limiting groove. The rotating tray has a dam formed along the edge of its upper surface, and a first groove is formed on the inner side of the dam. The sidewall of the rotating tray is recessed towards the center to form a second groove. The bottom of the top support member is detachably fixed to the first groove, and / or one end of the side support member is detachably fixed to the second groove.
[0006] The multifunctional bracket provided by this utility model can bring at least the following beneficial effects: 1) The rotating tray on the multi-functional bracket has a first groove for fixing the top support and a second groove for fixing the side support; it supports two load-bearing methods: upright planetary pot (planetary pot opening facing upward) and back-mounted planetary pot (planetary pot opening facing downward). The two load-bearing methods do not require replacement of the bracket body. The switch can be completed by simply replacing the top support and the side support. Operators can choose according to the process requirements of wafer evaporation (such as coating direction and wafer loading and unloading convenience).
[0007] 2) The multi-level platform design of the side support can accommodate planetary cookers of various sizes. When the planetary cooker is mounted on the back, the step size is selected according to the diameter of the planetary cooker so that the edge of the planetary cooker can be inserted into the step size. Attached Figure Description
[0008] Figure 1 This is a three-dimensional schematic diagram of a multifunctional bracket in one embodiment of the present invention; Figure 2 for Figure 1 A cross-sectional schematic diagram of the multifunctional bracket shown. Figure 3 This is a three-dimensional schematic diagram of a multifunctional support for mounting a planetary cooker in one embodiment of the present invention; Figure 4 This is a cross-sectional schematic diagram of the top support member in one embodiment of the present invention; Figure 5 This is a three-dimensional schematic diagram of a multifunctional support back-mounted planetary cooker in one embodiment of the present invention; Figure 6 This is a three-dimensional schematic diagram of a multifunctional bracket with side support members installed in one embodiment of the present invention.
[0009] Figure label: 10-Mounting base, 20-Hollow shaft, 21-Ball bearing, 22-Bearing cover plate, 23-First dust collection cover, 30-Rotating tray, 31-Rotating tray shaft, 311-Snap ring, 32-Dam, 301-First groove, 302-Second groove, 303-First positioning hole, 304-Positioning ball screw, 40-Limiting groove, 50-Limiting pin, 60-Top support, 61-Support platform, 62-Support shaft, 63-Second dust collection cover, 70-Side support, 71-First tabletop, 72-Second tabletop, 711-Second positioning hole, 100-Planetary pot, 110-Pot body, 111-Frustum, 120-Planetary shaft. Detailed Implementation
[0010] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific embodiments of this utility model will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other embodiments can be obtained based on these drawings without creative effort. Furthermore, in this application, directional terms such as "front," "rear," "upper," "lower," "left," and "right" are defined relative to the indicated placement of components in the drawings. It should be understood that these directional terms are relative concepts, used for relative description and clarification, and can change accordingly depending on the placement of components in the drawings. In this utility model, "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.
[0011] One embodiment of this utility model provides a multifunctional support, comprising: A multifunctional support, characterized in that it comprises: A mounting base is provided with a hollow shaft perpendicular to its surface; a rotating tray is disposed at the top of the hollow shaft and is rotatably connected to the hollow shaft; a locking assembly includes a limiting groove disposed on the side of the rotating tray and a limiting pin disposed on the upper surface of the mounting base, the limiting pin being adapted to the position of the limiting groove, and the height of the limiting pin being flush with the height of the limiting groove; a dam is formed along the edge of the upper surface of the rotating tray, the inner side of the dam forming a first groove, and the side wall of the rotating tray being recessed towards the center to form a second groove; the bottom of the top support is detachably fixed to the first groove, and / or one end of the side support is detachably fixed to the second groove.
