A clamping device for the evaporation boat of a metallization thin film deposition machine

Abstract

This utility model relates to an evaporation boat clamping device for a metallization thin film vapor deposition machine, belonging to vapor deposition machine technology. It includes a mounting base with a limiting mounting groove. A convergence drive assembly is installed in the limiting mounting groove. A first L-shaped clamping seat and a second L-shaped clamping seat are symmetrically distributed on both sides of the top of the mounting base for clamping the evaporation boat. The first and second L-shaped clamping seats are mounted on the convergence drive assembly. Lateral clamping plates are distributed on both sides of the top of the mounting base. The lateral clamping plates are slidably connected to the mounting base via a lateral push drive assembly, which is connected to the convergence drive assembly via a linkage assembly. The convergence drive assembly includes a bidirectional lead screw with a clamping threaded block threaded onto it. The clamping threaded block is slidably engaged in the limiting mounting groove. This utility model can clamp the evaporation boat simultaneously from both ends and sides, effectively preventing slippage and providing greater stability.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition machine technology, and in particular to an evaporation boat clamping device for a metallization thin film vapor deposition machine. Background Technology

[0002] The evaporation boat is the core component of a metallization thin film deposition machine. As a general term for evaporation vessels, it is typically made of ceramic composite materials such as boron nitride and titanium diboride. Under vacuum conditions, resistance heating evaporates the metal into gaseous atoms. These atoms move in a straight line and deposit on the surface of the substrate thin film, forming a uniform metal coating. This process is widely used in thin film metallization processes in packaging materials, capacitors, and displays. To ensure good contact between the evaporation boat and the electrodes, a clamping device is required to securely mount the evaporation boat during vacuum deposition, thereby extending its lifespan and improving the deposition quality.

[0003] However, traditional clamping devices mostly employ unidirectional clamping or fixed lateral support, which are prone to sliding and shifting during the evaporation process due to thermal expansion of the evaporation boat or mechanical vibration, affecting the uniformity of the film. Furthermore, some devices using clamping at both ends and sides require step-by-step operation of the clamping mechanisms at both ends and sides, making the process cumbersome and prone to clamping failure due to operational errors. Their stability and efficiency are poor, presenting certain drawbacks in their use. Utility Model Content

[0004] To overcome the technical defects of the existing technology, this utility model provides an evaporation boat clamping device for a metallization thin film evaporation coating machine, which can clamp the evaporation boat simultaneously from both ends and sides, effectively avoid slippage and displacement, and has strong stability and good practicality.

[0005] The technical solution adopted by this utility model is as follows: it includes a mounting base, a first L-shaped clamping seat, a second L-shaped clamping seat, a side clamping plate, and a convergence drive assembly. The mounting base has a limiting mounting groove. The first L-shaped clamping seat and the second L-shaped clamping seat are symmetrically distributed on both sides of the top of the mounting base for clamping the evaporation boat. The side clamping plate is distributed on both sides of the top of the mounting base. The convergence drive assembly is installed in the limiting mounting groove. The first L-shaped clamping seat and the second L-shaped clamping seat are installed on the convergence drive assembly. The side clamping plate is slidably connected to the mounting base through the side push drive assembly, and the side push drive assembly is connected to the convergence drive assembly through the linkage assembly.

[0006] Preferably, in order to control the rotation of the bidirectional lead screw so that the two clamping threaded blocks can slide synchronously in opposite directions in the limiting mounting groove, thereby adjusting the distance between the first L-shaped clamping seat and the second L-shaped clamping seat, the convergence drive assembly includes the bidirectional lead screw and the clamping threaded blocks threadedly sleeved on the bidirectional lead screw. The clamping threaded blocks are slidably engaged in the limiting mounting groove. There are two clamping threaded blocks, which are located at the opposite thread ends of the bidirectional lead screw. The first L-shaped clamping seat and the second L-shaped clamping seat are respectively fixed on the two clamping threaded blocks.

[0007] Preferably, in order to enable the bidirectional lead screw to rotate in the limiting mounting groove via the rotary joint by controlling the servo motor to turn on, an L-shaped mounting plate is fixedly mounted on one end of the mounting base, the servo motor is fixedly mounted on the L-shaped mounting plate, one end of the bidirectional lead screw is fixedly connected to the output shaft of the servo motor, and the other end of the bidirectional lead screw is rotatably connected to the inner wall of one end of the limiting mounting groove via the rotary joint.