[0012] In this embodiment, as Figure 1 and Figure 2As shown, both the mounting base 10 and the rotating tray 30 are disc-shaped. The projected area of the mounting base is larger than that of the rotating tray, providing stable support for the rotating tray. In other embodiments, the mounting base and rotating tray can also be designed as square, polygonal, or even irregular shapes; this embodiment does not limit this. The hollow shaft 20 contains a ball bearing 21. The hollow shaft includes two sections; the inner wall diameter of the section near the top is larger than that of the section near the bottom, naturally forming an annular step between the two sections. The outer diameter of the ball bearing matches the inner wall diameter of the upper section of the hollow shaft, and the ball bearing is placed on the step inside the hollow shaft. Simultaneously, to further ensure the stability of the ball bearing, a bearing cover plate 22 is fixed to the top of the hollow shaft. The bearing cover plate is annular, with an inner diameter smaller than that of the ball bearing, restricting the bearing from moving upwards during operation. Thus, through the double fixing structure of the step on the inner wall of the hollow shaft supporting it from the bottom and the bearing cover plate limiting it from the top, the ball bearing is constrained to a preset position inside the hollow shaft. Figure 2 As shown, the rotating tray shaft 31 is inserted into the center hole of the ball bearing 21 with an interference fit (i.e., the actual size of the rotating tray shaft is slightly larger than the nominal size of the bearing center hole, and a tight connection is achieved through appropriate pressure during assembly). The rotating tray achieves a stable rotational connection through the ball bearing and the hollow shaft. To further enhance the assembly stability of the rotating tray shaft and prevent axial movement due to axial force during long-term rotation, this embodiment also uses a retaining spring at the lower end of the rotating tray shaft for fastening. The retaining spring 311 is annularly embedded in a groove on the side wall of the rotating tray shaft. The retaining spring, ball bearing, and bearing cover plate confine the rotating tray to a fixed height, thereby restricting its axial movement. When an external driving force is applied to the rotating tray, the inner ring of the ball bearing rotates with the rotating tray shaft, while the outer ring remains relatively fixed to the hollow shaft. The balls roll between the inner and outer rings, allowing the rotating tray to rotate around the hollow shaft with low resistance. In addition, a first dust collection cover 23 is provided below the hollow shaft. The first dust collection cover is a cylinder with threads on the side and a concave upper surface. The inner wall of the hollow shaft near the bottom also has corresponding threads. In this way, the first dust collection cover can be screwed in / out from the bottom of the mounting base through the threads on the side wall. By inserting a wrench into the screw hole at the bottom of the dust collection cover and rotating it, the dust collection cover can be removed periodically to clean the dust collected inside.
[0013] Additionally, a locking assembly is provided between the rotating tray and the mounting base to lock the rotation function of the rotating tray. The locking assembly consists of mating limit grooves and limit pins, wherein, for example... Figure 1As shown, the limiting groove 40 is located on the bottom side of the rotating tray, while the limiting pin 50 is axially positioned radially on the upper surface of the mounting base and can slide freely along the axial direction. The fit between the limiting groove and the limiting pin includes spatial positioning; that is, the projection of the limiting groove onto the mounting base corresponds to the position of the limiting pin. The height of the limiting groove is also consistent with the height of the limiting pin. When the rotating tray needs to be locked, the limiting pin is inserted into the limiting groove, locking the rotating tray in a fixed position and preventing it from rotating around the hollow shaft. When the locking needs to be released and the rotating tray's rotation function restored, simply disengage the limiting pin from the limiting groove, and the rotating tray will resume its rotational movement.
[0014] The rotating tray body is disc-shaped, and it simultaneously forms a first groove for fixing the top support and a second groove for fixing the side support; it supports two load-bearing methods: upright planetary cooker (planetary cooker opening facing upwards) and back-mounted planetary cooker (planetary cooker opening facing downwards). The dam 32 on the upper surface edge of the rotating tray protrudes upwards to a certain height, and the inner side of the dam is the first groove 301; the dam is annular and has a certain height and thickness. In this embodiment, the height of the dam is 2mm, used to restrict the subsequent fixing of the top support. A locking structure (such as a tongue-and-groove interlocking or toothed engagement) can also be further provided within the first groove to firmly lock with the corresponding structure of the top support, preventing the top support from sliding up and down / left and right / rotationally under force during operation. The second groove 302 is located below the upper surface of the rotating tray. The opening is rectangular and recessed inward from the side wall to a certain depth. It is generally set to extend radially from the edge, but it can also be set at an angle to the radial direction, as long as it has sufficient depth and width to provide reliable support for the side support. In this embodiment, the rectangular opening of the second groove is 40mm × 5mm in length and width, and the radial depth extending towards the center of the rotating tray is 40mm. There are at least three second grooves, which are distributed at equal angles along the edge of the rotating tray. That is, the angle formed by the lines connecting the multiple second grooves to the center of the rotating tray is the same. This makes it easier for the side support fixed in the second grooves at different positions to evenly distribute the weight of the planetary cooker when it is mounted on the back.
[0015] The top support and side support are detachably fixed to the first and second grooves, respectively. When the planetary cooker needs to be supported for wafer installation or removal, the corresponding top / side support can be fixed to the multi-functional bracket as needed: for upright mounting of the planetary cooker, the top support is fixed to the multi-functional bracket to support the cooker; for back mounting of the planetary cooker, the top support is removed and the side support is fixed to the multi-functional bracket to support the cooker. This design not only reduces the space occupied by the multi-functional bracket when idle, but also supports the replacement of top / side support of different specifications according to new process requirements (such as adjusting the support height, changing materials and sizes, etc.) without modifying the main body of the bracket, providing convenience for subsequent functional upgrades and meeting diverse load-bearing needs.
[0016] like Figure 3 and Figure 5 As shown, the structure of the planetary pot 100 in mainstream vapor deposition equipment includes a pot body 110 for placing wafers and a planetary shaft 120 at the center of the pot body. The planetary shaft extends from the pot body away from the opening and is used to connect with the transmission structure inside the vapor deposition equipment. A frustum 111 is provided at the connection between the pot body and the planetary shaft; the diameter of the frustum is larger than the diameter of the planetary shaft, which enhances the structural strength of the connection to withstand the radial load during pot rotation and reduces stress concentration to prevent cracking after long-term use. Multiple wafer slots are evenly distributed on the pot body for wafer mounting. Before and after wafer deposition, the planetary pot needs to be removed from the vapor deposition equipment for wafer mounting or dismounting.
[0017] In this embodiment, as Figure 3 and Figure 4 As shown, the top support 60 consists of a support platform 61 and a support shaft 62 inclinedly disposed on the surface of the support platform; the shape and size of the support platform match the first groove, that is, the top support is fixed in the first groove of the multi-functional bracket by the support platform. To prevent the top support from loosening during operation, such as... Figure 1In the example shown, a first positioning hole 303 is formed on the surface of the first groove for engaging with the support member, and a corresponding protrusion is present on the bottom of the support platform of the top support member. The protrusion is aligned with the first positioning hole to fix the top support member. The shape, position, and number of the first positioning holes are based on the ability to firmly engage the support member. The shape of the first positioning hole can be elongated, circular, square, polygonal, or even irregular. It can be located at the bottom of the first groove or on the side wall of the first groove. Regardless of the shape of the first positioning hole, the shape of the protrusion on the support platform and the first positioning hole fit together, and the complementary shapes allow the top support member to be firmly fixed in the first groove, preventing shaking or detachment. In other embodiments, the protrusion can be provided in the first groove, and the first positioning hole can be provided on the support platform of the top support member, as long as the top support member can be firmly fixed in the first groove. The support shaft 62 is hollow inside and its length is not less than the length of the planetary shaft of the planetary cooker to be supported. The support shaft's tilted design, which accommodates the planetary shaft of the planetary cooker, better adapts to the installation angle requirements of wafers at various points on the planetary cooker body. Ball bearings are also installed on the top inner wall of the support shaft. When installing the planetary cooker, first fix the top support in the first groove, then insert the planetary shaft of the planetary cooker. The frustum at the top of the planetary shaft contacts the end face of the support shaft. At this time, external force is applied to the planetary cooker, allowing it to rotate around the support shaft, facilitating the installation of wafers at various angles on the planetary cooker. When installing the planetary cooker, the operator can gently push the planetary cooker to rotate it around the support shaft of the top support to meet the multi-angle wafer installation requirements. Typically, the rotation function of the rotating tray needs to be locked by inserting a limit pin into the limit slot, locking the rotating tray to the mounting base and preventing rotation around the hollow shaft. In addition, a second dust collection cover 63 is provided below the support shaft of the top support member. The second dust collection cover is also a cylinder with threads on the side and a concave upper surface. The inner wall of the support shaft near the bottom also has corresponding threads. In this way, the second dust collection cover can be screwed in / out from the bottom of the support platform through the threads on the side wall. By inserting a wrench into the screw hole at the bottom of the dust collection cover and rotating it, the dust collection cover can be removed periodically to clean the dust collected inside.
[0018] The side support is a plate-like component with multiple platform levels. The shape and size of the lowest platform are identical to the second groove, and a second positioning hole is formed in the lowest platform. A positioning ball screw, matching the shape and size of the second positioning hole in the side support, is installed in the second groove. The ball in the positioning ball screw can move elastically up and down; therefore, the side support can be installed into / removed from the second groove by forcefully pushing / pulling it in, achieving detachable fixing of the side support. Figure 6As shown, when a planetary cooker needs to be mounted on its back, the side support 70 is first installed on the rotating tray. With the platform side of the side support facing upwards, the end with the second positioning hole 711 is inserted into the second groove 302 and engaged with the positioning bead screw 304 to fix it to the side wall of the rotating tray. This arrangement allows the side support to gradually rise from the rotating tray towards the outer platform. There are three side supports, all inserted into the second grooves distributed at equal angles along the edge of the rotating tray, evenly distributing the weight of the planetary cooker. Since each side support has multiple platform levels, it can accommodate planetary cookers of various sizes. The connecting surfaces between different platforms are vertical, with each platform corresponding to a specific size of planetary cooker. One side support can support planetary cookers of different sizes. When placing the planetary cooker, the opening should face downwards. The platform size should be selected according to the diameter of the planetary cooker, allowing the edge of the cooker to engage with the corresponding step. The vertical surface at the step radially limits the movement of the planetary cooker, effectively preventing it from sliding due to centrifugal force. Furthermore, when mounting the planetary cooker on the back, the limiting pin should be released from its locking position. The operator should apply slight external force to allow the rotating tray to rotate around the hollow shaft, which in turn simultaneously rotates the planetary cooker located on the side support surface, facilitating wafer mounting at various points on the planetary cooker surface. Those skilled in the art can independently design parameters such as the number of mesa levels and the length of each level on the side support according to actual needs; this embodiment does not impose such limitations. Figure 6 In the example shown, the side support is used to support two sizes of planetary cookers; one planetary cooker has an opening diameter of 500mm and the other has a diameter of 600mm. The side support has three steps (containing two effective platforms). The distance from the edge of the first platform 71 (the lowest platform) away from the rotating tray to the center of the rotating platform is 250mm (it can be expanded by 1mm for easy handling by the operator), which matches the radius of the 500mm diameter planetary cooker. The distance from the edge of the second platform 72 away from the rotating tray to the center of the rotating platform is 300mm (it can be expanded by 1mm for easy handling by the operator), which matches the radius of the 600mm diameter planetary cooker. The last step is used to hold the 600mm diameter planetary cooker.