[0008] Preferably, in order to control the rotation of the side-push threaded rod so that the side-push slider can drive the upper extension block to move, thereby driving the first limiting slide rod and the lateral clamping plate to move, the side-push drive assembly includes the side-push threaded rod, which is rotatably mounted on the side wall of the mounting base. The side-push threaded rod is connected to the bidirectional lead screw through the linkage assembly. The side-push slider is threaded onto the side-push threaded rod, and the upper extension block is fixedly mounted on the top of the side-push slider. The lateral clamping plate is slidably connected to the upper extension block through the first limiting slide rod.

[0009] Preferably, in order to limit the side push slider by means of the second limiting slide rod, the second limiting slide rod is fixedly installed on the side wall of the mounting base, the positioning block is fixedly installed at one end of the second limiting slide rod, one end of the side push threaded rod is rotatably connected to the positioning block, and one end of the side push slider is slidably sleeved on the second limiting slide rod.

[0010] Preferably, in order to apply an inward elastic thrust to the lateral clamp via the connecting spring, the lateral clamp is elastically connected to the upper extension block via the connecting spring.

[0011] Preferably, in order to control the rotation of the bidirectional lead screw to drive the linkage rod to rotate under the cooperation of the drive bevel gear and the driven bevel gear, the linkage assembly includes an extension mounting head fixed to one end of the mounting base and the drive bevel gear. The linkage rod is rotatably inserted into the extension mounting head, and the driven bevel gear is fixed to one end of the linkage rod. The drive bevel gear is fixedly sleeved on the bidirectional lead screw, and the driven bevel gear is meshed with the drive bevel gear.

[0012] Preferably, in order to control the rotation of the linkage rod so that the side-push threaded rod can rotate under the action of the timing belt, the other end of the linkage rod is connected to the side-push threaded rod through the timing belt.

[0013] The beneficial effects of this utility model are: by driving the two L-shaped clamping seats to move relative to each other through the convergence drive component, the evaporation boat can be initially clamped; at the same time, the power is transmitted to the side push drive component through the linkage component, so that the side clamping plates approach the evaporation boat from both sides, realizing synchronous clamping from both ends and both sides, avoiding slippage and deviation during use, resulting in higher stability and stronger practicality. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the connection structure between the side-push drive assembly and the convergence drive assembly of this utility model; Figure 3 This is a schematic diagram of the structure of the convergence drive component of this utility model; Figure 4 This is a schematic diagram of the side-push drive assembly of this utility model; Figure 5 This is a schematic diagram of the connection structure between the side clamp and the upper extension block of this utility model.

[0015] Explanation of reference numerals in the attached drawings: 1. Mounting base; 2. First L-shaped clamping seat; 3. Second L-shaped clamping seat; 4. Side clamping plate; 5. Converging drive assembly; 501. Bidirectional lead screw; 502. Clamping threaded block; 503. L-shaped mounting plate; 504. Servo motor; 505. Rotary joint; 6. Side push drive assembly; 601. Side push threaded rod; 602. Side push slider; 603. Upper extension block; 604. First limit slide rod; 605. Second limit slide rod; 606. Positioning block; 607. Connecting spring; 7. Linkage assembly; 701. Extension mounting head; 702. Drive bevel gear; 703. Linkage rod; 704. Driven bevel gear; 705. Synchronous belt. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings: like Figures 1-5 As shown, this embodiment provides an evaporation boat clamping device for a metallization thin film evaporation machine, including a mounting base 1 and a convergence drive assembly 5 installed in a limiting mounting groove. A first L-shaped clamping seat 2 and a second L-shaped clamping seat 3 are symmetrically distributed on both sides of the top of the mounting base 1. This symmetrical layout makes the clamping force on the evaporation boat more uniform. They are made of special alloy materials, possessing high strength, wear resistance, and good thermal conductivity, and can maintain stable performance in high-temperature environments, effectively clamping and fixing the evaporation boat. The first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 are mounted on the convergence drive assembly 5, which is the core component for realizing the convergence action of the first L-shaped clamping seat 2 and the second L-shaped clamping seat 3. The convergence drive assembly 5 can precisely control the moving distance and force of the first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 to adapt to the clamping requirements of evaporation boats of different specifications. Side clamping plates 4 are distributed on both sides of the top of the mounting base 1. The side clamping plates 4 are slidably connected to the mounting base 1 via the side push drive assembly 6, and the side push drive assembly 6 is connected to the convergence drive assembly 5 via the linkage assembly 7. In use, the convergence drive assembly 5 is activated, which drives the first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 to move relative to each other on the mounting base 1, initially clamping and positioning the evaporation boat from both ends. Simultaneously, the convergence drive assembly 5 transmits power to the side push drive assembly 6 via the linkage assembly 7. The side push drive assembly 6 actuates, causing the side clamping plates 4 to move closer to the evaporation boat from both sides, cooperating with the first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 to firmly clamp the evaporation boat from the side, ensuring the stability of the evaporation boat's position during the vapor deposition process.

[0017] As a technical optimization solution of this utility model, specifically as follows: Figure 3As shown, the convergence drive assembly 5 includes a bidirectional lead screw 501 and a clamping threaded block 502 threadedly connected to the bidirectional lead screw 501. The clamping threaded block 502 is slidably engaged in the limiting mounting groove. There are two clamping threaded blocks 502, which are located at the reverse thread ends of the bidirectional lead screw 501. The first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 are respectively fixed on the two clamping threaded blocks 502. An L-shaped mounting plate 503 is fixedly mounted on one end of the mounting base 1. A servo motor 504 is fixedly mounted on the L-shaped mounting plate 503. One end of the bidirectional lead screw 501 is fixedly connected to the output shaft of the servo motor 504. The other end of the bidirectional lead screw 501 is rotatably connected to the inner wall of one end of the limiting mounting groove through a rotating joint 505. In use, the servo motor 504 fixed on the L-shaped mounting plate 503 is started first, and its output shaft drives the bidirectional lead screw 501 to rotate. Because the two clamping threaded blocks 502 are located at the opposite thread ends of the bidirectional lead screw 501 and are slidably engaged in the limiting mounting groove, they will slide synchronously in opposite directions along the groove. Furthermore, since the first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 are respectively fixed on these two clamping threaded blocks 502, the movement of the clamping threaded blocks 502 will cause the first L-shaped clamping seat 2 and the second L-shaped clamping seat 3 to move closer together, thereby achieving the gathering and clamping of the evaporation boat placed in the middle.

[0018] As a technical optimization solution of this utility model, specifically as follows: Figure 4 As shown, the side-push drive assembly 6 includes a side-push threaded rod 601, which is rotatably mounted on the side wall of the mounting base 1. The side-push threaded rod 601 is connected to the bidirectional lead screw 501 through the linkage assembly 7. A side-push slider 602 is threaded onto the side-push threaded rod 601. An upper extension block 603 is fixedly mounted on the top of the side-push slider 602. The side clamping plate 4 is slidably connected to the upper extension block 603 through a first limiting slide rod 604. A second limiting slide rod 605 is fixedly mounted on the side wall of the mounting base 1. A positioning block 606 is fixedly mounted on one end of the second limiting slide rod 605. One end of the side-push threaded rod 601 is rotatably connected to the positioning block 606, and one end of the side-push slider 602 is slidably sleeved on the second limiting slide rod 605. The side clamping plate 4 is elastically connected to the upper extension block 603 through a connecting spring 607. In use, the bidirectional lead screw 501 rotates, driving the side-push threaded rod 601 to rotate through the linkage assembly 7. Since the side-push slider 602 is threaded onto the side-push threaded rod 601, and one end is limited by the second limiting slide rod 605, it will move along the side-push threaded rod 601. When the side-push slider 602 moves, it drives the side clamping plate 4 to move through the upper extension block 603 and the first limiting slide rod 604. At the same time, the connecting spring 607 applies an elastic thrust to the side clamping plate 4, so that the side clamping plate 4 can smoothly and with a certain buffer approach the evaporation boat, achieving a stable clamping from the side. Furthermore, by connecting the spring 607, it can be applied to evaporation boats of different lengths and when the number of rotations of the bidirectional screw 501 is different.

[0019] As a technical optimization solution of this utility model, specifically as follows: Figure 4 and Figure 5 As shown, the linkage assembly 7 includes an extension mounting head 701 fixed to one end of the mounting base 1 and a drive bevel gear 702. A linkage rod 703 is rotatably inserted into the extension mounting head 701. A driven bevel gear 704 is fixed to one end of the linkage rod 703. The drive bevel gear 702 is fixedly sleeved on the bidirectional lead screw 501, and the driven bevel gear 704 meshes with the drive bevel gear 702. The other end of the linkage rod 703 is connected to the side-push threaded rod 601 via a timing belt 705. When the bidirectional lead screw 501 rotates, the drive bevel gear 702 fixedly sleeved on it rotates accordingly. Since the driven bevel gear 704 meshes with the drive bevel gear 702, and the driven bevel gear 704 is fixed to one end of the linkage rod 703, it will drive the linkage rod 703 to rotate on the extension mounting head 701. The other end of the linkage rod 703 is connected to the side push threaded rod 601 via the timing belt 705, thereby transmitting power to the side push threaded rod 601 to make it rotate, ultimately achieving the purpose of driving the side push threaded rod 601 to work together via the bidirectional screw 501.