[0019] This embodiment is an improvement on the above embodiment. In this embodiment, the limiting pin is set as an elastic reset pin. This elastic reset pin is slidably disposed on the upper surface of the mounting base along the axial direction and is equipped with an elastic element that drives it to reset. The limiting pin does not require manual reset and can achieve automatic springback reset function through internal components. Specifically, it includes a housing and a pin and spring in the housing. The pin passes through the central hole of the spring, and the extension and contraction direction of the spring is consistent with the sliding direction of the pin. There is a baffle fixedly connected to the pin at the top of the spring. When the limiting pin is pushed into the limiting groove to lock, the baffle is pushed along with it, and the spring in the housing is in a compressed state. The limiting structure inside the housing will precisely limit the movement stroke of the baffle to ensure that the insertion depth of the pin meets the locking requirements. When it is necessary to unlock, press the button on the housing, and the limiting constraint is released. The spring automatically drives the pin to exit from the limiting groove and return to the housing. The elastic reset pin can be made by oneself or purchased from the market, as long as it can meet the automatic reset function. This embodiment does not impose any restrictions on this.
[0020] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.
Claims
1. A multi-functional support characterized by, Planetary pots used to support vapor deposition equipment include: Mounting base, wherein a hollow shaft perpendicular to its surface is provided on the mounting base; A rotating tray is disposed at the top of the hollow shaft and is rotatably connected to the hollow shaft; The locking assembly includes a limiting groove disposed on the side of the rotating tray and a limiting pin disposed on the upper surface of the mounting base. The limiting pin is adapted to the position of the limiting groove, and the height of the limiting pin is flush with the height of the limiting groove. The rotating tray has a dam formed along the edge of its upper surface, and a first groove is formed on the inner side of the dam. The sidewall of the rotating tray is recessed towards the center to form a second groove. The bottom of the top support member is detachably fixed to the first groove, and / or one end of the side support member is detachably fixed to the second groove.
2. The multi-functional support of claim 1, wherein, The number of the second groove is at least three, and they are distributed at equal angles along the edge of the rotating tray.
3. The multi-functional support of claim 1, wherein, The top support includes a support platform and a support shaft that is inclined and placed on the surface of the support platform; the shape and size of the support platform match the first groove.
4. The multi-functional support of claim 3, wherein, The surface of the mounting base has a first positioning hole, and the bottom of the support platform of the top support member has a corresponding protrusion that matches the first positioning hole.
5. The multi-functional support of claim 1, wherein, The side support is a plate-shaped component with multiple levels of platforms, wherein a second positioning hole is formed at one end of the lowest platform.
6. The multi-functional support of claim 5, wherein, The side support is positioned with its platform facing upwards, and is fixed to the side wall of the rotating tray by extending its end, which has a second positioning hole, into the second groove.
7. The multi-functional support of claim 5, wherein, The second groove is equipped with a positioning glass ball screw, the shape and size of which match the second positioning hole in the side support.
8. The multi-functional support according to any one of claims 1 to 7, wherein The mounting base has a first dust collection cover below the hollow shaft, and the support platform of the top support member has a second dust collection cover below the support shaft. Both the first and second dust collection covers are cylinders with threads formed on the side and a concave upper surface.
9. The multi-functional support according to any one of claims 1 to 7, wherein The hollow shaft of the mounting base is provided with a bearing cover plate at its top.
10. The multi-functional support according to any one of claims 1 to 7, wherein The limiting pin is configured as an elastic reset pin, which is slidably disposed on the upper surface of the mounting base along the axial direction and is equipped with an elastic element that drives it to reset.