[0020] The foregoing has shown and described the basic principles, main features, and advantages of this invention. Those skilled in the art should understand that this invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this invention. Various changes and modifications may be made to this invention without departing from its spirit and scope. All such changes and modifications fall within the scope of this invention as defined by the appended claims and their equivalents.

Claims

1. An evaporator boat clamping device for a metalizing thin film evaporator, characterized by, include: Mounting base (1), with a limiting mounting groove; The first L-shaped clamping seat (2) and the second L-shaped clamping seat (3) are symmetrically distributed on both sides of the top of the mounting base (1) for clamping the evaporation boat. Side clamps (4) are distributed on both sides of the top of the mounting base (1); The convergence drive assembly (5) is installed in the limiting installation slot. The first L-shaped clamping seat (2) and the second L-shaped clamping seat (3) are installed on the convergence drive assembly (5). The side clamping plate (4) is slidably connected to the mounting base (1) through the side push drive assembly (6), and the side push drive assembly (6) is connected to the convergence drive assembly (5) through the linkage assembly (7).

2. The evaporation boat clamping device of the metallization thin film deposition machine according to claim 1, characterized in that: The gathering drive assembly (5) includes a bidirectional lead screw (501) and a clamping threaded block (502) threadedly connected to the bidirectional lead screw (501). The clamping threaded block (502) is slidably engaged in the limiting mounting groove. There are two clamping threaded blocks (502). The two clamping threaded blocks (502) are located at the reverse thread ends of the bidirectional lead screw (501). The first L-shaped clamping seat (2) and the second L-shaped clamping seat (3) are respectively fixed on the two clamping threaded blocks (502).

3. The evaporation boat clamping device of the metallization thin film deposition machine according to claim 2, characterized in that: An L-shaped mounting plate (503) is fixedly mounted on one end of the mounting base (1). A servo motor (504) is fixedly mounted on the L-shaped mounting plate (503). One end of the bidirectional lead screw (501) is fixedly connected to the output shaft of the servo motor (504). The other end of the bidirectional lead screw (501) is rotatably connected to the inner wall of one end of the limiting mounting groove through a rotating joint (505).

4. The evaporation boat clamping device of the metallization thin film evaporation machine according to claim 2, characterized in that: The side-push drive assembly (6) includes a side-push threaded rod (601), which is rotatably mounted on the side wall of the mounting base (1). The side-push threaded rod (601) is connected to the bidirectional lead screw (501) through the linkage assembly (7). A side-push slider (602) is threaded onto the side-push threaded rod (601). An upper extension block (603) is fixedly mounted on the top of the side-push slider (602). The side clamp (4) is slidably connected to the upper extension block (603) through a first limiting slide rod (604).

5. The evaporation boat clamping device of the metallization thin film deposition machine according to claim 4, characterized in that: A second limiting slide rod (605) is fixedly installed on the side wall of the mounting base (1). A positioning block (606) is fixedly installed at one end of the second limiting slide rod (605). One end of the side push threaded rod (601) is rotatably connected to the positioning block (606), and one end of the side push slider (602) is slidably sleeved on the second limiting slide rod (605).

6. The evaporation boat clamping device of the metallization thin film deposition machine according to claim 4, characterized in that: The lateral clamp (4) is elastically connected to the upper extension block (603) via a connecting spring (607).

7. The evaporation boat clamping device of the metallization thin film deposition machine according to claim 4, characterized in that: The linkage assembly (7) includes an extension mounting head (701) fixed to one end of the mounting base (1) and a drive bevel gear (702). A linkage rod (703) is rotatably inserted into the extension mounting head (701). A driven bevel gear (704) is fixed to one end of the linkage rod (703). The drive bevel gear (702) is fixedly sleeved on the bidirectional lead screw (501), and the driven bevel gear (704) meshes with the drive bevel gear (702).

8. The evaporation boat clamping device of the metallization thin film deposition machine according to claim 7, characterized in that: The other end of the linkage rod (703) is connected to the side-push threaded rod (601) via a timing belt (705).

Images